using incoherent radiation

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CPC
H01L21/2686

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/2686using incoherent radiation

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Heat treatment method and heat treatment apparatus
- Patent number 12,125,723
- Issue date Oct 22, 2024
- SCREEN Holdings Co., Ltd.
- Oma Nakajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method and heat treatment apparatus of light irradia...
- Patent number 12,057,352
- Issue date Aug 6, 2024
- SCREEN Holdings Co., Ltd.
- Takahiro Kitazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Supplemental energy for low temperature processes
- Patent number 11,981,999
- Issue date May 14, 2024
- Applied Materials, Inc.
- David K. Carlson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Light irradiation type heat treatment method
- Patent number 11,908,703
- Issue date Feb 20, 2024
- SCREEN Holdings Co., Ltd.
- Mao Omori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,881,403
- Issue date Jan 23, 2024
- SCREEN Holdings Co., Ltd.
- Ayumi Higuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method and heat treatment apparatus of light irradia...
- Patent number 11,876,006
- Issue date Jan 16, 2024
- SCREEN Holdings Co., Ltd.
- Tomohiro Ueno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Artificial intelligence-enabled preparation end-pointing
- Patent number 11,847,813
- Issue date Dec 19, 2023
- FEI Company
- Thomas Gary Miller
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Susceptor for semiconductor substrate processing
- Patent number 11,764,101
- Issue date Sep 19, 2023
- ASM IP Holding, B.V.
- Saket Rathi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support device, thermal processing apparatus, substrate s...
- Patent number 11,694,920
- Issue date Jul 4, 2023
- SCREEN Holdings Co., Ltd.
- Scott Prengle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method and heat treatment apparatus of light irradia...
- Patent number 11,476,167
- Issue date Oct 18, 2022
- SCREEN Holdings Co., Ltd.
- Takahiro Kitazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating treatment method and optical heating device
- Patent number 11,398,394
- Issue date Jul 26, 2022
- Ushio Denki Kabushiki Kaisha
- Takafumi Mizojiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for microwave treatment of dielectric films
- Patent number 11,343,884
- Issue date May 24, 2022
- Applied Materials, Inc.
- Iftikhar Ahmad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light irradiation type heat treatment method and heat treatment app...
- Patent number 11,282,708
- Issue date Mar 22, 2022
- SCREEN Holdings Co., Ltd.
- Akitsugu Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light irradiation type heat treatment method and heat treatment app...
- Patent number 11,276,575
- Issue date Mar 15, 2022
- SCREEN Holdings Co., Ltd.
- Yoshihide Nozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing method and thermal processing device
- Patent number 11,251,057
- Issue date Feb 15, 2022
- SCREEN Holdings Co., Ltd.
- Yukio Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,239,098
- Issue date Feb 1, 2022
- Kokusai Electric Corporation
- Yukitomo Hirochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Artificial neural networks (ANN) including a resistive element base...
- Patent number 11,227,996
- Issue date Jan 18, 2022
- International Business Machines Corporation
- Ali Afzali-Ardakani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing device, substrate processing method, and subst...
- Patent number 11,195,731
- Issue date Dec 7, 2021
- SCREEN Holdings Co., Ltd.
- Masafumi Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rod-shaped lamp and heat treatment apparatus
- Patent number 11,189,506
- Issue date Nov 30, 2021
- SCREEN Holdings Co., Ltd.
- Yoshio Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Artificial intelligence-enabled preparation end-pointing
- Patent number 11,176,656
- Issue date Nov 16, 2021
- FEI Company
- Thomas Gary Miller
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
SOI substrate compatible with the RFSOI and FDSOI technologies
- Patent number 11,171,158
- Issue date Nov 9, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Yann Lamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabrication system of semiconductor device and method of fabricatin...
- Patent number 11,086,224
- Issue date Aug 10, 2021
- Samsung Electronics Co., Ltd.
- Keunhee Bai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon carbide semiconductor device and method for manufacturing t...
- Patent number 11,069,779
- Issue date Jul 20, 2021
- Fuji Electric Co., Ltd.
- Kenichi Iguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for growing light emitting devices under ultra-violet illum...
- Patent number 11,069,836
- Issue date Jul 20, 2021
- Lumileds LLC
- Tsutomu Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for fabricating artificial neural networks (ANN) based on d...
- Patent number 11,024,803
- Issue date Jun 1, 2021
- International Business Machines Corporation
- Ali Afzali-Ardakani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of dicing a wafer by pre-sawing and subsequent laser cutting
- Patent number 10,985,065
- Issue date Apr 20, 2021
- Disco Corporation
- Yohei Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method and heat treatment apparatus for heating subs...
- Patent number 10,978,309
- Issue date Apr 13, 2021
- SCREEN Holdings Co., Ltd.
- Kenichi Yokouchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming a metal silicide interconnection nanowire struc...
- Patent number 10,930,472
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Bencherki Mebarki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for dopant activation using microwave radiation
- Patent number 10,923,355
- Issue date Feb 16, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser irradiation apparatus, thin film transistor, and method of ma...
- Patent number 10,896,817
- Issue date Jan 19, 2021
