using crystal oscillators

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CPC
C23C14/546

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/546using crystal oscillators

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and methods for depositing variable interference filters
- Patent number 11,891,686
- Issue date Feb 6, 2024
- Shigeng Song
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sensor assembly and methods of vapor monitoring in process chambers
- Patent number 11,721,566
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Xiaozhou Che
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process monitoring using crystal with reactance sensor
- Patent number 11,175,323
- Issue date Nov 16, 2021
- Inficon, Inc.
- Mohamed Buhary Rinzan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Crystal oscillation probe structure and evaporation device
- Patent number 10,988,840
- Issue date Apr 27, 2021
- Chengdu BOE Optoelectronics Technology Co., Ltd.
- Yifan Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical article coated with an antireflection coating comprising a...
- Patent number 10,962,687
- Issue date Mar 30, 2021
- Essilor International
- Luc Nouvelot
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Evaporation apparatus and calibration method thereof
- Patent number 10,895,007
- Issue date Jan 19, 2021
- Industrial Technology Research Institute
- Yu-Lin Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monitoring thin film deposition
- Patent number 10,704,150
- Issue date Jul 7, 2020
- Inficon, Inc.
- Mohamed Buhary Rinzan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for layer thickness measurement for a vapor de...
- Patent number 10,684,126
- Issue date Jun 16, 2020
- NICE SOLAR ENERGY GMBH
- Matthias Gang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication of critical layers of integrated computational elements
- Patent number 10,496,776
- Issue date Dec 3, 2019
- Halliburton Energy Services, Inc.
- David L. Perkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Crystal oscillator and the use thereof in semiconductor fabrication
- Patent number 10,446,421
- Issue date Oct 15, 2019
- GLOBALFOUNDRIES Inc.
- Cyril Cabral
- G05 - CONTROLLING REGULATING
Information Patent Grant
Detection device for detecting thickness of vacuum-evaporated film...
- Patent number 10,385,445
- Issue date Aug 20, 2019
- BOE Technology Group Co., Ltd.
- Wenbin Jia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film thickness monitoring system and method using the same
- Patent number 10,100,410
- Issue date Oct 16, 2018
- Industrial Technology Research Institute
- Yu-Lin Hsu
- G01 - MEASURING TESTING
Information Patent Grant
Crystal oscillator and the use thereof in semiconductor fabrication
- Patent number 9,971,341
- Issue date May 15, 2018
- GLOBALFOUNDRIES Inc.
- Cyril Cabral
- G05 - CONTROLLING REGULATING
Information Patent Grant
Reactor device with removable deposition monitor
- Patent number 9,567,661
- Issue date Feb 14, 2017
- SUPERCONDUCTOR TECHNOLOGIES, INC.
- Ward Ruby
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition rate measuring apparatus
- Patent number 9,562,798
- Issue date Feb 7, 2017
- Samsung Display Co., Ltd.
- Hee Dok Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method using oscillators for measurement and calibra...
- Patent number 9,382,624
- Issue date Jul 5, 2016
- Canon Kabushiki Kaisha
- Yoshiyuki Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface acoustic wave monitor for deposition and analysis of ultra-...
- Patent number 9,121,754
- Issue date Sep 1, 2015
- SenSanna Incorporated
- Jacqueline H. Hines
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and method for manufacturing organic light emi...
- Patent number 9,048,460
- Issue date Jun 2, 2015
- Samsung Display Co., Ltd.
- Tae-Hun Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition amount measuring apparatus, depositing apparatus includi...
- Patent number 8,889,214
- Issue date Nov 18, 2014
- Samsung Display Co., Ltd.
- Kyung-Soo Kim
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Detecting a deposition condition
- Patent number 8,546,205
