using electron radiation

Industry

CPC
C23C16/487

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/487using electron radiation

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for long-term storage of information and storage medium ther...
- Patent number 12,070,818
- Issue date Aug 27, 2024
- Ceramic Data Solutions GmbH
- Martin Kunze
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Forming method of component and substrate processing system
- Patent number 11,981,993
- Issue date May 14, 2024
- Tokyo Electron Limited
- Michishige Saito
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for chemical vapour deposition
- Patent number 11,970,765
- Issue date Apr 30, 2024
- Ionautics AB
- Henrik Pedersen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graphene printing
- Patent number 11,834,739
- Issue date Dec 5, 2023
- Hewlett-Packard Development Company, L.P.
- Robert Ionescu
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Thin film laminate, thin film device and multilayer substrate
- Patent number 11,594,668
- Issue date Feb 28, 2023
- TDK Corporation
- Kenta Ishii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for fabricating fibers and microstructures fro...
- Patent number 11,499,230
- Issue date Nov 15, 2022
- Dynetics, Inc.
- James L. Maxwell
- D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Information Patent Grant
Nanofabrication using a new class of electron beam induced surface...
- Patent number 11,377,740
- Issue date Jul 5, 2022
- FEI Company
- James Bishop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for long-term storage of information and storage medium ther...
- Patent number 11,007,606
- Issue date May 18, 2021
- Ceramic Data Solution GMBH
- Martin Kunze
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for fabricating fibers and microstructures fro...
- Patent number 10,947,622
- Issue date Mar 16, 2021
- Dynetics, Inc.
- James L. Maxwell
- D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Information Patent Grant
Method and apparatus for fabricating fibers and microstructures fro...
- Patent number 10,683,574
- Issue date Jun 16, 2020
- Dynetics, Inc.
- James L. Maxwell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of burying sample trench
- Patent number 10,648,081
- Issue date May 12, 2020
- Hitachi High-Tech Science Corporation
- Shota Torikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Patterned atomic layer etching and deposition using miniature-colum...
- Patent number 10,607,845
- Issue date Mar 31, 2020
- Kevin M. Monahan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Deposition or treatment of diamond-like carbon in a plasma reactor
- Patent number 10,544,505
- Issue date Jan 28, 2020
- Applied Materials, Inc.
- Yang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nanofabrication using a new class of electron beam induced surface...
- Patent number 10,538,844
- Issue date Jan 21, 2020
- FEI Company
- James Bishop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Attachment of nano-objects to beam-deposited structures
- Patent number 10,501,851
- Issue date Dec 10, 2019
- FEI Company
- Mehran Kianinia
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for application of metallic alloy coatings
- Patent number 10,260,143
- Issue date Apr 16, 2019
- University of Virginia Patent Foundation
- Derek D. Hass
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing crystal film
- Patent number 10,115,888
- Issue date Oct 30, 2018
- ADVANCED MATERIAL TECHNOLOGIES, INC.
- Takeshi Kijima
- C30 - CRYSTAL GROWTH
Information Patent Grant
Tunable nanoporous films on polymer substrates, and method for thei...
- Patent number 9,732,427
- Issue date Aug 15, 2017
- Rensselaer Polytechnic Institute
- David J. Poxson
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Deposition of a protective coating including metal-containing and c...
- Patent number 9,721,676
- Issue date Aug 1, 2017
- Westinghouse Electric Company, LLC
- Jason P. Mazzoccoli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graphene-coated steel sheet, and method for manufacturing same
- Patent number 9,689,071
- Issue date Jun 27, 2017
- Posco
- Chan Cuk Hwang
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Microfluidic structure
- Patent number 9,592,501
- Issue date Mar 14, 2017
- LANDEGREN GENE TECHNOLOGY AB
- Jonas Sven Peter Jarvius
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Methods and apparatus for nanofabrication using a pliable membrane...
- Patent number 9,588,416
- Issue date Mar 7, 2017
- Columbia University
- Dirk Robert Englund
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Precision deposition using miniature-column charged particle beam a...
- Patent number 9,556,521
- Issue date Jan 31, 2017
- Multibeam Corporation
- Theodore A. Prescop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precision deposition using miniature-column charged particle beam a...
- Patent number 9,453,281
- Issue date Sep 27, 2016
- Multibeam Corporation
- Theodore A. Prescop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal convection-type accelerometer
- Patent number 9,267,961
- Issue date Feb 23, 2016
- Chung Hua University
- Jium Ming Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Charged particle beam apparatus, thin film forming method, defect c...
- Patent number 9,257,273
- Issue date Feb 9, 2016
- Hitachi High-Tech Science Corporation
- Yoshihiro Koyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition system
- Patent number 9,157,152
- Issue date Oct 13, 2015
- Tokyo Electron Limited
- Jacques Faguet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing system
- Patent number 8,939,108
- Issue date Jan 27, 2015
- Carl Zeiss Microscopy GmbH
- Emmerich Bertagnolli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Irradiation assisted nucleation of quantum confinements by atomic l...
- Patent number 8,883,266
- Issue date Nov 11, 2014
- The Board of Trustees of the Leland Stanford Junior University
- Timothy P. Holme
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam plasma chamber
- Patent number 8,765,234
- Issue date Jul 1, 2014
- Applied Materials, Inc.
- Matthew S. Rogers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHODS OF REPAIRING EXTREME ULTRAVIOLET PHOTOMASKS
- Publication number 20250130490
- Publication date Apr 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ying-Hui HSIEH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Long-Term Storage of Information and Storage Medium Ther...
- Publication number 20240416458
- Publication date Dec 19, 2024
- Ceramic Data Solution GmbH
- Martin Kunze
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
RESTORING METHOD OF CONSUMED COMPONENT
- Publication number 20240254620
- Publication date Aug 1, 2024
- TOKYO ELECTRON LIMITED
- Michishige Saito
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTRON-ENHANCED ATOMIC LAYER DEPOSITION (EE-ALD) METHODS AND DEVI...
- Publication number 20240240317
- Publication date Jul 18, 2024
- The Regents of the University of Colorado, a Body Corporate
- Steven George
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
A METHOD AND APPARATUS FOR CHEMICAL VAPOUR DEPOSITION
- Publication number 20220098725
- Publication date Mar 31, 2022
- Ionautics AB
- Henrik Pedersen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Fabricating Fibers and Microstructures fro...
- Publication number 20220074051
- Publication date Mar 10, 2022
- Dynetics, Inc.
- James L. Maxwell
- D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Information Patent Application
Method for Long-Term Storage of Information and Storage Medium Ther...
- Publication number 20210252645
- Publication date Aug 19, 2021
- Ceramic Data Solution GmbH
- Martin Kunze
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
GRAPHENE PRINTING
- Publication number 20210087675
- Publication date Mar 25, 2021
- Hewlett-Packard Development Company, L.P.
- Robert Ionescu
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Method and Apparatus for Fabricating Fibers and Microstructures fro...
- Publication number 20200332417
- Publication date Oct 22, 2020
- Dynetics, Inc.
- James L. Maxwell
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
THIN FILM LAMINATE, THIN FILM DEVICE AND MULTILAYER SUBSTRATE
- Publication number 20200212286
- Publication date Jul 2, 2020
- TDK Corporation
- Kenta ISHII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NANOFABRICATION USING A NEW CLASS OF ELECTRON BEAM INDUCED SURFACE...
- Publication number 20200190669
- Publication date Jun 18, 2020
- FEI Company
- James Bishop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Fabricating Fibers and Microstructures fro...
- Publication number 20200149167
- Publication date May 14, 2020
- Dynetics, Inc.
- James L. Maxwell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF BURYING SAMPLE TRENCH
- Publication number 20180282870
- Publication date Oct 4, 2018
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Shota Torikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALTERNATING BETWEEN DEPOSITION AND TREATMENT OF DIAMOND-LIKE CARBON
- Publication number 20180274100
- Publication date Sep 27, 2018
- Applied Materials, Inc.
- Yang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATTACHMENT OF NANO-OBJECTS TO BEAM-DEPOSITED STRUCTURES
- Publication number 20170327951
- Publication date Nov 16, 2017
- FEI Company
- Mehran Kianinia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precursors for Electron Beam-Induced Deposition of Gold and Silver
- Publication number 20170267700
- Publication date Sep 21, 2017
- University of Florida Research Foundation, Inc.
- Lisa McElwee-White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CRYSTAL FILM, METHOD FOR MANUFACTURING CRYSTAL FILM, VAPOR DEPOSITI...
- Publication number 20170170384
- Publication date Jun 15, 2017
- YOUTEC CO., LTD.
- Takeshi KIJIMA
- C30 - CRYSTAL GROWTH
Information Patent Application
NANOFABRICATION USING A NEW CLASS OF ELECTRON BEAM INDUCED SURFACE...
- Publication number 20170073814
- Publication date Mar 16, 2017
- FEI Company
- James Bishop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADAPTIVE CONTROL FOR CHARGED PARTICLE BEAM PROCESSING
- Publication number 20170002467
- Publication date Jan 5, 2017
- FEI Company
- Marcus Straw
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROFLUIDIC STRUCTURE
- Publication number 20160096176
- Publication date Apr 7, 2016
- Landegren Gene Technology AB
- Jonas Sven Peter Jarvius
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ion Beam Modification of Noble Metals for Electrical Contacts
- Publication number 20160027547
- Publication date Jan 28, 2016
- SANDIA CORPORATION
- Khalid Mikhiel Hattar
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Method For Optimizing A Deposition Process, Method For Setting A De...
- Publication number 20160017496
- Publication date Jan 21, 2016
- JOHANN WOLFGANG GOETHE-UNIVERSITÄT
- MICHAEL HUTH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING DISPLAY APPARATUS
- Publication number 20150364719
- Publication date Dec 17, 2015
- SAMSUNG DISPLAY CO., LTD.
- Jai-Hyuk CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF A PROTECTIVE COATING INCLUDING METAL-CONTAINING AND C...
- Publication number 20150348652
- Publication date Dec 3, 2015
- Westinghouse Electric Company LLC
- JASON P. MAZZOCCOLI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PULSED PLASMA DEPOSITION DEVICE
- Publication number 20150345021
- Publication date Dec 3, 2015
- Organic Spintronics S.r.l.
- Dmitry YARMOLICH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE WELDING WIRE AND METHOD OF MANUFACTURING
- Publication number 20150298263
- Publication date Oct 22, 2015
- Liburdi Engineering Limited
- Alexander B. Goncharov
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Hydrogen-Free Amorphous Dielectric Insulating Thin Films With No Tu...
- Publication number 20150129089
- Publication date May 14, 2015
- THE GOVERNMENT OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETA...
- Xiao Liu
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
METHOD FOR MANUFACTURING A MULTIPLE-AXIS THERMAL CONVECTION-TYPE AC...
- Publication number 20150129114
- Publication date May 14, 2015
- Chung Hua University
- Jium Ming LIN
- B32 - LAYERED PRODUCTS
Information Patent Application
Processing System
- Publication number 20150114294
- Publication date Apr 30, 2015
- CARL ZEISS MICROSCOPY GMBH
- Emmerich Bertagnolli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR DEPOSITING SILICON ON A SUBSTRATE
- Publication number 20140295105
- Publication date Oct 2, 2014
- Michael Huth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using electron radiation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for long-term storage of information and storage medium ther...

Forming method of component and substrate processing system

Method and apparatus for chemical vapour deposition

Graphene printing

Thin film laminate, thin film device and multilayer substrate

Method and apparatus for fabricating fibers and microstructures fro...

Nanofabrication using a new class of electron beam induced surface...

Method for long-term storage of information and storage medium ther...

Method and apparatus for fabricating fibers and microstructures fro...

Method and apparatus for fabricating fibers and microstructures fro...

Method of burying sample trench

Patterned atomic layer etching and deposition using miniature-colum...

Deposition or treatment of diamond-like carbon in a plasma reactor

Nanofabrication using a new class of electron beam induced surface...

Attachment of nano-objects to beam-deposited structures

Method and apparatus for application of metallic alloy coatings

Method for manufacturing crystal film

Tunable nanoporous films on polymer substrates, and method for thei...

Deposition of a protective coating including metal-containing and c...

Graphene-coated steel sheet, and method for manufacturing same

Microfluidic structure

Methods and apparatus for nanofabrication using a pliable membrane...

Precision deposition using miniature-column charged particle beam a...

Precision deposition using miniature-column charged particle beam a...

Thermal convection-type accelerometer

Charged particle beam apparatus, thin film forming method, defect c...

Vapor deposition system

Processing system

Irradiation assisted nucleation of quantum confinements by atomic l...

Electron beam plasma chamber

Patents Applicationslast 30 patents

METHODS OF REPAIRING EXTREME ULTRAVIOLET PHOTOMASKS

Method for Long-Term Storage of Information and Storage Medium Ther...

RESTORING METHOD OF CONSUMED COMPONENT

ELECTRON-ENHANCED ATOMIC LAYER DEPOSITION (EE-ALD) METHODS AND DEVI...

A METHOD AND APPARATUS FOR CHEMICAL VAPOUR DEPOSITION

Method and Apparatus for Fabricating Fibers and Microstructures fro...

Method for Long-Term Storage of Information and Storage Medium Ther...

GRAPHENE PRINTING

Method and Apparatus for Fabricating Fibers and Microstructures fro...

THIN FILM LAMINATE, THIN FILM DEVICE AND MULTILAYER SUBSTRATE

NANOFABRICATION USING A NEW CLASS OF ELECTRON BEAM INDUCED SURFACE...

Method and Apparatus for Fabricating Fibers and Microstructures fro...

METHOD OF BURYING SAMPLE TRENCH

ALTERNATING BETWEEN DEPOSITION AND TREATMENT OF DIAMOND-LIKE CARBON

ATTACHMENT OF NANO-OBJECTS TO BEAM-DEPOSITED STRUCTURES

Precursors for Electron Beam-Induced Deposition of Gold and Silver

CRYSTAL FILM, METHOD FOR MANUFACTURING CRYSTAL FILM, VAPOR DEPOSITI...

NANOFABRICATION USING A NEW CLASS OF ELECTRON BEAM INDUCED SURFACE...

ADAPTIVE CONTROL FOR CHARGED PARTICLE BEAM PROCESSING

MICROFLUIDIC STRUCTURE

Ion Beam Modification of Noble Metals for Electrical Contacts

Method For Optimizing A Deposition Process, Method For Setting A De...

METHOD OF MANUFACTURING DISPLAY APPARATUS

DEPOSITION OF A PROTECTIVE COATING INCLUDING METAL-CONTAINING AND C...

PULSED PLASMA DEPOSITION DEVICE

COMPOSITE WELDING WIRE AND METHOD OF MANUFACTURING

Hydrogen-Free Amorphous Dielectric Insulating Thin Films With No Tu...

METHOD FOR MANUFACTURING A MULTIPLE-AXIS THERMAL CONVECTION-TYPE AC...

Processing System

METHOD AND DEVICE FOR DEPOSITING SILICON ON A SUBSTRATE