using microstructures

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G01K5/486

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GPHYSICS G01Measuring instruments G01KMEASURING TEMPERATURE MEASURING QUANTITY OF HEAT THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR G01K5/00Measuring temperature based on the expansion or contraction of a material

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G01K5/486using microstructures

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Patents Grantslast 30 patents

Information Patent Grant
Temperature indicator
- Patent number 12,345,574
- Issue date Jul 1, 2025
- ShockWatch, Inc.
- Anthony N. Fonk
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Time-temperature nanosensors for subsurface applications
- Patent number 11,761,329
- Issue date Sep 19, 2023
- Saudi Arabian Oil Company
- Jesus Manuel Felix Servin
- G01 - MEASURING TESTING
Information Patent Grant
MEMS structure and method for detecting a change in a parameter
- Patent number 11,573,131
- Issue date Feb 7, 2023
- Infineon Technologies AG
- Reinhard Hainisch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensing devices, sensors, and methods for monitoring environmental...
- Patent number 11,011,323
- Issue date May 18, 2021
- BelluTech LLC
- Weibin Zhu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor workpiece temperature measurement system
- Patent number 10,739,208
- Issue date Aug 11, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Petry
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor workpiece temperature measurement system
- Patent number 9,933,314
- Issue date Apr 3, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Petry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for measurement with pearls
- Patent number 9,116,053
- Issue date Aug 25, 2015
- Asle Johnsen
- G01 - MEASURING TESTING
Information Patent Grant
Integrated mechanical device for electrical switching
- Patent number 8,884,289
- Issue date Nov 11, 2014
- STMicroelectronics (Rousset) SAS
- Pascal Fornara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated capacitive device having a thermally variable capacitive...
- Patent number 8,704,327
- Issue date Apr 22, 2014
- STMicroelectronics (Rousset) SAS
- Christian Rivero
- G01 - MEASURING TESTING
Information Patent Grant
Integrated mechanical device for electrical switching
- Patent number 8,692,247
- Issue date Apr 8, 2014
- STMicroelectronics (Rousset) SAS
- Pascal Fornara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device for detecting temperature variations in a chip
- Patent number 8,550,707
- Issue date Oct 8, 2013
- STMicroelectronics (Rousset) SAS
- Christian Rivero
- G01 - MEASURING TESTING
Information Patent Grant
Method for monitoring and calibrating temperature in semiconductor...
- Patent number 7,572,052
- Issue date Aug 11, 2009
- Applied Materials, Inc.
- Jallepally Ravi
- G01 - MEASURING TESTING
Information Patent Grant
Microelectromechanical system and method for determining temperatur...
- Patent number 7,089,786
- Issue date Aug 15, 2006
- Glaxo Group Limited
- Dwight Sherod Walker
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Transmission-type extrinsic fabry-perot interferometric optical fib...
- Patent number 6,687,011
- Issue date Feb 3, 2004
- Korea Advanced Institute Science and Technology
- Jung Ju Lee
- G01 - MEASURING TESTING
Information Patent Grant
Methods of forming thermo-mechanical sensor
- Patent number 6,171,879
- Issue date Jan 9, 2001
- STMicroelectronics, Inc.
- Tsiu Chiu Chan
- G01 - MEASURING TESTING
Information Patent Grant
Integrated released beam, thermo-mechanical sensor for sensing temp...
- Patent number 5,917,226
- Issue date Jun 29, 1999
- STMicroelectronics, Inc.
- Tsiu Chiu Chan
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SENSING SYSTEM
- Publication number 20240312333
- Publication date Sep 19, 2024
- Rudders Rls Pty Ltd
- Roger John LA SALLE
- G01 - MEASURING TESTING
Information Patent Application
TIME-TEMPERATURE NANOSENSORS FOR SUBSURFACE APPLICATIONS
- Publication number 20230167735
- Publication date Jun 1, 2023
- Saudi Arabian Oil Company
- Jesus Manuel Felix Servin
- E21 - EARTH DRILLING MINING
Information Patent Application
TEMPERATURE INDICATOR
- Publication number 20220026283
- Publication date Jan 27, 2022
- ShockWatch, Inc.
- Anthony N. Fonk
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEMS STRUCTURE AND METHOD FOR DETECTING A CHANGE IN A PARAMETER
- Publication number 20190346314
- Publication date Nov 14, 2019
- INFINEON TECHNOLOGIES AG
- Reinhard Hainisch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Workpiece Temperature Measurement System
- Publication number 20190170591
- Publication date Jun 6, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Petry
- G01 - MEASURING TESTING
Information Patent Application
SENSING DEVICES, SENSORS, AND METHODS FOR MONITORING ENVIRONMENTAL...
- Publication number 20190172657
- Publication date Jun 6, 2019
- BelluTech LLC
- Weibin Zhu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Workpiece Temperature Measurement System
- Publication number 20180003567
- Publication date Jan 4, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Petry
- G01 - MEASURING TESTING
Information Patent Application
Integrated Mechanical Device for Electrical Switching
- Publication number 20140167908
- Publication date Jun 19, 2014
- STMicroelectronics (Rousset) SAS
- Pascal Fornara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Integrated Mechanical Device for Electrical Switching
- Publication number 20130146873
- Publication date Jun 13, 2013
- STMicroelectronics (Rousset) SAS
- Pascal Fornara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Integrated Capacitive Device Having a Thermally Variable Capacitive...
- Publication number 20130147004
- Publication date Jun 13, 2013
- STMicroelectronics (Rousset) SAS
- Christian Rivero
- G01 - MEASURING TESTING
Information Patent Application
TEMPERATURE MEASURING PROBE, TEMPERATURE MEASURING APPARATUS, AND T...
- Publication number 20130010829
- Publication date Jan 10, 2013
- Canon Kabushiki Kaisha
- Kaoru Ojima
- B82 - NANO-TECHNOLOGY
Information Patent Application
SYSTEM FOR MEASUREMENT WITH PEARLS
- Publication number 20110309844
- Publication date Dec 22, 2011
- Asle Johnsen
- G01 - MEASURING TESTING
Information Patent Application
DEVICE FOR DETECTING TEMPERATURE VARIATIONS IN A CHIP
- Publication number 20110080933
- Publication date Apr 7, 2011
- STMicroelectronics (Rousset) SAS
- Christian Rivero
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE SURFACE TEMPERATURE MEASUREMENT METHOD, SUBSTRATE PROCESS...
- Publication number 20090219969
- Publication date Sep 3, 2009
- Canon ANELVA Corporation
- Takeshi Yamamoto
- G01 - MEASURING TESTING
Information Patent Application
INTEGRATED TEMPERATURE SENSOR
- Publication number 20090180516
- Publication date Jul 16, 2009
- Koninklijke Philips Electronics N.V.
- Jacob Marinus Jan Den Toonder
- G01 - MEASURING TESTING
Information Patent Application
NOVEL METHOD FOR MONITORING AND CALIBRATING TEMPERATURE IN SEMICOND...
- Publication number 20090016406
- Publication date Jan 15, 2009
- Jallepally Ravi
- G01 - MEASURING TESTING
Information Patent Application
GAS ANALYZING APPARATUS AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20080236747
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Tatsuo MATSUDO
- G01 - MEASURING TESTING
Information Patent Application
Nanoelectronic sensor with integral suspended micro-heater
- Publication number 20070045756
- Publication date Mar 1, 2007
- Ying-Lan Chang
- G01 - MEASURING TESTING
Information Patent Application
Microelectromechanical system and method for determning temperature...
- Publication number 20050223827
- Publication date Oct 13, 2005
- Dwight Sherod Walker
- G01 - MEASURING TESTING

