using measurement on the vapor source

Industry

CPC
C23C14/543

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/543using measurement on the vapor source

Industries

Patents Grantslast 30 patents

Information Patent Grant
Irradiation-resistant and anti-wear hydrogen-free carbon film on po...
- Patent number 11,788,182
- Issue date Oct 17, 2023
- Lanzhou Institute of Chemical Physics Chinese Academy of Sciences
- Peng Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal evaporation sources for wide-area deposition
- Patent number 11,739,414
- Issue date Aug 29, 2023
- JLN Solar, Inc.
- Robert W. Birkmire
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Evaporator, deposition arrangement, deposition apparatus and method...
- Patent number 11,713,506
- Issue date Aug 1, 2023
- Applied Materials, Inc.
- Stefan Keller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PVD coatings with a HEA ceramic matrix with controlled precipitate...
- Patent number 11,649,541
- Issue date May 16, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Siva Phani Kumar Yalamanchili
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Apparatus for and method of manufacturing semiconductor device
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- Issue date Nov 29, 2022
- SAMSUNG ELECTRONINCS CO., LTD.
- Keewon Kim
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Information Patent Grant
Enhanced cathodic ARC source for ARC plasma deposition
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- Issue date Oct 11, 2022
- Veeco Instruments Inc.
- Boris L. Druz
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Electron beam evaporator, coating apparatus and coating method
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- Issue date Jul 5, 2022
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- Ekkehart Reinhold
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Device and method for determining the concentration of a vapor
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- Issue date Mar 8, 2022
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- Arno Offermanns
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Evaporation device and evaporation method
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- Issue date Sep 14, 2021
- Hefei Xinsheng Optoelectronics Technology Co., Ltd.
- Bo Mao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film thickness test apparatus and method and vapor deposition device
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- Issue date Aug 17, 2021
- BOE Technology Group Co., Ltd.
- Chihwei Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing tool having a monitoring device
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- Issue date Mar 23, 2021
- Applied Materials, Inc.
- Shimin Mao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating device for evaporation, evaporation device and evaporation...
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- Issue date Dec 22, 2020
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- Jiunsung Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cathode assembly, physical vapor deposition system, and method for...
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- Issue date Oct 13, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Chieh Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing tool having a monitoring device
- Patent number 10,763,143
- Issue date Sep 1, 2020
- Applied Materials, Inc.
- Shimin Mao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EBPVD columnated vapor stream
- Patent number 10,724,133
- Issue date Jul 28, 2020
- Raytheon Technologies Corporation
- James W. Neal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal evaporation sources for wide-area deposition
- Patent number 10,663,228
- Issue date May 26, 2020
- JLN Solar, Inc.
- Robert W. Birkmire
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporization system and vaporization system program
- Patent number 10,612,131
- Issue date Apr 7, 2020
- HORIBA STEC, Co., Ltd.
- Akihiro Taguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Storage device, vaporizer and substrate processing apparatus
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- Issue date Nov 19, 2019
- Kokusai Electric Corporation
- Naoko Kitagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nanoscale surface with nanoscale features formed using diffusion at...
- Patent number 10,422,746
- Issue date Sep 24, 2019
- International Business Machines Corporation
- Juntao Li
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Monomer vaporizing device and method of controlling the same
- Patent number 10,266,941
- Issue date Apr 23, 2019
- Samsung Display Co., Ltd.
- Yong-Suk Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for supplying deposition material, method for producing subs...
- Patent number 10,184,169
- Issue date Jan 22, 2019
- Mitsubishi Heavy Industries, Ltd.
- Ryuta Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum vapor deposition method
- Patent number 9,863,034
- Issue date Jan 9, 2018
- Mitsubishi Heavy Industries, Ltd.
- Yuji Yanagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic flux measurement device
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- Issue date May 23, 2017
- The Doshisha
- Tadashi Ohachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus
- Patent number 9,127,358
- Issue date Sep 8, 2015
- Tokyo Electron Limited
- Mitsuya Inoue
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Measurement device and method for vapour deposition applications
- Patent number 9,064,740
- Issue date Jun 23, 2015
- Koninklijke Philips N.V.
- Johannes Krijne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition amount measuring apparatus, depositing apparatus includi...
- Patent number 8,889,214
- Issue date Nov 18, 2014
- Samsung Display Co., Ltd.
- Kyung-Soo Kim
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Crucible having a monitor system and a cover with a slot which rece...
- Patent number 8,337,620
- Issue date Dec 25, 2012
- Hon Hai Precision Industry Co., Ltd.
- Shao-Kai Pei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method with deposition source position control
- Patent number 7,959,971
- Issue date Jun 14, 2011
- Canon Kabushiki Kaisha
- Nobutaka Ukigaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Source for thermal physical vapor deposition of organic electrolumi...
- Patent number 7,815,737
- Issue date Oct 19, 2010
- LG Display Co., Ltd.
- Ki Beom Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Source for thermal physical vapor deposition of organic electrolumi...
- Patent number 7,025,832
- Issue date Apr 11, 2006
- LG Electronics Inc.
- Ki Beom Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

