using irradiation by energy or particles

Industry

CPC
C23C16/047

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/047using irradiation by energy or particles

Industries

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for processing a substrate
- Patent number 12,074,009
- Issue date Aug 27, 2024
- Tokyo Electron Limited
- Yuki Iijima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and ion beam irradiati...
- Patent number 12,040,155
- Issue date Jul 16, 2024
- Kioxia Corporation
- Junichi Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for selectively depositing a metallic film on a substrate
- Patent number 12,033,861
- Issue date Jul 9, 2024
- ASM IP Holding B.V.
- Delphine Longrie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing a substrate
- Patent number 12,020,904
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Yuki Iijima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Underlayer for photoresist adhesion and dose reduction
- Patent number 11,988,965
- Issue date May 21, 2024
- Lam Research Corporation
- Samantha S. H. Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques and device structure based upon directional seeding and...
- Patent number 11,956,978
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- M. Arif Zeeshan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Graphene printing
- Patent number 11,834,739
- Issue date Dec 5, 2023
- Hewlett-Packard Development Company, L.P.
- Robert Ionescu
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method and apparatus for forming a patterned layer of carbon, metho...
- Patent number 11,807,937
- Issue date Nov 7, 2023
- ASML Netherlands B.V.
- Sonia Castellanos Ortega
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 11,456,184
- Issue date Sep 27, 2022
- Tokyo Electron Limited
- Ryuichi Asako
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Nanofabrication using a new class of electron beam induced surface...
- Patent number 11,377,740
- Issue date Jul 5, 2022
- FEI Company
- James Bishop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Functional high-performance fiber structure
- Patent number 11,362,256
- Issue date Jun 14, 2022
- FREE FORM FIBERS, LLC
- Joseph Pegna
- B32 - LAYERED PRODUCTS
Information Patent Grant
Deposition apparatus and deposition method using the same
- Patent number 11,339,471
- Issue date May 24, 2022
- Samsung Display Co., Ltd.
- Daeyong Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Underlayer for photoresist adhesion and dose reduction
- Patent number 11,314,168
- Issue date Apr 26, 2022
- Lam Research Corporation
- Samantha S. H. Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Post-production substrate modification with FIB deposition
- Patent number 11,139,217
- Issue date Oct 5, 2021
- BAE Systems Information and Electronic Systems Integration Inc.
- Jeffrey A. Zimmerman
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Graphene fabrication method
- Patent number 11,097,950
- Issue date Aug 24, 2021
- Korea Electronics Technology Institute
- Hyeong Keun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for selectively depositing a metallic film on a substrate
- Patent number 11,094,546
- Issue date Aug 17, 2021
- ASM IP Holding B.V.
- Delphine Longrie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for temperature control in plasma processing system
- Patent number 10,998,244
- Issue date May 4, 2021
- Tokyo Electron Limited
- Anton J. deVilliers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for the localized deposit of metal on a surface
- Patent number 10,865,477
- Issue date Dec 15, 2020
- Illinois Tool Works Inc.
- Zhigang Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for permanently repairing defects of absent mater...
- Patent number 10,732,501
- Issue date Aug 4, 2020
- Carl Zeiss SMT GmbH
- Jens Oster
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Programmable charge storage arrays and associated manufacturing dev...
- Patent number 10,689,754
- Issue date Jun 23, 2020
- Peter C. Salmon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature glass-ceramic matrix with embedded reinforcement f...
- Patent number 10,676,391
- Issue date Jun 9, 2020
- FREE FORM FIBERS, LLC
- Shay L. Harrison
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal metal chemical vapor deposition process
- Patent number 10,662,522
- Issue date May 26, 2020
- SanDisk Technologies LLC
- Fumitaka Amano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of burying sample trench
- Patent number 10,648,081
- Issue date May 12, 2020
- Hitachi High-Tech Science Corporation
- Shota Torikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Charged-particle-beam patterning without resist
- Patent number 10,615,036
- Issue date Apr 7, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuen-Yu Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Patterned atomic layer etching and deposition using miniature-colum...
- Patent number 10,607,845
- Issue date Mar 31, 2020
- Kevin M. Monahan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Filling a cavity in a substrate using sputtering and deposition
- Patent number 10,546,730
- Issue date Jan 28, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nanofabrication using a new class of electron beam induced surface...
- Patent number 10,538,844
- Issue date Jan 21, 2020
- FEI Company
- James Bishop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for processing a holding plate, in particular for a clamp fo...
- Patent number 10,475,689
- Issue date Nov 12, 2019
- Berliner Glas KGaA Herbert Kubatz GmbH & Co.
- Volker Schmidt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adaptive beam current for high throughput patterning
- Patent number 10,415,133
- Issue date Sep 17, 2019
- FEI Company
- Aurelien Philippe Jean Maclou Botman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for selectively depositing a metallic film on a substrate
- Patent number 10,403,504
- Issue date Sep 3, 2019
- ASM IP Holding B.V.
