using other particles than noble gas ions

Industry

CPC
C23C14/3457

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/3457using other particles than noble gas ions

Industries

Patents Grantslast 30 patents

Information Patent Grant
Near infrared optical interference filters with improved transmission
- Patent number 11,372,144
- Issue date Jun 28, 2022
- Materion Corporation
- Robert Sprague
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a thin film of tantalum with low resistivity
- Patent number 11,313,030
- Issue date Apr 26, 2022
- X-FAB FRANCE
- Faiz Dahmani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus, sputtering target, and method for forming sem...
- Patent number 11,309,181
- Issue date Apr 19, 2022
- Semiconductor Energy Laboratory Co., Ltd.
- Masahiro Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated metallic substrate and fabrication method
- Patent number 11,193,210
- Issue date Dec 7, 2021
- Arcelormittal
- Jacek Goniakowski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas barrier film
- Patent number 10,844,186
- Issue date Nov 24, 2020
- Toray Industries, Inc.
- Yusuke Tsukamura
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Sustained self-sputtering of lithium for lithium physical vapor dep...
- Patent number 10,443,121
- Issue date Oct 15, 2019
- View, Inc.
- Martin John Neumann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Window film and preparation method thereof
- Patent number 10,309,008
- Issue date Jun 4, 2019
- ZHANGJIAGANG KANGDE XIN OPTRONICS MATERIAL CO., LTD.
- Yuchun Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic-field-generating apparatus for magnetron sputtering
- Patent number 10,280,503
- Issue date May 7, 2019
- Hitachi Metals, Ltd.
- Yoshihiko Kuriyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus and film formation method
- Patent number 10,260,145
- Issue date Apr 16, 2019
- Shibaura Mechatronics Corporation
- Daisuke Ono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing oxide
- Patent number 10,157,738
- Issue date Dec 18, 2018
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-ionized and inductively-coupled plasma for sputtering and resp...
- Patent number 10,047,430
- Issue date Aug 14, 2018
- Applied Materials, Inc.
- Peijun Ding
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxide semiconductor film and formation method thereof
- Patent number 9,824,888
- Issue date Nov 21, 2017
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film transistor and manufacturing method thereof, display subs...
- Patent number 9,773,917
- Issue date Sep 26, 2017
- BOE Technology Group Co., Ltd.
- Jiangbo Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Printhead protective coating
- Patent number 9,597,873
- Issue date Mar 21, 2017
- Hewlett-Packard Development Company, L.P.
- Rio Rivas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method
- Patent number 9,139,901
- Issue date Sep 22, 2015
- Tokyo Electron Limited
- Akitaka Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for coating a substrate, plant for implementing the process...
- Patent number 9,051,642
- Issue date Jun 9, 2015
- ArcelorMittal France
- Daniel Chaleix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Catalyst production process
- Patent number 8,900,420
- Issue date Dec 2, 2014
- 3M Innovative Properties Company
- Badri Veeraraghavan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor element and deposition appar...
- Patent number 8,772,160
- Issue date Jul 8, 2014
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated article and method for making same
- Patent number 8,721,845
- Issue date May 13, 2014
- HONG FU JIN PRECISION INDUSTRY (ShenZhen) CO., LTD.
- Hsin-Pei Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Self-ionized and inductively-coupled plasma for sputtering and resp...
- Patent number 8,696,875
- Issue date Apr 15, 2014
- Applied Materials, Inc.
- Peijun Ding
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Self-ionized and inductively-coupled plasma for sputtering and resp...
