using reduction or decomposition of a gaseous compound yielding a solid condensate

Industry

CPC
H01L21/205

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/205using reduction or decomposition of a gaseous compound yielding a solid condensate

Industries

Patents Grantslast 30 patents

Information Patent Grant
Precursor supply system and precursors supply method
- Patent number 11,819,838
- Issue date Nov 21, 2023
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Toshiyuki Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Crucible having an improved crystal growth base for manufacturing s...
- Patent number 11,708,646
- Issue date Jul 25, 2023
- Showa Denko K.K.
- Rimpei Kindaichi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated photonics including waveguiding material
- Patent number 11,703,643
- Issue date Jul 18, 2023
- The Research Foundation for the State University of New York
- Douglas Coolbaugh
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
SiC chemical vapor deposition apparatus
- Patent number 11,692,266
- Issue date Jul 4, 2023
- Showa Denko K.K.
- Yoshikazu Umeta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor delivery device, methods of manufacture and methods of use th...
- Patent number 11,680,318
- Issue date Jun 20, 2023
- Edwards Semiconductor Solutions LLC
- Egbert Woelk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and compositions for RNA-directed target DNA modification a...
- Patent number 11,674,159
- Issue date Jun 13, 2023
- The Regents of the University of California
- Jennifer A. Doudna
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Semiconductor epitaxial wafer and method of producing semiconductor...
- Patent number 11,640,907
- Issue date May 2, 2023
- Sumco Corporation
- Ryosuke Okuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and compositions for RNA-directed target DNA modification a...
- Patent number 11,634,730
- Issue date Apr 25, 2023
- The Regents of the University of California
- Jennifer A. Doudna
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Fabrication of semiconductor structures
- Patent number 11,616,344
- Issue date Mar 28, 2023
- International Business Machines Corporation
- Noelia Vico Trivino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor phase epitaxial growth device
- Patent number 11,591,717
- Issue date Feb 28, 2023
- National University Corporation Nagoya University
- Shugo Nitta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry pump and exhaust gas treatment method
- Patent number 11,592,025
- Issue date Feb 28, 2023
- Edwards Japan Limited
- Katsumi Nishimura
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Methods and compositions for RNA-directed target DNA modification a...
- Patent number 11,549,127
- Issue date Jan 10, 2023
- The Regents of the University of California
- Jennifer A. Doudna
- A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information Patent Grant
Method for depositing an epitaxial layer on a front side of a semic...
- Patent number 11,538,683
- Issue date Dec 27, 2022
- Siltronic AG
- Joerg Haberecht
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for coating a substrate
- Patent number 11,532,494
- Issue date Dec 20, 2022
- Service Support Specialties, Inc
- Gary Hillman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus
- Patent number 11,512,392
- Issue date Nov 29, 2022
- Kokusai Electric Corporation
- Takayuki Nakada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nitride semiconductor laminate, method for manufacturing nitride se...
- Patent number 11,508,629
- Issue date Nov 22, 2022
- Sumitomo Chemical Company, Limited
- Fumimasa Horikiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transistor structure with multiple halo implants having epitaxial l...
- Patent number 11,488,871
- Issue date Nov 1, 2022
- Samar K. Saha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Group 13 (III) nitride thick layer formed on an underlying layer ha...
- Patent number 11,473,212
- Issue date Oct 18, 2022
- NGK Insulators, Ltd.
- Makoto Iwai
- C30 - CRYSTAL GROWTH
Information Patent Grant
