using ions

Industry

CPC
H01J2237/31737

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/31737using ions

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Low keV ion beam image restoration by machine learning for object l...
- Patent number 11,355,305
- Issue date Jun 7, 2022
- FEI Company
- Remco Johannes Petrus Geurts
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Ionization chamber chip for a nano-aperture ion source, method of f...
- Patent number 11,056,315
- Issue date Jul 6, 2021
- National University of Singapore
- Jeroen Anton Van Kan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Patterned atomic layer etching and deposition using miniature-colum...
- Patent number 10,607,845
- Issue date Mar 31, 2020
- Kevin M. Monahan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for processing a substrate with a focused part...
- Patent number 9,721,754
- Issue date Aug 1, 2017
- Carl Zeiss SMT GmbH
- Tristan Bret
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Precision deposition using miniature-column charged particle beam a...
- Patent number 9,556,521
- Issue date Jan 31, 2017
- Multibeam Corporation
- Theodore A. Prescop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precision deposition using miniature-column charged particle beam a...
- Patent number 9,453,281
- Issue date Sep 27, 2016
- Multibeam Corporation
- Theodore A. Prescop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for controlled particle beam manufacturing
- Patent number 8,658,994
- Issue date Feb 25, 2014
- Nexgen Semi Holding, Inc.
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Gas field ion microscopes having multiple operation modes
- Patent number 8,455,840
- Issue date Jun 4, 2013
- Carl Zeiss Microscopy, LLC
- Lawrence Scipioni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to direct pattern metals on a substrate
- Patent number 8,278,220
- Issue date Oct 2, 2012
- FEI Company
- Theresa Holtermann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Installation and method of nanofabrication
- Patent number 8,101,925
- Issue date Jan 24, 2012
- Centre National de la Recherche Scientifique CNRS
- Jacques Gierak
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electrospray deposition: devices and methods thereof
- Patent number 8,007,871
- Issue date Aug 30, 2011
- NanoSelect, Inc.
- Piu Francis Man
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and method for controlled particle beam manufacturing
- Patent number 7,659,526
- Issue date Feb 9, 2010
- NexGen Semi Holding, Inc.
- Michael John Zani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controlled particle beam manufacturing
- Patent number 7,507,960
- Issue date Mar 24, 2009
- NexGen Semi Holding, Inc.
- Michael John Zani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controlled particle beam manufacturing
- Patent number 7,501,644
- Issue date Mar 10, 2009
- NexGen Semi Holding, Inc.
- Michael John Zani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controlled particle beam manufacturing
- Patent number 7,495,245
- Issue date Feb 24, 2009
- NexGen Semi Holding, Inc.
- Michael John Zani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controlled particle beam manufacturing
- Patent number 7,495,242
- Issue date Feb 24, 2009
- NexGen Semi Holding, Inc.
- Michael John Zani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controlled particle beam manufacturing
- Patent number 7,495,244
- Issue date Feb 24, 2009
- NexGen Semi Holding, Inc.
- Michael John Zani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controlled particle beam manufacturing
- Patent number 7,488,960
- Issue date Feb 10, 2009
- NexGen Semi Holding, Inc.
- Michael John Zani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and method of forming electrodes ha...
- Patent number 7,301,159
- Issue date Nov 27, 2007
- Riken & SII NanoTechnology Inc.
- Toshiaki Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for fabricating three-dimensional microstructure
- Patent number 7,267,731
- Issue date Sep 11, 2007
- SII NanoTechnology Inc.
- Kouji Iwasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for controlled particle beam manufacturing
- Patent number 7,259,373
- Issue date Aug 21, 2007
- NexGenSemi Holdings Corporation
- Michael John Zani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced scanning control of charged particle beam systems
- Patent number 7,230,240
- Issue date Jun 12, 2007
- Credence Systems Corporation
- James Siebert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method of positionally accurate implantation of individu...
- Patent number 7,126,139
- Issue date Oct 24, 2006
- The Regents of the University of California
- Thomas Schenkel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system
- Patent number 6,979,822
- Issue date Dec 27, 2005
- FEI Company
- Diane K. Stewart
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for forming a cavity in a semiconductor substr...
- Patent number 6,855,622
- Issue date Feb 15, 2005
- NPTest, LLC
- Erwan Le Roy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabrication of high resistivity structures using focused ion beams
- Patent number 6,838,380
- Issue date Jan 4, 2005
- FEI Company
- Neil J. Bassom
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Projection ion beam machining apparatus
- Patent number 6,583,426
- Issue date Jun 24, 2003
- Hitachi, Ltd.
- Yoshimi Kawanami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for assisting backside focused ion beam device modification
- Patent number 6,566,681
- Issue date May 20, 2003
- International Business Machines Corporation
- David E. Lackey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for defining a pattern on a substrate
- Patent number 6,313,905
- Issue date Nov 6, 2001