- V Technology Co. Ltd.
- Michinobu Mizumura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ARTIFICIAL INTELLIGENCE-ENABLED PREPARATION END-POINTING
- Publication number 20240071040
- Publication date Feb 29, 2024
- FEI Company
- Thomas Gary Miller
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CMOS WELL REGIONS WITH HIGH DOPANT ACTIVATION LEVEL AND REDUCED EXT...
- Publication number 20240006246
- Publication date Jan 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Fan Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSCEPTOR FOR SEMICONDUCTOR SUBSTRATE PROCESSING
- Publication number 20230386889
- Publication date Nov 30, 2023
- ASM IP HOLDING, B.V.
- Saket Rathi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT DEVICE, THERMAL PROCESSING APPARATUS, SUBSTRATE S...
- Publication number 20230253237
- Publication date Aug 10, 2023
- SCREEN Holdings Co., Ltd.
- Scott PRENGLE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL HEATING DEVICE AND METHOD OF HEATING TREATMENT
- Publication number 20230238259
- Publication date Jul 27, 2023
- Ushio Denki Kabushiki Kaisha
- Tomonori Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20230106341
- Publication date Apr 6, 2023
- Kokusai Electric Corporation
- Aiko UMEDA
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
Workpiece Processing Apparatus with Vacuum Anneal Reflector Control
- Publication number 20220199376
- Publication date Jun 23, 2022
- Mattson Technology, Inc.
- Michael Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220189773
- Publication date Jun 16, 2022
- SCREEN Holdings Co., Ltd.
- Ayumi HIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPLEMENTAL ENERGY FOR LOW TEMPERATURE PROCESSES
- Publication number 20220162756
- Publication date May 26, 2022
- Applied Materials, Inc.
- David K. CARLSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATING TREATMENT METHOD AND OPTICAL HEATING DEVICE
- Publication number 20220148895
- Publication date May 12, 2022
- USHIO DENKI KABUSHIKI KAISHA
- Takafumi Mizojiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING DEVICE AND HEATING METHOD
- Publication number 20220093422
- Publication date Mar 24, 2022
- TOKYO ELECTRON LIMITED
- Takashi SUGIMOTO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ARTIFICIAL INTELLIGENCE-ENABLED PREPARATION END-POINTING
- Publication number 20220067915
- Publication date Mar 3, 2022
- FEI Company
- Thomas Gary Miller
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT METHOD
- Publication number 20220037164
- Publication date Feb 3, 2022
- SCREEN Holdings Co., Ltd.
- Mao OMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20210407865
- Publication date Dec 30, 2021
- Kokusai Electric Corporation
- Kenji SHINOZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS OF LIGHT IRRADIA...
- Publication number 20210327771
- Publication date Oct 21, 2021
- SCREEN Holdings Co., Ltd.
- Takahiro KITAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OHMIC CONTACT FORMATION IN A SIC-BASED ELECTRONIC DEVICE
- Publication number 20210328022
- Publication date Oct 21, 2021
- STMicroelectronics S.r.l.
- Simone RASCUNÁ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS
- Publication number 20210272827
- Publication date Sep 2, 2021
- SCREEN Holdings Co., Ltd.
- Oma NAKAJIMA
- G01 - MEASURING TESTING
Information Patent Application
SUSCEPTOR FOR SEMICONDUCTOR SUBSTRATE PROCESSING
- Publication number 20210125853
- Publication date Apr 29, 2021
- ASM IP HOLDING B.V.
- Saket Rathi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Features for Improving Process Uniformity in a Millisecond Anneal S...
- Publication number 20200402811
- Publication date Dec 24, 2020
- Mattson Technology, Inc.
- Alexandr Cosceev
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
FABRICATION SYSTEM OF SEMICONDUCTOR DEVICE AND METHOD OF FABRICATIN...
- Publication number 20200348599
- Publication date Nov 5, 2020
- SAMSUNG ELECTRONICS CO., LTD.
- Keunhee Bai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
THERMAL PROCESSING METHOD AND THERMAL PROCESSING DEVICE
- Publication number 20200335366
- Publication date Oct 22, 2020
- SCREEN Holdings Co., Ltd.
- Yukio ONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT METHOD AND HEAT TREATMENT APP...
- Publication number 20200328083
- Publication date Oct 15, 2020
- SCREEN Holdings Co., Ltd.
- Akitsugu UEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARTIFICIAL INTELLIGENCE-ENABLED PREPARATION END-POINTING
- Publication number 20200279362
- Publication date Sep 3, 2020
- FEI Company
- Thomas Gary Miller
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS, AND HEAT TREATMENT...
- Publication number 20200266084
- Publication date Aug 20, 2020
- SCREEN Holdings Co., Ltd.
- Takayuki AOYAMA
- G01 - MEASURING TESTING
Information Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT METHOD AND HEAT TREATMENT APP...
- Publication number 20200211851
- Publication date Jul 2, 2020
- SCREEN Holdings Co., Ltd.
- Yoshihide NOZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dicing A Wafer
- Publication number 20200203227
- Publication date Jun 25, 2020
- TEXAS INSTRUMENTS INCORPORATED
- Jerry Gomez Cayabyab
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOI SUBSTRATE COMPATIBLE WITH THE RFSOI AND FDSOI TECHNOLOGIES
- Publication number 20200161336
- Publication date May 21, 2020
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Yann LAMY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Systems for Dopant Activation Using Microwave Radiation
- Publication number 20200135468
- Publication date Apr 30, 2020
- Taiwan Semiconductor Manufacturing Company Limited
- CHUN-HSIUNG TSAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Methods For Growing Light Emitting Devices Under Ultra-Violet Illum...
- Publication number 20200127166
- Publication date Apr 23, 2020
- Lumileds LLC
- Tsutomu Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DICING A WAFER
- Publication number 20190385911
- Publication date Dec 19, 2019
- TEXAS INSTRUMENTS INCORPORATED
- JERRY GOMEZ CAYABYAB
- H01 - BASIC ELECTRIC ELEMENTS

