using measurement on deposited material

Industry

CPC
C23C14/545

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/545using measurement on deposited material

Industries

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and methods for depositing variable interference filters
- Patent number 11,891,686
- Issue date Feb 6, 2024
- Shigeng Song
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alkali semi-metal films and method and apparatus for fabricating them
- Patent number 11,881,391
- Issue date Jan 23, 2024
- Radiation Monitoring Devices, Inc.
- Harish B. Bhandari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Differential capacitive sensors for in-situ film thickness and diel...
- Patent number 11,781,214
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Patrick Tae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electronic device and manufacturing method thereof
- Patent number 11,725,273
- Issue date Aug 15, 2023
- Au Optronics Corporation
- Chun-Hao Su
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system and method
- Patent number 11,728,226
- Issue date Aug 15, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with multi-cathode and method of manufacture thereof
- Patent number 11,600,476
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of coating substrates
- Patent number 11,519,065
- Issue date Dec 6, 2022
- Singulus Technologies AG
- Berthold Ocker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for depositing durable optical coatings
- Patent number 11,466,362
- Issue date Oct 11, 2022
- UNIVERSITY OF THE WEST OF SCOTLAND
- Desmond Gibson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for fabricating perovskite film for solar cell ap...
- Patent number 11,447,858
- Issue date Sep 20, 2022
- OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
- Yabing Qi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for controlling physical vapor deposition metal film adhesi...
- Patent number 11,220,735
- Issue date Jan 11, 2022
- Medtronic MiniMed, Inc.
- Akhil Srinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with multi-cathode and method of manufacture thereof
- Patent number 11,183,375
- Issue date Nov 23, 2021
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alkali semi-metal films and method and apparatus for fabricating them
- Patent number 11,094,495
- Issue date Aug 17, 2021
- Radiation Monitoring Devices, Inc.
- Harish B. Bhandari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film thickness test apparatus and method and vapor deposition device
- Patent number 11,092,429
- Issue date Aug 17, 2021
- BOE Technology Group Co., Ltd.
- Chihwei Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for substrate edge uniformity
- Patent number 11,056,325
- Issue date Jul 6, 2021
- Applied Materials, Inc.
- Thanh X. Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tool and method of fabricating a self-aligned solid state thin film...
- Patent number 11,056,722
- Issue date Jul 6, 2021
- International Business Machines Corporation
- Frank Robert Libsch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method of magnetic recording medium, film formation s...
- Patent number 10,907,248
- Issue date Feb 2, 2021
- Kabushiki Kaisha Toshiba
- Masaki Honda
- G11 - INFORMATION STORAGE
Information Patent Grant
SAW device and method of manufacture
- Patent number 10,812,035
- Issue date Oct 20, 2020
- SPTS Technologies Limited
- Rhonda Hyndman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for measuring the electrical contact resistance...
- Patent number 10,739,389
- Issue date Aug 11, 2020
- The Boeing Company
- Shahriar Khosravani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam sample preparation and coating apparatus and methods
- Patent number 10,731,246
- Issue date Aug 4, 2020
- Gatan, Inc.
- John Andrew Hunt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating
- Patent number 10,689,748
- Issue date Jun 23, 2020
- Sumitomo Electric Industries, Ltd
- Yoshiharu Utsumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Functionally graded material by in-situ gradient alloy sputter depo...
- Patent number 10,597,772
- Issue date Mar 24, 2020
- International Business Machines Corporation
- Hans-Juergen Eickelmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing apparatus and method for measuring deposition quantity u...
- Patent number 10,596,582
- Issue date Mar 24, 2020
- Samsung Display Co., Ltd.
- Sung-Joong Joo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film formation method and thin film formation apparatus
- Patent number 10,415,135
- Issue date Sep 17, 2019
- Shincron Co., Ltd.
- Yohei Hinata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor silicon-germanium thin film preparation method
- Patent number 10,392,691
- Issue date Aug 27, 2019
- NINGBO CRRC TIMES TRANSDUCER TECHNOLOGY CO., LTD.
- Xiaowei Hou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Detection device for detecting thickness of vacuum-evaporated film...
- Patent number 10,385,445
- Issue date Aug 20, 2019
- BOE Technology Group Co., Ltd.
- Wenbin Jia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Evaporation method and evaporation device for organic light-emittin...
- Patent number 10,319,950
- Issue date Jun 11, 2019
- Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Youyuan Kuang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask for deposition system and method for using the mask
- Patent number 10,233,528
- Issue date Mar 19, 2019
- Applied Materials, Inc.
- John Macneill White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Evaporation method
- Patent number 10,190,207
- Issue date Jan 29, 2019
- BOE Technology Group Co., Ltd.
- Yinan Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Functionally graded material by in-situ gradient alloy sputter depo...
- Patent number 9,963,778
- Issue date May 8, 2018
- International Business Machines Corporation
