using measurement on the vapor source

Industry

CPC
C23C14/543

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/543using measurement on the vapor source

Industries

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for and method of manufacturing semiconductor device
- Patent number 12,252,778
- Issue date Mar 18, 2025
- Samsung Electronics Co, Ltd.
- Keewon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for monitoring process conditions of, and method for control...
- Patent number 12,180,579
- Issue date Dec 31, 2024
- Ionautics AB
- Daniel Lundin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Irradiation-resistant and anti-wear hydrogen-free carbon film on po...
- Patent number 11,788,182
- Issue date Oct 17, 2023
- Lanzhou Institute of Chemical Physics Chinese Academy of Sciences
- Peng Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal evaporation sources for wide-area deposition
- Patent number 11,739,414
- Issue date Aug 29, 2023
- JLN Solar, Inc.
- Robert W. Birkmire
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Evaporator, deposition arrangement, deposition apparatus and method...
- Patent number 11,713,506
- Issue date Aug 1, 2023
- Applied Materials, Inc.
- Stefan Keller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PVD coatings with a HEA ceramic matrix with controlled precipitate...
- Patent number 11,649,541
- Issue date May 16, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Siva Phani Kumar Yalamanchili
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for and method of manufacturing semiconductor device
- Patent number 11,512,389
- Issue date Nov 29, 2022
- SAMSUNG ELECTRONINCS CO., LTD.
- Keewon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced cathodic ARC source for ARC plasma deposition
- Patent number 11,466,360
- Issue date Oct 11, 2022
- Veeco Instruments Inc.
- Boris L. Druz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron beam evaporator, coating apparatus and coating method
- Patent number 11,377,724
- Issue date Jul 5, 2022
- VON ARDENNE Asset GmbH & Co. KG
- Ekkehart Reinhold
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Information Patent Grant
Device and method for determining the concentration of a vapor
- Patent number 11,268,934
- Issue date Mar 8, 2022
- Aixtron SE
- Arno Offermanns
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Evaporation device and evaporation method
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- Issue date Sep 14, 2021
- Hefei Xinsheng Optoelectronics Technology Co., Ltd.
- Bo Mao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film thickness test apparatus and method and vapor deposition device
- Patent number 11,092,429
- Issue date Aug 17, 2021
- BOE Technology Group Co., Ltd.
- Chihwei Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing tool having a monitoring device
- Patent number 10,957,565
- Issue date Mar 23, 2021
- Applied Materials, Inc.
- Shimin Mao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating device for evaporation, evaporation device and evaporation...
- Patent number 10,870,914
- Issue date Dec 22, 2020
- BOE Technology Group Co., Ltd.
- Jiunsung Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cathode assembly, physical vapor deposition system, and method for...
- Patent number 10,804,083
- Issue date Oct 13, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Chieh Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing tool having a monitoring device
- Patent number 10,763,143
- Issue date Sep 1, 2020
- Applied Materials, Inc.
- Shimin Mao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EBPVD columnated vapor stream
- Patent number 10,724,133
- Issue date Jul 28, 2020
- Raytheon Technologies Corporation
- James W. Neal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal evaporation sources for wide-area deposition
- Patent number 10,663,228
- Issue date May 26, 2020
- JLN Solar, Inc.
- Robert W. Birkmire
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporization system and vaporization system program
- Patent number 10,612,131
- Issue date Apr 7, 2020
- HORIBA STEC, Co., Ltd.
- Akihiro Taguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Storage device, vaporizer and substrate processing apparatus
- Patent number 10,480,069
- Issue date Nov 19, 2019
- Kokusai Electric Corporation
- Naoko Kitagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nanoscale surface with nanoscale features formed using diffusion at...
- Patent number 10,422,746
- Issue date Sep 24, 2019
- International Business Machines Corporation
- Juntao Li
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Monomer vaporizing device and method of controlling the same
- Patent number 10,266,941
- Issue date Apr 23, 2019
- Samsung Display Co., Ltd.
- Yong-Suk Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for supplying deposition material, method for producing subs...
- Patent number 10,184,169
- Issue date Jan 22, 2019
- Mitsubishi Heavy Industries, Ltd.
- Ryuta Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum vapor deposition method
- Patent number 9,863,034
- Issue date Jan 9, 2018
- Mitsubishi Heavy Industries, Ltd.
- Yuji Yanagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic flux measurement device
- Patent number 9,658,191
- Issue date May 23, 2017
- The Doshisha
- Tadashi Ohachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus
- Patent number 9,127,358
- Issue date Sep 8, 2015
- Tokyo Electron Limited
- Mitsuya Inoue
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Measurement device and method for vapour deposition applications
- Patent number 9,064,740
- Issue date Jun 23, 2015
- Koninklijke Philips N.V.
- Johannes Krijne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition amount measuring apparatus, depositing apparatus includi...
- Patent number 8,889,214
- Issue date Nov 18, 2014
- Samsung Display Co., Ltd.
- Kyung-Soo Kim
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Crucible having a monitor system and a cover with a slot which rece...
- Patent number 8,337,620
- Issue date Dec 25, 2012
- Hon Hai Precision Industry Co., Ltd.
- Shao-Kai Pei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method with deposition source position control
- Patent number 7,959,971
- Issue date Jun 14, 2011
- Canon Kabushiki Kaisha
- Nobutaka Ukigaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

