using scanning beams

Industry

CPC
H01J37/256

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/256using scanning beams

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Real-time direct measurement of mechanical properties in-situ of sc...
- Patent number 12,027,343
- Issue date Jul 2, 2024
- University of Connecticut
- Joseph Favata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Real-time direct measurement of mechanical properties in-situ of sc...
- Patent number 11,557,456
- Issue date Jan 17, 2023
- University of Connecticut
- Joseph Favata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for nanoscale X-ray imaging
- Patent number 11,437,218
- Issue date Sep 6, 2022
- Massachusetts Institute of Technology
- Richard C. Lanza
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of examining a sample using a charged particle microscope, w...
- Patent number 11,417,497
- Issue date Aug 16, 2022
- FEI Company
- Remco Schoenmakers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for determining and correcting for expected dose variati...
- Patent number 11,264,205
- Issue date Mar 1, 2022
- Applied Materials, Inc.
- Eric Donald Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Supply unit and a method for driving an electrode of a charged part...
- Patent number 11,043,357
- Issue date Jun 22, 2021
- Applied Materials Israel Ltd.
- Pavel Margulis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hard X-ray photoelectron spectroscopy arrangement and system
- Patent number 11,002,694
- Issue date May 11, 2021
- Scienta Omicron AB
- Tomas Wiell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particulate polymer binder composite
- Patent number 10,892,490
- Issue date Jan 12, 2021
- Arkema Inc.
- Sean M. Stabler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron energy loss spectrometer using direct detection sensor
- Patent number 10,535,492
- Issue date Jan 14, 2020
- Gatan, Inc.
- Colin Trevor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron probe microanalyzer and storage medium
- Patent number 10,410,825
- Issue date Sep 10, 2019
- Shimadzu Corporation
- Hiroshi Sakamae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cathodoluminescence detector including inner and outer tubes sealed...
- Patent number 10,157,726
- Issue date Dec 18, 2018
- Centre National de la Recherche Scientifique
- Mathieu Kociak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quantitative analysis device for trace carbon and quantitative anal...
- Patent number 10,151,718
- Issue date Dec 11, 2018
- JFE Steel Corporation
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron energy loss spectrometer using direct detection sensor
- Patent number 9,966,220
- Issue date May 8, 2018
- Gatan, Inc.
- Colin Trevor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated SEM nanoprobe tool
- Patent number 9,805,910
- Issue date Oct 31, 2017
- KLA-Tencor Corporation
- David Trease
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated mineral classification
- Patent number 9,778,215
- Issue date Oct 3, 2017
- FEI Company
- Michael James Owen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for fabricating platelets of a monochromator fo...
- Patent number 9,297,771
- Issue date Mar 29, 2016
- ReVera, Incorporated
- Jeffrey T. Fanton
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Low-interference sensor head for a radiation detector, as well as a...
- Patent number 9,299,532
- Issue date Mar 29, 2016
- Bruker Nano GmbH
- Meiken Falke
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection apparatus and method using a plurality of detecto...
- Patent number 9,236,218
- Issue date Jan 12, 2016
- Toppan Printing Co., Ltd.
- Tsutomu Murakawa
- G01 - MEASURING TESTING
Information Patent Grant
Ion sources, systems and methods
- Patent number 9,236,225
- Issue date Jan 12, 2016
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle vortex wave generation
- Patent number 9,018,596
- Issue date Apr 28, 2015
- Universiteit Antwerpen
- Johan Verbeeck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope with integrated detector(s)
- Patent number 8,987,665
- Issue date Mar 24, 2015
- FEI Company
- Frederick H. Schamber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus and replaceable door for a vacuum chamber of s...
- Patent number 8,895,921
- Issue date Nov 25, 2014
- Delmic B.V.
- Pieter Kruit
- G01 - MEASURING TESTING
Information Patent Grant
Particle beam microscope for generating material data
- Patent number 8,766,219
- Issue date Jul 1, 2014
- Carl Zeiss Microscopy GmbH
- Michel Aliman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
