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CPC
B24B49/105
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Parent Industries
B
PERFORMING OPERATIONS TRANSPORTING
B24
Grinding technology
B24B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
B24B49/00
Measuring or gauging equipment for controlling the feed movement of the grinding tool or work Arrangements of indicating or measuring equipment
Current Industry
B24B49/105
using eddy currents
Industries
Overview
Organizations
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Impact
Patents Grants
last 30 patents
Information
Patent Grant
Profile control with multiple instances of contol algorithm during...
Patent number
11,865,664
Issue date
Jan 9, 2024
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Switching control algorithms on detection of exposure of underlying...
Patent number
11,850,699
Issue date
Dec 26, 2023
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate polishing apparatus, method of creating thickness map, an...
Patent number
11,833,636
Issue date
Dec 5, 2023
Ebara Corporation
Katsuhide Watanabe
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus and calibration method
Patent number
11,806,828
Issue date
Nov 7, 2023
Ebara Corporation
Akira Nakamura
B24 - GRINDING POLISHING
Information
Patent Grant
Technique for training neural network for use in in-situ monitoring...
Patent number
11,791,224
Issue date
Oct 17, 2023
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Compensation for substrate doping for in-situ electromagnetic induc...
Patent number
11,780,045
Issue date
Oct 10, 2023
Applied Materials, Inc.
Wei Lu
B24 - GRINDING POLISHING
Information
Patent Grant
Magnetic element and eddy current sensor using the same
Patent number
11,759,912
Issue date
Sep 19, 2023
Ebara Corporation
Taro Takahashi
B24 - GRINDING POLISHING
Information
Patent Grant
Eddy current detection device and polishing apparatus
Patent number
11,731,233
Issue date
Aug 22, 2023
Ebara Corporation
Taro Takahashi
B24 - GRINDING POLISHING
Information
Patent Grant
Using a trained neural network for use in in-situ monitoring during...
Patent number
11,658,078
Issue date
May 23, 2023
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Core configuration for in-situ electromagnetic induction monitoring...
Patent number
11,638,982
Issue date
May 2, 2023
Applied Materials, Inc.
Hassan G. Iravani
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing apparatus
Patent number
11,612,981
Issue date
Mar 28, 2023
KCTECH CO., LTD.
Huiseong Che
B24 - GRINDING POLISHING
Information
Patent Grant
Pad conditioner cut rate monitoring
Patent number
11,577,362
Issue date
Feb 14, 2023
Applied Materials, Inc.
Sivakumar Dhandapani
G01 - MEASURING TESTING
Information
Patent Grant
Polishing apparatus using machine learning and compensation for pad...
Patent number
11,524,382
Issue date
Dec 13, 2022
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing method and polishing apparatus
Patent number
11,478,893
Issue date
Oct 25, 2022
Ebara Corporation
Keita Yagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of identifying trajectory of eddy current sensor, method of...
Patent number
11,376,704
Issue date
Jul 5, 2022
Ebara Corporation
Akira Nakamura
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing method and polishing apparatus
Patent number
11,260,496
Issue date
Mar 1, 2022
Ebara Corporation
Keita Yagi
B24 - GRINDING POLISHING
Information
Patent Grant
Film thickness measuring device and polishing device
Patent number
11,065,734
Issue date
Jul 20, 2021
Ebara Corporation
Hiroyuki Shinozaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Core configuration with alternating posts for in-situ electromagnet...
Patent number
11,004,708
Issue date
May 11, 2021
Applied Materials, Inc.
Hassan G. Iravani
G01 - MEASURING TESTING
Information
Patent Grant
Chattering correction for accurate sensor position determination on...
Patent number
10,898,986
Issue date
Jan 26, 2021
Applied Materials, Inc.