- Issue date Oct 1, 2013
- Skyworks Solutions, Inc.
- Lam T. Luu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of evaporating metal onto a semiconductor wafer in a test w...
- Patent number 8,481,344
- Issue date Jul 9, 2013
- Skyworks Solutions, Inc.
- Lam T. Luu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antireflection structure and manufacturing method thereof
- Patent number 8,236,433
- Issue date Aug 7, 2012
- National Applied Research Laboratories
- Po-Kai Chiu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming apparatus, film thickness measuring method and fi...
- Patent number 8,226,802
- Issue date Jul 24, 2012
- Ulvac, Inc.
- Masato Fukao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and devices for monitoring and controlling thin film proces...
- Patent number 8,182,861
- Issue date May 22, 2012
- Research Electro-Optics, Inc.
- William David Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lithographically patterned nanowire electrodeposition
- Patent number 8,142,984
- Issue date Mar 27, 2012
- The Regents of the University of California
- Reginald M. Penner
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and methods for detecting evaporation conditions
- Patent number 8,030,725
- Issue date Oct 4, 2011
- Skyworks Solutions, Inc.
- Lam T. Luu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for evaporation including test wafer holder
- Patent number 8,022,448
- Issue date Sep 20, 2011
- Skyworks Solutions, Inc.
- Lam T. Luu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of operating vacuum deposition apparatus and vacuum depositi...
- Patent number 7,871,667
- Issue date Jan 18, 2011
- Sumitomo Electric Industries, Ltd.
- Hideaki Awata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and devices for monitoring and controlling thin film proces...
- Patent number 7,828,929
- Issue date Nov 9, 2010
- Research Electro-Optics, Inc.
- William David Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic film thickness control system/method and its utilization
- Patent number 7,435,300
- Issue date Oct 14, 2008
- Hermosa Thin Film Co., Ltd.
- Kow-Je Ling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
APPLYING A TRANSPARENT CONDUCTIVE FILM TO FLUORINE-DOPED TIN OXIDE
- Publication number 20240102147
- Publication date Mar 28, 2024
- nexTC Corporation
- Cory K. Perkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONITORING THIN FILM DEPOSITION
- Publication number 20200325580
- Publication date Oct 15, 2020
- Inficon, Inc.
- Mohamed B. Rinzan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CRYSTAL OSCILLATION PROBE STRUCTURE AND EVAPORATION DEVICE
- Publication number 20200080194
- Publication date Mar 12, 2020
- CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Yifan YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATION DEVICE AND EVAPORATION METHOD
- Publication number 20190382884
- Publication date Dec 19, 2019
- Shenzhen china Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Yang LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEASUREMENT ASSEMBLY FOR MEASURING A DEPOSITION RATE AND METHOD THE...
- Publication number 20180187302
- Publication date Jul 5, 2018
- Applied Materials, Inc.
- Jose Manuel DIEGUEZ-CAMPO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DETECTION DEVICE FOR DETECTING THICKNESS OF VACUUM-EVAPORATED FILM...
- Publication number 20170191156
- Publication date Jul 6, 2017
- Wenbin Jia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRICATION OF CRITICAL LAYERS OF INTEGRATED COMPUTATIONAL ELEMENTS
- Publication number 20160292338
- Publication date Oct 6, 2016
- Halliburton Energy Services, Inc.
- David L. PERKINS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MONITORING SE VAPOR IN VACUUM REACTOR APPARATUS
- Publication number 20160273097
- Publication date Sep 22, 2016
- Nuvosun, Inc.
- Arthur C. WALL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition Apparatus, Method for Manufacturing Organic Light Emitti...
- Publication number 20140326962
- Publication date Nov 6, 2014
- SAMSUNG DISPLAY CO., LTD.
- TAE-HUN LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING FILM AND FILM DEPOSITION SYSTEM
