TREA

using liquid targets

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  • CPC
  • C23C14/3428
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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/3428using liquid targets
Industries

Patents Grantslast 30 patents

  • Information Patent Grant

    Liquid sputter target
    • Patent number 11,952,654
    • Issue date Apr 9, 2024
    • EVATEC AG
    • Dominik Jaeger
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Advanced sputter targets for ion generation
    • Patent number 11,542,594
    • Issue date Jan 3, 2023
    • Applied Materials, Inc.
    • Graham Wright
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of forming a metallic lithium coating
    • Patent number 11,296,310
    • Issue date Apr 5, 2022
    • SIGMA LITHIUM LIMITED
    • Vladimir Kolosnitsyn
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Advanced sputter targets for ion generation
    • Patent number 11,008,649
    • Issue date May 18, 2021
    • Applied Materials, Inc.
    • Graham Wright
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Molten target sputtering (MTS) deposition for enhanced kinetic ener...
    • Patent number 10,947,639
    • Issue date Mar 16, 2021
    • UNITED STATES OF AMERICA AS REPRESENTED BY THE ADMINISTRATOR OF NASA.
    • Hyun Jung Kim
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method for manufacturing acoustic wave device
    • Patent number 9,584,088
    • Issue date Feb 28, 2017
    • Murata Manufacturing Co., Ltd.
    • Taku Kikuchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film-Forming apparatus and Film-Forming method
    • Patent number 9,127,353
    • Issue date Sep 8, 2015
    • Canon Kabushiki Kaisha
    • Seiken Matsumoto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputter-enhanced evaporative deposition apparatus and method
    • Patent number 8,691,064
    • Issue date Apr 8, 2014
    • Raytheon Canada Limited
    • Daniel B. Mitchell
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method and device for manufacturing semiconductor or insulator-meta...
    • Patent number 7,638,019
    • Issue date Dec 29, 2009
    • Japan Science and Technology Agency
    • Takehiko Hihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Non-thermionic sputter material transport device, methods of use, a...
    • Patent number 6,787,010
    • Issue date Sep 7, 2004
    • North Carolina State University
    • Jerome J. Cuomo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputter deposition process
    • Patent number 5,507,931
    • Issue date Apr 16, 1996
    • Deposition Technologies, Inc.
    • Peter Y. Yang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    2206020
    • Patent number 2,206,020
    • Issue date Jul 2, 1940
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents