using plasma jets

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CPC
C23C16/513

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/513using plasma jets

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Shield for atmospheric pressure plasma jet coating deposition on a...
- Patent number 12,325,918
- Issue date Jun 10, 2025
- MOLECULAR PLASMA GROUP SA
- Gill Scheltjens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus including gas diffusion nozzle
- Patent number 12,320,003
- Issue date Jun 3, 2025
- ASM IP Holding B.V.
- Daiki Nojiri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors and related methods
- Patent number 12,312,688
- Issue date May 27, 2025
- Entegris, Inc.
- MinSeok Ryu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for film formation
- Patent number 12,293,900
- Issue date May 6, 2025
- Gallium Enterprises Pty Ltd.
- Satyanarayan Barik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film and forming method thereof
- Patent number 12,291,776
- Issue date May 6, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xinlian Deng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for carbon compound film deposition
- Patent number 12,288,672
- Issue date Apr 29, 2025
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for transistor pathogen detector
- Patent number 12,282,018
- Issue date Apr 22, 2025
- AKHAN SEMICONDUCTOR, INC.
- Adam Khan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Gapfill methods and processing assemblies
- Patent number 12,252,790
- Issue date Mar 18, 2025
- ASM IP Holding B.V.
- Tommi Tynell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods using same for deposition of silicon-conta...
- Patent number 12,221,692
- Issue date Feb 11, 2025
- VERSUM MATERIALS US, LLC
- Robert G. Ridgeway
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Photothermal seawater desalination material with multi-stage struct...
- Patent number 12,195,359
- Issue date Jan 14, 2025
- Shandong University of Science and Technology
- Hongzhi Cui
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Water-resistant nanofilm, preparation method and article thereof
- Patent number 12,173,175
- Issue date Dec 24, 2024
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Methods and systems for filling a gap
- Patent number 12,104,244
- Issue date Oct 1, 2024
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma surface treatment apparatus for conductive powder
- Patent number 12,098,461
- Issue date Sep 24, 2024
- KOREA INSTITUTE OF FUSION ENERGY
- Seung Ryul Yoo
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
PE-CVD apparatus and method
- Patent number 12,077,863
- Issue date Sep 3, 2024
- SPTS Technologies Limited
- Stephen Burgess
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for transistor pathogen detector
- Patent number 12,031,987
- Issue date Jul 9, 2024
- AKHAN SEMICONDUCTOR, INC.
- Adam Khan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and system for forming a conformal silicon carbon nitride la...
- Patent number 12,031,205
- Issue date Jul 9, 2024
- ASM IP Holding B.V.
- Ling Chi Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic holding structures for plasma processing applications
- Patent number 12,020,965
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Andrew Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High aspect ratio taper improvement using directional deposition
- Patent number 11,987,879
- Issue date May 21, 2024
- Applied Materials, Inc.
- Armin Saeedi Vahdat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of iridium containing films
- Patent number 11,946,135
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for structuring an anti-counterfeit marking in an at least p...
- Patent number 11,938,745
- Issue date Mar 26, 2024
- Comadur S.A.
- Alexis Boulmay
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lithographic apparatus, substrate table, and non-uniform coating me...
- Patent number 11,887,881
- Issue date Jan 30, 2024
- ASML Holding N.V.
- Bruce Tirri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma coating lance for internal coatings
- Patent number 11,866,826
- Issue date Jan 9, 2024
- OERLIKON METCO AG, Wohlen
- Martin Stoeckli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques to improve adhesion and defects for tungsten carbide film
- Patent number 11,859,275
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Vivek Bharat Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PE-CVD apparatus and method
- Patent number 11,802,341
- Issue date Oct 31, 2023
- SPTS Technologies Limited
- Stephen Burgess
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In situ tailoring of material properties in 3D printed electronics
- Patent number 11,773,491
- Issue date Oct 3, 2023
- Universities Space Research Association
- Ramprasad Gandhiraman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for atmospheric pressure plasma jet coating de...
- Patent number 11,767,594
- Issue date Sep 26, 2023
- MOLECULAR PLASMA GROUP SA
- Gill Scheltjens
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Methods and apparatus for vacuum processing a substrate
- Patent number 11,756,925
- Issue date Sep 12, 2023
- Applied Materials, Inc.
- Ying Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of growing graphene selectively
- Patent number 11,713,248
- Issue date Aug 1, 2023
- Samsung Electronics Co., Ltd.
- Changseok Lee
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Low temperature deposition of iridium containing films
- Patent number 11,643,721
- Issue date May 9, 2023
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of insulating lithium ion electrochemical cell components wi...
- Patent number 11,621,411
- Issue date Apr 4, 2023
- Intecells, Inc.
- Xiaohong Gayden
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Gapfill Methods and Processing Assemblies
