using lasers

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CPC
H01L21/0275

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/0275using lasers

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Interferometer systems and methods for real time etch process compe...
- Patent number 12,218,015
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chansyun Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photonic communication platform
- Patent number 12,124,081
- Issue date Oct 22, 2024
- Lightmatter, Inc.
- Nicholas C. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spectral feature control apparatus
- Patent number 12,124,053
- Issue date Oct 22, 2024
- Cymer, LLC
- Eric Anders Mason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photonic communication platform
- Patent number 12,124,082
- Issue date Oct 22, 2024
- Lightmatter, Inc.
- Nicholas C. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photonic communication platform
- Patent number 12,092,866
- Issue date Sep 17, 2024
- Lightmatter, Inc.
- Nicholas C. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photonic communication platform
- Patent number 12,092,867
- Issue date Sep 17, 2024
- Lightmatter, Inc.
- Nicholas C. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated photoresist removal and laser annealing
- Patent number 12,074,026
- Issue date Aug 27, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tz-Shian Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist layer surface treatment, cap layer, and method of formi...
- Patent number 12,057,315
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Chen Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photonic communication platform
- Patent number 12,038,604
- Issue date Jul 16, 2024
- Lightmatter, Inc.
- Nicholas C. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resist underlayer film-forming composition that contains triaryldia...
- Patent number 12,025,916
- Issue date Jul 2, 2024
- NISSAN CHEMICAL CORPORATION
- Hirokazu Nishimaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography exposure system with debris removing mechanism
- Patent number 12,001,143
- Issue date Jun 4, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hung-Jung Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device chip manufacturing method
- Patent number 11,990,371
- Issue date May 21, 2024
- Disco Corporation
- Kazuki Higashiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making a picoscopic scale/ nanoscopic scale circuit pattern
- Patent number 11,953,828
- Issue date Apr 9, 2024
- LONGSERVING TECHNOLOGY CO., LTD
- Ko-Cheng Fang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microelectronic assemblies having conductive structures with differ...
- Patent number 11,942,334
- Issue date Mar 26, 2024
- Intel Corporation
- Jeremy Ecton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method for cured substance, manufacturing method for...
- Patent number 11,934,102
- Issue date Mar 19, 2024
- FUJIFILM Corporation
- Atsuyasu Nozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling droplet in extreme ultraviolet...
- Patent number 11,914,302
- Issue date Feb 27, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Hung Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automatic kerf offset mapping and correction system for laser dicing
- Patent number 11,901,232
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Karthik Balakrishnan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon-containing layer-forming composition, and method for produc...
- Patent number 11,881,400
- Issue date Jan 23, 2024
- Central Glass Company, Limited
- Junya Nakatsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for die-level unique authentication and serialization of sem...
- Patent number 11,862,497
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- H. Jim Fulford
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photonic communication platform
- Patent number 11,860,413
- Issue date Jan 2, 2024
- Lightmatter, Inc.
- Nicholas C. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate structuring methods
- Patent number 11,837,680
- Issue date Dec 5, 2023
- Applied Materials, Inc.
- Han-Wen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabrication and control of nano-structure array by angle-...
- Patent number 11,837,470
- Issue date Dec 5, 2023
- Samsung Electronics Co., Ltd.
- Jisun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing workpiece
- Patent number 11,823,903
- Issue date Nov 21, 2023
- Tokyo Electron Limited
- Yoshihide Kihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser radiation system and method for manufacturing electronic device
- Patent number 11,768,362
- Issue date Sep 26, 2023
- Gigaphoton Inc.
- Akiyoshi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Water soluble organic-inorganic hybrid mask formulations and their...
- Patent number 11,764,061
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Wenguang Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography exposure method with debris removing mechanism
- Patent number 11,754,928
- Issue date Sep 12, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hung-Jung Hsu
- G02 - OPTICS
Information Patent Grant
Photonic communication platform
- Patent number 11,754,783
- Issue date Sep 12, 2023
- Lightmatter, Inc.
- Nicholas C. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist layer surface treatment, cap layer, and method of formi...
- Patent number 11,705,332
- Issue date Jul 18, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Chen Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for pitch split patterning using sidewall image transfer
- Patent number 11,676,817
- Issue date Jun 13, 2023
- Tokyo Electron Limited
- Akiteru Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of defect inspection
- Patent number 11,624,985
- Issue date Apr 11, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ta-Ching Yu
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR PHOTORESIST COMPOSITION AND METHOD OF FORMING PATTERN...
- Publication number 20250054758
- Publication date Feb 13, 2025
