using electromagnetic radiation

Industry

CPC
H01J37/32339

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/32339using electromagnetic radiation

Industries

Patents Grantslast 30 patents

Information Patent Grant
Vacuum deposition into trenches and vias and etch of trenches and via
- Patent number 12,170,185
- Issue date Dec 17, 2024
- Ascentool, Inc.
- George Xinsheng Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion extraction assembly having variable electrode thickness for bea...
- Patent number 12,125,680
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for pulsed laser deposition and a substrate with a substrate...
- Patent number 11,655,535
- Issue date May 23, 2023
- Lam Research Corporation
- Jan Arnaud Janssens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotating lamp for laser-sustained plasma illumination source
- Patent number 11,596,048
- Issue date Feb 28, 2023
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 11,557,463
- Issue date Jan 17, 2023
- HITACHI HIGH-TECH CORPORATION
- Hiroyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and semiconductor manu...
- Patent number 11,217,431
- Issue date Jan 4, 2022
- Kioxia Corporation
- Ryuichi Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for pulsed laser deposition
- Patent number 11,177,117
- Issue date Nov 16, 2021
- Solmates B.V.
- Jan Arnaud Janssens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 11,133,157
- Issue date Sep 28, 2021
- Tokyo Electron Limited
- Akihiro Yokota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Light source apparatus
- Patent number 11,128,097
- Issue date Sep 21, 2021
- Samsung Electronics Co., Ltd.
- Akihiro Komatsu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for temperature control in plasma processing system
- Patent number 10,998,244
- Issue date May 4, 2021
- Tokyo Electron Limited
- Anton J. deVilliers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing apparatus
- Patent number 10,937,635
- Issue date Mar 2, 2021
- HITACHI HIGH-TECH CORPORATION
- Hiroyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming a metal silicide interconnection nanowire struc...
- Patent number 10,930,472
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Bencherki Mebarki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser induced plasma micromachining (LIPMM)
- Patent number 10,692,700
- Issue date Jun 23, 2020
- Northwestern University
- Kumar Pallav
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for and method of active cleaning of EUV optic with RF pl...
- Patent number 10,493,504
- Issue date Dec 3, 2019
- ASML Netherlands B.V.
- Alexander I. Ershov
- B08 - CLEANING
Information Patent Grant
Substrate treating apparatus, substrate treating method, and plasma...
- Patent number 10,395,898
- Issue date Aug 27, 2019
- PSK Inc.
- Aram Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and semiconductor manu...
- Patent number 10,395,899
- Issue date Aug 27, 2019
- TOSHIBA MEMORY CORPORATION
- Ryuichi Saito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plasma processing apparatus
- Patent number 10,297,428
- Issue date May 21, 2019
- Tokyo Electron Limited
- Akihiro Yokota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing apparatus
- Patent number 10,290,472
- Issue date May 14, 2019
- Hitachi High-Technologies Corporation
- Hiroyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming a metal silicide interconnection nanowire struc...
- Patent number 10,204,764
- Issue date Feb 12, 2019
- Applied Materials, Inc.
- Bencherki Mebarki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for temperature control in plasma processing system
- Patent number 10,147,655
- Issue date Dec 4, 2018
- Tokyo Electron Limited
- Anton J. deVilliers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Extreme ultraviolet light generating apparatus
- Patent number 10,126,657
- Issue date Nov 13, 2018
- Gigaphoton Inc.
- Hirokazu Hosoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device, ion beam etching dev...
- Patent number 10,026,591
- Issue date Jul 17, 2018
- Canon Anelva Corporation
- Yoshimitsu Kodaira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generation apparatus for generating toroidal plasma
- Patent number 10,014,162
- Issue date Jul 3, 2018
- Daihen Corporation
- Michio Taniguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Toroidal plasma abatement apparatus and method
- Patent number 9,991,098
- Issue date Jun 5, 2018
- MKS Instruments, Inc.
- Xing Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing device, plasma processing method and manufacturin...
- Patent number 9,978,593
- Issue date May 22, 2018
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Tomohiro Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for reducing copper overhang in a feature of a substrate
- Patent number 9,978,639
- Issue date May 22, 2018
- Applied Materials, Inc.
- Siew Kit Hoi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for activating an inner surface of a substrate tube for the...
- Patent number 9,831,068
- Issue date Nov 28, 2017
- Draka Comteq, B.V.
- Igor Milicevic
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Method of producing an anti-wear layer and anti-wear layer produced...
- Patent number 9,803,273
- Issue date Oct 31, 2017
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Andreas Leson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface treatment apparatus and surface treatment method
- Patent number 9,780,390
- Issue date Oct 3, 2017
- Toyota Jidosha Kabushiki Kaisha
- Takashi Ikejiri
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method for manufacturing semiconductor device, ion beam etching dev...
