using high frequency electric fields

Industry

CPC
G01N21/68

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Parent Industries

GPHYSICS G01Measuring instruments G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES G01N21/00Investigating or analysing materials by the use of optical means

Current Industry

G01N21/68using high frequency electric fields

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Glow plasma gas measurement signal processing
- Patent number 11,948,774
- Issue date Apr 2, 2024
- Servomex Group Limited
- Bahram Alizadeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for detecting or monitoring for a chemical precursor in a...
- Patent number 11,939,673
- Issue date Mar 26, 2024
- ASM IP Holding B.V.
- John Kevin Shugrue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Portable water quality instrument
- Patent number 11,867,631
- Issue date Jan 9, 2024
- OndaVia, Inc.
- Mark C. Peterman
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Device and method for detecting concentration of specimen
- Patent number 11,860,107
- Issue date Jan 2, 2024
- Seoul National University R&DB Foundation
- Jai Ick Yoh
- G01 - MEASURING TESTING
Information Patent Grant
Portable water quality instrument
- Patent number 11,719,642
- Issue date Aug 8, 2023
- OndaVia, Inc.
- Mark C. Peterman
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
Multi-dimensional spectroscopy of macromolecules
- Patent number 11,709,138
- Issue date Jul 25, 2023
- David Allan Prystupa
- G01 - MEASURING TESTING
Information Patent Grant
Spatial optical emission spectroscopy for etch uniformity
- Patent number 11,668,602
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Blake Erickson
- G01 - MEASURING TESTING
Information Patent Grant
Probe for detecting near field and near-field detection system incl...
- Patent number 11,579,167
- Issue date Feb 14, 2023
- Samsung Electronics Co., Ltd.
- Jongmin Yoon
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical emission spectroscopy system, method of calibrating the sam...
- Patent number 11,092,495
- Issue date Aug 17, 2021
- Samsung Electronics Co., Ltd.
- Jeongil Mun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for detecting or monitoring for a chemical precursor in a...
- Patent number 10,975,470
- Issue date Apr 13, 2021
- ASM IP Holding B.V.
- John Shugrue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma sensing device, plasma monitoring system and method of contr...
- Patent number 10,910,202
- Issue date Feb 2, 2021
- Samsung Electronics Co., Ltd.
- Hun-Yong Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and tool for producing sample containing object, method for...
- Patent number 10,859,502
- Issue date Dec 8, 2020
- Horiba, Ltd.
- Akira Fujimoto
- G01 - MEASURING TESTING
Information Patent Grant
Plasma monitoring apparatus and plasma processing system
- Patent number 10,825,666
- Issue date Nov 3, 2020
- Samsung Electronics Co., Ltd.
- Kyeong-Hun Kim
- G01 - MEASURING TESTING
Information Patent Grant
Optical detection of tracer gases in a gas discharge cell having un...
- Patent number 10,782,237
- Issue date Sep 22, 2020
- INFICON Holding AG
- Vladimir Schwartz
- G01 - MEASURING TESTING
Information Patent Grant
OES device, plasma processing apparatus including the same and meth...
- Patent number 10,770,273
- Issue date Sep 8, 2020
- Samsung Electronics Co., Ltd.
- In-Joong Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma monitoring apparatus, and plasma processing apparatus includ...
- Patent number 10,748,749
- Issue date Aug 18, 2020
- Samsung Electronics Co., Ltd.
- Jeong Il Mun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for determining a mixing ratio of N organic, miscible compon...
- Patent number 10,656,135
- Issue date May 19, 2020
- Bayerische Motoren Werke Aktiengesellschaft
- Daniel Laessig
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for chamber matching and monitoring
- Patent number 10,622,219
- Issue date Apr 14, 2020
- Tokyo Electron Limited
- Jun Shinagawa
- G01 - MEASURING TESTING
Information Patent Grant
Sample-analyzing system
- Patent number 10,539,520
- Issue date Jan 21, 2020
- Shimadzu Corporation
- Sachio Murakami
- G01 - MEASURING TESTING
Information Patent Grant
Spatially resolved optical emission spectroscopy (OES) in plasma pr...
- Patent number 10,473,525
- Issue date Nov 12, 2019
- Tokyo Electron Limited
- Ching-Ling Meng