- Hans-Juergen Eickelmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alkali semi-metal films and method and apparatus for fabricating them
- Patent number 9,916,958
- Issue date Mar 13, 2018
- Radiation Monitoring Devices, Inc.
- Harish B. Bhandari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SURFACE TREATMENT APPARATUS AND SURFACE TREATMENT METHOD
- Publication number 20240060171
- Publication date Feb 22, 2024
- SHIBAURA MACHINE CO., LTD.
- Kazuhiro FUKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAPHRAGM ASSEMBLY FOR DELIMITING THE COATING REGION OF A SPUTTER S...
- Publication number 20240035142
- Publication date Feb 1, 2024
- Solayer GmbH
- Dzmitry HRUNSKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIFFERENTIAL CAPACITIVE SENSOR FOR IN-SITU FILM THICKNESS AND DIELE...
- Publication number 20240002999
- Publication date Jan 4, 2024
- Applied Materials, Inc.
- PATRICK TAE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20230352350
- Publication date Nov 2, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION DEVICE
- Publication number 20230304144
- Publication date Sep 28, 2023
- SHINCRON CO., LTD.
- Makoto IGARASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD FOR TUNING MAGNETIC FIELD DISTRIBUTION OF DEPOSIT...
- Publication number 20230091273
- Publication date Mar 23, 2023
- SKY TECH INC.
- JING-CHENG LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHYSICAL VAPOR DEPOSITION PROCESS APPARATUS AND METHOD OF OPTIMIZIN...
- Publication number 20230067466
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Hung LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SONAR SENSOR IN PROCESSING CHAMBER
- Publication number 20230019109
- Publication date Jan 19, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20220406583
- Publication date Dec 22, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC-FIELD-DISTRIBUTION TUNER, DEPOSITION EQUIPMENT AND METHOD...
- Publication number 20220384166
- Publication date Dec 1, 2022
- SKY TECH INC.
- JING-CHENG LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO IMPROVE WAFER EDGE UNIFORMITY
- Publication number 20220375727
- Publication date Nov 24, 2022
- Applied Materials, Inc.
- Mingle Tong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRONIC DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20220341032
- Publication date Oct 27, 2022
- AU OPTRONICS CORPORATION
- Chun-Hao Su
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD THICKNESS CONTROL
- Publication number 20220316050
- Publication date Oct 6, 2022
- SMS group GMBH
- Lutz KÜMMEL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR CONTROLLING PHYSICAL VAPOR DEPOSITION METAL FILM ADHESI...
- Publication number 20220081752
- Publication date Mar 17, 2022
- Medtronic MiniMed, Inc.
- Akhil Srinivasan
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
PLASMA FILM FORMING APPARATUS AND PLASMA FILM FORMING METHOD
- Publication number 20220076932
- Publication date Mar 10, 2022
- JSW AFTY Corporation
- Masaru Shimada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20220051952
- Publication date Feb 17, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition System With Multi-Cathode And Method Of Manufacture Thereof
- Publication number 20220037136
- Publication date Feb 3, 2022
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Forming Method
- Publication number 20210230741
- Publication date Jul 29, 2021
- Ulvac, Inc.
- Shuji Kodaira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
In Situ Density Control During Fabrication Of Thin Film Materials
- Publication number 20210079513
- Publication date Mar 18, 2021
- Halliburton Energy Services, Inc.
- James M. Price
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRON BEAM PVD ENDPOINT DETECTION AND CLOSED-LOOP PROCESS CONTRO...
- Publication number 20210062324
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- David Masayuki ISHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF COATING SUBSTRATES
- Publication number 20200224306
- Publication date Jul 16, 2020
- Singulus Technologies AG
- Berthold OCKER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR DEPOSITING DURABLE OPTICAL COATINGS
- Publication number 20200190659
- Publication date Jun 18, 2020
- UNIVERSITY OF THE WEST OF SCOTLAND
- Desmond GIBSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR CONTROLLING PHYSICAL VAPOR DEPOSITION METAL FILM ADHESI...
- Publication number 20190242010
- Publication date Aug 8, 2019
- Medtronic MiniMed, Inc.
- Akhil Srinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR FABRICATING PEROVSKITE FILM FOR SOLAR CELL AP...
- Publication number 20190218657
- Publication date Jul 18, 2019
- OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
- Yabing QI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR SUBSTRATE EDGE UNIFORMITY
- Publication number 20190189407
- Publication date Jun 20, 2019
- Applied Materials, Inc.
- THANH X. NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS AND METHOD OF OPERATING THE SAME
- Publication number 20190144992
- Publication date May 16, 2019
- Samsung Electronics Co., Ltd.
- Dong-Il Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATION SOURCE DEVICE FOR EVAPORATING
- Publication number 20190048459
- Publication date Feb 14, 2019
- Wei Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM THICKNESS TEST APPARATUS AND METHOD AND VAPOR DEPOSITION DEVICE
- Publication number 20190025045
- Publication date Jan 24, 2019
- BOE TECHNOLOGY GROUP CO., LTD.
- Chihwei SU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF MAGNETIC RECORDING MEDIUM, FILM FORMATION S...
- Publication number 20180274086
- Publication date Sep 27, 2018
- Kabushiki Kaisha Toshiba
- Masaki Honda
- G11 - INFORMATION STORAGE
Information Patent Application
Functionally Graded Material By In-Situ Gradient Alloy Sputter Depo...
- Publication number 20180187301
- Publication date Jul 5, 2018
- International Business Machines Corporation
- Hans-Juergen Eickelmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using measurement on deposited material

