using particle beams

Industry

CPC
H01L21/02689

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02689using particle beams

Industries

Patents Grantslast 30 patents

Information Patent Grant
Using absolute Z-height values for synergy between tools
- Patent number 11,600,497
- Issue date Mar 7, 2023
- KLA Corporation
- Sandeep Madhogarhia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma annealing method and device for the same
- Patent number 11,511,316
- Issue date Nov 29, 2022
- Nissan Chemical Industries, Ltd.
- Hitoshi Furusho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser assisted SiC growth on silicon
- Patent number 11,069,527
- Issue date Jul 20, 2021
- Board of Trustees of Michigan State University
- Premjeet Chahal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for providing lateral thermal processing of thin films on lo...
- Patent number 10,553,450
- Issue date Feb 4, 2020
- NCC Nano, LLC
- Kurt A. Schroder
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Hot jet assisted systems and methods
- Patent number 10,290,519
- Issue date May 14, 2019
- Katholieke Universiteit Leuven
- Jean-Pierre Locquet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing of silicon strained in tension on insulator by amorph...
- Patent number 10,115,590
- Issue date Oct 30, 2018
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Shay Reboh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam-induced etching
- Patent number 10,103,008
- Issue date Oct 16, 2018
- FEI Company
- Clive D. Chandler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing device, plasma processing method and manufacturin...
- Patent number 9,978,593
- Issue date May 22, 2018
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Tomohiro Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser assisted SiC growth on silicon
- Patent number 9,960,037
- Issue date May 1, 2018
- Board of Trustees of Michigan State University
- Premjeet Chahal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing a strained semiconductor on insulator substrate
- Patent number 9,899,217
- Issue date Feb 20, 2018
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Shay Reboh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generator, annealing device, deposition crystallization appa...
- Patent number 9,865,435
- Issue date Jan 9, 2018
- BOE Technology Group Co., Ltd.
- Xiangjun Tian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing device, and plasma processing method
- Patent number 9,601,330
- Issue date Mar 21, 2017
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Tomohiro Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of repairing defect and method of manufacturing semiconducto...
- Patent number 9,383,641
- Issue date Jul 5, 2016
- Kabushiki Kaisha Toshiba
- Shingo Kanamitsu
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method for providing lateral thermal processing of thin films on lo...
- Patent number 9,006,047
- Issue date Apr 14, 2015
- NCC Nano, LLC
- Kurt A. Schroder
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Apparatus and method of forming high crystalline quality layer
- Patent number 8,617,965
- Issue date Dec 31, 2013
- Partial Assignment to University of Central Florida
- Nathaniel R. Quick
- C30 - CRYSTAL GROWTH
Information Patent Grant
Laser formation of graphene
- Patent number 8,617,669
- Issue date Dec 31, 2013
- Partial Assignment to University of Central Florida
- Nathaniel R. Quick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for providing lateral thermal processing of thin films on lo...
- Patent number 8,557,642
- Issue date Oct 15, 2013
- NCC Nano, LLC
- Kurt A. Schroder
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method for fabricating semiconductor device
- Patent number 8,492,250
- Issue date Jul 23, 2013
- Hynix Semiconductor Inc.
- Eun-Jung Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam annealing apparatus and annealing methods using the same
- Patent number 8,445,366
- Issue date May 21, 2013
- Samsung Electronics Co., Ltd.
- Jung-hyun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam assisted modification of thin film materials
- Patent number 8,003,498
- Issue date Aug 23, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan G. England
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method for fabrication of single crystal diodes for resistive memories
- Patent number 7,902,051
- Issue date Mar 8, 2011
- International Business Machines Corporation
- Bipin Rajendran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for transformation of substrate
- Patent number 7,897,492
- Issue date Mar 1, 2011
- Nathaniel R. Quick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating oxide semiconductor device
- Patent number 7,883,934
- Issue date Feb 8, 2011
- Canon Kabushiki Kaisha
- Nobuyuki Kaji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for increasing thermal conductivity of a subst...
- Patent number 7,811,914
- Issue date Oct 12, 2010
- Nathaniel R. Quick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating oxide semiconductor device
- Patent number 7,691,715
- Issue date Apr 6, 2010
- Canon Kabushiki Kaisha
- Nobuyuki Kaji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for transformation of substrate
- Patent number 7,618,880
- Issue date Nov 17, 2009
- Nathaniel R. Quick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Producing method for crystalline thin film
- Patent number 7,473,621
- Issue date Jan 6, 2009
- Canon Kabushiki Kaisha
- Hideya Kumomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating oxide semiconductor device
- Patent number 7,468,304
- Issue date Dec 23, 2008
- Canon Kabushiki Kaisha
- Nobuyuki Kaji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to reduce crystal defects particularly in group III-nitride...
- Patent number 7,341,628
- Issue date Mar 11, 2008
- Andreas A. Melas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for forming single-crystalline thin film by beam irradiat...
- Patent number 6,032,611
- Issue date Mar 7, 2000
- Neuralsystems Corporation
- Toshifumi Asakawa
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
USING ABSOLUTE Z-HEIGHT VALUES FOR SYNERGY BETWEEN TOOLS