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THERMAL EVAPORATION SOURCES FOR WIDE-AREA DEPOSITION
- Publication number 20230313363
- Publication date Oct 5, 2023
- JLN Solar, Inc.
- Robert W. Birkmire
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CONTROLLING A FLUX DISTRIBUTION OF EVAPORATED SOURCE MAT...
- Publication number 20230287556
- Publication date Sep 14, 2023
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wolfgang Braun
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR EVAPORATING AN ORGANIC POWDER
- Publication number 20230220553
- Publication date Jul 13, 2023
- AIXTRON SE
- Markus JAKOB
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD FOR CONTROLLING AN EVAPORATION RATE OF SOURCE MATERIAL, DETE...
- Publication number 20230175892
- Publication date Jun 8, 2023
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wolfgang Braun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MONITORING PROCESS CONDITIONS OF, AND METHOD FOR CONTROL...
- Publication number 20230151476
- Publication date May 18, 2023
- Ionautics AB
- Daniel LUNDIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IRRADIATION-RESISTANT AND ANTI-WEAR HYDROGEN-FREE CARBON FILM ON PO...
- Publication number 20230052627
- Publication date Feb 16, 2023
- Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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PROCESS FOR MAKING MULTILAYER STRUCTURE WITH BARRIER PROPERTIES
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- KNOWFORT HOLDING B.V.
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220090258
- Publication date Mar 24, 2022
- Kokusai Electric Corporation
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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EVAPORATOR BOAT CONTROL SYSTEM, PVD MACHINE AND METHOD OF OPERATING...
- Publication number 20210388486
- Publication date Dec 16, 2021
- BOBST MANCHESTER LIMITED
- Omar NUNZIATI
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Information Patent Application
PVD Coatings with a HEA Ceramic Matrix with Controlled Precipitate...
- Publication number 20210388481
- Publication date Dec 16, 2021
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Siva Phani Kumar Yalamanchili
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING APPARATUS AND METHOD FOR USE THEREOF
- Publication number 20210246542
- Publication date Aug 12, 2021
- KVARC SERVICES INC
- Leonid KRISHTEIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED CATHODIC ARC SOURCE FOR ARC PLASMA DEPOSITION
- Publication number 20210172053
- Publication date Jun 10, 2021
- VEECO INSTRUMENTS INC.
- Boris L. Druz
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EVAPORATION SOURCE FOR DEPOSITION OF EVAPORATED MATERIAL ON A SUBST...
- Publication number 20210147975
- Publication date May 20, 2021
- Applied Materials, Inc.
- Thomas GEBELE
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PROCESSING TOOL HAVING A MONITORING DEVICE
- Publication number 20200357669
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- Applied Materials, Inc.
- Shimin Mao
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APPARATUS FOR AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20200299829
- Publication date Sep 24, 2020
- Samsung Electronics Co., Ltd.
- KEEWON KIM
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THERMAL EVAPORATION SOURCES FOR WIDE-AREA DEPOSITION
- Publication number 20200292234
- Publication date Sep 17, 2020
- JLN Solar, Inc.
- Robert W. Birkmire
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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ELECTRON BEAM EVAPORATOR, COATING APPARATUS AND COATING METHOD
- Publication number 20200048758
- Publication date Feb 13, 2020
- VON ARDENNE Asset GmbH & Co. KG
- Ekkehart REINHOLD
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DEVICE AND METHOD FOR DETERMINING THE CONCENTRATION OF A VAPOR
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METHOD FOR MONITORING SE VAPOR IN VACUUM REACTOR APPARATUS
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using measurement on the vapor source

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus for and method of manufacturing semiconductor device

Method for monitoring process conditions of, and method for control...

