using external electrodes

Industry

CPC
C23C16/507

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/507using external electrodes

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Low temperature deposition of iridium containing films
- Patent number 11,946,135
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Passivation, pH protective or lubricity coating for pharmaceutical...
- Patent number 11,884,446
- Issue date Jan 30, 2024
- SIO2 Medical Products, Inc.
- John T. Felts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction chamber
- Patent number 11,773,505
- Issue date Oct 3, 2023
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Gang Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Passivation, pH protective or lubricity coating for pharmaceutical...
- Patent number 11,724,860
- Issue date Aug 15, 2023
- SIO2 Medical Products, Inc.
- John T. Felts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of iridium containing films
- Patent number 11,643,721
- Issue date May 9, 2023
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system with tandem source activation for CVD
- Patent number 11,434,567
- Issue date Sep 6, 2022
- Lam Research Corporation
- Adrien LaVoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma reactor with electrode filaments extending from ceiling
- Patent number 11,424,104
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Kenneth S. Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 11,282,701
- Issue date Mar 22, 2022
- Tokyo Electron Limited
- Takashi Dokan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Passivation, pH protective or lubricity coating for pharmaceutical...
- Patent number 11,148,856
- Issue date Oct 19, 2021
- SIO2 Medical Products, Inc.
- John T. Felts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus and film deposition method
- Patent number 11,131,023
- Issue date Sep 28, 2021
- Tokyo Electron Limited
- Shigehiro Miura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Geometrically selective deposition of dielectric films utilizing lo...
- Patent number 11,081,318
- Issue date Aug 3, 2021
- Applied Materials, Inc.
- Kenichi Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled spacer for use in a substrate processing cha...
- Patent number 11,004,662
- Issue date May 11, 2021
- Lam Research Corporation
- Taide Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus having injection ports at both sides of...
- Patent number 10,961,626
- Issue date Mar 30, 2021
- EUGENE TECHNOLOGY CO., LTD.
- Jeong Hee Jo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alignment systems employing actuators providing relative displaceme...
- Patent number 10,858,735
- Issue date Dec 8, 2020
- Applied Materials, Inc.
- Danny D. Wang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Linearized energetic radio-frequency plasma ion source
- Patent number 10,815,570
- Issue date Oct 27, 2020
- DENTON VACUUM, LLC
- Craig A. Outten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 10,796,884
- Issue date Oct 6, 2020
- HITACHI HIGH-TECH CORPORATION
- Tsutomu Tetsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method, substrate processing app...
- Patent number 10,774,421
- Issue date Sep 15, 2020
- Kokusai Electric Corporation
- Tsuyoshi Takeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for gas abatement
- Patent number 10,757,797
- Issue date Aug 25, 2020
- Applied Materials, Inc.
- Rongping Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing a silicon nitride film and film deposition ap...
- Patent number 10,748,758
- Issue date Aug 18, 2020
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Laminated film and flexible electronic device
- Patent number 10,704,148
- Issue date Jul 7, 2020
- Sumitomo Chemical Company, Limited
- Yasuhiro Yamashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cooled gas feed block with baffle and nozzle for HDP-CVD
- Patent number 10,662,529
- Issue date May 26, 2020
- Applied Materials, Inc.
- Govinda Raj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal metal chemical vapor deposition process
- Patent number 10,662,522
- Issue date May 26, 2020
- SanDisk Technologies LLC
- Fumitaka Amano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Advanced coating method and materials to prevent HDP-CVD chamber ar...
- Patent number 10,655,223
- Issue date May 19, 2020
- Applied Materials, Inc.
- Lin Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing a silicon nitride film and film deposition ap...
- Patent number 10,643,837
- Issue date May 5, 2020
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method
- Patent number 10,593,541
- Issue date Mar 17, 2020
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Passivation, pH protective or lubricity coating for pharmaceutical...
- Patent number 10,577,154
- Issue date Mar 3, 2020
- SIO2 Medical Products, Inc.
- John T. Felts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tandem source activation for CVD of films
- Patent number 10,577,688
- Issue date Mar 3, 2020
- Lam Research Corporation
- Adrien LaVoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing a substrate support assembly
- Patent number 10,557,202
- Issue date Feb 11, 2020
- Applied Materials, Inc.
- Wendell Glen Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alignment systems employing actuators providing relative displaceme...
- Patent number 10,435,786
- Issue date Oct 8, 2019
- Applied Materials, Inc.
- Danny D. Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tunable multi-zone gas injection system