- Publication number 20200321221
- Publication date Oct 8, 2020
- KLA Corporation
- Sandeep Madhogarhia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser Assisted SiC Growth On Silicon
- Publication number 20180226247
- Publication date Aug 9, 2018
- Board of Trustees of Michigan State University
- Premjeet CHAHAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING OF SILICON STRAINED IN TENSION ON INSULATOR BY AMORPH...
- Publication number 20170309483
- Publication date Oct 26, 2017
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Shay REBOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD AND MANUFACTURIN...
- Publication number 20170287712
- Publication date Oct 5, 2017
- Panasonic Intellectual Property Management Co., Ltd.
- TOMOHIRO OKUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Hot Jet Assisted Systems and Methods
- Publication number 20170263475
- Publication date Sep 14, 2017
- Katholieke Universiteit Leuven
- Jean-Pierre LOCQUET
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA GENERATOR, ANNEALING DEVICE, DEPOSITION CRYSTALLIZATION APPA...
- Publication number 20170103876
- Publication date Apr 13, 2017
- BOE TECHNOLOGY GROUP CO., LTD.
- Xiangjun TIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON CARBIDE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR SAME
- Publication number 20160254148
- Publication date Sep 1, 2016
- FUJI ELECTRIC CO., LTD.
- Shoji KITAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING AN EPITAXIAL SEMICONDUCTOR LAYER
- Publication number 20150357193
- Publication date Dec 10, 2015
- FRAUNHOFER-GES. ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- Dietmar Temmler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD
- Publication number 20150294866
- Publication date Oct 15, 2015
- Panasonic Intellectual Property Management Co., Ltd.
- TOMOHIRO OKUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING A SEMICONDUCTOR SUBSTRATE ON INSULATOR
- Publication number 20150155170
- Publication date Jun 4, 2015
- COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE. ALT.
- Shay REBOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF CRYSTALLISING THIN FILMS
- Publication number 20140357066
- Publication date Dec 4, 2014
- Panorama Synergy, Ltd.
- Roger Dunstan Jeffery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PROVIDING LATERAL THERMAL PROCESSING OF THIN FILMS ON LO...
- Publication number 20140017857
- Publication date Jan 16, 2014
- KURT A. SCHRODER
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METHOD FOR CONVERTING SEMICONDUCTOR LAYERS
- Publication number 20130240892
- Publication date Sep 19, 2013
- EVONIK DEGUSSA GmbH
- Patrik Stenner
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA ANNEALING METHOD AND DEVICE FOR THE SAME
- Publication number 20130224396
- Publication date Aug 29, 2013
- Nissan Chemical Industries, Ltd.
- Hitoshi Furusho
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
- Publication number 20120289046
- Publication date Nov 15, 2012
- Eun-Jung KO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING LAYERS CONTAINING VOLATILE COMPONENTS AT ELEVATED TEMPERATURES
- Publication number 20120193349
- Publication date Aug 2, 2012
- GREENTECH SOLUTIONS, INC.
- Michael Joseph CALLAHAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Providing Lateral Thermal Processing of Thin Films on Lo...
- Publication number 20110300676
- Publication date Dec 8, 2011
- Kurt A. Schroder
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Apparatus and method for transformation of substrate
- Publication number 20110151648
- Publication date Jun 23, 2011
- Nathaniel R. Quick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for increasing thermal conductivity of a subst...
- Publication number 20110031504
- Publication date Feb 10, 2011
- Nathaniel R. Quick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERNED CRYSTALLINE SEMICONDUCTOR THIN FILM, METHOD FOR PRODUCING...
- Publication number 20110006297
- Publication date Jan 13, 2011
- Idemitsu Kosan Co., Ltd.
- Kazuyoshi Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam annealing apparatuses and annealing methods using the...
- Publication number 20100147807
- Publication date Jun 17, 2010
- SAMSUNG ELECTRONICS CO., LTD.
- Jung-hyun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING OXIDE SEMICONDUCTOR DEVICE
- Publication number 20100144089
- Publication date Jun 10, 2010
- Canon Kabushiki Kaisha
- NOBUYUKI KAJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of polarizing transparent conductive oxides, electronic dev...
- Publication number 20100110346
- Publication date May 6, 2010
- Jung-hyun Lee
- G02 - OPTICS
Information Patent Application
LAVACOAT PRE-CLEAN AND PRE-HEAT
- Publication number 20100108641
- Publication date May 6, 2010
- Applied Materials, Inc.
- Brian T. West
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for transformation of substrate
- Publication number 20100025694
- Publication date Feb 4, 2010
- Nathaniel R. Quick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATION OF SINGLE CRYSTAL DIODES FOR RESISTIVE MEMORIES
- Publication number 20090176354
- Publication date Jul 9, 2009
- International Business Machines Corporation
- Bipin Rajendran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRODUCING METHOD FOR CRYSTALLINE THIN FILM
- Publication number 20090166626
- Publication date Jul 2, 2009
- Canon Kabushiki Kaisha
- Hideya Kumomi
- C30 - CRYSTAL GROWTH
Information Patent Application
PARTICLE BEAM ASSISTED MODIFICATION OF THIN FILM MATERIALS
- Publication number 20090124064
- Publication date May 14, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan G. ENGLAND
- C30 - CRYSTAL GROWTH
Information Patent Application
PARTICLE BEAM ASSISTED MODIFICATION OF THIN FILM MATERIALS
- Publication number 20090124066
- Publication date May 14, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan G. ENGLAND
- C30 - CRYSTAL GROWTH
Information Patent Application
PARTICLE BEAM ASSISTED MODIFICATION OF THIN FILM MATERIALS
- Publication number 20090124065
- Publication date May 14, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan G. ENGLAND
- C30 - CRYSTAL GROWTH

