using physical deposition

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CPC
H01L21/203

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/203using physical deposition

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Metal plate for deposition mask, and deposition mask and manufactur...
- Patent number 11,795,549
- Issue date Oct 24, 2023
- LG Innotek Co., Ltd
- Dong Mug Seong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal plate for deposition mask, and deposition mask and manufactur...
- Patent number 11,732,364
- Issue date Aug 22, 2023
- LG Innotek Co., Ltd
- Dong Mug Seong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device including a Fin-FET and method of manufacturin...
- Patent number 11,728,414
- Issue date Aug 15, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yasutoshi Okuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated photonics including waveguiding material
- Patent number 11,703,643
- Issue date Jul 18, 2023
- The Research Foundation for the State University of New York
- Douglas Coolbaugh
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Textured processing chamber components and methods of manufacturing...
- Patent number 11,685,990
- Issue date Jun 27, 2023
- Applied Materials, Inc.
- Cariappa Baduvamanda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compound semiconductor, method for manufacturing same, and nitride...
- Patent number 11,549,172
- Issue date Jan 10, 2023
- Japan Science and Technology Agency
- Hiroshi Fujioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
End effectors for moving workpieces and replaceable parts within a...
- Patent number 11,515,127
- Issue date Nov 29, 2022
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Martin L. Zucker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focus ring adjustment assembly of a system for processing workpiece...
- Patent number 11,508,560
- Issue date Nov 22, 2022
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Martin L. Zucker
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Method of forming interconnect for semiconductor device
- Patent number 11,508,617
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Hao Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method for semiconductor laminated film, and semicond...
- Patent number 11,492,696
- Issue date Nov 8, 2022
- NATIONAL UNIVERSITY CORPORATION TOKYO UNIVERSITY OF AGRICULUTRE AND TECHNOLOGY
- Yoshiyuki Suda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Split-gate MOSFET with gate shield
- Patent number 11,437,488
- Issue date Sep 6, 2022
- Applied Materials, Inc.
- Qintao Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light-emitting device, method for manufacturing the same, and proje...
- Patent number 11,430,659
- Issue date Aug 30, 2022
- Seiko Epson Corporation
- Takafumi Noda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering device
- Patent number 11,414,747
- Issue date Aug 16, 2022
- Tokyo Electron Limited
- Junichi Takei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering method and sputtering apparatus
- Patent number 11,404,255
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Kazunaga Ono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device having a planar III-N semiconductor layer and...
- Patent number 11,393,686
- Issue date Jul 19, 2022
- HEXAGEM AB
- Jonas Ohlsson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device including a Fin-FET and method of manufacturin...
- Patent number 11,373,910
- Issue date Jun 28, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yasutoshi Okuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus having a focus ring adjustment assembly
- Patent number 11,348,767
- Issue date May 31, 2022
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Martin L. Zucker
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Amorphous oxide semiconductor film, oxide sintered body, thin film...
- Patent number 11,342,466
- Issue date May 24, 2022
- Idemitsu Kosan Co., Ltd.
- Kazuyoshi Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal plate for deposition mask, and deposition mask and manufactur...
- Patent number 11,335,854
- Issue date May 17, 2022
- LG Innotek Co., Ltd