- Publication number 20250188615
- Publication date Jun 12, 2025
- ASM IP HOLDING B.V.
- Tommi Tynell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRICATION METHODS FOR 3D STRUCTURES BASED ON ROLLING-UP KIRIGAMI...
- Publication number 20250109487
- Publication date Apr 3, 2025
- City University of Hong Kong
- Lixin Dong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PRODUCING NITROGEN COMPOUND
- Publication number 20240410077
- Publication date Dec 12, 2024
- NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Xuelun WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE PLASMA DEPOSITION WITH ELECTROSTATIC CLAMPING
- Publication number 20240387226
- Publication date Nov 21, 2024
- LAM RESEARCH CORPORATION
- Aaron Blake MILLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR FILLING A GAP
- Publication number 20240352576
- Publication date Oct 24, 2024
- ASM IP HOLDING B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System and Method for Transistor Pathogen Detector
- Publication number 20240345089
- Publication date Oct 17, 2024
- AKHAN Semiconductor, Inc.
- Adam Khan
- B82 - NANO-TECHNOLOGY
Information Patent Application
PECVD OF SIBN THIN FILMS WITH LOW LEAKAGE CURRENT
- Publication number 20240304437
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Chuanxi YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC HOLDING STRUCTURES FOR PLASMA PROCESSING APPLICATIONS
- Publication number 20240297059
- Publication date Sep 5, 2024
- Applied Materials, Inc.
- Andrew NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS
- Publication number 20240200188
- Publication date Jun 20, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN SITU TAILORING OF MATERIAL PROPERTIES IN 3D PRINTED ELECTRONICS
- Publication number 20240158918
- Publication date May 16, 2024
- UNIVERSITIES SPACE RESEARCH ASSOCIATION
- Ramprasad Gandhiraman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gapfill methods and processing assemblies
- Publication number 20240117494
- Publication date Apr 11, 2024
- ASM IP HOLDING B.V.
- Tommi Tynell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARC-BEAM POSITION MONITORING AND POSITION CONTROL IN PICVD COATING...
- Publication number 20240117493
- Publication date Apr 11, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Othmar ZÜGER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
2D Layered Thin Film Structure
- Publication number 20240117487
- Publication date Apr 11, 2024
- NATIONAL APPLIED RESEARCH LABORATORIES
- Shu-Ju Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR DEPOSITION OF AT LEAST ONE LAYER, OPTICAL...
- Publication number 20240035163
- Publication date Feb 1, 2024
- Carl Zeiss SMT GMBH
- Felix LANGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR ATMOSPHERIC PRESSURE PLASMA JET COATING DE...
- Publication number 20230416921
- Publication date Dec 28, 2023
- MOLECULAR PLASMA GROUP SA
- Gill SCHELTJENS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING GAS DIFFUSION NOZZLE
- Publication number 20230383410
- Publication date Nov 30, 2023
- ASM IP HOLDING B.V.
- Daiki Nojiri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL GASIFICATION DEVICE, FILM COATING DEVICE, FILM COATING...
- Publication number 20230349041
- Publication date Nov 2, 2023
- Jiangsu Favored Nanotechnology Co., Ltd.
- Jian ZONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STABLE SILICON OXYNITRIDE LAYERS AND PROCESSES OF MAKING THEM
- Publication number 20230265562
- Publication date Aug 24, 2023
- Applied Materials, Inc.
- Fei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROUND RETURN FOR THIN FILM FORMATION USING PLASMA
- Publication number 20230243035
- Publication date Aug 3, 2023
- Applied Materials, Inc.
- Teng Mao WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR FORMING A SILICON OXYCARBIDE LAYER AND STRUCT...
- Publication number 20230235453
- Publication date Jul 27, 2023
- ASM IP HOLDING B.V.
- Takashi Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS
- Publication number 20230227968
- Publication date Jul 20, 2023
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING A PATTERNED STRUCTURE ON A SUBSTRATE
- Publication number 20230227965
- Publication date Jul 20, 2023
- ASM IP HOLDING, B.V.
- Shaoren Deng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF INSULATING LITHIUM ION ELECTROCHEMICAL CELL COMPONENTS WI...
- Publication number 20230207774
- Publication date Jun 29, 2023
- Intecells, Inc.
- Xiaohong Gayden
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSORS AND RELATED METHODS
- Publication number 20230193462
- Publication date Jun 22, 2023
- Entegris, Inc.
- MinSeok Ryu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230175116
- Publication date Jun 8, 2023
- Kokusai Electric Corporation
- Kimihiko NAKATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR FORMING A CONFORMAL SILICON CARBON NITRIDE LA...
- Publication number 20230167544
- Publication date Jun 1, 2023
- ASM IP HOLDING B.V.
- Ling Chi Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20230167554
- Publication date Jun 1, 2023
- TOKYO ELECTRON LIMITED
- Tatsuo MATSUDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FABRICATING CHAMBER PARTS
- Publication number 20230167543
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Mats LARSSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR USING PLASMA PROCESSING...
- Publication number 20230167553
- Publication date Jun 1, 2023
- Panasonic Intellectual Property Management Co., Ltd.
- Tetsuhiro IWAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATMOSPHERIC COLD PLASMA JET COATING AND SURFACE TREATMENT
- Publication number 20230160067
- Publication date May 25, 2023
- Starfire Industires, LLC
- Brian Edward Jurczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using plasma jets

