using an ion beam

Industry

CPC
C23C14/3442

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/3442using an ion beam

Industries

Patents Grantslast 30 patents

Information Patent Grant
Scratch-resistant laminates with retained optical properties
- Patent number 12,195,384
- Issue date Jan 14, 2025
- Corning Incorporated
- Karl William Koch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ribbon beam plasma enhanced chemical vapor deposition system for an...
- Patent number 12,191,156
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- John Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Physical vapor deposition apparatus and method thereof
- Patent number 12,094,698
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for forming nano-laminate optical coating
- Patent number 11,897,811
- Issue date Feb 13, 2024
- Intevac, Inc.
- Terry Bluck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate comprising plasmonic continuous film with curved surface...
- Patent number 11,873,552
- Issue date Jan 16, 2024
- Korea Institute of Materials Science
- Sung-Gyu Park
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,694,882
- Issue date Jul 4, 2023
- Canon Anelva Corporation
- Yuji Takanami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Physical vapor deposition apparatus and method thereof
- Patent number 11,688,591
- Issue date Jun 27, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Scratch-resistant laminates with retained optical properties
- Patent number 11,667,565
- Issue date Jun 6, 2023
- Corning Incorporated
- Karl William Koch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques and apparatus for selective shaping of mask features usi...
- Patent number 11,569,095
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- John Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition apparatus and method thereof
- Patent number 11,462,394
- Issue date Oct 4, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transparent halo assembly for reduced particle generation
- Patent number 11,424,112
- Issue date Aug 23, 2022
- Varian Semiconductor Equipment Associates, Inc.
- Ernest E. Allen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,270,873
- Issue date Mar 8, 2022
- Canon Anelva Corporation
- Yuji Takanami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for forming nano-laminate optical coating
- Patent number 11,236,013
- Issue date Feb 1, 2022
- Intevac, Inc.
- Terry Bluck
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Metal pillar device structures and methods for making and using the...
- Patent number 11,134,868
- Issue date Oct 5, 2021
- Medtronic MiniMed, Inc.
- Akhil Srinivasan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of synthesizing thickness-controlled graphene through chemic...
- Patent number 11,117,804
- Issue date Sep 14, 2021
- CENTER FOR ADVANCED SOFT ELECTRONICS
- Kilwon Cho
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Sputtering apparatus including cathode with rotatable targets, and...
- Patent number 11,094,513
- Issue date Aug 17, 2021
- Guardian Europe S.à r.l.
- Marcel Schloremberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for selective deposition using angled ions
- Patent number 11,053,580
- Issue date Jul 6, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques and apparatus for selective shaping of mask features usi...
- Patent number 11,043,394
- Issue date Jun 22, 2021
- Applied Materials, Inc.
- John Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Planarization of optical substrates
- Patent number 10,901,121
- Issue date Jan 26, 2021
- Lawrence Livermore National Security, LLC
- Christopher J. Stolz
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Coated cutting tool
- Patent number 10,737,332
- Issue date Aug 11, 2020
- Tungaloy Corporation
- Yusuke Hirano
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Sputtering apparatus including cathode with rotatable targets, and...
- Patent number 10,586,689
- Issue date Mar 10, 2020
- Guardian Europe S.a.r.l.
- Marcel Schloremberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Acoustic resonator structure with inclined C-axis piezoelectric bul...
- Patent number 10,574,204
- Issue date Feb 25, 2020
- QORVO BIOTECHNOLOGIES, LLC
- Kevin McCarron
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alkali resistant optical coatings for alkali lasers and methods of...
- Patent number 10,570,502
- Issue date Feb 25, 2020
- Lawrence Livermore National Security
- Thomas F. Soules
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Seed layer free nanoporous metal deposition for bonding
- Patent number 10,566,214
- Issue date Feb 18, 2020
- Facebook Technologies, LLC
- John Michael Goward
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Planarization of optical substrates
- Patent number 10,175,391
- Issue date Jan 8, 2019
- Lawrence Livermore National Security, LLC
- Christopher Stolz
- G02 - OPTICS
Information Patent Grant
Ion vapor deposition of aluminum on non-metallic materials
- Patent number 9,909,207
- Issue date Mar 6, 2018
- CAMETOID TECHNOLOGIES, INC.
- Timothy Cranford
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of an alignment film for a liquid crystal on a substrate
- Patent number 9,869,014
- Issue date Jan 16, 2018
- International Business Machines Corporation
- Shoichi Doi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interchangeable sputter gun head
- Patent number 9,318,306
- Issue date Apr 19, 2016
- Intermolecular, Inc.
- Owen Fong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conductive hard carbon film and method for forming the same
- Patent number 9,183,965
- Issue date Nov 10, 2015
- Nomura Plating Co., Ltd.
- Teruyuki Kitagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SERS-sensor with nanostructured layer and methods of making and using
- Patent number 9,134,250
- Issue date Sep 15, 2015
- Wostec, Inc.
- Valery K. Smirnov
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING A PUMP ELEMENT COMPRISING THE PRODUCTION OF...