- Dong Mug Seong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon carbide semiconductor device and method of manufacturing si...
- Patent number 11,251,271
- Issue date Feb 15, 2022
- Fuji Electric Co., Ltd.
- Takumi Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device including a Fin-FET and method of manufacturin...
- Patent number 11,251,087
- Issue date Feb 15, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yasutoshi Okuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of producing epitaxial silicon wafer
- Patent number 11,198,949
- Issue date Dec 14, 2021
- Sumco Corporation
- Masayuki Tsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor crystal substrate, infrared detector, and method for...
- Patent number 11,152,210
- Issue date Oct 19, 2021
- Fujitsu Limited
- Shigekazu Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor on insulator type structure...
- Patent number 11,127,624
- Issue date Sep 21, 2021
- Soitec
- Walter Schwarzenbach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing perovskite solar cell module and perovskit...
- Patent number 11,114,252
- Issue date Sep 7, 2021
- CPC CORPORATION, TAIWAN
- Kuan-Chieh Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Smoothed doped layer for solar cell
- Patent number 11,075,317
- Issue date Jul 27, 2021
- Imec VZW
- Yuandong Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for using remote plasma chemical vapor deposition (RP-CVD)...
- Patent number 11,069,525
- Issue date Jul 20, 2021
- Lumileds LLC
- Isaac Wildeson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for using remote plasma chemical vapor deposition (RP-CVD)...
- Patent number 11,069,524
- Issue date Jul 20, 2021
- Lumileds LLC
- Isaac Wildeson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pressurizing device and pressurizing method
- Patent number 11,037,790
- Issue date Jun 15, 2021
- Nikkiso Co., Ltd.
- Takahiro Mori
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method and apparatus for fabricating a stretchable electronic element
- Patent number 10,986,727
- Issue date Apr 20, 2021
- Electronics and Telecommunications Research Institute
- Jong Tae Lim
- B32 - LAYERED PRODUCTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR FORMING AN EPITAXIAL WAFER
- Publication number 20220359195
- Publication date Nov 10, 2022
- GLOBALWAFERS CO., LTD.
- Maria Porrini
- C30 - CRYSTAL GROWTH
Information Patent Application
METAL PLATE FOR DEPOSITION MASK, AND DEPOSITION MASK AND MANUFACTUR...
- Publication number 20220190250
- Publication date Jun 16, 2022
- LG Innotek Co., Ltd.
- Dong Mug SEONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE INCLUDING A FIN-FET AND METHOD OF MANUFACTURIN...
- Publication number 20220172998
- Publication date Jun 2, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yasutoshi OKUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPLIT-GATE MOSFET WITH GATE SHIELD
- Publication number 20220165863
- Publication date May 26, 2022
- Applied Materials, Inc.
- Qintao Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL PLATE FOR DEPOSITION MASK, AND DEPOSITION MASK AND MANUFACTUR...
- Publication number 20220149283
- Publication date May 12, 2022
- LG Innotek Co., Ldt.
- Dong Mug SEONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEPOSITION MONITORING DEVICE
- Publication number 20210388501
- Publication date Dec 16, 2021
- Samsung Electronics Co., Ltd.
- Young Uk CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR ON INSULATOR STRUCTURE FOR A FRONT SIDE TYPE IMAGER
- Publication number 20210366763
- Publication date Nov 25, 2021
- SOITEC
- Walter Schwarzenbach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING ION SENSORS
- Publication number 20210325337
- Publication date Oct 21, 2021
- Life Technologies Corporation
- Phil WAGGONER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing Method For Semiconductor Laminated Film, And Semicond...
- Publication number 20210189549
- Publication date Jun 24, 2021
- NATIONAL UNIVERSITY CORPORATION TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY
- Yoshiyuki SUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE EPITAXY METHOD
- Publication number 20210193465
- Publication date Jun 24, 2021
- AZUR SPACE SOLAR POWER GMBH
- Clemens WAECHTER
