using eddy currents

Industry

CPC
B24B49/105

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B24Grinding technology B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work Arrangements of indicating or measuring equipment

Current Industry

B24B49/105using eddy currents

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Output signal processing apparatus for eddy current sensor
- Patent number 12,179,310
- Issue date Dec 31, 2024
- Ebara Corporation
- Atsushi Abe
- G01 - MEASURING TESTING
Information Patent Grant
Technique for training neural network for use in in-situ monitoring...
- Patent number 12,136,574
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Core configuration for in-situ electromagnetic induction monitoring...
- Patent number 12,103,135
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Hassan G. Iravani
- B24 - GRINDING POLISHING
Information Patent Grant
Eddy current sensor
- Patent number 12,076,834
- Issue date Sep 3, 2024
- Ebara Corporation
- Atsushi Abe
- B24 - GRINDING POLISHING
Information Patent Grant
Trained neural network in in-situ monitoring during polishing and p...
- Patent number 12,057,354
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Profile control with multiple instances of contol algorithm during...
- Patent number 11,865,664
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Switching control algorithms on detection of exposure of underlying...
- Patent number 11,850,699
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus, method of creating thickness map, an...
- Patent number 11,833,636
- Issue date Dec 5, 2023
- Ebara Corporation
- Katsuhide Watanabe
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and calibration method
- Patent number 11,806,828
- Issue date Nov 7, 2023
- Ebara Corporation
- Akira Nakamura
- B24 - GRINDING POLISHING
Information Patent Grant
Technique for training neural network for use in in-situ monitoring...
- Patent number 11,791,224
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Kun Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Compensation for substrate doping for in-situ electromagnetic induc...
- Patent number 11,780,045
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Wei Lu
- B24 - GRINDING POLISHING
Information Patent Grant
Magnetic element and eddy current sensor using the same
- Patent number 11,759,912
- Issue date Sep 19, 2023
- Ebara Corporation
- Taro Takahashi
- B24 - GRINDING POLISHING
Information Patent Grant
Eddy current detection device and polishing apparatus
- Patent number 11,731,233
- Issue date Aug 22, 2023
- Ebara Corporation
- Taro Takahashi
- B24 - GRINDING POLISHING
Information Patent Grant
Using a trained neural network for use in in-situ monitoring during...
- Patent number 11,658,078
- Issue date May 23, 2023
- Applied Materials, Inc.
- Kun Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Core configuration for in-situ electromagnetic induction monitoring...
- Patent number 11,638,982
- Issue date May 2, 2023
- Applied Materials, Inc.
- Hassan G. Iravani
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,612,981
- Issue date Mar 28, 2023
- KCTECH CO., LTD.
- Huiseong Che
- B24 - GRINDING POLISHING
Information Patent Grant
Pad conditioner cut rate monitoring
- Patent number 11,577,362
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Sivakumar Dhandapani
- G01 - MEASURING TESTING
Information Patent Grant
Polishing apparatus using machine learning and compensation for pad...
- Patent number 11,524,382
- Issue date Dec 13, 2022
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 11,478,893
- Issue date Oct 25, 2022
- Ebara Corporation
- Keita Yagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of identifying trajectory of eddy current sensor, method of...
- Patent number 11,376,704
- Issue date Jul 5, 2022
- Ebara Corporation
- Akira Nakamura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 11,260,496
- Issue date Mar 1, 2022
- Ebara Corporation
- Keita Yagi
- B24 - GRINDING POLISHING
Information Patent Grant
Film thickness measuring device and polishing device
- Patent number 11,065,734
- Issue date Jul 20, 2021
- Ebara Corporation
- Hiroyuki Shinozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Core configuration with alternating posts for in-situ electromagnet...
- Patent number 11,004,708
- Issue date May 11, 2021
- Applied Materials, Inc.
- Hassan G. Iravani
- G01 - MEASURING TESTING
Information Patent Grant
Chattering correction for accurate sensor position determination on...
- Patent number 10,898,986
- Issue date Jan 26, 2021
- Applied Materials, Inc.
- Harry Q. Lee
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus and method
- Patent number 10,828,747
- Issue date Nov 10, 2020
- Ebara Corporation
- Yasumasa Hiroo
- B24 - GRINDING POLISHING
Information Patent Grant
Calibration method for eddy current sensor
- Patent number 10,759,020
- Issue date Sep 1, 2020
- Ebara Corporation
- Akira Nakamura
- G01 - MEASURING TESTING
Information Patent Grant
Polishing with measurement prior to deposition of outer layer
- Patent number 10,651,098
- Issue date May 12, 2020
- Applied Materials, Inc.
- Tomohiko Kitajima
- B24 - GRINDING POLISHING
Information Patent Grant
Film thickness signal processing apparatus, and polishing apparatus
- Patent number 10,569,380
- Issue date Feb 25, 2020
- Ebara Corporation
- Akira Nakamura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 10,569,381
- Issue date Feb 25, 2020
- Ebara Corporation
- Hiroshi Yoshida
- B24 - GRINDING POLISHING
Information Patent Grant
Determination of gain for eddy current sensor
- Patent number 10,556,315
- Issue date Feb 11, 2020