- Publication number 20240392428
- Publication date Nov 28, 2024
- SAFRAN ELECTRONICS & DEFENSE
- Bruno LETOURNEUR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LASER INDUCED IONIZATION OF INERT AND REACTIVE GASSES FOR MAGNETRON...
- Publication number 20240263297
- Publication date Aug 8, 2024
- Arizona Thin Film Research, LLC
- Patrick Morse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM DEPOSITION OF A LOW RESISTIVITY METAL
- Publication number 20240093356
- Publication date Mar 21, 2024
- VEECO INSTRUMENTS INC.
- Narasimhan SRINIVASAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM SOURCE, SUBSTRATE PROCESS APPARATUS INCLUDING THE SAME, AN...
- Publication number 20240062996
- Publication date Feb 22, 2024
- Samsung Electronics Co., Ltd.
- SeungWan YOO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF
- Publication number 20230307218
- Publication date Sep 28, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SCRATCH-RESISTANT LAMINATES WITH RETAINED OPTICAL PROPERTIES
- Publication number 20230303432
- Publication date Sep 28, 2023
- Corning Incorporated
- Karl William Koch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTER MAGNETRON FOR OPERATING WITH OTHER PLASMA SOURCES
- Publication number 20230282466
- Publication date Sep 7, 2023
- SCION PLASMA LLC
- LI QIN ZHOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING A COATING ON A SUBSTRATE
- Publication number 20230189946
- Publication date Jun 22, 2023
- Omega S.A.
- Loïc Curchod
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
HIGH-ENTROPY CARBIDE CERAMIC MATERIAL, CARBIDE CERAMIC COATING AND...
- Publication number 20230183851
- Publication date Jun 15, 2023
- Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences
- Hongxuan Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES AND APPARATUS FOR SELECTIVE SHAPING OF MASK FEATURES USI...
- Publication number 20230135735
- Publication date May 4, 2023
- Applied Materials, Inc.
- John Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF
- Publication number 20220367161
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM FOR FORMING NANO-LAMINATE OPTICAL COATING
- Publication number 20220185726
- Publication date Jun 16, 2022
- INTEVAC, INC.
- Terry Bluck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220139686
- Publication date May 5, 2022
- Canon ANELVA Corporation
- Yuji TAKANAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL PILLAR DEVICE STRUCTURES AND METHODS FOR MAKING AND USING THE...
- Publication number 20220054057
- Publication date Feb 24, 2022
- Medtronic MiniMed, Inc.
- Akhil Srinivasan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ION BEAM DEPOSITION OF A LOW RESISTIVITY METAL
- Publication number 20210404051
- Publication date Dec 30, 2021
- VEECO INSTRUMENTS, INC.
- Narasimhan SRINIVASAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING TWO-DIMENSIONAL MATERIAL
- Publication number 20210332469
- Publication date Oct 28, 2021
- National Cheng Kung University
- Jung-Chun HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES AND APPARATUS FOR SELECTIVE SHAPING OF MASK FEATURES USI...
- Publication number 20210324519
- Publication date Oct 21, 2021
- Applied Materials, Inc.
- John Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM DEPOSITION OF A LOW RESISTIVITY METAL
- Publication number 20210292889
- Publication date Sep 23, 2021
- VEECO INSTRUMENTS, INC.
- Narasimhan SRINIVASAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE COMPRISING PLASMONIC CONTINUOUS FILM WITH CURVED SURFACE...
- Publication number 20210017638
- Publication date Jan 21, 2021
- Korea Institute of Machinery and Materials
- Sung-Gyu PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200343080
- Publication date Oct 29, 2020
- Canon ANELVA Corporation
- Yuji TAKANAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AESTHETIC COATINGS FOR DENTAL APPLICATIONS
- Publication number 20200232087
- Publication date Jul 23, 2020
- N2 Biomedical LLC
- Jason E. BURNS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIRECTED PLASMA NANOSYNTHESIS (DPNS) METHODS, USES AND SYSTEMS
- Publication number 20200197566
- Publication date Jun 25, 2020
- THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- Jean Paul ALLAIN
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
SPUTTERING APPARATUS INCLUDING CATHODE WITH ROTATABLE TARGETS, AND...
- Publication number 20200185205
- Publication date Jun 11, 2020
- GUARDIAN EUROPE S.À R.L.
- Marcel SCHLOREMBERG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF
- Publication number 20200105511
- Publication date Apr 2, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PREPARING MULTICOMPONENT NANOPATTERN
- Publication number 20200102644
- Publication date Apr 2, 2020
- Korea Advanced Institute of Science and Technology
- Hee-Tae JUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR SELECTIVE DEPOSITION USING ANGLED IONS
- Publication number 20190256966
- Publication date Aug 22, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AN INTERFERENCE COATING OR ITS PART CONSISTING LAYERS WITH DIFFEREN...
- Publication number 20190169739
- Publication date Jun 6, 2019
- Valstybinis Moksliniu Tyrimu Institutas Fiziniu Ir Technologijos Mokslu Centras
- Andrius MELNINKAITIS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLANARIZATION OF OPTICAL SUBSTRATES
- Publication number 20190162879
- Publication date May 30, 2019
- LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
- Christopher J. Stolz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSPARENT HALO ASSEMBLY FOR REDUCED PARTICLE GENERATION
- Publication number 20190139758
- Publication date May 9, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Ernest E. Allen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Y2O3-SiO2 PROTECTIVE COATINGS FOR SEMICONDUCTOR PROCESS CHAMBER COM...
- Publication number 20190131113
- Publication date May 2, 2019
- David Fenwick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using an ion beam