- Patent number 8,668,816
- Issue date Mar 11, 2014
- Applied Materials Inc.
- Peijun Ding
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus
- Patent number 8,377,269
- Issue date Feb 19, 2013
- ULVAC, Inc.
- Naoki Morimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon object forming method and apparatus
- Patent number 7,887,677
- Issue date Feb 15, 2011
- Nissin Electric Co., Ltd.
- Takashi Mikami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming vertical inorganic alignment layer and liquid cry...
- Patent number 7,755,733
- Issue date Jul 13, 2010
- Samsung Electronics Co., Ltd.
- Soon-Joon Rho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of sputtering a protective coating on a semiconductor subst...
- Patent number 7,601,246
- Issue date Oct 13, 2009
- Lam Research Corporation
- Jisoo Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shields usable with an inductively coupled plasma reactor
- Patent number 7,569,125
- Issue date Aug 4, 2009
- Applied Materials, Inc.
- Tza-Jing Gung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sidewall magnet improving uniformity of inductively coupled plasma...
- Patent number 7,041,201
- Issue date May 9, 2006
- Applied Materials, Inc.
- Tza-Jing Gung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotational and reciprocal radial movement of a sputtering magnetron
- Patent number 6,960,284
- Issue date Nov 1, 2005
- Applied Materials, Inc.
- Jianming Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing a layer
- Patent number 6,905,962
- Issue date Jun 14, 2005
- Trikon Technologies Limited
- Knut Beekman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-step process for depositing copper seed layer in a via
- Patent number 6,893,541
- Issue date May 17, 2005
- Applied Materials, Inc.
- Tony P. Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
NEAR INFRARED OPTICAL INTERFERENCE FILTERS WITH IMPROVED TRANSMISSION
- Publication number 20220299688
- Publication date Sep 22, 2022
- MATERION CORPORATION
- Robert Sprague
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A THIN FILM OF TANTALUM WITH LOW RESISTIVITY
- Publication number 20210062320
- Publication date Mar 4, 2021
- X-FAB FRANCE
- Faiz DAHMANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL FILTER INCLUDING A HIGH REFRACTIVE INDEX MATERIAL
- Publication number 20200096675
- Publication date Mar 26, 2020
- VIAVI Solutions Inc.
- Georg OCKENFUSS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMORPHOUS TUNGSTEN NITRIDE COMPOSITIONS, METHODS OF MANUFACTURE, AN...
- Publication number 20190301004
- Publication date Oct 3, 2019
- King Abdullah University of Science and Technology
- Abdulilah Mohammad MAYET
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NEAR INFRARED OPTICAL INTERFERENCE FILTERS WITH IMPROVED TRANSMISSION
- Publication number 20190212484
- Publication date Jul 11, 2019
- Materion Corporation
- Robert Sprague
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESS KIT WITH 3D PROFILING
- Publication number 20190211444
- Publication date Jul 11, 2019
- NOVENA TEC INC.
- ROMMEL MONTES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELF-IONIZED AND INDUCTIVELY-COUPLED PLASMA FOR SPUTTERING AND RESP...
- Publication number 20180327893
- Publication date Nov 15, 2018
- Applied Materials, Inc.
- Peijun Ding
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRICATION METHOD OF STRONTIUM NIOBIUM OXYNITRIDE FILM HAVING SMAL...
- Publication number 20180030602
- Publication date Feb 1, 2018
- PANASONIC CORPORATION
- RYOSUKE KIKUCHI
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
MAGNETIC-FIELD-GENERATING APPARATUS FOR MAGNETRON SPUTTERING
- Publication number 20180023189
- Publication date Jan 25, 2018
- Hitachi Metals, Ltd.
- Yoshihiko KURIYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROTECTED ITEM INCLUDING A PROTECTIVE COATING
- Publication number 20170357033
- Publication date Dec 14, 2017
- Viavi Solutions Inc.
- Georg OCKENFUSS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS, SPUTTERING TARGET, AND METHOD FOR FORMING SEM...
