using cavities formed by hydrogen or noble gas ion implantation

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H01L21/3223

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/3223using cavities formed by hydrogen or noble gas ion implantation

Industries

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor epitaxial wafer and method of producing semiconductor...
- Patent number 11,935,745
- Issue date Mar 19, 2024
- Sumco Corporation
- Ryosuke Okuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor epitaxial wafer and method of producing semiconductor...
- Patent number 11,640,907
- Issue date May 2, 2023
- Sumco Corporation
- Ryosuke Okuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with field stop layer and semiconductor device...
- Patent number 11,152,224
- Issue date Oct 19, 2021
- Fuji Electric Co., Ltd.
- Tomonori Mizushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor epitaxial wafer and method of producing semiconductor...
- Patent number 11,107,687
- Issue date Aug 31, 2021
- Sumco Corporation
- Ryosuke Okuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method of semiconductor device
- Patent number 11,094,810
- Issue date Aug 17, 2021
- Fuji Electric Co., Ltd.
- Tatsuya Naito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for forming a semiconductor device
- Patent number 10,892,168
- Issue date Jan 12, 2021
- Infineon Technologies AG
- Gerhard Schmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method of semiconductor device
- Patent number 10,840,361
- Issue date Nov 17, 2020
- Fuji Electric Co., Ltd.
- Tatsuya Naito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High resistivity silicon-on-insulator substrate comprising a charge...
- Patent number 10,796,945
- Issue date Oct 6, 2020
- GlobalWafers Co., Ltd.
- Qingmin Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and semiconductor device manufacturing method
- Patent number 10,490,646
- Issue date Nov 26, 2019
- Fuji Electric Co., Ltd.
- Yuichi Onozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High resistivity silicon-on-insulator substrate comprising a charge...
- Patent number 10,403,541
- Issue date Sep 3, 2019
- GlobalWafers Co., Ltd.
- Qingmin Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 10,396,189
- Issue date Aug 27, 2019
- Fuji Electric Co., Ltd.
- Tatsuya Naito
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device
- Patent number 10,141,304
- Issue date Nov 27, 2018
- Toyota Jidosha Kabushiki Kaisha
- Shinya Iwasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method of semiconductor device
- Patent number 10,014,368
- Issue date Jul 3, 2018
- Toyota Jidosha Kabushiki Kaisha
- Shinya Iwasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method of semiconductor device
- Patent number 9,978,830
- Issue date May 22, 2018
- Toyota Jidosha Kabushiki Kaisha
- Shinya Iwasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of manufacturing semiconductor devices
- Patent number 9,837,272
- Issue date Dec 5, 2017
- Samsung Electronics Co., Ltd.
- Su-Min Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing in silicon
- Patent number 9,824,897
- Issue date Nov 21, 2017
- Newsouth Innovations Pty Limited
- Brett Jason Hallam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Super junction semiconductor device having columnar super junction...
- Patent number 9,722,020
- Issue date Aug 1, 2017
- Infineon Technologies Austria AG
- Armin Willmeroth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, method of manufacturing the same, and electro...
- Patent number 9,711,433
- Issue date Jul 18, 2017
- Fujitsu Limited
- Jun Taniguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of improving getter efficiency by increasing superficial area
- Patent number 9,708,179
- Issue date Jul 18, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Production method for a semiconductor device
- Patent number 9,530,672
- Issue date Dec 27, 2016
- Fuji Electric Co., Ltd.
- Yusuke Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS device having a getter
- Patent number 9,511,998
- Issue date Dec 6, 2016
- Robert Bosch GmbH
- Ashwin Samarao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anisotropic gap etch
- Patent number 9,502,258
- Issue date Nov 22, 2016
- Applied Materials, Inc.
- Jun Xue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing a semiconductor device by thermal treatmen...
- Patent number 9,449,847
- Issue date Sep 20, 2016
- Infineon Technologies Austria AG
- Hans-Joachim Schulze
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Super junction semiconductor device having columnar super junction...
- Patent number 9,349,792
- Issue date May 24, 2016
- Infineon Technologies Austria AG
- Armin Willmeroth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of improving getter efficiency by increasing superficial area
- Patent number 9,242,853
- Issue date Jan 26, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
SOI (silicon on insulator) structure semiconductor device and metho...
- Patent number 8,410,573
- Issue date Apr 2, 2013
- Denso Corporation
- Hiroshi Ohtsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for protecting an integrated circuit chip against laser attacks
- Patent number 8,399,280
- Issue date Mar 19, 2013
- STMicroelectronics (Rousset) SAS
- Pascal Fornara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diffusion barrier and method of formation thereof
- Patent number 8,324,031
- Issue date Dec 4, 2012
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Shyue Seng Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating a semiconductor element, and semiconductor e...
- Patent number 7,972,947
- Issue date Jul 5, 2011
- Infineon Technologies AG
- Luis-Felipe Giles
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of producing a semiconductor element in a substrate
- Patent number 7,833,886
- Issue date Nov 16, 2010
- Infineon Technologies AG
- Luis-Felipe Giles