- C30 - CRYSTAL GROWTH
Information Patent Application
SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SI...
- Publication number 20210167173
- Publication date Jun 3, 2021
- Fuji Electric Co., Ltd.
- Takumi FUJIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CRYSTAL SUBSTRATE, INFRARED DETECTOR, AND METHOD FOR...
- Publication number 20210143009
- Publication date May 13, 2021
- Fujitsu Limited
- Shigekazu Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING INTERCONNECT FOR SEMICONDUCTOR DEVICE
- Publication number 20210125864
- Publication date Apr 29, 2021
- Applied Materials, Inc.
- Hao Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR RELIABLY FORMING MICROELECTRONIC DEVICES WITH CONDUCTIV...
- Publication number 20210118676
- Publication date Apr 22, 2021
- Micron Technology, Inc.
- Kenichi Kusumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING METHOD AND SPUTTERING APPARATUS
- Publication number 20210082675
- Publication date Mar 18, 2021
- TOKYO ELECTRON LIMITED
- Kazunaga ONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOUND SEMICONDUCTOR, METHOD FOR MANUFACTURING SAME, AND NITRIDE...
- Publication number 20210047720
- Publication date Feb 18, 2021
- Japan Science and Technology Agency
- Hiroshi FUJIOKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIGHT-EMITTING DEVICE, METHOD FOR MANUFACTURING THE SAME, AND PROJE...
- Publication number 20210043457
- Publication date Feb 11, 2021
- SEIKO EPSON CORPORATION
- Takafumi NODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRESSURIZING DEVICE AND PRESSURIZING METHOD
- Publication number 20210028018
- Publication date Jan 28, 2021
- Nikkiso Co., Ltd.
- Takahiro MORI
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
FOCUS RING ADJUSTMENT ASSEMBLY OF A SYSTEM FOR PROCESSING WORKPIECE...
- Publication number 20200365405
- Publication date Nov 19, 2020
- Mattson Technology, Inc.
- Martin L. Zucker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INLINE VACUUM PROCESSING SYSTEM WITH SUBSTRATE AND CARRIER COOLING
- Publication number 20200350188
- Publication date Nov 5, 2020
- INTEVAC, INC.
- Terry Bluck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE INCLUDING A FIN-FET AND METHOD OF MANUFACTURIN...
- Publication number 20200303260
- Publication date Sep 24, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- YASUTOSHI OKUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE INCLUDING A FIN-FET AND METHOD OF MANUFACTURIN...
- Publication number 20200303259
- Publication date Sep 24, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- YASUTOSHI OKUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL PLATE FOR DEPOSITION MASK, AND DEPOSITION MASK AND MANUFACTUR...
- Publication number 20200227640
- Publication date Jul 16, 2020
- LG INNTEK CO., LTD.
- Dong Mug SEONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARD MASK AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20200227273
- Publication date Jul 16, 2020
- TOKYO ELECTRON LIMITED
- Hiroyuki TOSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED PHOTONICS INCLUDING WAVEGUIDING MATERIAL
- Publication number 20200158954
- Publication date May 21, 2020
- Douglas Coolbaugh
- G02 - OPTICS
Information Patent Application
AMORPHOUS OXIDE SEMICONDUCTOR FILM, OXIDE SINTERED BODY, AND THIN F...
- Publication number 20200052130
- Publication date Feb 13, 2020
- Idemitsu Kosan Co., Ltd.
- Kazuyoshi INOUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED PHOTONICS INCLUDING GERMANIUM
- Publication number 20200026003
- Publication date Jan 23, 2020
- The Research Foundation for the State University of New York
- Douglas Coolbaugh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING DEVICE
- Publication number 20190390325
- Publication date Dec 26, 2019
- TOKYO ELECTRON LIMITED
- Junichi TAKEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PRODUCING EPITAXIAL SILICON WAFER
- Publication number 20190338443
- Publication date Nov 7, 2019
- SUMCO CORPORATION
- Masayuki TSUJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR FABRICATING A STRETCHABLE ELECTRONIC ELEMENT
- Publication number 20190327828
- Publication date Oct 24, 2019
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Jong Tae LIM
- H01 - BASIC ELECTRIC ELEMENTS