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
FILM THICKNESS SIGNAL PROCESSING APPARATUS, POLISHING APPARATUS, AN...
- Publication number 20250073847
- Publication date Mar 6, 2025
- EBARA CORPORATION
- Keita YAGI
- B24 - GRINDING POLISHING
Information Patent Application
EDDY CURRENT SENSOR, EDDY CURRENT SENSOR ASSEMBLY, AND POLISHING AP...
- Publication number 20240399536
- Publication date Dec 5, 2024
- EBARA CORPORATION
- Katsuya MINATOZAKI
- B24 - GRINDING POLISHING
Information Patent Application
PROCESS CONTROL METHOD FOR PATTERN WAFER INDEX POLISHING
- Publication number 20240371646
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Jimin ZHANG
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF DETECTING POLISHING ENDPOINT, AND PROGRAM FOR DETECTING P...
- Publication number 20240326196
- Publication date Oct 3, 2024
- EBARA CORPORATION
- Yuko SHIMIZU
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20240300068
- Publication date Sep 12, 2024
- EBARA CORPORATION
- Hiroto YAMADA
- B24 - GRINDING POLISHING
Information Patent Application
SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING...
- Publication number 20240116152
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
TECHNIQUE FOR TRAINING NEURAL NETWORK FOR USE IN IN-SITU MONITORING...
- Publication number 20240014080
- Publication date Jan 11, 2024
- Applied Materials, Inc.
- Kun Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EDDY CURRENT MONITORING TO DETECT VIBRATION IN POLISHING
- Publication number 20230286107
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
TRAINED NEURAL NETWORK IN IN-SITU MONITORING DURING POLISHING AND P...
- Publication number 20230290691
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Kun Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PAD CONDITIONER CUT RATE MONITORING
- Publication number 20230182264
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Sivakumar Dhandapani
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS USING MACHINE LEARNING AND COMPENSATION FOR PAD...
- Publication number 20230085787
- Publication date Mar 23, 2023
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20220371153
- Publication date Nov 24, 2022
- EBARA CORPORATION
- Toshimitsu Sasaki
- B24 - GRINDING POLISHING
Information Patent Application
OUTPUT SIGNAL PROCESSING APPARATUS FOR EDDY CURRENT SENSOR
- Publication number 20220063056
- Publication date Mar 3, 2022
- EBARA CORPORATION
- Atsushi ABE
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND A SYSTEM FOR EVALUATING THE PHYSICAL CONSUMPTION OF A PO...
- Publication number 20210402559
- Publication date Dec 30, 2021
- STMicroelectronics S.r.l
- Renato CORETTI
- B24 - GRINDING POLISHING
Information Patent Application
SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING...
- Publication number 20210379724
- Publication date Dec 9, 2021
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
TECHNIQUE FOR TRAINING NEURAL NETWORK FOR USE IN IN-SITU MONITORING...
- Publication number 20210354265
- Publication date Nov 18, 2021
- Applied Materials, Inc.
- Kun Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE POLISHING APPARATUS, METHOD OF CREATING THICKNESS MAP, AN...
- Publication number 20210101250
- Publication date Apr 8, 2021
- EBARA CORPORATION
- Katsuhide Watanabe
- B24 - GRINDING POLISHING
Information Patent Application
EDDY CURRENT SENSOR
- Publication number 20210001447
- Publication date Jan 7, 2021
- EBARA CORPORATION
- Atsushi Abe
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200164486
- Publication date May 28, 2020
- KCTECH CO., LTD.
- Huiseong CHE
- B24 - GRINDING POLISHING
Information Patent Application
EDDY CURRENT DETECTION DEVICE AND POLISHING APPARATUS
- Publication number 20200147747
- Publication date May 14, 2020
- EBARA CORPORATION
- Taro Takahashi
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND CALIBRATION METHOD
- Publication number 20200016722
- Publication date Jan 16, 2020
- EBARA CORPORATION
- Akira NAKAMURA
- B24 - GRINDING POLISHING
Information Patent Application
COMPENSATION FOR SUBSTRATE DOPING FOR IN-SITU ELECTROMAGNETIC INDUC...
- Publication number 20190389028
- Publication date Dec 26, 2019
- Wei Lu
- B24 - GRINDING POLISHING
Information Patent Application
CORE CONFIGURATION FOR IN-SITU ELECTROMAGNETIC INDUCTION MONITORING...
- Publication number 20190358770
- Publication date Nov 28, 2019
- Applied Materials, Inc.
- Hassan G. Iravani
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS USING MACHINE LEARNING AND COMPENSATION FOR PAD...
- Publication number 20190299356
- Publication date Oct 3, 2019
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
Pad Conditioner Cut Rate Monitoring
- Publication number 20190283208
- Publication date Sep 19, 2019
- Applied Materials, Inc.
- Sivakumar Dhandapani
- B24 - GRINDING POLISHING
Information Patent Application
MAGNETIC ELEMENT AND EDDY CURRENT SENSOR USING THE SAME
- Publication number 20190193242
- Publication date Jun 27, 2019
- EBARA CORPORATION
- Taro TAKAHASHI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20190134774
- Publication date May 9, 2019
- EBARA CORPORATION
- Keita YAGI
- B24 - GRINDING POLISHING
Information Patent Application
DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR
- Publication number 20190134775
- Publication date May 9, 2019
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20190118333
- Publication date Apr 25, 2019
- EBARA CORPORATION
- Keita YAGI
- B24 - GRINDING POLISHING
Information Patent Application
Chattering Correction for Accurate Sensor Position Determination on...
- Publication number 20190084119
- Publication date Mar 21, 2019
- Harry Q. Lee
- B24 - GRINDING POLISHING