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR SUBSTRATES AND METHODS OF PRODUCING THE SAME
- Publication number 20230395376
- Publication date Dec 7, 2023
- IMEC vzw
- Bertrand Parvais
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRENCH-GATE SIC MOSFET DEVICE AND MANUFACTURING METHOD THEREFOR
- Publication number 20220336602
- Publication date Oct 20, 2022
- KOREA ELECTROTECHNOLOGY RESEARCH INSTITUTE
- Jeong Hyun MOON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20220013368
- Publication date Jan 13, 2022
- Fuji Electric Co., Ltd.
- Yasunori AGATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR EPITAXIAL WAFER AND METHOD OF PRODUCING SEMICONDUCTOR...
- Publication number 20210358755
- Publication date Nov 18, 2021
- SUMCO CORPORATION
- Ryosuke OKUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF THIN FILM TRANSISTOR
- Publication number 20210343543
- Publication date Nov 4, 2021
- WUHAN CHINA STAR OPTELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Mingjen Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20200373418
- Publication date Nov 26, 2020
- Fuji Electric Co., Ltd.
- Tatsuya NAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH RESISTIVITY SILICON-ON-INSULATOR SUBSTRATE COMPRISING A CHARGE...
- Publication number 20190341296
- Publication date Nov 7, 2019
- GLOBALWAFERS CO., LTD.
- Qingmin Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device and Method for Forming a Semiconductor Device
- Publication number 20190189463
- Publication date Jun 20, 2019
- INFINEON TECHNOLOGIES AG
- Gerhard Schmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20180350962
- Publication date Dec 6, 2018
- Fuji Electric Co., Ltd.
- Tatsuya NAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Manufacturing a Semiconductor Device by Hydrogen Treatment
- Publication number 20160372336
- Publication date Dec 22, 2016
- Infineon Technologies Austria AG
- Hans-Joachim Schulze
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING IN SILICON
- Publication number 20160172213
- Publication date Jun 16, 2016
- NEWSOUTH INNOVATIONS PTY LIMITED
- Brett Jason HALLAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING THE SAME, AND ELECTRO...
- Publication number 20160056089
- Publication date Feb 25, 2016
- Fujitsu Limited
- Jun Taniguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Improving Getter Efficiency by Increasing Superficial Area
- Publication number 20150102432
- Publication date Apr 16, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20150069462
- Publication date Mar 12, 2015
- Fuji Electric Co., Ltd.
- Tomonori Mizushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Manufacturing a Semiconductor Device by Thermal Treatmen...
- Publication number 20150056784
- Publication date Feb 26, 2015
- Infineon Technologies Austria AG
- Hans-Joachim Schulze
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRODUCTION METHOD FOR A SEMICONDUCTOR DEVICE
- Publication number 20150050798
- Publication date Feb 19, 2015
- Fuji Electric Co., Ltd.
- Yusuke Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing a Super Junction Semiconductor Device and Semiconduct...
- Publication number 20140231910
- Publication date Aug 21, 2014
- Infineon Technologies Austria AG
- Armin Willmeroth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIFFUSION BARRIER AND METHOD OF FORMATION THEREOF
- Publication number 20130087889
- Publication date Apr 11, 2013
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Shyue Seng TAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20130065379
- Publication date Mar 14, 2013
- Infineon Technologies Austria AG
- Hans-Joachim Schulze
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PROTECTING AN INTEGRATED CIRCUIT CHIP AGAINST LASER ATTACKS
- Publication number 20110080190
- Publication date Apr 7, 2011
- STMicroelectronics (Rousset) SAS
- Pascal Fornara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOI (SILICON ON INSULATOR) STRUCTURE SEMICONDUCTOR DEVICE AND METHO...
- Publication number 20100264510
- Publication date Oct 21, 2010
- Denso Corporation
- Hiroshi Ohtsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIFFUSION BARRIER AND METHOD OF FORMATION THEREOF
- Publication number 20090315152
- Publication date Dec 24, 2009
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Shyue Seng TAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REUSING DELAMINATED WAFER
- Publication number 20090209085
- Publication date Aug 20, 2009
- Akihiko Tamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Fabricating a Semiconductor Element, and Semiconductor E...
- Publication number 20080290425
- Publication date Nov 27, 2008
- Luis-Felipe Giles
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Producing a Semiconductor Element in a Substrate
- Publication number 20080286908
- Publication date Nov 20, 2008
- Luis-Felipe Giles
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PRODUCING A SEMICONDUCTOR ELEMENT AND SEMICONDUCTOR ELEMENT
- Publication number 20070161219
- Publication date Jul 12, 2007
- Infineon Technologies AG
- Luis-Felipe Giles
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gettering using voids formed by surface transformation
- Publication number 20070080335
- Publication date Apr 12, 2007
- Micron Technology, Inc.
- Leonard Forbes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gettering using voids formed by surface transformation
- Publication number 20070075401
- Publication date Apr 5, 2007
- Micron Technology, Inc.
- Leonard Forbes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing a semiconductor device
- Publication number 20070004109
- Publication date Jan 4, 2007
- Semiconductor Energy Laboratory Co., Ltd.
- Mitsuhiro Ichijo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for forming dielectrics and metal electrodes
- Publication number 20070004224
- Publication date Jan 4, 2007
- AmberWave Systems Corporation
- Matthew T. Currie
- H01 - BASIC ELECTRIC ELEMENTS

