using ion beams

Industry

CPC
H01J2237/31755

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/31755using ion beams

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Particle beam apparatus, defect repair method, lithographic exposur...
- Patent number 11,996,267
- Issue date May 28, 2024
- ASML Netherlands B.V.
- Ruben Cornelis Maas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Micro-electro-mechanical-systems processing method, and micro-elect...
- Patent number 10,662,059
- Issue date May 26, 2020
- Hitachi, Ltd.
- Keiji Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Charged-particle beam exposure method and charged-particle beam cor...
- Patent number 10,056,229
- Issue date Aug 21, 2018
- Samsung Electronics Co., Ltd.
- Sukjong Bae
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Ion sources, systems and methods
- Patent number 9,236,225
- Issue date Jan 12, 2016
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Ion sources, systems and methods
- Patent number 9,012,867
- Issue date Apr 21, 2015
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Ion sources, systems and methods
- Patent number 8,748,845
- Issue date Jun 10, 2014
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Accelerator on a chip having a grid and plate cell
- Patent number 8,564,225
- Issue date Oct 22, 2013
- Transmute, Inc.
- Kim L. Hailey
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Accelerator on a chip having a cold ion source
- Patent number 8,541,757
- Issue date Sep 24, 2013
- Transmute, Inc.
- Kim L. Hailey
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Ion sources, systems and methods
- Patent number 8,110,814
- Issue date Feb 7, 2012
- ALIS Corporation
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Installation and method of nanofabrication
- Patent number 8,101,925
- Issue date Jan 24, 2012
- Centre National de la Recherche Scientifique CNRS
- Jacques Gierak
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Ion sources, systems and methods
- Patent number 7,786,451
- Issue date Aug 31, 2010
- ALIS Corporation
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 7,557,358
- Issue date Jul 7, 2009
- ALIS Corporation
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 7,557,361
- Issue date Jul 7, 2009
- ALIS Corporation
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 7,557,360
- Issue date Jul 7, 2009
- ALIS Corporation
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 7,557,359
- Issue date Jul 7, 2009
- ALIS Corporation
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 7,554,096
- Issue date Jun 30, 2009
- ALIS Corporation
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 7,554,097
- Issue date Jun 30, 2009
- ALIS Corporation
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 7,521,693
- Issue date Apr 21, 2009
- ALIS Corporation
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 7,518,122
- Issue date Apr 14, 2009
- ALIS Corporation
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 7,511,280
- Issue date Mar 31, 2009
- ALIS Corporation
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 7,511,279
- Issue date Mar 31, 2009
- ALIS Corporation
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 7,504,639
- Issue date Mar 17, 2009
- ALIS Corporation
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 7,495,232
- Issue date Feb 24, 2009
- ALIS Corporation
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 7,488,952
- Issue date Feb 10, 2009
- ALIS Corporation
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 7,485,873
- Issue date Feb 3, 2009
- ALIS Corporation
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Double layer patterning and technique for milling patterns for a se...
- Patent number 7,386,934
- Issue date Jun 17, 2008
- Advanced Research Corporation
- Matthew P. Dugas
- G11 - INFORMATION STORAGE
Information Patent Grant
Micromachining process, system and product
- Patent number 7,385,209
- Issue date Jun 10, 2008
- Haute Ecole Arc Ne-Be-Ju
- Samuel Jaccard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ion printer
- Patent number 7,139,009
- Issue date Nov 21, 2006
- Boris Aronovich Gurovich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for single ion implantation
- Patent number 7,002,166
- Issue date Feb 21, 2006
- Qucor Pty Ltd
- David Norman Jamieson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Angular aperture shaped beam system and method
- Patent number 6,977,386
- Issue date Dec 20, 2005
- FEI Company
- Robert L. Gerlach
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION BEAM LITHOGRAPHY AND NANOENGINEERING
- Publication number 20240222073
- Publication date Jul 4, 2024
- Intel Corporation
- Shida Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Beam Pattern Definition Device
- Publication number 20230360880
- Publication date Nov 9, 2023
- IMS Nanofabrication GmbH
- Stefan Eder-Kapl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM APPARATUS, DEFECT REPAIR METHOD, LITHOGRAPHIC EXPOSUR...
- Publication number 20210327678
- Publication date Oct 21, 2021
- ASML NETHERLANDS B.V.
- Ruben Cornelis MAAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICRO-ELECTRO-MECHANICAL-SYSTEMS PROCESSING METHOD, AND MICRO-ELECT...
- Publication number 20190062157
- Publication date Feb 28, 2019
- Hitachi, Ltd
- Keiji WATANABE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CHARGED-PARTICLE BEAM EXPOSURE METHOD AND CHARGED-PARTICLE BEAM COR...
- Publication number 20180012730
- Publication date Jan 11, 2018
- Samsung Electronics Co., Ltd.
- SUKJONG BAE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCES, SYSTEMS AND METHODS
- Publication number 20140306121
- Publication date Oct 16, 2014
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
ION SOURCES, SYSTEMS AND METHODS
- Publication number 20120141693
- Publication date Jun 7, 2012
- ALIS Corporation
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
ION SOURCES, SYSTEMS AND METHODS
- Publication number 20090179161
- Publication date Jul 16, 2009
- ALIS Corporation
- BILLY W. WARD
- B82 - NANO-TECHNOLOGY
Information Patent Application
INSTALLATION AND METHOD OF NANOFABRICATION
- Publication number 20090095923
- Publication date Apr 16, 2009
- CENTRE NATIONAL DE LA RECHERCHESECIENTIFQUE-CNRS
- Jacques Gierak
- G01 - MEASURING TESTING
Information Patent Application
ION BEAM APPARATUS AND METHOD FOR ALIGNING SAME
- Publication number 20080073583
- Publication date Mar 27, 2008
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Thomas JASINSKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion sources, systems and methods
- Publication number 20070221843
- Publication date Sep 27, 2007
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion sources, systems and methods
- Publication number 20070210250
- Publication date Sep 13, 2007
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion sources, systems and methods
- Publication number 20070210251
- Publication date Sep 13, 2007
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion sources, systems and methods
- Publication number 20070205375
- Publication date Sep 6, 2007
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion sources, systems and methods
- Publication number 20070194251
- Publication date Aug 23, 2007
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion sources, systems and methods
- Publication number 20070194226
- Publication date Aug 23, 2007
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion sources, systems and methods
- Publication number 20070187621
- Publication date Aug 16, 2007
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion sources, systems and methods
- Publication number 20070158555
- Publication date Jul 12, 2007
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion sources, systems and methods
- Publication number 20070158556
- Publication date Jul 12, 2007
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion sources, systems and methods
- Publication number 20070158558
- Publication date Jul 12, 2007
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion sources, systems and methods
- Publication number 20070158557
- Publication date Jul 12, 2007
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion sources, systems and methods
- Publication number 20070158580
- Publication date Jul 12, 2007
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion sources, systems and methods
- Publication number 20070158581
- Publication date Jul 12, 2007
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion sources, systems and methods
- Publication number 20070158582
- Publication date Jul 12, 2007
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion sources, systems and methods
- Publication number 20070138388
- Publication date Jun 21, 2007
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
Micromachining process, system and product
- Publication number 20060214105
- Publication date Sep 28, 2006
- Samuel Jaccard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Double layer patterning and technique for milling patterns for a se...
- Publication number 20060213053
- Publication date Sep 28, 2006
- ADVANCED RESEARCH CORPORATION
- Matthew P. Dugas
- G11 - INFORMATION STORAGE
Information Patent Application
Ion printer
- Publication number 20050104014
- Publication date May 19, 2005
- Boris Aronovich Gurovich
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
Method and system for single ion implanation
- Publication number 20040232353
- Publication date Nov 25, 2004
- David Norman Jamieson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Apparatus for enhancing the lifetime of stencil masks
- Publication number 20040188243
- Publication date Sep 30, 2004
- Elmar Platzgummer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using ion beams

