using an electron beam

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H01L2021/60165

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR

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H01L2021/60165using an electron beam

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Patents Grantslast 30 patents

Information Patent Grant
Amorphous germanium waveguides for spectroscopic sensing and data c...
- Patent number 11,604,147
- Issue date Mar 14, 2023
- Massachusetts Institute of Technology
- Eveline Postelnicu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses and methods for plasma processing
- Patent number 11,393,662
- Issue date Jul 19, 2022
- Tokyo Electron Limited
- Zhiying Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Amorphous germanium waveguides for spectroscopic sensing and data c...
- Patent number 11,204,327
- Issue date Dec 21, 2021
- Massachusetts Institute of Technology
- Eveline Postelnicu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
AMORPHOUS GERMANIUM WAVEGUIDES FOR SPECTROSCOPIC SENSING AND DATA C...
- Publication number 20220065793
- Publication date Mar 3, 2022
- Massachusetts Institute of Technology
- Eveline Postelnicu
- H01 - BASIC ELECTRIC ELEMENTS