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Scratch-resistant laminates with retained optical properties

Ribbon beam plasma enhanced chemical vapor deposition system for an...

Physical vapor deposition apparatus and method thereof

System for forming nano-laminate optical coating

Substrate comprising plasmonic continuous film with curved surface...

Substrate processing apparatus and substrate processing method

Physical vapor deposition apparatus and method thereof

Scratch-resistant laminates with retained optical properties

Techniques and apparatus for selective shaping of mask features usi...

Physical vapor deposition apparatus and method thereof

Transparent halo assembly for reduced particle generation

Substrate processing apparatus and substrate processing method

System for forming nano-laminate optical coating

Metal pillar device structures and methods for making and using the...

Method of synthesizing thickness-controlled graphene through chemic...

Sputtering apparatus including cathode with rotatable targets, and...

Techniques for selective deposition using angled ions

Techniques and apparatus for selective shaping of mask features usi...

Planarization of optical substrates

Coated cutting tool

Sputtering apparatus including cathode with rotatable targets, and...

Acoustic resonator structure with inclined C-axis piezoelectric bul...

Alkali resistant optical coatings for alkali lasers and methods of...

Seed layer free nanoporous metal deposition for bonding

Planarization of optical substrates

Ion vapor deposition of aluminum on non-metallic materials

Formation of an alignment film for a liquid crystal on a substrate

Interchangeable sputter gun head

Conductive hard carbon film and method for forming the same

SERS-sensor with nanostructured layer and methods of making and using

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING A PUMP ELEMENT COMPRISING THE PRODUCTION OF...

LASER INDUCED IONIZATION OF INERT AND REACTIVE GASSES FOR MAGNETRON...

ION BEAM DEPOSITION OF A LOW RESISTIVITY METAL

ION BEAM SOURCE, SUBSTRATE PROCESS APPARATUS INCLUDING THE SAME, AN...

PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF

SCRATCH-RESISTANT LAMINATES WITH RETAINED OPTICAL PROPERTIES

SPUTTER MAGNETRON FOR OPERATING WITH OTHER PLASMA SOURCES

METHOD FOR DEPOSITING A COATING ON A SUBSTRATE

HIGH-ENTROPY CARBIDE CERAMIC MATERIAL, CARBIDE CERAMIC COATING AND...

TECHNIQUES AND APPARATUS FOR SELECTIVE SHAPING OF MASK FEATURES USI...

PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF

SYSTEM FOR FORMING NANO-LAMINATE OPTICAL COATING

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METAL PILLAR DEVICE STRUCTURES AND METHODS FOR MAKING AND USING THE...

ION BEAM DEPOSITION OF A LOW RESISTIVITY METAL

METHOD FOR MANUFACTURING TWO-DIMENSIONAL MATERIAL

TECHNIQUES AND APPARATUS FOR SELECTIVE SHAPING OF MASK FEATURES USI...

ION BEAM DEPOSITION OF A LOW RESISTIVITY METAL

SUBSTRATE COMPRISING PLASMONIC CONTINUOUS FILM WITH CURVED SURFACE...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

AESTHETIC COATINGS FOR DENTAL APPLICATIONS

DIRECTED PLASMA NANOSYNTHESIS (DPNS) METHODS, USES AND SYSTEMS

SPUTTERING APPARATUS INCLUDING CATHODE WITH ROTATABLE TARGETS, AND...

PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF

METHOD OF PREPARING MULTICOMPONENT NANOPATTERN

TECHNIQUES FOR SELECTIVE DEPOSITION USING ANGLED IONS

AN INTERFERENCE COATING OR ITS PART CONSISTING LAYERS WITH DIFFEREN...

PLANARIZATION OF OPTICAL SUBSTRATES

TRANSPARENT HALO ASSEMBLY FOR REDUCED PARTICLE GENERATION

Y2O3-SiO2 PROTECTIVE COATINGS FOR SEMICONDUCTOR PROCESS CHAMBER COM...