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for chamber matching and monitoring
- Patent number 10,438,805
- Issue date Oct 8, 2019
- Tokyo Electron Limited
- Jun Shinagawa
- G01 - MEASURING TESTING
Information Patent Grant
Plasma processing apparatus, plasma processing method and plasma pr...
- Patent number 10,408,762
- Issue date Sep 10, 2019
- Hitachi High-Technologies Corporation
- Ryoji Asakura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
ICP emission spectrophotometer
- Patent number 10,309,903
- Issue date Jun 4, 2019
- Hitachi High-Tech Science Corporation
- Yutaka Ikku
- G01 - MEASURING TESTING
Information Patent Grant
Plasma spectroscopic analysis method and inhibitor of plasma emissi...
- Patent number 10,295,471
- Issue date May 21, 2019
- ARKRAY, Inc.
- Tokuo Kasai
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for detecting oxygen in-situ in a substrate are...
- Patent number 10,267,728
- Issue date Apr 23, 2019
- Lam Research Corporation
- Dengliang Yang
- G01 - MEASURING TESTING
Information Patent Grant
Optical microresonator device with thermal isolation
- Patent number 10,247,676
- Issue date Apr 2, 2019
- National Technology & Engineering Solutions of Sandia, LLC
- Michael J. Shaw
- G01 - MEASURING TESTING
Information Patent Grant
Computed tomography using intersecting views of plasma using optica...
- Patent number 10,215,704
- Issue date Feb 26, 2019
- Tokyo Electron Limited
- Taejoon Han
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for determining downhole optical fiber orientatio...
- Patent number 10,175,384
- Issue date Jan 8, 2019
- Silixa, LTD.
- Mahmoud Farhadiroushan
- G01 - MEASURING TESTING
Information Patent Grant
Optical emission spectroscope with a pivotably mounted inductively...
- Patent number 10,107,759
- Issue date Oct 23, 2018
- Spectro Analytical Instruments GmbH
- Manfred A. Bergsch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma spectrochemical analysis method and plasma spectrochemical a...
- Patent number 10,101,275
- Issue date Oct 16, 2018
- ARKRAY, Inc.
- Yasunori Shiraki
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PLASMA MONITORING SYSTEM, PLASMA MONITORING METHOD, AND MONITORING...
- Publication number 20240096608
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Satoru TERUUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH SPECTRAL AND TEMPORAL RESOLUTION GLOW DISCHARGE SPECTROMETRY D...
- Publication number 20230349832
- Publication date Nov 2, 2023
- HORIBA FRANCE SAS
- Patrick CHAPON
- G01 - MEASURING TESTING
Information Patent Application
SPATIAL OPTICAL EMISSION SPECTROSCOPY FOR ETCH UNIFORMITY
- Publication number 20230258500
- Publication date Aug 17, 2023
- Applied Materials, Inc.
- Blake Erickson
- G01 - MEASURING TESTING
Information Patent Application
MIXED SALINITY IMPACT ON INTERPRETATION AND REMEDIAL DETECTION TECH...
- Publication number 20230141107
- Publication date May 11, 2023
- Baker Hughes Oilfield Operations LLC
- Sandip Maity
- E21 - EARTH DRILLING MINING
Information Patent Application
DEVICE FOR MEASURING ELEMENT CONCENTRATIONS IN PLANT LEAVES AND MET...
- Publication number 20220365009
- Publication date Nov 17, 2022
- The State of Isreal, Ministry of Agriculture & Rural Development, Agricultura...
- Uri YERMIYAHU
- G01 - MEASURING TESTING
Information Patent Application
PORTABLE WATER QUALITY INSTRUMENT
- Publication number 20220146430
- Publication date May 12, 2022
- OndaVia, Inc.
- Mark C. PETERMAN
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR DETECTING CONCENTRATION OF SPECIMEN
- Publication number 20220136975
- Publication date May 5, 2022
- Seoul National University R&DB Foundation
- Jai Ick YOH
- G01 - MEASURING TESTING
Information Patent Application
PORTABLE WATER QUALITY INSTRUMENT
- Publication number 20220074862
- Publication date Mar 10, 2022
- OndaVia, Inc.
- Mark C. PETERMAN
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Multi-Dimensional Spectroscopy of Macromolecules
- Publication number 20220034817
- Publication date Feb 3, 2022
- 12198681 Canada Ltd.
- David Allan Prystupa
- G01 - MEASURING TESTING
Information Patent Application
GLOW PLASMA GAS MEASUREMENT SIGNAL PROCESSING
- Publication number 20210310956
- Publication date Oct 7, 2021
- Servomex Group Limited
- Bahram Alizadeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR DETECTING OR MONITORING FOR A CHEMICAL PRECURSOR IN A...