- Patent number 9,734,989
- Issue date Aug 15, 2017
- Canon Anelva Corporation
- Yoshimitsu Kodaira
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
System and Method for Semiconductor Structure
- Publication number 20240379354
- Publication date Nov 14, 2024
- TOKYO ELECTRON LIMITED
- David Eitan Barlaz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADDITION OF EXTERNAL ULTRAVIOLET LIGHT FOR IMPROVED PLASMA STRIKE C...
- Publication number 20240162011
- Publication date May 16, 2024
- Applied Materials, Inc.
- Eric Kihara SHONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA TREATMENT METHOD AND PLASMA TREATMENT DEVICE
- Publication number 20240055231
- Publication date Feb 15, 2024
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM DEPOSITION INTO TRENCHES AND VIAS AND ETCH OF TRENCHES AND VIA
- Publication number 20240021411
- Publication date Jan 18, 2024
- Ascentool, Inc.
- George Xinsheng Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTOELECTRON ASSISTED PLASMA IGNITION
- Publication number 20230207274
- Publication date Jun 29, 2023
- LAM RESEARCH CORPORATION
- Lee CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION EXTRACTION ASSEMBLY HAVING VARIABLE ELECTRODE THICKNESS FOR BEA...
- Publication number 20230125435
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF IGNITING PLASMA AND PLASMA GENERATING SYSTEM
- Publication number 20220115211
- Publication date Apr 14, 2022
- SPP TECHNOLOGIES CO., LTD.
- Bryan LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220020569
- Publication date Jan 20, 2022
- TOKYO ELECTRON LIMITED
- Masaki HIRAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20210151298
- Publication date May 20, 2021
- HITACHI HIGH-TECH CORPORATION
- Hiroyuki KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTATING LAMP FOR LASER-SUSTAINED PLASMA ILLUMINATION SOURCE
- Publication number 20210092826
- Publication date Mar 25, 2021
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT SOURCE APPARATUS
- Publication number 20210036477
- Publication date Feb 4, 2021
- Samsung Electronics Co., Ltd.
- Akihiro Komatsu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LOW-TEMPERATURE IONIZATION OF METASTABLE ATOMS EMITTED BY AN INDUCT...
- Publication number 20200350142
- Publication date Nov 5, 2020
- ZEROK NANO TECH CORPORATION
- Brenton J. KNUFFMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...
- Publication number 20190341229
- Publication date Nov 7, 2019
- Toshiba Memory Corporation
- Ryuichi Saito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for Pulsed Laser Deposition
- Publication number 20190279847
- Publication date Sep 12, 2019
- SOLMATES B.V.
- Jan Arnaud Janssens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190244794
- Publication date Aug 8, 2019
- TOKYO ELECTRON LIMITED
- Akihiro YOKOTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA SIMULATION WITH NON-LINEAR OPTICS
- Publication number 20190246484
- Publication date Aug 8, 2019
- RAYTHEON BBN TECHNOLOGIES CORP.
- Hari Kiran Krovi
- G01 - MEASURING TESTING
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20190237302
- Publication date Aug 1, 2019
- Hitachi High-Technologies Corporation
- Hiroyuki KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING A METAL SILICIDE INTERCONNECTION NANOWIRE STRUC...
- Publication number 20190172686
- Publication date Jun 6, 2019
- Applied Materials, Inc.
- Bencherki MEBARKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...
- Publication number 20190080887
- Publication date Mar 14, 2019
- Toshiba Memory Corporation
- Ryuichi Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR TEMPERATURE CONTROL IN PLASMA PROCESSING SYSTEM
- Publication number 20190051568
- Publication date Feb 14, 2019
- Anton J. DEVILLIERS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING APPARATUS, SUBSTRATE TREATING METHOD, AND PLASMA...
- Publication number 20190051498
- Publication date Feb 14, 2019
- PSK INC.
- Aram KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS
- Publication number 20180253010
- Publication date Sep 6, 2018
- Gigaphoton Inc.
- Hirokazu HOSODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD
- Publication number 20180233333
- Publication date Aug 16, 2018
- MKS Instruments, Inc.
- Xing Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, ION BEAM ETCHING DEV...
- Publication number 20170316918
- Publication date Nov 2, 2017
- Canon ANELVA Corporation
- Yoshimitsu KODAIRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD AND MANUFACTURIN...
- Publication number 20170287712
- Publication date Oct 5, 2017
- Panasonic Intellectual Property Management Co., Ltd.
- TOMOHIRO OKUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Temperature Control in Plasma Processing System
- Publication number 20170278761
- Publication date Sep 28, 2017
- TOKYO ELECTRON LIMITED
- Anton J. deVilliers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Coaxial Hollow Cathode Plasma Assisted Directed Vapor Deposition an...
- Publication number 20170236692
- Publication date Aug 17, 2017
- University of Virginia Patent Foundation
- Haydn N. G. Wadley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20170229290
- Publication date Aug 10, 2017
- Hitachi High-Technologies Corporation
- Hiroyuki KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR FABRICATING TWO-DIMENSIONAL LAYERED CHALCOGENIDE FILM
- Publication number 20170218536
- Publication date Aug 3, 2017
- G-FORCE NANOTECH LTD.
- CHAO-HUI YEH
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS FOR AND METHOD OF ACTIVE CLEANING OF EUV OPTIC WITH RF PL...
- Publication number 20170095843
- Publication date Apr 6, 2017
- Alexander I. ERSHOV
- B08 - CLEANING