- Delphine Longrie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CARBON CONTAINING PRECURSORS FOR BEAM-INDUCED DEPOSITION
- Publication number 20250163571
- Publication date May 22, 2025
- FEI Company
- Gavin MITCHSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF MODIFYING OPENINGS IN HARDMASKS AND PHOTORESISTS TO ACHI...
- Publication number 20250075315
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Charith NANAYAKKARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNDERLAYER FOR PHOTORESIST ADHESION AND DOSE REDUCTION
- Publication number 20240255850
- Publication date Aug 1, 2024
- LAM RESEARCH CORPORATION
- Samantha S.H. Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES AND DEVICE STRUCTURE BASED UPON DIRECTIONAL SEEDING AND...
- Publication number 20240040808
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- M. Arif Zeeshan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHO...
- Publication number 20240011150
- Publication date Jan 11, 2024
- ASML NETHERLANDS B.V.
- Sonia CASTELLANOS ORTEGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SENSOR WITH SUPERLATTICE STRUCTURE
- Publication number 20230243770
- Publication date Aug 3, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Archana VENUGOPAL
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20230035284
- Publication date Feb 2, 2023
- Tokyo Electron Limited
- Kazuki DEMPOH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND ION BEAM IRRADIATI...
- Publication number 20220301809
- Publication date Sep 22, 2022
- KIOXIA Corporation
- Junichi HASHIMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF REPAIRING CERAMIC COMPOSITE ARTICLES
- Publication number 20220228256
- Publication date Jul 21, 2022
- Raytheon Technologies Corporation
- Olivier H. Sudre
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES AND DEVICE STRUCTURE BASED UPON DIRECTIONAL SEEDING AND...
- Publication number 20220068923
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- M. Arif Zeeshan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNDERLAYER FOR PHOTORESIST ADHESION AND DOSE REDUCTION
- Publication number 20220035247
- Publication date Feb 3, 2022
- LAM RESEARCH CORPORATION
- Samantha S.H. Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SELECTIVELY DEPOSITING A METALLIC FILM ON A SUBSTRATE
- Publication number 20210296130
- Publication date Sep 23, 2021
- ASM IP HOLDING B.V.
- Delphine Longrie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR CONTINUOUS MONITORING, SYNTHESIS, AND DETECTION OF BIOC...
- Publication number 20210262083
- Publication date Aug 26, 2021
- California Institute of Technology
- Aditya Rajagopal
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20210125837
- Publication date Apr 29, 2021
- TOKYO ELECTRON LIMITED
- Ryuichi ASAKO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD AND SYSTEM FOR THE LOCALIZED DEPOSIT OF METAL ON A SURFACE
- Publication number 20210115558
- Publication date Apr 22, 2021
- Illinois Tool Works Inc.
- Zhigang Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GRAPHENE PRINTING
- Publication number 20210087675
- Publication date Mar 25, 2021
- Hewlett-Packard Development Company, L.P.
- Robert Ionescu
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL
- Publication number 20210079519
- Publication date Mar 18, 2021
- ASML NETHERLANDS B.V.
- Pieter Willem Herman DE JAGER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Forming a Patterned Layer of Carbon, Metho...
- Publication number 20210032743
- Publication date Feb 4, 2021
- ASML NETHERLANDS B.V.
- Sonia CASTELLANOS ORTEGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NANOFABRICATION USING A NEW CLASS OF ELECTRON BEAM INDUCED SURFACE...
- Publication number 20200190669
- Publication date Jun 18, 2020
- FEI Company
- James Bishop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL METAL CHEMICAL VAPOR DEPOSITION PROCESS
- Publication number 20200149153
- Publication date May 14, 2020
- SANDISK TECHNOLOGIES LLC
- Fumitaka AMANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME
- Publication number 20200123651
- Publication date Apr 23, 2020
- SAMSUNG DISPLAY CO., LTD.
- Daeyong KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILLING A CAVITY IN A SUBSTRATE USING SPUTTERING AND DEPOSITION
- Publication number 20200090909
- Publication date Mar 19, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SELECTIVELY DEPOSITING A METALLIC FILM ON A SUBSTRATE
- Publication number 20200013626
- Publication date Jan 9, 2020
- ASM IP HOLDING B.V.
- Delphine Longrie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE VAPOR DEPOSITION PROCESS FOR ADDITIVE MANUFACTURING
- Publication number 20190368033
- Publication date Dec 5, 2019
- United Technologies Corporation
- Thomas J. Martin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR PERMANENTLY REPAIRING DEFECTS OF ABSENT MATER...
- Publication number 20190317395
- Publication date Oct 17, 2019
- Carl Zeiss SMT GMBH
- Jens Oster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SELECTIVELY DEPOSITING A METALLIC FILM ON A SUBSTRATE
- Publication number 20190109009
- Publication date Apr 11, 2019
- ASM IP HOLDING B.V.
- Delphine Longrie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEED LAYER LASER-INDUCED DEPOSITION
- Publication number 20180298490
- Publication date Oct 18, 2018
- FEI Company
- Steven Randolph
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Charged-Particle-Beam Patterning Without Resist
- Publication number 20180218903
- Publication date Aug 2, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuen-Yu Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FOCUSED RADIATION BEAM INDUCED DEPOSITION
- Publication number 20180203347
- Publication date Jul 19, 2018
- Taiwan Semiconductor Manufacturing Co., LTD
- Hsun-Chuan SHIH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AREA-SELECTIVE ATOMIC LAYER DEPOSITION APPARATUS
- Publication number 20180127877
- Publication date May 10, 2018
- Korea University Research and Business Foundation
- Joon Hyung SHIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using irradiation by energy or particles