Harry Q. Lee
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate polishing apparatus and method
Patent number
10,828,747
Issue date
Nov 10, 2020
Ebara Corporation
Yasumasa Hiroo
B24 - GRINDING POLISHING
Information
Patent Grant
Calibration method for eddy current sensor
Patent number
10,759,020
Issue date
Sep 1, 2020
Ebara Corporation
Akira Nakamura
G01 - MEASURING TESTING
Information
Patent Grant
Polishing with measurement prior to deposition of outer layer
Patent number
10,651,098
Issue date
May 12, 2020
Applied Materials, Inc.
Tomohiko Kitajima
B24 - GRINDING POLISHING
Information
Patent Grant
Film thickness signal processing apparatus, and polishing apparatus
Patent number
10,569,380
Issue date
Feb 25, 2020
Ebara Corporation
Akira Nakamura
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing method and polishing apparatus
Patent number
10,569,381
Issue date
Feb 25, 2020
Ebara Corporation
Hiroshi Yoshida
B24 - GRINDING POLISHING
Information
Patent Grant
Determination of gain for eddy current sensor
Patent number
10,556,315
Issue date
Feb 11, 2020
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Core configuration for in-situ electromagnetic induction monitoring...
Patent number
10,391,610
Issue date
Aug 27, 2019
Applied Materials, Inc.
Hassan G. Iravani
G01 - MEASURING TESTING
Information
Patent Grant
System and method for polishing substrate
Patent number
10,272,540
Issue date
Apr 30, 2019
Taiwan Semiconductor Manufacturing Co., Ltd
Jiun-Yu Lai
B24 - GRINDING POLISHING
Information
Patent Grant
Method for detecting and/or preventing grind burn
Patent number
10,213,898
Issue date
Feb 26, 2019
Allison Transmission, Inc.
Elizabeth Frazee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Determination of gain for eddy current sensor
Patent number
10,207,386
Issue date
Feb 19, 2019
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
10,160,089
Issue date
Dec 25, 2018
Ebara Corporation
Akira Nakamura
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING...
Publication number
20240116152
Publication date
Apr 11, 2024
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Application
TECHNIQUE FOR TRAINING NEURAL NETWORK FOR USE IN IN-SITU MONITORING...
Publication number
20240014080
Publication date
Jan 11, 2024
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
EDDY CURRENT MONITORING TO DETECT VIBRATION IN POLISHING
Publication number
20230286107
Publication date
Sep 14, 2023
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Application
TRAINED NEURAL NETWORK IN IN-SITU MONITORING DURING POLISHING AND P...
Publication number
20230290691
Publication date
Sep 14, 2023
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PAD CONDITIONER CUT RATE MONITORING
Publication number
20230182264
Publication date
Jun 15, 2023
Applied Materials, Inc.
Sivakumar Dhandapani
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS USING MACHINE LEARNING AND COMPENSATION FOR PAD...
Publication number
20230085787
Publication date
Mar 23, 2023
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS AND POLISHING METHOD
Publication number
20220371153
Publication date
Nov 24, 2022
EBARA CORPORATION
Toshimitsu Sasaki
B24 - GRINDING POLISHING
Information
Patent Application
OUTPUT SIGNAL PROCESSING APPARATUS FOR EDDY CURRENT SENSOR
Publication number
20220063056
Publication date
Mar 3, 2022
EBARA CORPORATION
Atsushi ABE
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND A SYSTEM FOR EVALUATING THE PHYSICAL CONSUMPTION OF A PO...
Publication number
20210402559
Publication date
Dec 30, 2021
STMicroelectronics S.r.l
Renato CORETTI
B24 - GRINDING POLISHING
Information
Patent Application
SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING...
Publication number
20210379724
Publication date
Dec 9, 2021
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Application
TECHNIQUE FOR TRAINING NEURAL NETWORK FOR USE IN IN-SITU MONITORING...
Publication number
20210354265
Publication date
Nov 18, 2021
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE POLISHING APPARATUS, METHOD OF CREATING THICKNESS MAP, AN...