- International Business Machines Corporation
- Juergen P. Brugger
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Depth enhancement of ion sensitized data
- Patent number 6,230,071
- Issue date May 8, 2001
- The Regents of the University of California
- Bruce C. Lamartine
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUSES FOR PROCESSING A LITHOGRAPHIC OBJECT
- Publication number 20240310722
- Publication date Sep 19, 2024
- Carl Zeiss SMT GMBH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW KEV ION BEAM IMAGE RESTORATION BY MACHINE LEARNING FOR OBJECT L...
- Publication number 20210104375
- Publication date Apr 8, 2021
- FEI Company
- Remco Johannes Petrus Geurts
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AN IONIZATION CHAMBER CHIP FOR A NANO-APERTURE ION SOURCE, METHOD O...
- Publication number 20200211822
- Publication date Jul 2, 2020
- National University of Singapore
- Jeroen Anton VAN KAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR STRUCTURING AN OBJECT WITH THE AID OF A PARTICLE BEAM AP...
- Publication number 20160090645
- Publication date Mar 31, 2016
- CARL ZEISS MICROSCOPY GMBH
- Simon Stegmaier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE WITH A FOCUSED PART...
- Publication number 20120273458
- Publication date Nov 1, 2012
- Tristan Bret
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
- Publication number 20120112323
- Publication date May 10, 2012
- NEXGEN SEMI HOLDING, INC.
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
GAS FIELD ION MICROSCOPES HAVING MULTIPLE OPERATION MODES
- Publication number 20120068067
- Publication date Mar 22, 2012
- CARL ZEISS NTS, LLC.
- Lawrence Scipioni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
- Publication number 20100098922
- Publication date Apr 22, 2010
- NEXGEN SEMI HOLDING, INC.
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
ELECTROSPRAY DEPOSITION: DEVICES AND METHODS THEREOF
- Publication number 20100068406
- Publication date Mar 18, 2010
- Piu Francis Man
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD TO DIRECT PATTERN METALS ON A SUBSTRATE
- Publication number 20100032302
- Publication date Feb 11, 2010
- FEI Company
- THERESA HOLTERMANN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSTALLATION AND METHOD OF NANOFABRICATION
- Publication number 20090095923
- Publication date Apr 16, 2009
- CENTRE NATIONAL DE LA RECHERCHESECIENTIFQUE-CNRS
- Jacques Gierak
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
- Publication number 20070284695
- Publication date Dec 13, 2007
- NexGenSemi Holdings Corporation
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
- Publication number 20070284537
- Publication date Dec 13, 2007
- NexGenSemi Holdings Corporation
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
- Publication number 20070284538
- Publication date Dec 13, 2007
- NexGenSemi Holdings Corporation
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus and method for controlled particle beam manufacturing
- Publication number 20070284527
- Publication date Dec 13, 2007
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
- Publication number 20070278419
- Publication date Dec 6, 2007
- NexGenSemi Holdings Corporation
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
- Publication number 20070278418
- Publication date Dec 6, 2007
- NexGenSemi Holdings Corporation
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
- Publication number 20070278428
- Publication date Dec 6, 2007
- NexGenSemi Holdings Corporation
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus and method for controlled particle beam manufacturing
- Publication number 20070045534
- Publication date Mar 1, 2007
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method for engraving irreproducible pattern on the surface of a dia...
- Publication number 20060144821
- Publication date Jul 6, 2006
- Academia Sinica
- Yuh-Lin Wang
- A44 - HABERDASHERY JEWELLERY
Information Patent Application
Enhanced scanning control of charged particle beam systems
- Publication number 20060043312
- Publication date Mar 2, 2006
- James Siebert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus and method of forming electrodes ha...
- Publication number 20060038137
- Publication date Feb 23, 2006
- Toshiaki Fujii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM
- Publication number 20050279934
- Publication date Dec 22, 2005
- FEI Company
- Diane K. Stewart
- G01 - MEASURING TESTING
Information Patent Application
Device and method of positionally accurate implantation of individu...
- Publication number 20050077486
- Publication date Apr 14, 2005
- Thomas Schenkel
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method and system for fabricating three-diemensional microstructure
- Publication number 20040129351
- Publication date Jul 8, 2004
- Kouji Iwasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for forming a trench through a semiconductor s...
- Publication number 20030224601
- Publication date Dec 4, 2003
- Erwan Le Roy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for assisting backside focused ion beam device modification
- Publication number 20030015671
- Publication date Jan 23, 2003
- International Business Machines Corporation
- David E. Lackey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device for forming nanostructures on the surface of a semiconductor...
- Publication number 20020170497
- Publication date Nov 21, 2002
- Valery Konstantinovich Smirnov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fabrication of high resistivity structures using focused ion beams
- Publication number 20020102861
- Publication date Aug 1, 2002
- Neil J. Bassom
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Low keV ion beam image restoration by machine learning for object l...