- Patent number 10,403,475
- Issue date Sep 3, 2019
- Lam Research Corporation
- David J. Cooperberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL...
- Publication number 20240417138
- Publication date Dec 19, 2024
- SiO2 Medical Products, Inc.
- John T. Felts
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
SHOWERHEAD TO PEDESTAL GAPPING WITH DIFFERENTIAL CAPACITIVE SENSOR...
- Publication number 20240353217
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Jacob L. HIESTER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS
- Publication number 20240200188
- Publication date Jun 20, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD COATING SYSTEM AND COATING METHOD
- Publication number 20240133036
- Publication date Apr 25, 2024
- JIANGSU FAVORED NANOTECHNOLOGY CO., LTD.
- Jian ZONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS
- Publication number 20240038498
- Publication date Feb 1, 2024
- TOKYO ELECTRON LIMITED
- Taehoon PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS, SYSTEMS, AND APPARATUS FOR FORMING LAYERS HAVING SINGLE CR...
- Publication number 20240035195
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Qinghua ZHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20230377892
- Publication date Nov 23, 2023
- Yiyang WAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS
- Publication number 20230227968
- Publication date Jul 20, 2023
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL...
- Publication number 20230150727
- Publication date May 18, 2023
- SiO2 Medical Products, Inc.
- John T. Felts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR FABRICATION APPARATUS AND FABRICATION METHOD
- Publication number 20230045027
- Publication date Feb 9, 2023
- Samsung Electronics Co., Ltd.
- Myoung-Kyu Oh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20230035284
- Publication date Feb 2, 2023
- Tokyo Electron Limited
- Kazuki DEMPOH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION CHAMBER
- Publication number 20230028116
- Publication date Jan 26, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Gang XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL...
- Publication number 20220161969
- Publication date May 26, 2022
- SiO2 Medical Products, Inc.
- John T. Felts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ENHANCED ATOMIC LAYER DEPOSITION (PEALD) APPARATUS
- Publication number 20210348274
- Publication date Nov 11, 2021
- Evatec AG
- Jörg PATSCHEIDER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE
- Publication number 20210025060
- Publication date Jan 28, 2021
- TOKYO ELECTRON LIMITED
- Masahiro TABATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL...
- Publication number 20200270025
- Publication date Aug 27, 2020
- SiO2 Medical Products, Inc.
- John T. Felts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM WITH TANDEM SOURCE ACTIVATION FOR CVD
- Publication number 20200199747
- Publication date Jun 25, 2020
- LAM RESEARCH CORPORATION
- Adrien LAVOIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL METAL CHEMICAL VAPOR DEPOSITION PROCESS
- Publication number 20200149153
- Publication date May 14, 2020
- SANDISK TECHNOLOGIES LLC
- Fumitaka AMANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20200118814
- Publication date Apr 16, 2020
- TOKYO ELECTRON LIMITED
- Takashi DOKAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR GAS ABATEMENT
- Publication number 20190246481
- Publication date Aug 8, 2019
- Applied Materials, Inc.
- Rongping WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL...
- Publication number 20190233167
- Publication date Aug 1, 2019
- SiO2 Medical Products, Inc.
- John T. Felts
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190189396
- Publication date Jun 20, 2019
- Hitachi High-Technologies Corporation
- Taku IWASE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Geometrically Selective Deposition Of Dielectric Films Utilizing Lo...
- Publication number 20190189400
- Publication date Jun 20, 2019
- Applied Materials, Inc.
- Kenichi Ohno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADVANCED COATING METHOD AND MATERIALS TO PREVENT HDP-CVD CHAMBER AR...
- Publication number 20190169743
- Publication date Jun 6, 2019
- Applied Materials, Inc.
- Lin ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD FOR FORMING FILMS
- Publication number 20190131111
- Publication date May 2, 2019
- WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Rui XIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR APPLYING A PECVD LUBRICITY LAYER WITH A MOVING GAS INLET
- Publication number 20190093226
- Publication date Mar 28, 2019
- SiO2 Medical Products, Inc.
- James Newton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH TYPE PLASMA SUBSTRATE PROCESSING APPARATUS
- Publication number 20190085456
- Publication date Mar 21, 2019
- EUGENE TECHNOLOGY CO., LTD.
- Jeong Hee JO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA REACTOR WITH ELECTRODE FILAMENTS
- Publication number 20180308661
- Publication date Oct 25, 2018
- Applied Materials, Inc.
- Kenneth S. Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of CVD Plasma Processing with a Toroidal Plasma Processing A...
- Publication number 20180155839
- Publication date Jun 7, 2018
- PLASMABILITY, LLC
- William Holber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TANDEM SOURCE ACTIVATION FOR CVD OF FILMS
- Publication number 20170327947
- Publication date Nov 16, 2017
- LAM RESEARCH CORPORATION
- Adrien LaVoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using external electrodes