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus for processing a substrate

Method of manufacturing semiconductor device and ion beam irradiati...

Method for selectively depositing a metallic film on a substrate

Apparatus for processing a substrate

Underlayer for photoresist adhesion and dose reduction

Techniques and device structure based upon directional seeding and...

Graphene printing

Method and apparatus for forming a patterned layer of carbon, metho...

Substrate processing method and substrate processing system

Nanofabrication using a new class of electron beam induced surface...

Functional high-performance fiber structure

Deposition apparatus and deposition method using the same

Underlayer for photoresist adhesion and dose reduction

Post-production substrate modification with FIB deposition

Graphene fabrication method

Method for selectively depositing a metallic film on a substrate

System and method for temperature control in plasma processing system

Method and system for the localized deposit of metal on a surface

Method and device for permanently repairing defects of absent mater...

Programmable charge storage arrays and associated manufacturing dev...

High temperature glass-ceramic matrix with embedded reinforcement f...

Thermal metal chemical vapor deposition process

Method of burying sample trench

Charged-particle-beam patterning without resist

Patterned atomic layer etching and deposition using miniature-colum...

Filling a cavity in a substrate using sputtering and deposition

Nanofabrication using a new class of electron beam induced surface...

Method for processing a holding plate, in particular for a clamp fo...

Adaptive beam current for high throughput patterning

Method for selectively depositing a metallic film on a substrate

Patents Applicationslast 30 patents

CARBON CONTAINING PRECURSORS FOR BEAM-INDUCED DEPOSITION

METHODS OF MODIFYING OPENINGS IN HARDMASKS AND PHOTORESISTS TO ACHI...

UNDERLAYER FOR PHOTORESIST ADHESION AND DOSE REDUCTION

TECHNIQUES AND DEVICE STRUCTURE BASED UPON DIRECTIONAL SEEDING AND...

METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHO...

GAS SENSOR WITH SUPERLATTICE STRUCTURE

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND ION BEAM IRRADIATI...

METHOD OF REPAIRING CERAMIC COMPOSITE ARTICLES

TECHNIQUES AND DEVICE STRUCTURE BASED UPON DIRECTIONAL SEEDING AND...

UNDERLAYER FOR PHOTORESIST ADHESION AND DOSE REDUCTION

METHOD FOR SELECTIVELY DEPOSITING A METALLIC FILM ON A SUBSTRATE

METHODS FOR CONTINUOUS MONITORING, SYNTHESIS, AND DETECTION OF BIOC...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

METHOD AND SYSTEM FOR THE LOCALIZED DEPOSIT OF METAL ON A SURFACE

GRAPHENE PRINTING

METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL

Method and Apparatus for Forming a Patterned Layer of Carbon, Metho...

NANOFABRICATION USING A NEW CLASS OF ELECTRON BEAM INDUCED SURFACE...

THERMAL METAL CHEMICAL VAPOR DEPOSITION PROCESS

DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME

FILLING A CAVITY IN A SUBSTRATE USING SPUTTERING AND DEPOSITION

METHOD FOR SELECTIVELY DEPOSITING A METALLIC FILM ON A SUBSTRATE

SELECTIVE VAPOR DEPOSITION PROCESS FOR ADDITIVE MANUFACTURING

METHOD AND DEVICE FOR PERMANENTLY REPAIRING DEFECTS OF ABSENT MATER...

METHOD FOR SELECTIVELY DEPOSITING A METALLIC FILM ON A SUBSTRATE

SEED LAYER LASER-INDUCED DEPOSITION

Charged-Particle-Beam Patterning Without Resist

FOCUSED RADIATION BEAM INDUCED DEPOSITION

AREA-SELECTIVE ATOMIC LAYER DEPOSITION APPARATUS