Ionization chamber chip for a nano-aperture ion source, method of f...

Patterned atomic layer etching and deposition using miniature-colum...

Method and apparatus for processing a substrate with a focused part...

Precision deposition using miniature-column charged particle beam a...

Precision deposition using miniature-column charged particle beam a...

Apparatus and method for controlled particle beam manufacturing

Gas field ion microscopes having multiple operation modes

Method to direct pattern metals on a substrate

Installation and method of nanofabrication

Electrospray deposition: devices and methods thereof

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Charged particle beam apparatus and method of forming electrodes ha...

Method and system for fabricating three-dimensional microstructure

Apparatus and method for controlled particle beam manufacturing

Enhanced scanning control of charged particle beam systems

Device and method of positionally accurate implantation of individu...

Charged particle beam system

Method and apparatus for forming a cavity in a semiconductor substr...

Fabrication of high resistivity structures using focused ion beams

Projection ion beam machining apparatus

Apparatus for assisting backside focused ion beam device modification

Apparatus and method for defining a pattern on a substrate

Depth enhancement of ion sensitized data

Patents Applicationslast 30 patents

METHODS AND APPARATUSES FOR PROCESSING A LITHOGRAPHIC OBJECT

LOW KEV ION BEAM IMAGE RESTORATION BY MACHINE LEARNING FOR OBJECT L...

AN IONIZATION CHAMBER CHIP FOR A NANO-APERTURE ION SOURCE, METHOD O...

METHOD FOR STRUCTURING AN OBJECT WITH THE AID OF A PARTICLE BEAM AP...

METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE WITH A FOCUSED PART...

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

GAS FIELD ION MICROSCOPES HAVING MULTIPLE OPERATION MODES

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

ELECTROSPRAY DEPOSITION: DEVICES AND METHODS THEREOF

METHOD TO DIRECT PATTERN METALS ON A SUBSTRATE

INSTALLATION AND METHOD OF NANOFABRICATION

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

Apparatus and method for controlled particle beam manufacturing

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

Apparatus and method for controlled particle beam manufacturing

Method for engraving irreproducible pattern on the surface of a dia...

Enhanced scanning control of charged particle beam systems

Charged particle beam apparatus and method of forming electrodes ha...

CHARGED PARTICLE BEAM SYSTEM

Device and method of positionally accurate implantation of individu...

Method and system for fabricating three-diemensional microstructure

Method and apparatus for forming a trench through a semiconductor s...

Apparatus for assisting backside focused ion beam device modification

Device for forming nanostructures on the surface of a semiconductor...

Fabrication of high resistivity structures using focused ion beams