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using incoherent light, UV to IR
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CPC
C23C16/482
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Parent Industries
C
CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C16/00
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating
Current Industry
C23C16/482
using incoherent light, UV to IR
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last 30 patents
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Patent Grant
Methods of forming structures, semiconductor processing systems, an...
Patent number
11,959,173
Issue date
Apr 16, 2024
ASM IP Holding B.V.
Amir Kajbafvala
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Quantum printing nanostructures within carbon nanopores
Patent number
11,939,671
Issue date
Mar 26, 2024
Quantum Elements Development Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Plasma processing method
Patent number
11,915,951
Issue date
Feb 27, 2024
HITACHI HIGH-TECH CORPORATION
Hiroyuki Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for forming a patterned layer of carbon, metho...
Patent number
11,807,937
Issue date
Nov 7, 2023
ASML Netherlands B.V.
Sonia Castellanos Ortega
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Solid precursor feed system for thin film depositions
Patent number
11,781,216
Issue date
Oct 10, 2023
MetOx Technologies, Inc.
Mikhail Novozhilov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Quantum printing apparatus and method of using same
Patent number
11,746,412
Issue date
Sep 5, 2023
Quantum Elements Development Inc.
Christopher J. Nagel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming apparatus
Patent number
11,732,360
Issue date
Aug 22, 2023
TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
Takahiro Hiramatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Quantum printing nanostructures within carbon nanopores
Patent number
11,680,317
Issue date
Jun 20, 2023
Quantum Elements Development Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Quantum printing nanostructures within carbon nanopores
Patent number
11,643,723
Issue date
May 9, 2023
Quantum Elements Development Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Light irradiation type heat treatment apparatus including oxygen an...
Patent number
11,621,178
Issue date
Apr 4, 2023
SCREEN Holdings Co., Ltd.
Takayuki Aoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Solid precursor feed system for thin film depositions
Patent number
11,584,988
Issue date
Feb 21, 2023
MetOx Technologies, Inc.
Mikhail Novozhilov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heat treatment method including low temperature degassing before fl...
Patent number
11,574,824
Issue date
Feb 7, 2023
SCREEN Holdings Co., Ltd.
Takayuki Aoyama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Quantum printing methods
Patent number
11,535,933
Issue date
Dec 27, 2022
Quantum Elements Development Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Graphene synthesis chamber and method of synthesizing graphene by u...
Patent number
11,486,035
Issue date
Nov 1, 2022
Versarien PLC
Dong-kwan Won
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Quantum printing apparatus and method of using same
Patent number
11,447,860
Issue date
Sep 20, 2022
Quantum Elements Development Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Fixed and portable coating apparatuses and methods
Patent number
11,421,317
Issue date
Aug 23, 2022
University of Houston System
Seamus Curran
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Quantum printing nanostructures within carbon nanopores
Patent number
11,345,995
Issue date
May 31, 2022
Quantum Elements Development Inc.
Christopher J. Nagel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Quantum printing nanostructures within carbon nanopores
Patent number
11,332,825
Issue date
May 17, 2022
Quantum Elements Development Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Laser processing machine
Patent number
11,311,966
Issue date
Apr 26, 2022
Honda Motor Co., Ltd.
Yuichi Hirata
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Microwave plasma and ultraviolet assisted deposition apparatus and...
Patent number
11,186,911
Issue date
Nov 30, 2021
International Business Machines Corporation
Alfred Grill
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Solid precursor feed system for thin film depositions
Patent number
11,162,171
Issue date
Nov 2, 2021
MetOx Technologies, Inc.
Mikhail Novozhilov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate rack and a substrate processing system and method
Patent number
11,088,002
Issue date
Aug 10, 2021
ASM IP Holding B.V.
Dieter Pierreux
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for growing light emitting devices under ultra-violet illum...
Patent number
11,069,836
Issue date
Jul 20, 2021
Lumileds LLC
Tsutomu Ishikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microwave plasma and ultraviolet assisted deposition apparatus and...
Patent number
11,066,748
Issue date
Jul 20, 2021
International Business Machines Corporation
Alfred Grill
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Light-irradiation heat treatment method and heat treatment apparatus
Patent number
10,978,319
Issue date
Apr 13, 2021
SCREEN Holdings Co., Ltd.
Takayuki Aoyama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cooled reflective adapter plate for a deposition chamber
Patent number
10,903,067
Issue date
Jan 26, 2021
Applied Materials, Inc.
Ashish Goel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Quantum printing apparatus
Patent number
10,889,892
Issue date
Jan 12, 2021
Quantum Elements Development, Inc.
Christopher J. Nagel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for producing a thin film, method for producing a magnetic d...
Patent number
10,888,895
Issue date
Jan 12, 2021
Showa Denko K.K.
Hiroshi Tani
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Light-irradiation heat treatment method and heat treatment apparatus
Patent number
10,790,171
Issue date
Sep 29, 2020
SCREEN Holdings Co., Ltd.
Takayuki Aoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing method and plasma processing apparatus
Patent number
10,707,100
Issue date
Jul 7, 2020
Tokyo Electron Limited
Masahiro Tabata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SYSTEMS AND METHODS FOR MONITORING A CONDITION OF LAMPS USED IN SEM...
Publication number
20240110283
Publication date
Apr 4, 2024
ASM IP HOLDING, B.V.