Publication number
20210101250
Publication date
Apr 8, 2021
EBARA CORPORATION
Katsuhide Watanabe
B24 - GRINDING POLISHING
Information
Patent Application
EDDY CURRENT SENSOR
Publication number
20210001447
Publication date
Jan 7, 2021
EBARA CORPORATION
Atsushi Abe
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20200164486
Publication date
May 28, 2020
KCTECH CO., LTD.
Huiseong CHE
B24 - GRINDING POLISHING
Information
Patent Application
EDDY CURRENT DETECTION DEVICE AND POLISHING APPARATUS
Publication number
20200147747
Publication date
May 14, 2020
EBARA CORPORATION
Taro Takahashi
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS AND CALIBRATION METHOD
Publication number
20200016722
Publication date
Jan 16, 2020
EBARA CORPORATION
Akira NAKAMURA
B24 - GRINDING POLISHING
Information
Patent Application
COMPENSATION FOR SUBSTRATE DOPING FOR IN-SITU ELECTROMAGNETIC INDUC...
Publication number
20190389028
Publication date
Dec 26, 2019
Wei Lu
B24 - GRINDING POLISHING
Information
Patent Application
CORE CONFIGURATION FOR IN-SITU ELECTROMAGNETIC INDUCTION MONITORING...
Publication number
20190358770
Publication date
Nov 28, 2019
Applied Materials, Inc.
Hassan G. Iravani
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS USING MACHINE LEARNING AND COMPENSATION FOR PAD...
Publication number
20190299356
Publication date
Oct 3, 2019
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Application
Pad Conditioner Cut Rate Monitoring
Publication number
20190283208
Publication date
Sep 19, 2019
Applied Materials, Inc.
Sivakumar Dhandapani
B24 - GRINDING POLISHING
Information
Patent Application
MAGNETIC ELEMENT AND EDDY CURRENT SENSOR USING THE SAME
Publication number
20190193242
Publication date
Jun 27, 2019
EBARA CORPORATION
Taro TAKAHASHI
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING METHOD AND POLISHING APPARATUS
Publication number
20190134774
Publication date
May 9, 2019
EBARA CORPORATION
Keita YAGI
B24 - GRINDING POLISHING
Information
Patent Application
DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR
Publication number
20190134775
Publication date
May 9, 2019
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING METHOD AND POLISHING APPARATUS
Publication number
20190118333
Publication date
Apr 25, 2019
EBARA CORPORATION
Keita YAGI
B24 - GRINDING POLISHING
Information
Patent Application
Chattering Correction for Accurate Sensor Position Determination on...
Publication number
20190084119
Publication date
Mar 21, 2019
Harry Q. Lee
B24 - GRINDING POLISHING
Information
Patent Application
CALIBRATION METHOD FOR EDDY CURRENT SENSOR
Publication number
20180311788
Publication date
Nov 1, 2018
EBARA CORPORATION
Akira NAKAMURA
B24 - GRINDING POLISHING
Information
Patent Application
EDDY CURRENT PROBE AND A METHOD OF USING THE SAME
Publication number
20180164250
Publication date
Jun 14, 2018
Rolls-Royce plc
Chow Cher WONG
B24 - GRINDING POLISHING
Information
Patent Application
CORE CONFIGURATION WITH ALTERNATING POSTS FOR IN-SITU ELECTROMAGNET...
Publication number
20180122667
Publication date
May 3, 2018
Applied Materials, Inc.
Hassan G. Iravani
G01 - MEASURING TESTING
Information
Patent Application
CORE CONFIGURATION FOR IN-SITU ELECTROMAGNETIC INDUCTION MONITORING...
Publication number
20180111251
Publication date
Apr 26, 2018
Applied Materials, Inc.
Hassan G. Iravani
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM AND METHOD FOR POLISHING SUBSTRATE
Publication number
20170246723
Publication date
Aug 31, 2017
Taiwan Semiconductor Manufacturing Co., Ltd.
Jiun-Yu LAI
B24 - GRINDING POLISHING