using electromagnetic radiation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Vacuum deposition into trenches and vias and etch of trenches and via

Ion extraction assembly having variable electrode thickness for bea...

Device for pulsed laser deposition and a substrate with a substrate...

Rotating lamp for laser-sustained plasma illumination source

Vacuum processing apparatus

Method of manufacturing semiconductor device and semiconductor manu...

Method for pulsed laser deposition

Plasma processing apparatus

Light source apparatus

System and method for temperature control in plasma processing system

Vacuum processing apparatus

Methods for forming a metal silicide interconnection nanowire struc...

Laser induced plasma micromachining (LIPMM)

Apparatus for and method of active cleaning of EUV optic with RF pl...

Substrate treating apparatus, substrate treating method, and plasma...

Method of manufacturing semiconductor device and semiconductor manu...

Plasma processing apparatus

Vacuum processing apparatus

Methods for forming a metal silicide interconnection nanowire struc...

System and method for temperature control in plasma processing system

Extreme ultraviolet light generating apparatus

Method for manufacturing semiconductor device, ion beam etching dev...

Plasma generation apparatus for generating toroidal plasma

Toroidal plasma abatement apparatus and method

Plasma processing device, plasma processing method and manufacturin...

Methods for reducing copper overhang in a feature of a substrate

Method for activating an inner surface of a substrate tube for the...

Method of producing an anti-wear layer and anti-wear layer produced...

Surface treatment apparatus and surface treatment method

Method for manufacturing semiconductor device, ion beam etching dev...

Patents Applicationslast 30 patents

System and Method for Semiconductor Structure

ADDITION OF EXTERNAL ULTRAVIOLET LIGHT FOR IMPROVED PLASMA STRIKE C...

PLASMA TREATMENT METHOD AND PLASMA TREATMENT DEVICE

VACUUM DEPOSITION INTO TRENCHES AND VIAS AND ETCH OF TRENCHES AND VIA

PHOTOELECTRON ASSISTED PLASMA IGNITION

ION EXTRACTION ASSEMBLY HAVING VARIABLE ELECTRODE THICKNESS FOR BEA...

METHOD OF IGNITING PLASMA AND PLASMA GENERATING SYSTEM

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

VACUUM PROCESSING APPARATUS

ROTATING LAMP FOR LASER-SUSTAINED PLASMA ILLUMINATION SOURCE

LIGHT SOURCE APPARATUS

LOW-TEMPERATURE IONIZATION OF METASTABLE ATOMS EMITTED BY AN INDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...

Method for Pulsed Laser Deposition

PLASMA PROCESSING APPARATUS

PLASMA SIMULATION WITH NON-LINEAR OPTICS

VACUUM PROCESSING APPARATUS

METHODS FOR FORMING A METAL SILICIDE INTERCONNECTION NANOWIRE STRUC...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...

SYSTEM AND METHOD FOR TEMPERATURE CONTROL IN PLASMA PROCESSING SYSTEM

SUBSTRATE TREATING APPARATUS, SUBSTRATE TREATING METHOD, AND PLASMA...

EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS

TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, ION BEAM ETCHING DEV...

PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD AND MANUFACTURIN...

System and Method for Temperature Control in Plasma Processing System

Coaxial Hollow Cathode Plasma Assisted Directed Vapor Deposition an...

VACUUM PROCESSING APPARATUS

APPARATUS FOR FABRICATING TWO-DIMENSIONAL LAYERED CHALCOGENIDE FILM

APPARATUS FOR AND METHOD OF ACTIVE CLEANING OF EUV OPTIC WITH RF PL...