Membership
Tour
Register
Log in
using ion beam radiation
Follow
Industry
CPC
C23C16/486
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
C
CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C16/00
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating
Current Industry
C23C16/486
using ion beam radiation
Industries
Overview
Organizations
People
Information
Impact
Please log in for detailed analytics
Patents Grants
last 30 patents
Information
Patent Grant
Method of forming structures using a neutral beam
Patent number
12,129,548
Issue date
Oct 29, 2024
ASM IP Holding B.V.
Tomohiro Kubota
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for long-term storage of information and storage medium ther...
Patent number
12,070,818
Issue date
Aug 27, 2024
Ceramic Data Solutions GmbH
Martin Kunze
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method of manufacturing semiconductor device and ion beam irradiati...
Patent number
12,040,155
Issue date
Jul 16, 2024
Kioxia Corporation
Junichi Hashimoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Depositive shielding for fiducial protection from redeposition
Patent number
11,817,395
Issue date
Nov 14, 2023
FEI Company
Sean Morgan-Jones
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High power wafer cooling
Patent number
11,670,483
Issue date
Jun 6, 2023
Axcelis Technologies, Inc.
Joseph Ferrara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming structures using a neutral beam
Patent number
11,643,724
Issue date
May 9, 2023
ASM IP Holding B.V.
Tomohiro Kubota
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for fabricating fibers and microstructures fro...
Patent number
11,499,230
Issue date
Nov 15, 2022
Dynetics, Inc.
James L. Maxwell
D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Information
Patent Grant
Post-production substrate modification with FIB deposition
Patent number
11,139,217
Issue date
Oct 5, 2021
BAE Systems Information and Electronic Systems Integration Inc.
Jeffrey A. Zimmerman
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method and apparatus for depositing a monolayer on a three dimensio...
Patent number
11,031,247
Issue date
Jun 8, 2021
Varian Semiconductor Equipment Associates, Inc.
Thomas R. Omstead
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for long-term storage of information and storage medium ther...
Patent number
11,007,606
Issue date
May 18, 2021
Ceramic Data Solution GMBH
Martin Kunze
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Use of a diamond layer doped with foreign atoms to detect the degre...
Patent number
10,974,360
Issue date
Apr 13, 2021
Guehring KG
Immo Garrn
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for fabricating fibers and microstructures fro...
Patent number
10,947,622
Issue date
Mar 16, 2021
Dynetics, Inc.
James L. Maxwell
D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Information
Patent Grant
Method for manufacturing graphene and apparatus for manufacturing g...
Patent number
10,738,377
Issue date
Aug 11, 2020
Tokyo Electron Limited
Takashi Matsumoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and device for permanently repairing defects of absent mater...
Patent number
10,732,501
Issue date
Aug 4, 2020
Carl Zeiss SMT GmbH
Jens Oster
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for fabricating fibers and microstructures fro...
Patent number
10,683,574
Issue date
Jun 16, 2020
Dynetics, Inc.
James L. Maxwell
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processes for producing orthopedic implants having a subsurface lev...
Patent number
10,619,238
Issue date
Apr 14, 2020
Joint Development, LLC
Eric M. Dacus
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Patterned atomic layer etching and deposition using miniature-colum...
Patent number
10,607,845
Issue date
Mar 31, 2020
Kevin M. Monahan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Adaptive beam current for high throughput patterning
Patent number
10,415,133
Issue date
Sep 17, 2019
FEI Company
Aurelien Philippe Jean Maclou Botman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and device for permanently repairing defects of absent mater...
Patent number
10,372,032
Issue date
Aug 6, 2019
Carl Zeiss SMT GmbH
Jens Oster
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for carbon film deposition profile control
Patent number
10,280,512
Issue date
May 7, 2019
Varian Semiconductor Equipment Associates, Inc.
Alex Tsung-Liang Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for fabricating fibers and microstructures fro...
Patent number
10,167,555
Issue date
Jan 1, 2019
Dynetics, Inc.