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Particle beam apparatus, defect repair method, lithographic exposur...

Micro-electro-mechanical-systems processing method, and micro-elect...

Charged-particle beam exposure method and charged-particle beam cor...

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Accelerator on a chip having a grid and plate cell

Accelerator on a chip having a cold ion source

Ion sources, systems and methods

Installation and method of nanofabrication

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Double layer patterning and technique for milling patterns for a se...

Micromachining process, system and product

Ion printer

Method and system for single ion implantation

Angular aperture shaped beam system and method

Patents Applicationslast 30 patents

ION BEAM LITHOGRAPHY AND NANOENGINEERING

Multi-Beam Pattern Definition Device

PARTICLE BEAM APPARATUS, DEFECT REPAIR METHOD, LITHOGRAPHIC EXPOSUR...

MICRO-ELECTRO-MECHANICAL-SYSTEMS PROCESSING METHOD, AND MICRO-ELECT...

CHARGED-PARTICLE BEAM EXPOSURE METHOD AND CHARGED-PARTICLE BEAM COR...

ION SOURCES, SYSTEMS AND METHODS

ION SOURCES, SYSTEMS AND METHODS

ION SOURCES, SYSTEMS AND METHODS

INSTALLATION AND METHOD OF NANOFABRICATION

ION BEAM APPARATUS AND METHOD FOR ALIGNING SAME

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Micromachining process, system and product

Double layer patterning and technique for milling patterns for a se...

Ion printer

Method and system for single ion implanation

Apparatus for enhancing the lifetime of stencil masks