- Publication number 20140205762
- Publication date Jul 24, 2014
- SHINCRON CO., LTD.
- Ichiro Shiono
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20140199493
- Publication date Jul 17, 2014
- Shincron Co., LTD
- Ichiro Shiono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEASUREMENT DEVICE AND METHOD FOR VAPOUR DEPOSITION APPLICATIONS
- Publication number 20140186974
- Publication date Jul 3, 2014
- Koninklijke Philips N.V.
- Johannes Krijne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION AMOUNT MEASURING APPARATUS, DEPOSITING APPARATUS INCLUDI...
- Publication number 20140127833
- Publication date May 8, 2014
- Kyung-Soo KIM
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DEPOSITION APPARATUS
- Publication number 20140076232
- Publication date Mar 20, 2014
- SAMSUNG DISPLAY CO., LTD.
- Byoung Hee Park
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SURFACE ACOUSTIC WAVE MONITOR FOR DEPOSITION AND ANALYSIS OF ULTRA-...
- Publication number 20140007692
- Publication date Jan 9, 2014
- APPLIED SENSOR RESEARCH & DEVELOPMENT CORPORATION
- Jacqueline H. HINES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR COATING WITH AN EVAPORATION MATERIAL
- Publication number 20130323407
- Publication date Dec 5, 2013
- Paul WURZINGER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS AND FILM FORMATION METHOD
- Publication number 20120114837
- Publication date May 10, 2012
- Canon Kabushiki Kaisha
- Yoshiyuki Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS
- Publication number 20120114838
- Publication date May 10, 2012
- Cannon Kabushiki Kaisha
- Yoshiyuki Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM VAPOR DEPOSITION SYSTEM
- Publication number 20120114839
- Publication date May 10, 2012
- Canon Kabushiki Kaisha
- Naoto Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS AND FILM FORMATION METHOD
- Publication number 20120114833
- Publication date May 10, 2012
- Canon Kabushiki Kaisha
- Yoshiyuki Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM VAPOR DEPOSITION SYSTEM
- Publication number 20120114840
- Publication date May 10, 2012
- Canon Kabushiki Kaisha
- Naoto Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR DEVICE WITH REMOVABLE DEPOSITION MONITOR
- Publication number 20120090542
- Publication date Apr 19, 2012
- Superconductor Technologies, Inc.
- Ward Ruby
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DETECTING A DEPOSITION CONDITION
- Publication number 20120083050
- Publication date Apr 5, 2012
- SKYWORKS SOLUTIONS, INC.
- Lam T. Luu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF EVAPORATING METAL ONTO A SEMICONDUCTOR WAFER IN A TEST W...
- Publication number 20120083118
- Publication date Apr 5, 2012
- SKYWORKS SOLUTIONS, INC.
- Lam T. Luu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THICKNESS MEASURING DEVICE, COATING INSTALLATION, METHOD OF MEASURI...
- Publication number 20110079178
- Publication date Apr 7, 2011
- Applied Materials, Inc.
- Sven SCHRAMM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Devices for Monitoring and Controlling Thin Film Proces...
- Publication number 20110027459
- Publication date Feb 3, 2011
- Research Electro-Optics, Inc.
- William David LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION RATE MONITOR DEVICE, EVAPORATOR, COATING INSTALLATION, M...
- Publication number 20100316788
- Publication date Dec 16, 2010
- Applied Materials, Inc.
- Manuel Dieguez-Campo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMBINED CRYSTAL/OPTICAL ASSEMBLY AND METHOD OF ITS USE
- Publication number 20100266747
- Publication date Oct 21, 2010
- FLIR SYSTEMS, INC.
- William B. Strickland
- C30 - CRYSTAL GROWTH
Information Patent Application
Dynamic Film Thickness Control System/Method and its Utilization
- Publication number 20100224486
- Publication date Sep 9, 2010
- Kow-Je LING
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dynamic Film Thickness Control System/Method and its Utilization
- Publication number 20100224127
- Publication date Sep 9, 2010
- Kow-Je LING
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using crystal oscillators