James L. Maxwell
D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Information
Patent Grant
Method and apparatus for fabricating fibers and microstructures fro...
Patent number
10,106,894
Issue date
Oct 23, 2018
Dynetics, Inc.
James L. Maxwell
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Anti-reflective lenses and methods for manufacturing the same
Patent number
10,073,194
Issue date
Sep 11, 2018
Qspex Technologies, Inc.
Kai C. Su
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method of depositing material
Patent number
9,951,417
Issue date
Apr 24, 2018
FEI Company
Aurelien Philippe Jean Maclou Botman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High efficiency apparatus and method for depositing a layer on a th...
Patent number
9,929,015
Issue date
Mar 27, 2018
Varian Semiconductor Equipment Associates, Inc.
Thomas R. Omstead
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for selectively depositing a layer on a three dimensional st...
Patent number
9,847,228
Issue date
Dec 19, 2017
Varian Semiconductor Equipment Associates, Inc.
Simon Ruffell
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition method and focused ion beam system
Patent number
9,824,856
Issue date
Nov 21, 2017
Jeol Ltd.
Misumi Kadoi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for nanofabrication using a pliable membrane...
Patent number
9,588,416
Issue date
Mar 7, 2017
Columbia University
Dirk Robert Englund
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Precision deposition using miniature-column charged particle beam a...
Patent number
9,556,521
Issue date
Jan 31, 2017
Multibeam Corporation
Theodore A. Prescop
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for selectively depositing a layer on a three dimensional st...
Patent number
9,453,279
Issue date
Sep 27, 2016
Varian Semiconductor Equipment Associates, Inc.
Simon Ruffell
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Method for Long-Term Storage of Information and Storage Medium Ther...
Publication number
20240416458
Publication date
Dec 19, 2024
Ceramic Data Solution GmbH
Martin Kunze
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ENHANCED DEPOSITION RATE BY THERMAL ISOLATION COVER FOR GIS MANIPUL...
Publication number
20240062990
Publication date
Feb 22, 2024
APPLIED MATERIALS ISRAEL LTD.
Sean Kashy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR DEPOSITION OF AT LEAST ONE LAYER, OPTICAL...
Publication number
20240035163
Publication date
Feb 1, 2024
Carl Zeiss SMT GMBH
Felix LANGE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING STRUCTURES USING A NEUTRAL BEAM, STRUCTURES FORME...
Publication number
20230250531
Publication date
Aug 10, 2023
ASM IP HOLDING B.V.
Tomohiro Kubota
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TEMPERATURE-CONTROLLED SURFACE WITH A CRYO-NANOMANIPULATOR FOR IMPR...
Publication number
20230023396
Publication date
Jan 26, 2023
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND ION BEAM IRRADIATI...
Publication number
20220301809
Publication date
Sep 22, 2022
KIOXIA Corporation
Junichi HASHIMOTO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ORTHOPEDIC IMPLANTS HAVING A SUBSURFACE LEVEL CERAMIC LAYER APPLIED...
Publication number
20220228258
Publication date
Jul 21, 2022
Joint Development, LLC
Eric M. Dacus
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
PROCESSES FOR PRODUCING ORTHOPEDIC IMPLANTS HAVING A SUBSURFACE LEV...
Publication number
20220228259
Publication date
Jul 21, 2022
Joint Development, LLC
Eric M. Dacus
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
Method and Apparatus for Fabricating Fibers and Microstructures fro...
Publication number
20220074051
Publication date
Mar 10, 2022
Dynetics, Inc.
James L. Maxwell
D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Information
Patent Application
Method for Long-Term Storage of Information and Storage Medium Ther...
Publication number
20210252645
Publication date
Aug 19, 2021
Ceramic Data Solution GmbH
Martin Kunze
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD OF FORMING STRUCTURES USING A NEUTRAL BEAM, STRUCTURES FORME...
Publication number
20210017648
Publication date
Jan 21, 2021
ASM IP HOLDING B.V.