- Samsung SDI Co., Ltd.
- Dong Wan RYU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL-RESISTANT PROTECTIVE FILM-FORMING COMPOSITION HAVING CATEC...
- Publication number 20250034427
- Publication date Jan 30, 2025
- NISSAN CHEMICAL CORPORATION
- Shun KUBODERA
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Method For Forming Resist Underlayer Film And Patterning Process
- Publication number 20250036029
- Publication date Jan 30, 2025
- Shin-Etsu Chemical Co., Ltd.
- Naoki KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST COMPOSITIONS AND METHODS OF MANUFACTURING INTEGRATED CI...
- Publication number 20250020998
- Publication date Jan 16, 2025
- Samsung Electronics Co., Ltd.
- Kyungoh Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST COMPOSITIONS AND METHODS OF MANUFACTURING INTEGRATED CI...
- Publication number 20250020997
- Publication date Jan 16, 2025
- Samsung Electronics Co., Ltd.
- Suk Koo Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Composition For Forming Organic Film, Method For Forming Organic Fi...
- Publication number 20250011623
- Publication date Jan 9, 2025
- Shin-Etsu Chemical Co., Ltd.
- Daisuke KORI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SPECTRAL FEATURE CONTROL APPARATUS
- Publication number 20250013066
- Publication date Jan 9, 2025
- CYMER, LLC
- Eric Anders Mason
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTRONIC DEVICE MANUFACTURING SOLUTION, METHOD FOR MANUFACTURING...
- Publication number 20240425777
- Publication date Dec 26, 2024
- Merck Patent GmbH
- KAZUMA YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOSENSITIVE COMPOSITION, TRANSFER FILM, CURED FILM, SEMICONDUCTO...
- Publication number 20240395551
- Publication date Nov 28, 2024
- FUJIFILM CORPORATION
- Keigo YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR REAL TIME ETCH PROCESS COMPENSATION CONTROL
- Publication number 20240395637
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chansyun Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED PHOTORESIST REMOVAL AND LASER ANNEALING
- Publication number 20240379356
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tz-Shian Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED PHOTORESIST REMOVAL AND LASER ANNEALING
- Publication number 20240379355
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tz-Shian Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THINNER COMPOSITION, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICES...
- Publication number 20240361693
- Publication date Oct 31, 2024
- Mitsubishi Gas Chemical Company, Inc.
- Takumi OKADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST LAYER SURFACE TREATMENT, CAP LAYER, AND METHOD OF FORMI...
- Publication number 20240355623
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Chen KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Composition For Forming Organic Film, Method For Forming Organic Fi...
- Publication number 20240355632
- Publication date Oct 24, 2024
- Shin-Etsu Chemical Co., Ltd.
- Yasuyuki YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITION FOR FORMING SILICON-CONTAINING UNDERLAYER FILM FOR INDU...
- Publication number 20240302744
- Publication date Sep 12, 2024
- NISSAN CHEMICAL CORPORATION
- Shuhei SHIGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NAPHTHALENE UNIT-CONTAINING RESIST UNDERLAYER FILM-FORMING COMPOSITION
- Publication number 20240302747
- Publication date Sep 12, 2024
- NISSAN CHEMICAL CORPORATION
- Hiroto OGATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST COMPOSITION INCLUDING PHOTOSENSITIVE POLYMER AND METHOD...
- Publication number 20240302742
- Publication date Sep 12, 2024
- Samsung Electronics Co., Ltd.
- Sung Hwan Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON-CONTAINING RESIST UNDERLAYER FILM-FORMING COMPOSITION
- Publication number 20240295815
- Publication date Sep 5, 2024
- NISSAN CHEMICAL CORPORATION
- Wataru SHIBAYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE, AND COMPOSITION
- Publication number 20240288773
- Publication date Aug 29, 2024
- JSR Corporation
- Masato DOBASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTORESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, METHOD...
- Publication number 20240288768
- Publication date Aug 29, 2024
- TOKYO ELECTRON LIMITED
- Seiji NAGAHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROTECTIVE FILM, PROTECTIVE FILM AGENT, AND METHOD OF PROCESSING WO...
- Publication number 20240290624
- Publication date Aug 29, 2024
- Disco Corporation
- Sho OSAWA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20240282582
- Publication date Aug 22, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Chao CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS TO REDUCE EXTREME ULTRAVIOLET LIGHT FOR PHOTO...
- Publication number 20240241446
- Publication date Jul 18, 2024
- Intel Corporation
- Marvin Paik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST COMPOSITION AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE
- Publication number 20240231222
- Publication date Jul 11, 2024
- Samsung Electronics Co., Ltd.
- Kyungoh KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTONIC COMMUNICATION PLATFORM
- Publication number 20240219635
- Publication date Jul 4, 2024
- Lightmatter, Inc
- Nicholas C. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INFRARED DEBOND DAMAGE MITIGATION BY COPPER FILL PATTERN
- Publication number 20240170288
- Publication date May 23, 2024
- International Business Machines Corporation
- Mukta Ghate Farooq
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST COMPOSITION
- Publication number 20240168374
- Publication date May 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- An-Ren Zi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET...
- Publication number 20240160106
- Publication date May 16, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Hung LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE MANUFACTURING METHOD AND COMPOSITION
- Publication number 20240142876
- Publication date May 2, 2024
- JSR Corporation
- Hiroyuki MIYAUCHI
- H01 - BASIC ELECTRIC ELEMENTS