using cavities formed by hydrogen or noble gas ion implantation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor epitaxial wafer and method of producing semiconductor...

Semiconductor epitaxial wafer and method of producing semiconductor...

Semiconductor device with field stop layer and semiconductor device...

Semiconductor epitaxial wafer and method of producing semiconductor...

Semiconductor device and manufacturing method of semiconductor device

Semiconductor device and method for forming a semiconductor device

Semiconductor device and manufacturing method of semiconductor device

High resistivity silicon-on-insulator substrate comprising a charge...

Semiconductor device and semiconductor device manufacturing method

High resistivity silicon-on-insulator substrate comprising a charge...

Semiconductor device

Semiconductor device

Semiconductor device and manufacturing method of semiconductor device

Semiconductor device and manufacturing method of semiconductor device

Methods of manufacturing semiconductor devices

Thermal processing in silicon

Super junction semiconductor device having columnar super junction...

Semiconductor device, method of manufacturing the same, and electro...

Method of improving getter efficiency by increasing superficial area

Production method for a semiconductor device

MEMS device having a getter

Anisotropic gap etch

Method for manufacturing a semiconductor device by thermal treatmen...

Super junction semiconductor device having columnar super junction...

Method of improving getter efficiency by increasing superficial area

SOI (silicon on insulator) structure semiconductor device and metho...

Method for protecting an integrated circuit chip against laser attacks

Diffusion barrier and method of formation thereof

Method for fabricating a semiconductor element, and semiconductor e...

Method of producing a semiconductor element in a substrate

Patents Applicationslast 30 patents

SEMICONDUCTOR SUBSTRATES AND METHODS OF PRODUCING THE SAME

TRENCH-GATE SIC MOSFET DEVICE AND MANUFACTURING METHOD THEREFOR

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

SEMICONDUCTOR EPITAXIAL WAFER AND METHOD OF PRODUCING SEMICONDUCTOR...

MANUFACTURING METHOD OF THIN FILM TRANSISTOR

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

HIGH RESISTIVITY SILICON-ON-INSULATOR SUBSTRATE COMPRISING A CHARGE...

Semiconductor Device and Method for Forming a Semiconductor Device

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

Method for Manufacturing a Semiconductor Device by Hydrogen Treatment

THERMAL PROCESSING IN SILICON

SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING THE SAME, AND ELECTRO...

Method of Improving Getter Efficiency by Increasing Superficial Area

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

Method for Manufacturing a Semiconductor Device by Thermal Treatmen...

PRODUCTION METHOD FOR A SEMICONDUCTOR DEVICE

Manufacturing a Super Junction Semiconductor Device and Semiconduct...

DIFFUSION BARRIER AND METHOD OF FORMATION THEREOF

METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE

METHOD FOR PROTECTING AN INTEGRATED CIRCUIT CHIP AGAINST LASER ATTACKS

SOI (SILICON ON INSULATOR) STRUCTURE SEMICONDUCTOR DEVICE AND METHO...

DIFFUSION BARRIER AND METHOD OF FORMATION THEREOF

METHOD FOR REUSING DELAMINATED WAFER

Method for Fabricating a Semiconductor Element, and Semiconductor E...

Method of Producing a Semiconductor Element in a Substrate

METHOD OF PRODUCING A SEMICONDUCTOR ELEMENT AND SEMICONDUCTOR ELEMENT

Gettering using voids formed by surface transformation

Gettering using voids formed by surface transformation

Manufacturing a semiconductor device

Methods for forming dielectrics and metal electrodes