using incoherent radiation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Heat treatment method and heat treatment apparatus

Heat treatment method and heat treatment apparatus of light irradia...

Supplemental energy for low temperature processes

Light irradiation type heat treatment method

Substrate processing method and substrate processing apparatus

Heat treatment method and heat treatment apparatus of light irradia...

Artificial intelligence-enabled preparation end-pointing

Susceptor for semiconductor substrate processing

Substrate support device, thermal processing apparatus, substrate s...

Heat treatment method and heat treatment apparatus of light irradia...

Heating treatment method and optical heating device

Method and apparatus for microwave treatment of dielectric films

Light irradiation type heat treatment method and heat treatment app...

Light irradiation type heat treatment method and heat treatment app...

Thermal processing method and thermal processing device

Substrate processing apparatus, method of manufacturing semiconduct...

Artificial neural networks (ANN) including a resistive element base...

Substrate processing device, substrate processing method, and subst...

Rod-shaped lamp and heat treatment apparatus

Artificial intelligence-enabled preparation end-pointing

SOI substrate compatible with the RFSOI and FDSOI technologies

Fabrication system of semiconductor device and method of fabricatin...

Silicon carbide semiconductor device and method for manufacturing t...

Methods for growing light emitting devices under ultra-violet illum...

Methods for fabricating artificial neural networks (ANN) based on d...

Method of dicing a wafer by pre-sawing and subsequent laser cutting

Heat treatment method and heat treatment apparatus for heating subs...

Methods for forming a metal silicide interconnection nanowire struc...

Methods and systems for dopant activation using microwave radiation

Laser irradiation apparatus, thin film transistor, and method of ma...

Patents Applicationslast 30 patents

ARTIFICIAL INTELLIGENCE-ENABLED PREPARATION END-POINTING

CMOS WELL REGIONS WITH HIGH DOPANT ACTIVATION LEVEL AND REDUCED EXT...

SUSCEPTOR FOR SEMICONDUCTOR SUBSTRATE PROCESSING

SUBSTRATE SUPPORT DEVICE, THERMAL PROCESSING APPARATUS, SUBSTRATE S...

OPTICAL HEATING DEVICE AND METHOD OF HEATING TREATMENT

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

Workpiece Processing Apparatus with Vacuum Anneal Reflector Control

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUPPLEMENTAL ENERGY FOR LOW TEMPERATURE PROCESSES

HEATING TREATMENT METHOD AND OPTICAL HEATING DEVICE

HEATING DEVICE AND HEATING METHOD

ARTIFICIAL INTELLIGENCE-ENABLED PREPARATION END-POINTING

LIGHT IRRADIATION TYPE HEAT TREATMENT METHOD

Method of Manufacturing Semiconductor Device, Substrate Processing...

HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS OF LIGHT IRRADIA...

OHMIC CONTACT FORMATION IN A SIC-BASED ELECTRONIC DEVICE

HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS

SUSCEPTOR FOR SEMICONDUCTOR SUBSTRATE PROCESSING

Features for Improving Process Uniformity in a Millisecond Anneal S...

FABRICATION SYSTEM OF SEMICONDUCTOR DEVICE AND METHOD OF FABRICATIN...

THERMAL PROCESSING METHOD AND THERMAL PROCESSING DEVICE

LIGHT IRRADIATION TYPE HEAT TREATMENT METHOD AND HEAT TREATMENT APP...

ARTIFICIAL INTELLIGENCE-ENABLED PREPARATION END-POINTING

LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS, AND HEAT TREATMENT...

LIGHT IRRADIATION TYPE HEAT TREATMENT METHOD AND HEAT TREATMENT APP...

Dicing A Wafer

SOI SUBSTRATE COMPATIBLE WITH THE RFSOI AND FDSOI TECHNOLOGIES

Methods and Systems for Dopant Activation Using Microwave Radiation

Methods For Growing Light Emitting Devices Under Ultra-Violet Illum...

DICING A WAFER