Epitaxial silicon wafer, and method for manufacturing epitaxial sil...
- Patent number 11,462,409
- Issue date Oct 4, 2022
- Sumco Corporation
- Naoya Nonaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nanorod production method and nanorod produced thereby
- Patent number 11,450,737
- Issue date Sep 20, 2022
- Samsung Display Co., Ltd.
- Young Rag Do
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Cleaning method of semiconductor manufacturing device
- Patent number 11,434,565
- Issue date Sep 6, 2022
- Kanto Denka Kogyo Co., Ltd.
- Yoshinao Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer supporting mechanism, chemical vapor deposition apparatus, an...
- Patent number 11,427,929
- Issue date Aug 30, 2022
- Showa Denko K.K.
- Jia Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mechanisms for supplying process gas into wafer process apparatus
- Patent number 11,414,759
- Issue date Aug 16, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Su-Horng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Source/drain structure for semiconductor device
- Patent number 11,404,274
- Issue date Aug 2, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsiao-Chun Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,380,540
- Issue date Jul 5, 2022
- Kokusai Electric Corporation
- Takashi Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing GaN crystal
- Patent number 11,371,140
- Issue date Jun 28, 2022
- Mitsubishi Chemical Corporation
- Kenji Iso
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase epitaxial growth device
- Patent number 11,371,165
- Issue date Jun 28, 2022
- NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH...
- Shugo Nitta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing silicon carbide epitaxial substrate
- Patent number 11,373,868
- Issue date Jun 28, 2022
- Sumitomo Electric Industries, Ltd.
- Hironori Itoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor delivery device, methods of manufacture and methods of use th...
- Patent number 11,345,997
- Issue date May 31, 2022
- Ceres Technologies, Inc.
- Egbert Woelk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for manufacturing group III nitride single crystal, metho...
- Patent number 11,348,785
- Issue date May 31, 2022
- Tokuyama Corporation
- Toru Nagashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR ADJUSTING THERMAL FIELD OF SILICON CARBIDE SINGLE CRYSTA...
- Publication number 20230227998
- Publication date Jul 20, 2023
- NATIONAL CHUNG-SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY
- HSUEH-I CHEN
- C30 - CRYSTAL GROWTH
Information Patent Application
WAFER CARRIER ASSEMBLY WITH PEDESTAL AND COVER RESTRAINT ARRANGEMEN...
- Publication number 20230060609
- Publication date Mar 2, 2023
- VEECO INSTRUMENTS INC.
- Sandeep Krishnan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220396875
- Publication date Dec 15, 2022
- TOKYO ELECTRON LIMITED
- Takanobu HOTTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPITAXIAL GROWTH DEVICE
- Publication number 20220384192
- Publication date Dec 1, 2022
- ZHEJIANG QIUSHI SEMICONDUCTOR EQUIPMENT CO., LTD
- Liang ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING AN EPITAXIAL WAFER
- Publication number 20220359195
- Publication date Nov 10, 2022
- GLOBALWAFERS CO., LTD.
- Maria Porrini
- C30 - CRYSTAL GROWTH
Information Patent Application
AlN MONOCRYSTAL PLATE
- Publication number 20220328723
- Publication date Oct 13, 2022
- NGK Insulators, Ltd.
- Hirohisa OGAWA
- C30 - CRYSTAL GROWTH
Information Patent Application
EPITAXIAL SILICON WAFER FOR MANUFACTURING SEMICONDUCTOR DEVICE AND...
- Publication number 20220319851
- Publication date Oct 6, 2022
- SUMCO CORPORATION
- Kazuya KODANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR DELIVERY DEVICE, METHODS OF MANUFACTURE AND METHODS OF USE TH...
- Publication number 20220290299
- Publication date Sep 15, 2022
- Ceres Technologies, Inc.
- Egbert WOELK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND COMPOSITIONS FOR RNA-DIRECTED TARGET DNA MODIFICATION A...
- Publication number 20220267928
- Publication date Aug 25, 2022
- The Regents of the University of California
- Jennifer A. Doudna