using physical deposition

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Metal plate for deposition mask, and deposition mask and manufactur...

Metal plate for deposition mask, and deposition mask and manufactur...

Semiconductor device including a Fin-FET and method of manufacturin...

Integrated photonics including waveguiding material

Textured processing chamber components and methods of manufacturing...

Compound semiconductor, method for manufacturing same, and nitride...

End effectors for moving workpieces and replaceable parts within a...

Focus ring adjustment assembly of a system for processing workpiece...

Method of forming interconnect for semiconductor device

Manufacturing method for semiconductor laminated film, and semicond...

Split-gate MOSFET with gate shield

Light-emitting device, method for manufacturing the same, and proje...

Sputtering device

Sputtering method and sputtering apparatus

Semiconductor device having a planar III-N semiconductor layer and...

Semiconductor device including a Fin-FET and method of manufacturin...

Plasma processing apparatus having a focus ring adjustment assembly

Amorphous oxide semiconductor film, oxide sintered body, thin film...

Metal plate for deposition mask, and deposition mask and manufactur...

Silicon carbide semiconductor device and method of manufacturing si...

Semiconductor device including a Fin-FET and method of manufacturin...

Method of producing epitaxial silicon wafer

Semiconductor crystal substrate, infrared detector, and method for...

Method of manufacturing a semiconductor on insulator type structure...

Method for manufacturing perovskite solar cell module and perovskit...

Smoothed doped layer for solar cell

Methods for using remote plasma chemical vapor deposition (RP-CVD)...

Methods for using remote plasma chemical vapor deposition (RP-CVD)...

Pressurizing device and pressurizing method

Method and apparatus for fabricating a stretchable electronic element

Patents Applicationslast 30 patents

METHODS FOR FORMING AN EPITAXIAL WAFER

METAL PLATE FOR DEPOSITION MASK, AND DEPOSITION MASK AND MANUFACTUR...

SEMICONDUCTOR DEVICE INCLUDING A FIN-FET AND METHOD OF MANUFACTURIN...

SPLIT-GATE MOSFET WITH GATE SHIELD

METAL PLATE FOR DEPOSITION MASK, AND DEPOSITION MASK AND MANUFACTUR...

SEMICONDUCTOR DEPOSITION MONITORING DEVICE

SEMICONDUCTOR ON INSULATOR STRUCTURE FOR A FRONT SIDE TYPE IMAGER

METHOD OF FORMING ION SENSORS

Manufacturing Method For Semiconductor Laminated Film, And Semicond...

VAPOR PHASE EPITAXY METHOD

SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SI...

SEMICONDUCTOR CRYSTAL SUBSTRATE, INFRARED DETECTOR, AND METHOD FOR...

METHOD OF FORMING INTERCONNECT FOR SEMICONDUCTOR DEVICE

METHODS FOR RELIABLY FORMING MICROELECTRONIC DEVICES WITH CONDUCTIV...

SPUTTERING METHOD AND SPUTTERING APPARATUS

COMPOUND SEMICONDUCTOR, METHOD FOR MANUFACTURING SAME, AND NITRIDE...

LIGHT-EMITTING DEVICE, METHOD FOR MANUFACTURING THE SAME, AND PROJE...

PRESSURIZING DEVICE AND PRESSURIZING METHOD

FOCUS RING ADJUSTMENT ASSEMBLY OF A SYSTEM FOR PROCESSING WORKPIECE...

INLINE VACUUM PROCESSING SYSTEM WITH SUBSTRATE AND CARRIER COOLING

SEMICONDUCTOR DEVICE INCLUDING A FIN-FET AND METHOD OF MANUFACTURIN...

SEMICONDUCTOR DEVICE INCLUDING A FIN-FET AND METHOD OF MANUFACTURIN...

METAL PLATE FOR DEPOSITION MASK, AND DEPOSITION MASK AND MANUFACTUR...

HARD MASK AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

INTEGRATED PHOTONICS INCLUDING WAVEGUIDING MATERIAL

AMORPHOUS OXIDE SEMICONDUCTOR FILM, OXIDE SINTERED BODY, AND THIN F...

INTEGRATED PHOTONICS INCLUDING GERMANIUM

SPUTTERING DEVICE

METHOD OF PRODUCING EPITAXIAL SILICON WAFER

METHOD AND APPARATUS FOR FABRICATING A STRETCHABLE ELECTRONIC ELEMENT