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and methods for depositing variable interference filters

Alkali semi-metal films and method and apparatus for fabricating them

Differential capacitive sensors for in-situ film thickness and diel...

Electronic device and manufacturing method thereof

Deposition system and method

Deposition system with multi-cathode and method of manufacture thereof

Method of coating substrates

Apparatus and methods for depositing durable optical coatings

System and method for fabricating perovskite film for solar cell ap...

Methods for controlling physical vapor deposition metal film adhesi...

Deposition system with multi-cathode and method of manufacture thereof

Alkali semi-metal films and method and apparatus for fabricating them

Film thickness test apparatus and method and vapor deposition device

Methods and apparatus for substrate edge uniformity

Tool and method of fabricating a self-aligned solid state thin film...

Manufacturing method of magnetic recording medium, film formation s...

SAW device and method of manufacture

Systems and methods for measuring the electrical contact resistance...

Ion beam sample preparation and coating apparatus and methods

Coating

Functionally graded material by in-situ gradient alloy sputter depo...

Depositing apparatus and method for measuring deposition quantity u...

Thin film formation method and thin film formation apparatus

Semiconductor silicon-germanium thin film preparation method

Detection device for detecting thickness of vacuum-evaporated film...

Evaporation method and evaporation device for organic light-emittin...

Mask for deposition system and method for using the mask

Evaporation method

Functionally graded material by in-situ gradient alloy sputter depo...

Alkali semi-metal films and method and apparatus for fabricating them

Patents Applicationslast 30 patents

SURFACE TREATMENT APPARATUS AND SURFACE TREATMENT METHOD

DIAPHRAGM ASSEMBLY FOR DELIMITING THE COATING REGION OF A SPUTTER S...

DIFFERENTIAL CAPACITIVE SENSOR FOR IN-SITU FILM THICKNESS AND DIELE...

DEPOSITION SYSTEM AND METHOD

FILM FORMATION DEVICE

DEPOSITION METHOD FOR TUNING MAGNETIC FIELD DISTRIBUTION OF DEPOSIT...

PHYSICAL VAPOR DEPOSITION PROCESS APPARATUS AND METHOD OF OPTIMIZIN...

SONAR SENSOR IN PROCESSING CHAMBER

DEPOSITION SYSTEM AND METHOD

MAGNETIC-FIELD-DISTRIBUTION TUNER, DEPOSITION EQUIPMENT AND METHOD...

METHOD TO IMPROVE WAFER EDGE UNIFORMITY

ELECTRONIC DEVICE AND MANUFACTURING METHOD THEREOF

PVD THICKNESS CONTROL

METHODS FOR CONTROLLING PHYSICAL VAPOR DEPOSITION METAL FILM ADHESI...

PLASMA FILM FORMING APPARATUS AND PLASMA FILM FORMING METHOD

DEPOSITION SYSTEM AND METHOD

Deposition System With Multi-Cathode And Method Of Manufacture Thereof

Film Forming Method

In Situ Density Control During Fabrication Of Thin Film Materials

ELECTRON BEAM PVD ENDPOINT DETECTION AND CLOSED-LOOP PROCESS CONTRO...

METHOD OF COATING SUBSTRATES

APPARATUS AND METHODS FOR DEPOSITING DURABLE OPTICAL COATINGS

METHODS FOR CONTROLLING PHYSICAL VAPOR DEPOSITION METAL FILM ADHESI...

SYSTEM AND METHOD FOR FABRICATING PEROVSKITE FILM FOR SOLAR CELL AP...

METHODS AND APPARATUS FOR SUBSTRATE EDGE UNIFORMITY

SPUTTERING APPARATUS AND METHOD OF OPERATING THE SAME

EVAPORATION SOURCE DEVICE FOR EVAPORATING

FILM THICKNESS TEST APPARATUS AND METHOD AND VAPOR DEPOSITION DEVICE

MANUFACTURING METHOD OF MAGNETIC RECORDING MEDIUM, FILM FORMATION S...

Functionally Graded Material By In-Situ Gradient Alloy Sputter Depo...