- Publication number 20210180189
- Publication date Jun 17, 2021
- ASM IP HOLDING B.V.
- John Kevin Shugrue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DETERMINING CLEANING CONDITIONS AND PLASMA PROCESSING DEVICE
- Publication number 20210111008
- Publication date Apr 15, 2021
- TOKYO ELECTRON LIMITED
- Shun ITOH
- B08 - CLEANING
Information Patent Application
SYSTEMS AND METHODS FOR RAPID ELEMENTAL ANALYSIS OF AIRBORNE PARTIC...
- Publication number 20200132606
- Publication date Apr 30, 2020
- The USA, as represented by the Secretary, Department of Health and Human Serv...
- Pramod P. Kulkarni
- G01 - MEASURING TESTING
Information Patent Application
PLASMA SENSING DEVICE, PLASMA MONITORING SYSTEM AND METHOD OF CONTR...
- Publication number 20200083030
- Publication date Mar 12, 2020
- Samsung Electronics Co., Ltd.
- Hun-Yong PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA MONITORING APPARATUS AND PLASMA PROCESSING SYSTEM
- Publication number 20200066499
- Publication date Feb 27, 2020
- Samsung Electronics Co., Ltd.
- Kyeong-Hun KIM
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL EMISSION SPECTROSCOPY SYSTEM, METHOD OF CALIBRATING THE SAM...
- Publication number 20200049560
- Publication date Feb 13, 2020
- Samsung Electronics Co., Ltd.
- Jeongil MUN
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR DETECTING OR MONITORING FOR A CHEMICAL PRECURSOR IN A...
- Publication number 20190264324
- Publication date Aug 29, 2019
- ASM IP HOLDING B.V.
- John Shugrue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND PLASMA PR...
- Publication number 20190170653
- Publication date Jun 6, 2019
- Hitachi High-Technologies Corporation
- Ryoji ASAKURA
- G01 - MEASURING TESTING
Information Patent Application
Optical Detection of Tracer Gases in a Gas Discharge Cell Having Un...
- Publication number 20180313763
- Publication date Nov 1, 2018
- INFICON GMBH
- Vladimir Schwartz
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method for Determining a Mixing Ratio of N Organic, Miscible Compon...
- Publication number 20180217121
- Publication date Aug 2, 2018
- Bayerische Motoren Werke Aktiengesellschaft
- Daniel LAESSIG
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND A DEVICE FOR MEASURING GAS DISSOCIATION DEGREES WITH AN...
- Publication number 20180190548
- Publication date Jul 5, 2018
- FairTech Corporation
- Jui-Pao PAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Spectroscopic Analysis Method and Inhibitor of Plasma Emissi...
- Publication number 20180100803
- Publication date Apr 12, 2018
- ARKRAY, Inc.
- Tokuo Kasai
- G01 - MEASURING TESTING
Information Patent Application
Method and System for Determining Downhole Optical Fiber Orientatio...
- Publication number 20180052252
- Publication date Feb 22, 2018
- Silixa Ltd.
- Mahmoud Farhadiroushan
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR ANALYZING ONLINE-TRANSFERRED ASSAY SAMPLES
- Publication number 20180024068
- Publication date Jan 25, 2018
- IAS Inc.
- Katsuhiko Kawabata
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL EMISSION SPECTROSCOPE WITH A PIVOTABLY MOUNTED INDUCTIVELY...
- Publication number 20170343478
- Publication date Nov 30, 2017
- Spectro Analytical Instruments GmbH
- Manfred A. BERGSCH
- G01 - MEASURING TESTING
Information Patent Application
SPATIALLY RESOLVED OPTICAL EMISSION SPECTROSCOPY (OES) IN PLASMA PR...
- Publication number 20170314991
- Publication date Nov 2, 2017
- TOKYO ELECTRON LIMITED
- Ching-Ling MENG
- G01 - MEASURING TESTING
Information Patent Application
THERMAL STRESS RESISTANT MICRO-PLASMA EMISSION DETECTOR UNIT
- Publication number 20170254786
- Publication date Sep 7, 2017
- LDETEK INC.
- Dany GAGNE
- G01 - MEASURING TESTING
Information Patent Application
IN-SITU SPATIALLY RESOLVED PLASMA MONITORING BY USING OPTICAL EMISS...
- Publication number 20170254755
- Publication date Sep 7, 2017
- Applied Materials, Inc.
- Tae Seung CHO
- G01 - MEASURING TESTING
Information Patent Application
GLOW DISCHARGE SPECTROSCOPY METHOD AND SYSTEM FOR MEASURING IN SITU...
- Publication number 20170045457
- Publication date Feb 16, 2017
- HORIBA JOBIN YVON SAS
- Simon RICHARD
- G01 - MEASURING TESTING
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND PLASMA PR...
- Publication number 20160225681
- Publication date Aug 4, 2016
- Hitachi High-Technologies Corporation
- Ryoji ASAKURA
- G01 - MEASURING TESTING