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Low temperature deposition of iridium containing films

Passivation, pH protective or lubricity coating for pharmaceutical...

Reaction chamber

Passivation, pH protective or lubricity coating for pharmaceutical...

Low temperature deposition of iridium containing films

Substrate processing system with tandem source activation for CVD

Plasma reactor with electrode filaments extending from ceiling

Plasma processing method and plasma processing apparatus

Passivation, pH protective or lubricity coating for pharmaceutical...

Film deposition apparatus and film deposition method

Geometrically selective deposition of dielectric films utilizing lo...

Temperature controlled spacer for use in a substrate processing cha...

Plasma processing apparatus having injection ports at both sides of...

Alignment systems employing actuators providing relative displaceme...

Linearized energetic radio-frequency plasma ion source

Plasma processing apparatus

Semiconductor device manufacturing method, substrate processing app...

Method and apparatus for gas abatement

Method for depositing a silicon nitride film and film deposition ap...

Laminated film and flexible electronic device

Cooled gas feed block with baffle and nozzle for HDP-CVD

Thermal metal chemical vapor deposition process

Advanced coating method and materials to prevent HDP-CVD chamber ar...

Method for depositing a silicon nitride film and film deposition ap...

Film deposition method

Passivation, pH protective or lubricity coating for pharmaceutical...

Tandem source activation for CVD of films

Method of processing a substrate support assembly

Alignment systems employing actuators providing relative displaceme...

Tunable multi-zone gas injection system

Patents Applicationslast 30 patents

PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL...

SHOWERHEAD TO PEDESTAL GAPPING WITH DIFFERENTIAL CAPACITIVE SENSOR...

LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS

PECVD COATING SYSTEM AND COATING METHOD

FILM DEPOSITION APPARATUS

METHODS, SYSTEMS, AND APPARATUS FOR FORMING LAYERS HAVING SINGLE CR...

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS

PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL...

SEMICONDUCTOR FABRICATION APPARATUS AND FABRICATION METHOD

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

REACTION CHAMBER

PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL...

PLASMA ENHANCED ATOMIC LAYER DEPOSITION (PEALD) APPARATUS

APPARATUS FOR PROCESSING SUBSTRATE

PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL...

SUBSTRATE PROCESSING SYSTEM WITH TANDEM SOURCE ACTIVATION FOR CVD

THERMAL METAL CHEMICAL VAPOR DEPOSITION PROCESS

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

METHOD AND APPARATUS FOR GAS ABATEMENT

PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL...

PLASMA PROCESSING APPARATUS

Geometrically Selective Deposition Of Dielectric Films Utilizing Lo...

ADVANCED COATING METHOD AND MATERIALS TO PREVENT HDP-CVD CHAMBER AR...

CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD FOR FORMING FILMS

METHOD FOR APPLYING A PECVD LUBRICITY LAYER WITH A MOVING GAS INLET

BATCH TYPE PLASMA SUBSTRATE PROCESSING APPARATUS

PLASMA REACTOR WITH ELECTRODE FILAMENTS

Method of CVD Plasma Processing with a Toroidal Plasma Processing A...

TANDEM SOURCE ACTIVATION FOR CVD OF FILMS