- Publication number 20170352540
- Publication date Dec 7, 2017
- Semiconductor Energy Laboratory Co., Ltd.
- Masahiro WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS AND FILM FORMATION METHOD
- Publication number 20170268098
- Publication date Sep 21, 2017
- SHIBAURA MECHATRONICS CORPORATION
- Daisuke Ono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WINDOW FILM AND PREPARATION METHOD THEREOF
- Publication number 20170268099
- Publication date Sep 21, 2017
- ZHANGJIAGANG KANGDE XIN OPTRONICS MATERIAL CO. LTD.
- Yuchun Zhang
- B32 - LAYERED PRODUCTS
Information Patent Application
OXIDE AND MANUFACTURING METHOD THEREOF
- Publication number 20170250077
- Publication date Aug 31, 2017
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS BARRIER FILM
- Publication number 20170190858
- Publication date Jul 6, 2017
- TORAY INDUSTRIES, INC.
- Yusuke Tsukamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN METAL FILM SUBSTRATE AND METHOD FOR PREPARING THE SAME
- Publication number 20170175249
- Publication date Jun 22, 2017
- KOREA INSTITUTE OF MACHINERY & MATERIALS
- Jung Heum Yun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR MANUFACTURING NICKEL OXIDE FILMS WITH HIGH CONDUCTIVITY
- Publication number 20170159169
- Publication date Jun 8, 2017
- Ming Chi University of Technology
- Sheng-Chi CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WIRE GRID POLARIZER PLATE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20170153372
- Publication date Jun 1, 2017
- Samsung Display Co. Ltd.
- Su Kyoung YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF GROWING ALUMINUM OXIDE ONTO SUBSTRATES BY USE OF AN ALUMI...
- Publication number 20160369387
- Publication date Dec 22, 2016
- RUBICON TECHNOLOGY, INC.
- John P. Ciraldo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF SOLID STATE ELECTROLYTE ON ELECTRODE LAYERS IN ELECTR...
- Publication number 20160343552
- Publication date Nov 24, 2016
- Applied Materials, Inc.
- Lizhong SUN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRONIC DEVICE, METHOD FOR PRODUCING ELECTRONIC DEVICE, ELECTRON...
- Publication number 20160293827
- Publication date Oct 6, 2016
- SEIKO EPSON CORPORATION
- Tetsuya OTSUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF, DISPLAY SUBS...
- Publication number 20160260834
- Publication date Sep 8, 2016
- BOE TECHNOLOGY GROUP CO., LTD.
- Jiangbo CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NEAR INFRARED OPTICAL INTERFERENCE FILTERS WITH IMPROVED TRANSMISSION
- Publication number 20160238759
- Publication date Aug 18, 2016
- MATERION CORPORATION
- Robert Sprague
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF GROWING ALUMINUM OXIDE ONTO SUBSTRATES BY USE OF AN ALUMI...
- Publication number 20160215381
- Publication date Jul 28, 2016
- RUBICON TECHNOLOGY, INC.
- Jonathan Benjamin Levine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRINTHEAD PROTECTIVE COATING
- Publication number 20160114581
- Publication date Apr 28, 2016
- Hewlett-Packard Development Company, L.P.
- Rio RIVAS
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
SUSTAINED SELF-SPUTTERING OF LITHIUM FOR LITHIUM PHYSICAL VAPOR DEP...
- Publication number 20160076139
- Publication date Mar 17, 2016
- VIEW, INC.
- Martin John Neumann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20150083580
- Publication date Mar 26, 2015
- TOKYO ELECTRON LIMITED
- Akitaka SHIMIZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDE SEMICONDUCTOR FILM AND FORMATION METHOD THEREOF
- Publication number 20140346500
- Publication date Nov 27, 2014
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELF-IONIZED AND INDUCTIVELY-COUPLED PLASMA FOR SPUTTERING AND RESP...
- Publication number 20140305802
- Publication date Oct 16, 2014
- Applied Materials, Inc.
- Peijun Ding
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT AND DEPOSITION APPAR...
- Publication number 20140290569
- Publication date Oct 2, 2014
- Shunpei YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using other particles than noble gas ions