- C30 - CRYSTAL GROWTH
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20220243329
- Publication date Aug 4, 2022
- TOKYO ELECTRON LIMITED
- Reita IGARASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON CARBIDE SINGLE CRYSTAL MANUFACTURING APPARATUS AND METHOD O...
- Publication number 20220205137
- Publication date Jun 30, 2022
- SHOWA DENKO K.K.
- Rimpei KINDAICHI
- C30 - CRYSTAL GROWTH
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...
- Publication number 20220195594
- Publication date Jun 23, 2022
- KIOXIA Corporation
- Masayuki KITAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SiC EPITAXIAL SUBSTRATE MANUFACTURING METHOD AND MANUFACTURING DEVI...
- Publication number 20220181156
- Publication date Jun 9, 2022
- KWANSEI GAKUIN EDUCATIONAL FOUNDATION
- Tadaaki KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND/OR SYSTEM FOR COATING A SUBSTRATE
- Publication number 20220148889
- Publication date May 12, 2022
- Service Support Specialties, Inc.
- Gary HILLMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20220119951
- Publication date Apr 21, 2022
- Kokusai Electric Corporation
- Akira HORII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220093447
- Publication date Mar 24, 2022
- Kokusai Electric Corporation
- Naofumi OHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...
- Publication number 20220093388
- Publication date Mar 24, 2022
- Kokusai Electric Corporation
- Kimihiko NAKATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR ELEMENT, SEMICONDUCTOR ELEMEN...
- Publication number 20220064818
- Publication date Mar 3, 2022
- KYOCERA CORPORATION
- Masahiro ARAKI
- C30 - CRYSTAL GROWTH
Information Patent Application
SOURCE/DRAIN STRUCTURE FOR SEMICONDUCTOR DEVICE
- Publication number 20220059350
- Publication date Feb 24, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsiao-Chun CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SILICON CARBIDE EPITAXIAL SUBSTRATE
- Publication number 20220044934
- Publication date Feb 10, 2022
- Sumitomo Electric Industries, Ltd.
- Hironori ITOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SiC EPITAXIAL GROWTH APPARATUS
- Publication number 20220005696
- Publication date Jan 6, 2022
- NUFLARE TECHNOLOGY, INC.
- Ichiro MIZUSHIMA
- C30 - CRYSTAL GROWTH
Information Patent Application
FLOW CONTROL SYSTEM, METHOD, AND APPARATUS
- Publication number 20220004209
- Publication date Jan 6, 2022
- ICHOR SYSTEMS, INC.
- Daniel T. Mudd
- G05 - CONTROLLING REGULATING
Information Patent Application
Diamond Semiconductor System And Method
- Publication number 20210384032
- Publication date Dec 9, 2021
- AKHAN Semiconductor, Inc.
- Adam Khan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR EPITAXIAL WAFER AND METHOD OF PRODUCING SEMICONDUCTOR...
- Publication number 20210358755
- Publication date Nov 18, 2021
- SUMCO CORPORATION
- Ryosuke OKUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING NITRIDE SEMICONDUCTOR LIGHT-EMITTING ELEMENT
- Publication number 20210328099
- Publication date Oct 21, 2021
- Nichia Corporation.
- Tomoya YAMASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR PHASE EPITAXIAL GROWTH DEVICE
- Publication number 20210310154
- Publication date Oct 7, 2021
- NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH...
- Shugo NITTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SiC COMPOSITE SUBSTRATE AND SEMICONDUCTOR DEVICE
- Publication number 20210301422
- Publication date Sep 30, 2021
- NGK Insulators, Ltd.
- Risa MIYAKAZE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON CARBIDE EPITAXIAL SUBSTRATE AND METHOD OF MANUFACTURING SIL...
- Publication number 20210225646
- Publication date Jul 22, 2021
- Sumitomo Electric Industries, Ltd.
- Takaya MIYASE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING GaN CRYSTAL
- Publication number 20210172061
- Publication date Jun 10, 2021
- MITSUBISHI CHEMICAL CORPORATION
- Kenji ISO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING GROUP III NITRIDE SEMICONDUCTOR SUBSTRATE
- Publication number 20210151314
- Publication date May 20, 2021
- SUMCO CORPORATION
- Koji MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS

using reduction or decomposition of a gaseous compound yielding a solid condensate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Precursor supply system and precursors supply method

Crucible having an improved crystal growth base for manufacturing s...

Integrated photonics including waveguiding material

SiC chemical vapor deposition apparatus

Vapor delivery device, methods of manufacture and methods of use th...

Methods and compositions for RNA-directed target DNA modification a...

Semiconductor epitaxial wafer and method of producing semiconductor...

Methods and compositions for RNA-directed target DNA modification a...

Fabrication of semiconductor structures

Vapor phase epitaxial growth device

Dry pump and exhaust gas treatment method

Methods and compositions for RNA-directed target DNA modification a...

Method for depositing an epitaxial layer on a front side of a semic...

System for coating a substrate

Substrate processing apparatus

Nitride semiconductor laminate, method for manufacturing nitride se...

Transistor structure with multiple halo implants having epitaxial l...

Group 13 (III) nitride thick layer formed on an underlying layer ha...

Epitaxial silicon wafer, and method for manufacturing epitaxial sil...

Nanorod production method and nanorod produced thereby

Cleaning method of semiconductor manufacturing device

Wafer supporting mechanism, chemical vapor deposition apparatus, an...

Mechanisms for supplying process gas into wafer process apparatus

Source/drain structure for semiconductor device

Substrate processing apparatus

Method for producing GaN crystal

Vapor phase epitaxial growth device

Method for manufacturing silicon carbide epitaxial substrate

Vapor delivery device, methods of manufacture and methods of use th...

Apparatus for manufacturing group III nitride single crystal, metho...

Patents Applicationslast 30 patents

METHOD FOR ADJUSTING THERMAL FIELD OF SILICON CARBIDE SINGLE CRYSTA...

WAFER CARRIER ASSEMBLY WITH PEDESTAL AND COVER RESTRAINT ARRANGEMEN...

SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS

EPITAXIAL GROWTH DEVICE

METHODS FOR FORMING AN EPITAXIAL WAFER

AlN MONOCRYSTAL PLATE

EPITAXIAL SILICON WAFER FOR MANUFACTURING SEMICONDUCTOR DEVICE AND...

VAPOR DELIVERY DEVICE, METHODS OF MANUFACTURE AND METHODS OF USE TH...

METHODS AND COMPOSITIONS FOR RNA-DIRECTED TARGET DNA MODIFICATION A...

PROCESSING APPARATUS AND PROCESSING METHOD

SILICON CARBIDE SINGLE CRYSTAL MANUFACTURING APPARATUS AND METHOD O...

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...

SiC EPITAXIAL SUBSTRATE MANUFACTURING METHOD AND MANUFACTURING DEVI...

METHOD AND/OR SYSTEM FOR COATING A SUBSTRATE

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR ELEMENT, SEMICONDUCTOR ELEMEN...

SOURCE/DRAIN STRUCTURE FOR SEMICONDUCTOR DEVICE

METHOD FOR MANUFACTURING SILICON CARBIDE EPITAXIAL SUBSTRATE

SiC EPITAXIAL GROWTH APPARATUS

FLOW CONTROL SYSTEM, METHOD, AND APPARATUS

Diamond Semiconductor System And Method

SEMICONDUCTOR EPITAXIAL WAFER AND METHOD OF PRODUCING SEMICONDUCTOR...

METHOD OF MANUFACTURING NITRIDE SEMICONDUCTOR LIGHT-EMITTING ELEMENT

VAPOR PHASE EPITAXIAL GROWTH DEVICE

SiC COMPOSITE SUBSTRATE AND SEMICONDUCTOR DEVICE

SILICON CARBIDE EPITAXIAL SUBSTRATE AND METHOD OF MANUFACTURING SIL...

METHOD FOR PRODUCING GaN CRYSTAL

METHOD FOR MANUFACTURING GROUP III NITRIDE SEMICONDUCTOR SUBSTRATE