using eddy currents

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Output signal processing apparatus for eddy current sensor

Technique for training neural network for use in in-situ monitoring...

Core configuration for in-situ electromagnetic induction monitoring...

Eddy current sensor

Trained neural network in in-situ monitoring during polishing and p...

Profile control with multiple instances of contol algorithm during...

Switching control algorithms on detection of exposure of underlying...

Substrate polishing apparatus, method of creating thickness map, an...

Polishing apparatus and calibration method

Technique for training neural network for use in in-situ monitoring...

Compensation for substrate doping for in-situ electromagnetic induc...

Magnetic element and eddy current sensor using the same

Eddy current detection device and polishing apparatus

Using a trained neural network for use in in-situ monitoring during...

Core configuration for in-situ electromagnetic induction monitoring...

Substrate processing apparatus

Pad conditioner cut rate monitoring

Polishing apparatus using machine learning and compensation for pad...

Polishing method and polishing apparatus

Method of identifying trajectory of eddy current sensor, method of...

Polishing method and polishing apparatus

Film thickness measuring device and polishing device

Core configuration with alternating posts for in-situ electromagnet...

Chattering correction for accurate sensor position determination on...

Substrate polishing apparatus and method

Calibration method for eddy current sensor

Polishing with measurement prior to deposition of outer layer

Film thickness signal processing apparatus, and polishing apparatus

Polishing method and polishing apparatus

Determination of gain for eddy current sensor

Patents Applicationslast 30 patents

FILM THICKNESS SIGNAL PROCESSING APPARATUS, POLISHING APPARATUS, AN...

EDDY CURRENT SENSOR, EDDY CURRENT SENSOR ASSEMBLY, AND POLISHING AP...

PROCESS CONTROL METHOD FOR PATTERN WAFER INDEX POLISHING

METHOD OF DETECTING POLISHING ENDPOINT, AND PROGRAM FOR DETECTING P...

POLISHING APPARATUS AND POLISHING METHOD

SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING...

TECHNIQUE FOR TRAINING NEURAL NETWORK FOR USE IN IN-SITU MONITORING...

EDDY CURRENT MONITORING TO DETECT VIBRATION IN POLISHING

TRAINED NEURAL NETWORK IN IN-SITU MONITORING DURING POLISHING AND P...

PAD CONDITIONER CUT RATE MONITORING

POLISHING APPARATUS USING MACHINE LEARNING AND COMPENSATION FOR PAD...

POLISHING APPARATUS AND POLISHING METHOD

OUTPUT SIGNAL PROCESSING APPARATUS FOR EDDY CURRENT SENSOR

METHOD AND A SYSTEM FOR EVALUATING THE PHYSICAL CONSUMPTION OF A PO...

SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING...

TECHNIQUE FOR TRAINING NEURAL NETWORK FOR USE IN IN-SITU MONITORING...

SUBSTRATE POLISHING APPARATUS, METHOD OF CREATING THICKNESS MAP, AN...

EDDY CURRENT SENSOR

SUBSTRATE PROCESSING APPARATUS

EDDY CURRENT DETECTION DEVICE AND POLISHING APPARATUS

POLISHING APPARATUS AND CALIBRATION METHOD

COMPENSATION FOR SUBSTRATE DOPING FOR IN-SITU ELECTROMAGNETIC INDUC...

CORE CONFIGURATION FOR IN-SITU ELECTROMAGNETIC INDUCTION MONITORING...

POLISHING APPARATUS USING MACHINE LEARNING AND COMPENSATION FOR PAD...

Pad Conditioner Cut Rate Monitoring

MAGNETIC ELEMENT AND EDDY CURRENT SENSOR USING THE SAME

POLISHING METHOD AND POLISHING APPARATUS

DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR

POLISHING METHOD AND POLISHING APPARATUS

Chattering Correction for Accurate Sensor Position Determination on...