Peter Bryan Ruckle
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240060185
Publication date
Feb 22, 2024
Samsung Electronics Co., Ltd.
Yeontae KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR DEPOSITION OF AT LEAST ONE LAYER, OPTICAL...
Publication number
20240035163
Publication date
Feb 1, 2024
Carl Zeiss SMT GMBH
Felix LANGE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TRANSPARENT HEATERS FOR IMPROVED EPITAXY REACTOR PRODUCTIVITY
Publication number
20240040672
Publication date
Feb 1, 2024
Applied Materials, Inc.
Sathya Shrinivas CHARY
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ACTIVELY CONTROLLED PRE-HEAT RING FOR PROCESS TEMPERATURE CONTROL
Publication number
20240035161
Publication date
Feb 1, 2024
Applied Materials, Inc.
Zhepeng CONG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHO...
Publication number
20240011150
Publication date
Jan 11, 2024
ASML NETHERLANDS B.V.
Sonia CASTELLANOS ORTEGA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
QUANTUM PRINTING NANOSTRUCTURES WITHIN CARBON NANOPORES
Publication number
20230366083
Publication date
Nov 16, 2023
Quantum Elements Development Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Application
DEPOSITION OF FLOWABLE SICN FILMS BY PLASMA ENHANCED ATOMIC LAYER D...
Publication number
20230335392
Publication date
Oct 19, 2023
ASM IP HOLDING B.V.
Shinya Yoshimoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
QUANTUM PRINTING METHODS
Publication number
20230279542
Publication date
Sep 7, 2023
Quantum Elements Development Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Application
SOLID PRECURSOR FEED SYSTEM FOR THIN FILM DEPOSITIONS
Publication number
20230160059
Publication date
May 25, 2023
MetOx Technologies, Inc.
Mikhail NOVOZHILOV
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Quantum Printing Apparatus and Method of Using Same
Publication number
20230074549
Publication date
Mar 9, 2023
Quantum Elements Development Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Application
Apparatus and Methods for Roll-to-Roll (R2R) Plasma Enhanced/Activa...
Publication number
20230047633
Publication date
Feb 16, 2023
Nano-Master, Inc.
Birol Kuyel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus and Methods for Roll-to-Roll (R2R) Plasma Enhanced/Activa...
Publication number
20230047186
Publication date
Feb 16, 2023
Nano-Master, Inc.
Birol Kuyel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LAMP FILAMENT HAVING A PITCH GRADIENT AND METHOD OF MAKING
Publication number
20230017852
Publication date
Jan 19, 2023
Applied Materials, Inc.
Vilen K. NESTOROV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
QUANTUM PRINTING NANOSTRUCTURES WITHIN CARBON NANOPORES
Publication number
20220325408
Publication date
Oct 13, 2022
Quantum Elements Development Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Application
QUANTUM PRINTING NANOSTRUCTURES WITHIN CARBON NANOPORES
Publication number
20220325407
Publication date
Oct 13, 2022
Quantum Elements Development Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Application
METHODS OF FORMING STRUCTURES, SEMICONDUCTOR PROCESSING SYSTEMS, AN...
Publication number
20220298643
Publication date
Sep 22, 2022
ASM IP HOLDING B.V.
Amir Kajbafvala
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION METHOD AND FILM FORMATION DEVICE
Publication number
20220178031
Publication date
Jun 9, 2022
Tokyo Electron Limited
Michitaka AITA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUPPLEMENTAL ENERGY FOR LOW TEMPERATURE PROCESSES
Publication number
20220162756
Publication date
May 26, 2022
Applied Materials, Inc.
David K. CARLSON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND FILM FORMING APPAR...
Publication number
20220059396
Publication date
Feb 24, 2022
TOKYO ELECTRON LIMITED
Tatsuya YAMAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SOLID PRECURSOR FEED SYSTEM FOR THIN FILM DEPOSITIONS
Publication number
20220010425
Publication date
Jan 13, 2022
MetOx Technologies, Inc.
Mikhail NOVOZHILOV
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUPERCONDUCTOR FLUX PINNING WITHOUT COLUMNAR DEFECTS
Publication number
20210408359
Publication date
Dec 30, 2021
Mikhail NOVOZHILOV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATOMIC LAYER DEPOSITION AND VAPOR DEPOSITION REACTOR WITH IN-CHAMBE...
Publication number
20210388498
Publication date
Dec 16, 2021
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
J. Gary Eden
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Quantum Printing Nanostructures within Carbon Nanopores
Publication number
20210380414
Publication date
Dec 9, 2021
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Application
MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM
Publication number
20210324514
Publication date
Oct 21, 2021
Applied Materials, Inc.
Zhiyuan YE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Quantum Printing Methods
Publication number
20210301399
Publication date
Sep 30, 2021
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Application
Quantum Printing Nanostructures within Carbon Nanopores
Publication number
20210300763
Publication date
Sep 30, 2021
Quantum Elements Development, Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Application
Quantum Printing Apparatus
Publication number
20210292896
Publication date
Sep 23, 2021
Quantum Elements Development, Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Application
FILM FORMING APPARATUS
Publication number
20210230748
Publication date
Jul 29, 2021
TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
Takahiro HIRAMATSU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and Apparatus for Forming a Patterned Layer of Carbon, Metho...
Publication number
20210032743
Publication date
Feb 4, 2021
ASML NETHERLANDS B.V.
Sonia CASTELLANOS ORTEGA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...