using digital signal processors

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CPC
H01J2237/2487

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2487using digital signal processors

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Estimation model generation method and electron microscope
- Patent number 11,842,880
- Issue date Dec 12, 2023
- Jeol Ltd.
- Ryusuke Sagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate processing method, and contr...
- Patent number 11,823,877
- Issue date Nov 21, 2023
- Tokyo Electron Limited
- Koichi Miyashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for controlling dynamically controllable ultrawide-amplitude...
- Patent number 11,658,005
- Issue date May 23, 2023
- NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY, PEOPLE'S LIBERATION ARMY OF CHINA
- Ye Tian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operating a particle beam device
- Patent number 11,501,948
- Issue date Nov 15, 2022
- Carl Zeiss Microscopy GmbH
- Luyang Han
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Aberration measurement method and electron microscope
- Patent number 10,840,058
- Issue date Nov 17, 2020
- Jeol Ltd.
- Yuji Kohno
- G01 - MEASURING TESTING
Information Patent Grant
Accelerator system for mineral component analysis, system and metho...
- Patent number 10,825,643
- Issue date Nov 3, 2020
- Nuctech Company Limited
- Yaohong Liu
- G01 - MEASURING TESTING
Information Patent Grant
Method for the correction of electron proximity effects
- Patent number 10,553,394
- Issue date Feb 4, 2020
- Aselta Nanographics
- Nader Jedidi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,446,359
- Issue date Oct 15, 2019
- Hitachi High-Technologies Corporation
- Toshiyuki Yokosuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sustained self-sputtering of lithium for lithium physical vapor dep...
- Patent number 10,443,121
- Issue date Oct 15, 2019
- View, Inc.
- Martin John Neumann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and method of operating same
- Patent number 10,224,176
- Issue date Mar 5, 2019
- Jeol Ltd.
- Takashi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray CT apparatus
- Patent number 9,633,814
- Issue date Apr 25, 2017
- Toshiba Medical Systems Corporation
- Daizo Oikawa
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Dynamic focus adjustment with optical height detection apparatus in...
- Patent number 9,400,176
- Issue date Jul 26, 2016
- Hermes-Microvision, Inc.
- Joe Wang
- G01 - MEASURING TESTING
Information Patent Grant
Hybrid wafer dicing approach using a phase modulated laser beam pro...
- Patent number 9,196,536
- Issue date Nov 24, 2015
- Applied Materials, Inc.
- Jungrae Park
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Particle beam system and method for operating the same
- Patent number 8,927,948
- Issue date Jan 6, 2015
- Carl Zeiss Microscopy GmbH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic focus adjustment with optical height detection apparatus in...
- Patent number 8,791,414
- Issue date Jul 29, 2014
- Hermes Microvision, Inc.
- Joe Wang
- G01 - MEASURING TESTING
Information Patent Grant
Particle beam system and method for operating the same
- Patent number 8,723,136
- Issue date May 13, 2014
- Carl Zeiss Microscopy GmbH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 8,633,451
- Issue date Jan 21, 2014
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Method of inspecting pattern and inspecting instrument
- Patent number 8,558,173
- Issue date Oct 15, 2013
- Hitachi, Ltd.
- Mari Nozoe
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope and method for detecting an image usin...
- Patent number 8,405,025
- Issue date Mar 26, 2013
- Hitachi High-Technologies Corporation
- Toshifumi Honda
- G01 - MEASURING TESTING
Information Patent Grant
Microstructured pattern inspection method
- Patent number 8,304,724
- Issue date Nov 6, 2012
- Hitachi, Ltd.
- Fumihiro Sasajima
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection and charged particle beam apparatus
- Patent number 8,304,723
- Issue date Nov 6, 2012
- Hitachi High-Technologies Corporation
- Toshihide Agemura
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam exposure or system inspection or measurement apparatu...
- Patent number 8,212,227
- Issue date Jul 3, 2012
- Hitachi, Ltd.
- Masahiro Watanabe
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning electron microscope
- Patent number 8,153,970
- Issue date Apr 10, 2012
- Hitachi High-Technologies Corporation
- Hirohiko Kitsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 8,124,934
- Issue date Feb 28, 2012
- Hitachi High-Technologies Corporation
- Tatsuya Maeda
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Charged particle beam apparatus
- Patent number 8,124,940
- Issue date Feb 28, 2012
- Hitachi High-Technologies Corporation
- Kunji Shigeto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam inspection system and an image generation method for...
- Patent number 8,086,022
- Issue date Dec 27, 2011
- Hitachi High-Technologies Corporation
- Hiroshi Miyai
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle apparatus, scanning electron microscope, and sampl...
- Patent number 8,026,481
- Issue date Sep 27, 2011
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam equipment
- Patent number 7,923,701
- Issue date Apr 12, 2011
- Hitachi High-Technologies Corporation
- Hiromi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for determining a cross sectional feature of a st...
- Patent number 7,910,885
- Issue date Mar 22, 2011
- Applied Materials Israel, Ltd.
- Zvika Rosenberg
- G01 - MEASURING TESTING
Information Patent Grant
Image forming method and electron microscope
- Patent number 7,838,834
- Issue date Nov 23, 2010
- Hitachi High-Technologies Corporation