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Near infrared optical interference filters with improved transmission

Method of forming a thin film of tantalum with low resistivity

Sputtering apparatus, sputtering target, and method for forming sem...

Coated metallic substrate and fabrication method

Gas barrier film

Sustained self-sputtering of lithium for lithium physical vapor dep...

Window film and preparation method thereof

Magnetic-field-generating apparatus for magnetron sputtering

Film formation apparatus and film formation method

Method for manufacturing oxide

Self-ionized and inductively-coupled plasma for sputtering and resp...

Oxide semiconductor film and formation method thereof

Thin film transistor and manufacturing method thereof, display subs...

Printhead protective coating

Plasma processing method

Process for coating a substrate, plant for implementing the process...

Catalyst production process

Method for manufacturing semiconductor element and deposition appar...

Coated article and method for making same

Self-ionized and inductively-coupled plasma for sputtering and resp...

Self-ionized and inductively-coupled plasma for sputtering and resp...

Sputtering apparatus

Silicon object forming method and apparatus

Method of forming vertical inorganic alignment layer and liquid cry...

Methods of sputtering a protective coating on a semiconductor subst...

Shields usable with an inductively coupled plasma reactor

Sidewall magnet improving uniformity of inductively coupled plasma...

Rotational and reciprocal radial movement of a sputtering magnetron

Method of depositing a layer

Multi-step process for depositing copper seed layer in a via

Patents Applicationslast 30 patents

NEAR INFRARED OPTICAL INTERFERENCE FILTERS WITH IMPROVED TRANSMISSION

METHOD OF FORMING A THIN FILM OF TANTALUM WITH LOW RESISTIVITY

OPTICAL FILTER INCLUDING A HIGH REFRACTIVE INDEX MATERIAL

AMORPHOUS TUNGSTEN NITRIDE COMPOSITIONS, METHODS OF MANUFACTURE, AN...

NEAR INFRARED OPTICAL INTERFERENCE FILTERS WITH IMPROVED TRANSMISSION

SEMICONDUCTOR PROCESS KIT WITH 3D PROFILING

SELF-IONIZED AND INDUCTIVELY-COUPLED PLASMA FOR SPUTTERING AND RESP...

FABRICATION METHOD OF STRONTIUM NIOBIUM OXYNITRIDE FILM HAVING SMAL...

MAGNETIC-FIELD-GENERATING APPARATUS FOR MAGNETRON SPUTTERING

PROTECTED ITEM INCLUDING A PROTECTIVE COATING

SPUTTERING APPARATUS, SPUTTERING TARGET, AND METHOD FOR FORMING SEM...

FILM FORMATION APPARATUS AND FILM FORMATION METHOD

WINDOW FILM AND PREPARATION METHOD THEREOF

OXIDE AND MANUFACTURING METHOD THEREOF

GAS BARRIER FILM

THIN METAL FILM SUBSTRATE AND METHOD FOR PREPARING THE SAME

PROCESS FOR MANUFACTURING NICKEL OXIDE FILMS WITH HIGH CONDUCTIVITY

WIRE GRID POLARIZER PLATE AND METHOD FOR MANUFACTURING THE SAME

METHOD OF GROWING ALUMINUM OXIDE ONTO SUBSTRATES BY USE OF AN ALUMI...

DEPOSITION OF SOLID STATE ELECTROLYTE ON ELECTRODE LAYERS IN ELECTR...

ELECTRONIC DEVICE, METHOD FOR PRODUCING ELECTRONIC DEVICE, ELECTRON...

THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF, DISPLAY SUBS...

NEAR INFRARED OPTICAL INTERFERENCE FILTERS WITH IMPROVED TRANSMISSION

METHOD OF GROWING ALUMINUM OXIDE ONTO SUBSTRATES BY USE OF AN ALUMI...

PRINTHEAD PROTECTIVE COATING

SUSTAINED SELF-SPUTTERING OF LITHIUM FOR LITHIUM PHYSICAL VAPOR DEP...

PLASMA PROCESSING METHOD

OXIDE SEMICONDUCTOR FILM AND FORMATION METHOD THEREOF

SELF-IONIZED AND INDUCTIVELY-COUPLED PLASMA FOR SPUTTERING AND RESP...

METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT AND DEPOSITION APPAR...