using lasers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Interferometer systems and methods for real time etch process compe...

Photonic communication platform

Spectral feature control apparatus

Photonic communication platform

Photonic communication platform

Photonic communication platform

Integrated photoresist removal and laser annealing

Photoresist layer surface treatment, cap layer, and method of formi...

Photonic communication platform

Resist underlayer film-forming composition that contains triaryldia...

Lithography exposure system with debris removing mechanism

Device chip manufacturing method

Method of making a picoscopic scale/ nanoscopic scale circuit pattern

Microelectronic assemblies having conductive structures with differ...

Manufacturing method for cured substance, manufacturing method for...

Method and apparatus for controlling droplet in extreme ultraviolet...

Automatic kerf offset mapping and correction system for laser dicing

Silicon-containing layer-forming composition, and method for produc...

Method for die-level unique authentication and serialization of sem...

Photonic communication platform

Substrate structuring methods

Method of fabrication and control of nano-structure array by angle-...

Method for processing workpiece

Laser radiation system and method for manufacturing electronic device

Water soluble organic-inorganic hybrid mask formulations and their...

Lithography exposure method with debris removing mechanism

Photonic communication platform

Photoresist layer surface treatment, cap layer, and method of formi...

Method for pitch split patterning using sidewall image transfer

Methods of defect inspection

Patents Applicationslast 30 patents

SEMICONDUCTOR PHOTORESIST COMPOSITION AND METHOD OF FORMING PATTERN...

CHEMICAL-RESISTANT PROTECTIVE FILM-FORMING COMPOSITION HAVING CATEC...

Method For Forming Resist Underlayer Film And Patterning Process

PHOTORESIST COMPOSITIONS AND METHODS OF MANUFACTURING INTEGRATED CI...

PHOTORESIST COMPOSITIONS AND METHODS OF MANUFACTURING INTEGRATED CI...

Composition For Forming Organic Film, Method For Forming Organic Fi...

SPECTRAL FEATURE CONTROL APPARATUS

ELECTRONIC DEVICE MANUFACTURING SOLUTION, METHOD FOR MANUFACTURING...

PHOTOSENSITIVE COMPOSITION, TRANSFER FILM, CURED FILM, SEMICONDUCTO...

METHODS FOR REAL TIME ETCH PROCESS COMPENSATION CONTROL

INTEGRATED PHOTORESIST REMOVAL AND LASER ANNEALING

INTEGRATED PHOTORESIST REMOVAL AND LASER ANNEALING

THINNER COMPOSITION, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICES...

PHOTORESIST LAYER SURFACE TREATMENT, CAP LAYER, AND METHOD OF FORMI...

Composition For Forming Organic Film, Method For Forming Organic Fi...

COMPOSITION FOR FORMING SILICON-CONTAINING UNDERLAYER FILM FOR INDU...

NAPHTHALENE UNIT-CONTAINING RESIST UNDERLAYER FILM-FORMING COMPOSITION

PHOTORESIST COMPOSITION INCLUDING PHOTOSENSITIVE POLYMER AND METHOD...

SILICON-CONTAINING RESIST UNDERLAYER FILM-FORMING COMPOSITION

METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE, AND COMPOSITION

PHOTORESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, METHOD...

PROTECTIVE FILM, PROTECTIVE FILM AGENT, AND METHOD OF PROCESSING WO...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

METHODS AND APPARATUS TO REDUCE EXTREME ULTRAVIOLET LIGHT FOR PHOTO...

PHOTORESIST COMPOSITION AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE

PHOTONIC COMMUNICATION PLATFORM

INFRARED DEBOND DAMAGE MITIGATION BY COPPER FILL PATTERN

PHOTORESIST COMPOSITION

METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET...

SEMICONDUCTOR SUBSTRATE MANUFACTURING METHOD AND COMPOSITION