- Isao Nagaoki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR CONTROLLING DYNAMICALLY CONTROLLABLE ULTRAWIDE-AMPLITUDE...
- Publication number 20220384141
- Publication date Dec 1, 2022
- National University of Defense Technology, People's Liberation Army of China
- Ye TIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A PARTICLE BEAM DEVICE, COMPUTER PROGRAM PRODU...
- Publication number 20220384140
- Publication date Dec 1, 2022
- CARL ZEISS MICROSCOPY GMBH
- Bjoern Gamm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Estimation Model Generation Method and Electron Microscope
- Publication number 20220262595
- Publication date Aug 18, 2022
- JEOL Ltd.
- Ryusuke Sagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR PROCESSING A SUBSTRATE
- Publication number 20210375701
- Publication date Dec 2, 2021
- Applied Materials, Inc.
- Ramesh GOPALAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND CONTR...
- Publication number 20210305029
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Koichi MIYASHITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACCELERATOR SYSTEM FOR MINERAL COMPONENT ANALYSIS, SYSTEM AND METHO...
- Publication number 20190198285
- Publication date Jun 27, 2019
- Nuctech Company Limited
- Yaohong LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABERRATION MEASUREMENT METHOD AND ELECTRON MICROSCOPE
- Publication number 20190066968
- Publication date Feb 28, 2019
- JEOL Ltd.
- Yuji Kohno
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS INCLUDING A BEAM PROJECTION DEVICE PROVIDING VARIABLE EXPOS...
- Publication number 20170133199
- Publication date May 11, 2017
- Samsung Electronics Co., Ltd.
- SUYOUNG LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR THE CORRECTION OF ELECTRON PROXIMITY EFFECTS
- Publication number 20160211115
- Publication date Jul 21, 2016
- ASELTA NANOGRAPHICS
- Nader JEDIDI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COPPER SUBSTRATE FOR DEPOSITION OF GRAPHENE
- Publication number 20160185605
- Publication date Jun 30, 2016
- EMPIRE TECHNOLOGY DEVELOPMENT LLC
- Thomas A. Yager
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSTAINED SELF-SPUTTERING OF LITHIUM FOR LITHIUM PHYSICAL VAPOR DEP...
- Publication number 20160076139
- Publication date Mar 17, 2016
- VIEW, INC.
- Martin John Neumann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DRAWING APPARATUS, DRAWING METHOD, AND METHOD FOR FABRICATING ARTICLE
- Publication number 20150155135
- Publication date Jun 4, 2015
- Canon Kabushiki Kaisha
- Tatsuro Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dynamic Focus Adjustment with Optical Height Detection Apparatus in...
- Publication number 20140291517
- Publication date Oct 2, 2014
- JOE WANG
- G01 - MEASURING TESTING
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING THE SAME
- Publication number 20140217303
- Publication date Aug 7, 2014
- CARL ZEISS MICROSCOPY GMBH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COPPER SUBSTRATE FOR DEPOSITION OF GRAPHENE
- Publication number 20130316167
- Publication date Nov 28, 2013
- Empire Technology Developement LLC
- Thomas A. Yager
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING THE SAME
- Publication number 20130082188
- Publication date Apr 4, 2013
- Carl Zeiss Mocroscopy GmbH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCES, SYSTEMS AND METHODS
- Publication number 20120241640
- Publication date Sep 27, 2012
- CARL ZEISS NTS, LLC.
- Billy W. Ward
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
CHARGED PARTICLE APPARATUS, SCANNING ELECTRON MICROSCOPE, AND SAMPL...
- Publication number 20120004879
- Publication date Jan 5, 2012
- Hitachi High-Technologies Corporation
- Muneyuki FUKUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dynamic Focus Adjustment with Optical Height Detection Apparatus in...
- Publication number 20110260055
- Publication date Oct 27, 2011
- Hermes Microvision, Inc.
- JOE WANG
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20100320385
- Publication date Dec 23, 2010
- Hitachi High-Technologies Corporation
- Hirohiko Kitsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROSTRUCTURED PATTERN INSPECTION METHOD
- Publication number 20100314541
- Publication date Dec 16, 2010
- HITACHI, LTD.
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Electron Beam Exposure Or System Inspection Or Measurement Apparatu...
- Publication number 20100193686
- Publication date Aug 5, 2010
- Masahiro Watanabe
- B82 - NANO-TECHNOLOGY
Information Patent Application
DEFECT INSPECTION AND CHARGED PARTICLE BEAM APPARATUS
- Publication number 20100187416
- Publication date Jul 29, 2010
- Hitachi High-Technologies Corporation
- Toshihide Agemura
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam equipment
- Publication number 20090242794
- Publication date Oct 1, 2009
- Hitachi High-Technologies Corporation
- Hiromi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20090242765
- Publication date Oct 1, 2009
- Tatsuya Maeda
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20090184256
- Publication date Jul 23, 2009
- Hitachi High-Technologies Corporation
- Kunji Shigeto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for reviewing defects by detecting images havi...
- Publication number 20090058437
- Publication date Mar 5, 2009
- Toshifumi Honda
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20090050805
- Publication date Feb 26, 2009
- Hitachi High-Technologies Corporation
- Hirohiko Kitsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning Electron Microscope And Method For Detecting An Image Usin...
- Publication number 20090039258
- Publication date Feb 12, 2009
- Toshifumi Honda
- G01 - MEASURING TESTING
Information Patent Application
Electron Beam Inspection System and an Image Generation Method for...
- Publication number 20090026369
- Publication date Jan 29, 2009
- Hitachi High-Technologies Corporation
- Hiroshi MIYAI
- G01 - MEASURING TESTING