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Shield for atmospheric pressure plasma jet coating deposition on a...

Substrate processing apparatus including gas diffusion nozzle

Precursors and related methods

Apparatus and method for film formation

Film and forming method thereof

Methods and apparatus for carbon compound film deposition

System and method for transistor pathogen detector

Gapfill methods and processing assemblies

Compositions and methods using same for deposition of silicon-conta...

Photothermal seawater desalination material with multi-stage struct...

Water-resistant nanofilm, preparation method and article thereof

Methods and systems for filling a gap

Plasma surface treatment apparatus for conductive powder

PE-CVD apparatus and method

System and method for transistor pathogen detector

Method and system for forming a conformal silicon carbon nitride la...

Magnetic holding structures for plasma processing applications

High aspect ratio taper improvement using directional deposition

Low temperature deposition of iridium containing films

Method for structuring an anti-counterfeit marking in an at least p...

Lithographic apparatus, substrate table, and non-uniform coating me...

Plasma coating lance for internal coatings

Techniques to improve adhesion and defects for tungsten carbide film

PE-CVD apparatus and method

In situ tailoring of material properties in 3D printed electronics

Method and apparatus for atmospheric pressure plasma jet coating de...

Methods and apparatus for vacuum processing a substrate

Method of growing graphene selectively

Low temperature deposition of iridium containing films

Method of insulating lithium ion electrochemical cell components wi...

Patents Applicationslast 30 patents

Gapfill Methods and Processing Assemblies

FABRICATION METHODS FOR 3D STRUCTURES BASED ON ROLLING-UP KIRIGAMI...

METHOD AND APPARATUS FOR PRODUCING NITROGEN COMPOUND

REMOTE PLASMA DEPOSITION WITH ELECTROSTATIC CLAMPING

METHODS AND SYSTEMS FOR FILLING A GAP

System and Method for Transistor Pathogen Detector

PECVD OF SIBN THIN FILMS WITH LOW LEAKAGE CURRENT

MAGNETIC HOLDING STRUCTURES FOR PLASMA PROCESSING APPLICATIONS

LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS

IN SITU TAILORING OF MATERIAL PROPERTIES IN 3D PRINTED ELECTRONICS

Gapfill methods and processing assemblies

ARC-BEAM POSITION MONITORING AND POSITION CONTROL IN PICVD COATING...

2D Layered Thin Film Structure

METHOD AND APPARATUS FOR DEPOSITION OF AT LEAST ONE LAYER, OPTICAL...

METHOD AND APPARATUS FOR ATMOSPHERIC PRESSURE PLASMA JET COATING DE...

SUBSTRATE PROCESSING APPARATUS INCLUDING GAS DIFFUSION NOZZLE

RAW MATERIAL GASIFICATION DEVICE, FILM COATING DEVICE, FILM COATING...

STABLE SILICON OXYNITRIDE LAYERS AND PROCESSES OF MAKING THEM

GROUND RETURN FOR THIN FILM FORMATION USING PLASMA

METHOD AND SYSTEM FOR FORMING A SILICON OXYCARBIDE LAYER AND STRUCT...

LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS

METHOD AND APPARATUS FOR FORMING A PATTERNED STRUCTURE ON A SUBSTRATE

METHOD OF INSULATING LITHIUM ION ELECTROCHEMICAL CELL COMPONENTS WI...

PRECURSORS AND RELATED METHODS

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD AND SYSTEM FOR FORMING A CONFORMAL SILICON CARBON NITRIDE LA...

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

METHOD FOR FABRICATING CHAMBER PARTS

PLASMA PROCESSING APPARATUS AND METHOD FOR USING PLASMA PROCESSING...

ATMOSPHERIC COLD PLASMA JET COATING AND SURFACE TREATMENT