using high frequency electric fields

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Glow plasma gas measurement signal processing

Apparatus for detecting or monitoring for a chemical precursor in a...

Portable water quality instrument

Device and method for detecting concentration of specimen

Portable water quality instrument

Multi-dimensional spectroscopy of macromolecules

Spatial optical emission spectroscopy for etch uniformity

Probe for detecting near field and near-field detection system incl...

Optical emission spectroscopy system, method of calibrating the sam...

Apparatus for detecting or monitoring for a chemical precursor in a...

Plasma sensing device, plasma monitoring system and method of contr...

Method and tool for producing sample containing object, method for...

Plasma monitoring apparatus and plasma processing system

Optical detection of tracer gases in a gas discharge cell having un...

OES device, plasma processing apparatus including the same and meth...

Plasma monitoring apparatus, and plasma processing apparatus includ...

Method for determining a mixing ratio of N organic, miscible compon...

Methods and systems for chamber matching and monitoring

Sample-analyzing system

Spatially resolved optical emission spectroscopy (OES) in plasma pr...

Methods and systems for chamber matching and monitoring

Plasma processing apparatus, plasma processing method and plasma pr...

ICP emission spectrophotometer

Plasma spectroscopic analysis method and inhibitor of plasma emissi...

Systems and methods for detecting oxygen in-situ in a substrate are...

Optical microresonator device with thermal isolation

Computed tomography using intersecting views of plasma using optica...

Method and system for determining downhole optical fiber orientatio...

Optical emission spectroscope with a pivotably mounted inductively...

Plasma spectrochemical analysis method and plasma spectrochemical a...

Patents Applicationslast 30 patents

PLASMA MONITORING SYSTEM, PLASMA MONITORING METHOD, AND MONITORING...

HIGH SPECTRAL AND TEMPORAL RESOLUTION GLOW DISCHARGE SPECTROMETRY D...

SPATIAL OPTICAL EMISSION SPECTROSCOPY FOR ETCH UNIFORMITY

MIXED SALINITY IMPACT ON INTERPRETATION AND REMEDIAL DETECTION TECH...

DEVICE FOR MEASURING ELEMENT CONCENTRATIONS IN PLANT LEAVES AND MET...

PORTABLE WATER QUALITY INSTRUMENT

DEVICE AND METHOD FOR DETECTING CONCENTRATION OF SPECIMEN

PORTABLE WATER QUALITY INSTRUMENT

Multi-Dimensional Spectroscopy of Macromolecules

GLOW PLASMA GAS MEASUREMENT SIGNAL PROCESSING

APPARATUS FOR DETECTING OR MONITORING FOR A CHEMICAL PRECURSOR IN A...

METHOD OF DETERMINING CLEANING CONDITIONS AND PLASMA PROCESSING DEVICE

SYSTEMS AND METHODS FOR RAPID ELEMENTAL ANALYSIS OF AIRBORNE PARTIC...

PLASMA SENSING DEVICE, PLASMA MONITORING SYSTEM AND METHOD OF CONTR...

PLASMA MONITORING APPARATUS AND PLASMA PROCESSING SYSTEM

OPTICAL EMISSION SPECTROSCOPY SYSTEM, METHOD OF CALIBRATING THE SAM...

APPARATUS FOR DETECTING OR MONITORING FOR A CHEMICAL PRECURSOR IN A...

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND PLASMA PR...

Optical Detection of Tracer Gases in a Gas Discharge Cell Having Un...

Method for Determining a Mixing Ratio of N Organic, Miscible Compon...

METHOD AND A DEVICE FOR MEASURING GAS DISSOCIATION DEGREES WITH AN...

Plasma Spectroscopic Analysis Method and Inhibitor of Plasma Emissi...

Method and System for Determining Downhole Optical Fiber Orientatio...

SYSTEM FOR ANALYZING ONLINE-TRANSFERRED ASSAY SAMPLES

OPTICAL EMISSION SPECTROSCOPE WITH A PIVOTABLY MOUNTED INDUCTIVELY...

SPATIALLY RESOLVED OPTICAL EMISSION SPECTROSCOPY (OES) IN PLASMA PR...

THERMAL STRESS RESISTANT MICRO-PLASMA EMISSION DETECTOR UNIT

IN-SITU SPATIALLY RESOLVED PLASMA MONITORING BY USING OPTICAL EMISS...

GLOW DISCHARGE SPECTROSCOPY METHOD AND SYSTEM FOR MEASURING IN SITU...

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND PLASMA PR...