using digital signal processors

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Estimation model generation method and electron microscope

Substrate processing system, substrate processing method, and contr...

Method for controlling dynamically controllable ultrawide-amplitude...

Operating a particle beam device

Aberration measurement method and electron microscope

Accelerator system for mineral component analysis, system and metho...

Method for the correction of electron proximity effects

Charged particle beam device

Sustained self-sputtering of lithium for lithium physical vapor dep...

Electron microscope and method of operating same

X-ray CT apparatus

Dynamic focus adjustment with optical height detection apparatus in...

Hybrid wafer dicing approach using a phase modulated laser beam pro...

Particle beam system and method for operating the same

Dynamic focus adjustment with optical height detection apparatus in...

Particle beam system and method for operating the same

Ion sources, systems and methods

Method of inspecting pattern and inspecting instrument

Scanning electron microscope and method for detecting an image usin...

Microstructured pattern inspection method

Defect inspection and charged particle beam apparatus

Electron beam exposure or system inspection or measurement apparatu...

Scanning electron microscope

Scanning electron microscope

Charged particle beam apparatus

Electron beam inspection system and an image generation method for...

Charged particle apparatus, scanning electron microscope, and sampl...

Charged particle beam equipment

System and method for determining a cross sectional feature of a st...

Image forming method and electron microscope

Patents Applicationslast 30 patents

METHOD FOR CONTROLLING DYNAMICALLY CONTROLLABLE ULTRAWIDE-AMPLITUDE...

METHOD FOR OPERATING A PARTICLE BEAM DEVICE, COMPUTER PROGRAM PRODU...

Estimation Model Generation Method and Electron Microscope

METHODS AND SYSTEMS FOR PROCESSING A SUBSTRATE

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND CONTR...

ACCELERATOR SYSTEM FOR MINERAL COMPONENT ANALYSIS, SYSTEM AND METHO...

ABERRATION MEASUREMENT METHOD AND ELECTRON MICROSCOPE

SYSTEMS INCLUDING A BEAM PROJECTION DEVICE PROVIDING VARIABLE EXPOS...

METHOD FOR THE CORRECTION OF ELECTRON PROXIMITY EFFECTS

COPPER SUBSTRATE FOR DEPOSITION OF GRAPHENE

SUSTAINED SELF-SPUTTERING OF LITHIUM FOR LITHIUM PHYSICAL VAPOR DEP...

DRAWING APPARATUS, DRAWING METHOD, AND METHOD FOR FABRICATING ARTICLE

Dynamic Focus Adjustment with Optical Height Detection Apparatus in...

PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING THE SAME

COPPER SUBSTRATE FOR DEPOSITION OF GRAPHENE

PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING THE SAME

ION SOURCES, SYSTEMS AND METHODS

CHARGED PARTICLE APPARATUS, SCANNING ELECTRON MICROSCOPE, AND SAMPL...

Dynamic Focus Adjustment with Optical Height Detection Apparatus in...

SCANNING ELECTRON MICROSCOPE

MICROSTRUCTURED PATTERN INSPECTION METHOD

Electron Beam Exposure Or System Inspection Or Measurement Apparatu...

DEFECT INSPECTION AND CHARGED PARTICLE BEAM APPARATUS

Charged particle beam equipment

SCANNING ELECTRON MICROSCOPE

CHARGED PARTICLE BEAM APPARATUS

Method and apparatus for reviewing defects by detecting images havi...

SCANNING ELECTRON MICROSCOPE

Scanning Electron Microscope And Method For Detecting An Image Usin...

Electron Beam Inspection System and an Image Generation Method for...