using particle beams

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Using absolute Z-height values for synergy between tools

Plasma annealing method and device for the same

Laser assisted SiC growth on silicon

Method for providing lateral thermal processing of thin films on lo...

Hot jet assisted systems and methods

Manufacturing of silicon strained in tension on insulator by amorph...

Charged particle beam-induced etching

Plasma processing device, plasma processing method and manufacturin...

Laser assisted SiC growth on silicon

Method for producing a strained semiconductor on insulator substrate

Plasma generator, annealing device, deposition crystallization appa...

Plasma processing device, and plasma processing method

Method of repairing defect and method of manufacturing semiconducto...

Method for providing lateral thermal processing of thin films on lo...

Apparatus and method of forming high crystalline quality layer

Laser formation of graphene

Method for providing lateral thermal processing of thin films on lo...

Method for fabricating semiconductor device

Electron beam annealing apparatus and annealing methods using the same

Particle beam assisted modification of thin film materials

Method for fabrication of single crystal diodes for resistive memories

Apparatus and method for transformation of substrate

Method of fabricating oxide semiconductor device

Apparatus and method for increasing thermal conductivity of a subst...

Method of fabricating oxide semiconductor device

Apparatus and method for transformation of substrate

Producing method for crystalline thin film

Method of fabricating oxide semiconductor device

Method to reduce crystal defects particularly in group III-nitride...

Apparatus for forming single-crystalline thin film by beam irradiat...

Patents Applicationslast 30 patents

USING ABSOLUTE Z-HEIGHT VALUES FOR SYNERGY BETWEEN TOOLS

Laser Assisted SiC Growth On Silicon

MANUFACTURING OF SILICON STRAINED IN TENSION ON INSULATOR BY AMORPH...

PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD AND MANUFACTURIN...

Hot Jet Assisted Systems and Methods

PLASMA GENERATOR, ANNEALING DEVICE, DEPOSITION CRYSTALLIZATION APPA...

SILICON CARBIDE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR SAME

METHOD FOR PRODUCING AN EPITAXIAL SEMICONDUCTOR LAYER

PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD

METHOD OF FABRICATING A SEMICONDUCTOR SUBSTRATE ON INSULATOR

METHODS OF CRYSTALLISING THIN FILMS

METHOD FOR PROVIDING LATERAL THERMAL PROCESSING OF THIN FILMS ON LO...

METHOD FOR CONVERTING SEMICONDUCTOR LAYERS

PLASMA ANNEALING METHOD AND DEVICE FOR THE SAME

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE

HEATING LAYERS CONTAINING VOLATILE COMPONENTS AT ELEVATED TEMPERATURES

Method for Providing Lateral Thermal Processing of Thin Films on Lo...

Apparatus and method for transformation of substrate

Apparatus and method for increasing thermal conductivity of a subst...

PATTERNED CRYSTALLINE SEMICONDUCTOR THIN FILM, METHOD FOR PRODUCING...

Electron beam annealing apparatuses and annealing methods using the...

METHOD OF FABRICATING OXIDE SEMICONDUCTOR DEVICE

Methods of polarizing transparent conductive oxides, electronic dev...

LAVACOAT PRE-CLEAN AND PRE-HEAT

Apparatus and method for transformation of substrate

METHOD FOR FABRICATION OF SINGLE CRYSTAL DIODES FOR RESISTIVE MEMORIES

PRODUCING METHOD FOR CRYSTALLINE THIN FILM

PARTICLE BEAM ASSISTED MODIFICATION OF THIN FILM MATERIALS

PARTICLE BEAM ASSISTED MODIFICATION OF THIN FILM MATERIALS

PARTICLE BEAM ASSISTED MODIFICATION OF THIN FILM MATERIALS