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and methods for depositing variable interference filters

Sensor assembly and methods of vapor monitoring in process chambers

Process monitoring using crystal with reactance sensor

Crystal oscillation probe structure and evaporation device

Optical article coated with an antireflection coating comprising a...

Evaporation apparatus and calibration method thereof

Monitoring thin film deposition

Apparatus and method for layer thickness measurement for a vapor de...

Fabrication of critical layers of integrated computational elements

Crystal oscillator and the use thereof in semiconductor fabrication

Detection device for detecting thickness of vacuum-evaporated film...

Film thickness monitoring system and method using the same

Crystal oscillator and the use thereof in semiconductor fabrication

Reactor device with removable deposition monitor

Deposition rate measuring apparatus

Film formation method using oscillators for measurement and calibra...

Surface acoustic wave monitor for deposition and analysis of ultra-...

Deposition apparatus and method for manufacturing organic light emi...

Deposition amount measuring apparatus, depositing apparatus includi...

Detecting a deposition condition

Methods of evaporating metal onto a semiconductor wafer in a test w...

Antireflection structure and manufacturing method thereof

Thin film forming apparatus, film thickness measuring method and fi...

Methods and devices for monitoring and controlling thin film proces...

Lithographically patterned nanowire electrodeposition

Apparatus and methods for detecting evaporation conditions

Apparatus and methods for evaporation including test wafer holder

Method of operating vacuum deposition apparatus and vacuum depositi...

Methods and devices for monitoring and controlling thin film proces...

Dynamic film thickness control system/method and its utilization

Patents Applicationslast 30 patents

APPLYING A TRANSPARENT CONDUCTIVE FILM TO FLUORINE-DOPED TIN OXIDE

MONITORING THIN FILM DEPOSITION

CRYSTAL OSCILLATION PROBE STRUCTURE AND EVAPORATION DEVICE

EVAPORATION DEVICE AND EVAPORATION METHOD

MEASUREMENT ASSEMBLY FOR MEASURING A DEPOSITION RATE AND METHOD THE...

DETECTION DEVICE FOR DETECTING THICKNESS OF VACUUM-EVAPORATED FILM...

FABRICATION OF CRITICAL LAYERS OF INTEGRATED COMPUTATIONAL ELEMENTS

METHOD FOR MONITORING SE VAPOR IN VACUUM REACTOR APPARATUS

Deposition Apparatus, Method for Manufacturing Organic Light Emitti...

METHOD FOR DEPOSITING FILM AND FILM DEPOSITION SYSTEM

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

MEASUREMENT DEVICE AND METHOD FOR VAPOUR DEPOSITION APPLICATIONS

DEPOSITION AMOUNT MEASURING APPARATUS, DEPOSITING APPARATUS INCLUDI...

DEPOSITION APPARATUS

SURFACE ACOUSTIC WAVE MONITOR FOR DEPOSITION AND ANALYSIS OF ULTRA-...

METHOD FOR COATING WITH AN EVAPORATION MATERIAL

FILM FORMATION APPARATUS AND FILM FORMATION METHOD

FILM FORMATION APPARATUS

VACUUM VAPOR DEPOSITION SYSTEM

FILM FORMATION APPARATUS AND FILM FORMATION METHOD

VACUUM VAPOR DEPOSITION SYSTEM

REACTOR DEVICE WITH REMOVABLE DEPOSITION MONITOR

DETECTING A DEPOSITION CONDITION

METHODS OF EVAPORATING METAL ONTO A SEMICONDUCTOR WAFER IN A TEST W...

THICKNESS MEASURING DEVICE, COATING INSTALLATION, METHOD OF MEASURI...

Methods and Devices for Monitoring and Controlling Thin Film Proces...

DEPOSITION RATE MONITOR DEVICE, EVAPORATOR, COATING INSTALLATION, M...

COMBINED CRYSTAL/OPTICAL ASSEMBLY AND METHOD OF ITS USE

Dynamic Film Thickness Control System/Method and its Utilization

Dynamic Film Thickness Control System/Method and its Utilization