Tomohiro Kubota
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and Apparatus for Fabricating Fibers and Microstructures fro...
Publication number
20200332417
Publication date
Oct 22, 2020
Dynetics, Inc.
James L. Maxwell
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Application
MAGNETIC RECORDING MEDIUM AND MAGNETIC RECORDING AND REPRODUCING DE...
Publication number
20200286515
Publication date
Sep 10, 2020
FUJIFILM CORPORATION
Masahiko MORI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and Apparatus for Fabricating Fibers and Microstructures fro...
Publication number
20200149167
Publication date
May 14, 2020
Dynetics, Inc.
James L. Maxwell
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
USE OF A DIAMOND LAYER DOPED WITH FOREIGN ATOMS TO DETECT THE DEGRE...
Publication number
20200094364
Publication date
Mar 26, 2020
Guehring KG
Immo GARRN
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND DEVICE FOR PERMANENTLY REPAIRING DEFECTS OF ABSENT MATER...
Publication number
20190317395
Publication date
Oct 17, 2019
Carl Zeiss SMT GMBH
Jens Oster
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR DEPOSITING A MONOLAYER ON A THREE DIMENSIO...
Publication number
20180182627
Publication date
Jun 28, 2018
Varian Semiconductor Equipment Associates, Inc.
Thomas R. Omstead
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR CARBON FILM DEPOSITION PROFILE CONTROL
Publication number
20170029950
Publication date
Feb 2, 2017
Varian Semiconductor Equipment Associates, Inc.
Alex Tsung-Liang Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and Apparatus for Fabricating Fibers and Microstructures fro...
Publication number
20160369400
Publication date
Dec 22, 2016
Dynetics, Inc.
James L. Maxwell
D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Information
Patent Application
Method For Optimizing A Deposition Process, Method For Setting A De...
Publication number
20160017496
Publication date
Jan 21, 2016
JOHANN WOLFGANG GOETHE-UNIVERSITÄT
MICHAEL HUTH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BEAM-INDUCED DEPOSITION OF LOW-RESISTIVITY MATERIAL
Publication number
20160010211
Publication date
Jan 14, 2016
FEI Company
Steven Randolph
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH EFFICIENCY APPARATUS AND METHOD FOR DEPOSITING A LAYER ON A TH...
Publication number
20160005594
Publication date
Jan 7, 2016
Varian Semiconductor Equipment Associates, Inc.
Thomas R. Omstead
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR DEPOSITING A MONOLAYER ON A THREE DIMENSIO...
Publication number
20160002784
Publication date
Jan 7, 2016
Varian Semiconductor Equipment Associates, Inc.
Thomas R. Omstead
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS CLUSTER REACTOR FOR ANISOTROPIC FILM GROWTH
Publication number
20150376791
Publication date
Dec 31, 2015
International Business Machines Corporation
Oleg Gluschenkov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and System of Creating a Symmetrical FIB Deposition
Publication number
20150369710
Publication date
Dec 24, 2015
FEI Company
Scott Edward Fuller
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING DISPLAY APPARATUS
Publication number
20150364719
Publication date
Dec 17, 2015
SAMSUNG DISPLAY CO., LTD.
Jai-Hyuk CHOI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ION BOMBARDMENT DEVICE AND METHOD FOR USING THE SAME TO CLEAN SUBST...
Publication number
20150299847
Publication date
Oct 22, 2015
Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
Satoshi HIROTA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ANTI-REFLECTIVE LENSES AND METHODS FOR MANUFACTURING THE SAME
Publication number
20150212237
Publication date
Jul 30, 2015
QSPEX TECHNOLOGIES, INC.
Kai C. Su
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
Processing System
Publication number
20150114294
Publication date
Apr 30, 2015
CARL ZEISS MICROSCOPY GMBH
Emmerich Bertagnolli
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF DEPOSITING MATERIAL
Publication number
20150099071
Publication date
Apr 9, 2015
FEI Company
Aurélien Philippe Jean Maclou Botman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...