using microstructures

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Temperature indicator

Time-temperature nanosensors for subsurface applications

MEMS structure and method for detecting a change in a parameter

Sensing devices, sensors, and methods for monitoring environmental...

Semiconductor workpiece temperature measurement system

Semiconductor workpiece temperature measurement system

System for measurement with pearls

Integrated mechanical device for electrical switching

Integrated capacitive device having a thermally variable capacitive...

Integrated mechanical device for electrical switching

Device for detecting temperature variations in a chip

Method for monitoring and calibrating temperature in semiconductor...

Microelectromechanical system and method for determining temperatur...

Transmission-type extrinsic fabry-perot interferometric optical fib...

Methods of forming thermo-mechanical sensor

Integrated released beam, thermo-mechanical sensor for sensing temp...

Patents Applicationslast 30 patents

SENSING SYSTEM

TIME-TEMPERATURE NANOSENSORS FOR SUBSURFACE APPLICATIONS

TEMPERATURE INDICATOR

MEMS STRUCTURE AND METHOD FOR DETECTING A CHANGE IN A PARAMETER

Semiconductor Workpiece Temperature Measurement System

SENSING DEVICES, SENSORS, AND METHODS FOR MONITORING ENVIRONMENTAL...

Semiconductor Workpiece Temperature Measurement System

Integrated Mechanical Device for Electrical Switching

Integrated Mechanical Device for Electrical Switching

Integrated Capacitive Device Having a Thermally Variable Capacitive...

TEMPERATURE MEASURING PROBE, TEMPERATURE MEASURING APPARATUS, AND T...

SYSTEM FOR MEASUREMENT WITH PEARLS

DEVICE FOR DETECTING TEMPERATURE VARIATIONS IN A CHIP

SUBSTRATE SURFACE TEMPERATURE MEASUREMENT METHOD, SUBSTRATE PROCESS...

INTEGRATED TEMPERATURE SENSOR

NOVEL METHOD FOR MONITORING AND CALIBRATING TEMPERATURE IN SEMICOND...

GAS ANALYZING APPARATUS AND SUBSTRATE PROCESSING SYSTEM

Nanoelectronic sensor with integral suspended micro-heater

Microelectromechanical system and method for determning temperature...