Irradiation-resistant and anti-wear hydrogen-free carbon film on po...

Thermal evaporation sources for wide-area deposition

Evaporator, deposition arrangement, deposition apparatus and method...

PVD coatings with a HEA ceramic matrix with controlled precipitate...

Apparatus for and method of manufacturing semiconductor device

Enhanced cathodic ARC source for ARC plasma deposition

Electron beam evaporator, coating apparatus and coating method

Device and method for determining the concentration of a vapor

Evaporation device and evaporation method

Film thickness test apparatus and method and vapor deposition device

Processing tool having a monitoring device

Heating device for evaporation, evaporation device and evaporation...

Cathode assembly, physical vapor deposition system, and method for...

Processing tool having a monitoring device

EBPVD columnated vapor stream

Thermal evaporation sources for wide-area deposition

Vaporization system and vaporization system program

Storage device, vaporizer and substrate processing apparatus

Nanoscale surface with nanoscale features formed using diffusion at...

Monomer vaporizing device and method of controlling the same

Method for supplying deposition material, method for producing subs...

Vacuum vapor deposition method

Atomic flux measurement device

Film forming apparatus

Measurement device and method for vapour deposition applications

Deposition amount measuring apparatus, depositing apparatus includi...

Crucible having a monitor system and a cover with a slot which rece...

Film formation method with deposition source position control

Patents Applicationslast 30 patents

APPLYING A TRANSPARENT CONDUCTIVE FILM TO FLUORINE-DOPED TIN OXIDE

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

THERMAL EVAPORATION SOURCES FOR WIDE-AREA DEPOSITION

METHOD FOR CONTROLLING A FLUX DISTRIBUTION OF EVAPORATED SOURCE MAT...

DEVICE AND METHOD FOR EVAPORATING AN ORGANIC POWDER

METHOD FOR CONTROLLING AN EVAPORATION RATE OF SOURCE MATERIAL, DETE...

METHOD FOR MONITORING PROCESS CONDITIONS OF, AND METHOD FOR CONTROL...

IRRADIATION-RESISTANT AND ANTI-WEAR HYDROGEN-FREE CARBON FILM ON PO...

APPARATUS FOR AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

PROCESS FOR MAKING MULTILAYER STRUCTURE WITH BARRIER PROPERTIES

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

EVAPORATOR BOAT CONTROL SYSTEM, PVD MACHINE AND METHOD OF OPERATING...

PVD Coatings with a HEA Ceramic Matrix with Controlled Precipitate...

COATING APPARATUS AND METHOD FOR USE THEREOF

ENHANCED CATHODIC ARC SOURCE FOR ARC PLASMA DEPOSITION

EVAPORATION SOURCE FOR DEPOSITION OF EVAPORATED MATERIAL ON A SUBST...

PROCESSING TOOL HAVING A MONITORING DEVICE

APPARATUS FOR AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

THERMAL EVAPORATION SOURCES FOR WIDE-AREA DEPOSITION

ELECTRON BEAM EVAPORATOR, COATING APPARATUS AND COATING METHOD

DEVICE AND METHOD FOR DETERMINING THE CONCENTRATION OF A VAPOR

MATERIAL DEPOSITION ARRANGEMENT, VACUUM DEPOSITION SYSTEM AND METHO...

EVAPORATOR, EVAPORATION COATING APPARATUS AND EVAPORATION COATING M...

NANOSCALE SURFACE WITH NANOSCALE FEATURES FORMED USING DIFFUSION AT...

EVAPORATION SOURCE

FILM THICKNESS TEST APPARATUS AND METHOD AND VAPOR DEPOSITION DEVICE

HEATING DEVICE FOR EVAPORATION, EVAPORATION DEVICE AND EVAPORATION...

MONOMER VAPORIZING DEVICE AND METHOD OF CONTROLLING THE SAME

A CRUCIBLE DEVICE USED IN COATING SYSTEM

METHOD FOR MONITORING SE VAPOR IN VACUUM REACTOR APPARATUS