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THERMAL EVAPORATION SOURCES FOR WIDE-AREA DEPOSITION
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- JLN Solar, Inc.
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METHOD FOR CONTROLLING A FLUX DISTRIBUTION OF EVAPORATED SOURCE MAT...
- Publication number 20230287556
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- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wolfgang Braun
- G01 - MEASURING TESTING
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DEVICE AND METHOD FOR EVAPORATING AN ORGANIC POWDER
- Publication number 20230220553
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- AIXTRON SE
- Markus JAKOB
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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METHOD FOR CONTROLLING AN EVAPORATION RATE OF SOURCE MATERIAL, DETE...
- Publication number 20230175892
- Publication date Jun 8, 2023
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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- Publication number 20230151476
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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IRRADIATION-RESISTANT AND ANTI-WEAR HYDROGEN-FREE CARBON FILM ON PO...
- Publication number 20230052627
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- Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences
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PVD Coatings with a HEA Ceramic Matrix with Controlled Precipitate...
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- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
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- KVARC SERVICES INC
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- H01 - BASIC ELECTRIC ELEMENTS
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ENHANCED CATHODIC ARC SOURCE FOR ARC PLASMA DEPOSITION
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using measurement on the vapor source

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Irradiation-resistant and anti-wear hydrogen-free carbon film on po...

Thermal evaporation sources for wide-area deposition

Evaporator, deposition arrangement, deposition apparatus and method...

PVD coatings with a HEA ceramic matrix with controlled precipitate...

Apparatus for and method of manufacturing semiconductor device

Enhanced cathodic ARC source for ARC plasma deposition

Electron beam evaporator, coating apparatus and coating method

Device and method for determining the concentration of a vapor

Evaporation device and evaporation method

Film thickness test apparatus and method and vapor deposition device

Processing tool having a monitoring device

Heating device for evaporation, evaporation device and evaporation...

Cathode assembly, physical vapor deposition system, and method for...

Processing tool having a monitoring device

EBPVD columnated vapor stream

Thermal evaporation sources for wide-area deposition

Vaporization system and vaporization system program

Storage device, vaporizer and substrate processing apparatus

Nanoscale surface with nanoscale features formed using diffusion at...

Monomer vaporizing device and method of controlling the same

Method for supplying deposition material, method for producing subs...

Vacuum vapor deposition method

Atomic flux measurement device

Film forming apparatus

Measurement device and method for vapour deposition applications

Deposition amount measuring apparatus, depositing apparatus includi...

Crucible having a monitor system and a cover with a slot which rece...

Film formation method with deposition source position control

Source for thermal physical vapor deposition of organic electrolumi...

Source for thermal physical vapor deposition of organic electrolumi...

Patents Applicationslast 30 patents

APPLYING A TRANSPARENT CONDUCTIVE FILM TO FLUORINE-DOPED TIN OXIDE

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

THERMAL EVAPORATION SOURCES FOR WIDE-AREA DEPOSITION

METHOD FOR CONTROLLING A FLUX DISTRIBUTION OF EVAPORATED SOURCE MAT...

DEVICE AND METHOD FOR EVAPORATING AN ORGANIC POWDER

METHOD FOR CONTROLLING AN EVAPORATION RATE OF SOURCE MATERIAL, DETE...

METHOD FOR MONITORING PROCESS CONDITIONS OF, AND METHOD FOR CONTROL...

IRRADIATION-RESISTANT AND ANTI-WEAR HYDROGEN-FREE CARBON FILM ON PO...

APPARATUS FOR AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

PROCESS FOR MAKING MULTILAYER STRUCTURE WITH BARRIER PROPERTIES

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

EVAPORATOR BOAT CONTROL SYSTEM, PVD MACHINE AND METHOD OF OPERATING...

PVD Coatings with a HEA Ceramic Matrix with Controlled Precipitate...

COATING APPARATUS AND METHOD FOR USE THEREOF

ENHANCED CATHODIC ARC SOURCE FOR ARC PLASMA DEPOSITION

EVAPORATION SOURCE FOR DEPOSITION OF EVAPORATED MATERIAL ON A SUBST...

PROCESSING TOOL HAVING A MONITORING DEVICE

APPARATUS FOR AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

THERMAL EVAPORATION SOURCES FOR WIDE-AREA DEPOSITION

ELECTRON BEAM EVAPORATOR, COATING APPARATUS AND COATING METHOD

DEVICE AND METHOD FOR DETERMINING THE CONCENTRATION OF A VAPOR

MATERIAL DEPOSITION ARRANGEMENT, VACUUM DEPOSITION SYSTEM AND METHO...

EVAPORATOR, EVAPORATION COATING APPARATUS AND EVAPORATION COATING M...

NANOSCALE SURFACE WITH NANOSCALE FEATURES FORMED USING DIFFUSION AT...

EVAPORATION SOURCE

FILM THICKNESS TEST APPARATUS AND METHOD AND VAPOR DEPOSITION DEVICE

HEATING DEVICE FOR EVAPORATION, EVAPORATION DEVICE AND EVAPORATION...

MONOMER VAPORIZING DEVICE AND METHOD OF CONTROLLING THE SAME

A CRUCIBLE DEVICE USED IN COATING SYSTEM

METHOD FOR MONITORING SE VAPOR IN VACUUM REACTOR APPARATUS