using particular beams or near-field effects

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CPC
H01J2237/31752

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/31752using particular beams or near-field effects

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for controlling electron beam in multi-microcolumn and multi...
- Patent number 8,173,978
- Issue date May 8, 2012
- Cebt Co., Ltd
- Ho Seob Kim
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithography systems and methods for operating the same
- Patent number 7,576,341
- Issue date Aug 18, 2009
- Samsung Electronics Co., Ltd.
- Dong-Wook Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Energetic neutral particle lithographic apparatus and process
- Patent number 7,504,619
- Issue date Mar 17, 2009
- The University of Houston System
- John C. Wolfe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nano-lithography using squeezed atomic and molecular states
- Patent number 6,891,152
- Issue date May 10, 2005
- Yeda Research and Development Co. Ltd.
- Eliyahu Averbukh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron exposure device and method and electronic characteristics...
- Patent number 6,670,622
- Issue date Dec 30, 2003
- Hitachi, Ltd.
- Seiji Heike
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for Controlling Electron Beam in Multi-Microcolumn and Multi...
- Publication number 20100019166
- Publication date Jan 28, 2010
- CEBT Co. Ltd.
- Ho Seob Kim
- B82 - NANO-TECHNOLOGY
Information Patent Application
Energetic neutral particle lithographic apparatus and process
- Publication number 20060124865
- Publication date Jun 15, 2006
- John C. Wolfe
- B82 - NANO-TECHNOLOGY
Information Patent Application
Lithography systems and methods for operating the same
- Publication number 20060118735
- Publication date Jun 8, 2006
- Dong-Wook Kim
- B82 - NANO-TECHNOLOGY
Information Patent Application
Nanolithography molecular beam machine
- Publication number 20030213922
- Publication date Nov 20, 2003
- The Board of Trustees of the University of Illinois, University of Illinois
- Robert J. Gordon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Nano-lithography using squeezed atomic and molecular states
- Publication number 20030152841
- Publication date Aug 14, 2003
- Yeda Research and Development Co. Ltd.
- Eliyahu Averbukh
- B82 - NANO-TECHNOLOGY
Information Patent Application
Electron exposure device and method and electronic characteristics...
- Publication number 20030107007
- Publication date Jun 12, 2003
- Hitachi, Ltd.
- Seiji Heike
- B82 - NANO-TECHNOLOGY