On-axis detector for charged particle beam system
- Patent number 8,759,764
- Issue date Jun 24, 2014
- FEI Company
- Anthony Graupera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 8,748,845
- Issue date Jun 10, 2014
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for processing a micro sample
- Patent number 8,618,520
- Issue date Dec 31, 2013
- Hitachi, Ltd.
- Mitsuo Tokuda
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Method of using a direct electron detector for a TEM
- Patent number 8,592,762
- Issue date Nov 26, 2013
- FEI Company
- Uwe Luecken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate surface processing apparatus...
- Patent number 8,578,952
- Issue date Nov 12, 2013
- Tokyo Electron Limited
- Hiroshi Nagaike
- G01 - MEASURING TESTING
Information Patent Grant
Sensor head for an x-ray detector and x-ray detector containing sai...
- Patent number 8,558,175
- Issue date Oct 15, 2013
- Bruker Nano GmbH
- Robert Krömer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface analyzer of object to be measured and analyzing method
- Patent number 8,541,738
- Issue date Sep 24, 2013
- Japan Science and Technology Agency
- Masahide Tona
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
REAL-TIME DIRECT MEASUREMENT OF MECHANICAL PROPERTIES IN-SITU OF SC...
- Publication number 20230106426
- Publication date Apr 6, 2023
- University of Connecticut
- Joseph Favata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR DETERMINING AND CORRECTING FOR EXPECTED DOSE VARIATI...
- Publication number 20210175048
- Publication date Jun 10, 2021
- Applied Materials, Inc.
- Eric Donald Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR NANOSCALE X-RAY IMAGING
- Publication number 20210151288
- Publication date May 20, 2021
- Massachusetts Institute of Technology
- Richard C. Lanza
- G01 - MEASURING TESTING
Information Patent Application
HARD X-RAY PHOTOELECTRON SPECTROSCOPY ARRANGEMENT AND SYSTEM
- Publication number 20200103358
- Publication date Apr 2, 2020
- SCIENTA OMICRON AB
- Tomas WIELL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REAL-TIME DIRECT MEASUREMENT OF MECHANICAL PROPERTIES IN-SITU OF SC...
- Publication number 20200090901
- Publication date Mar 19, 2020
- University of Connecticut
- Joseph Favata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON PROBE MICROANALYZER AND STORAGE MEDIUM
- Publication number 20190006146
- Publication date Jan 3, 2019
- Shimadzu Corporation
- Hiroshi SAKAMAE
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON ENERGY LOSS SPECTROMETER USING DIRECT DETECTION SENSOR
- Publication number 20180240639
- Publication date Aug 23, 2018
- GATAN, INC.
- Colin Trevor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
QUANTITATIVE ANALYSIS DEVICE FOR TRACE CARBON AND QUANTITATIVE ANAL...
- Publication number 20170336336
- Publication date Nov 23, 2017
- JFE STEEL CORPORATION
- Yuji TANAKA
- G01 - MEASURING TESTING
Information Patent Application
ION SOURCES, SYSTEMS AND METHODS
- Publication number 20150213997
- Publication date Jul 30, 2015
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE VORTEX WAVE GENERATION
- Publication number 20140346353
- Publication date Nov 27, 2014
- Johan Verbeeck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRINTED CIRCUIT BOARD MULTIPOLE UNITS USED FOR ION TRANSPORTATION
- Publication number 20140326874
- Publication date Nov 6, 2014
- CARL ZEISS MICROSCOPY GMBH
- Albrecht Glasmachers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD
- Publication number 20140312225
- Publication date Oct 23, 2014
- Advantest Corporation
- Tsutomu Murakawa
- G01 - MEASURING TESTING
Information Patent Application
ION SOURCES, SYSTEMS AND METHODS
- Publication number 20140306121
- Publication date Oct 16, 2014
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
Automated Mineral Classification
- Publication number 20140117231
- Publication date May 1, 2014
- Michael James Owen
- G01 - MEASURING TESTING
Information Patent Application
PARTICLE BEAM MICROSCOPE FOR GENERATING MATERIAL DATA
- Publication number 20140070099
- Publication date Mar 13, 2014
- CARL ZEISS MICROSCOPY GMBH
- Michel Aliman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
On-Axis Detector for Charged Particle Beam System
- Publication number 20140001357
- Publication date Jan 2, 2014
- FEI Company
- Anthony Graupera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Microscope with Integrated Detector(s)
- Publication number 20130299698
- Publication date Nov 14, 2013
- Frederick H. Schamber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION APPARATUS AND REPLACEABLE DOOR FOR A VACUUM CHAMBER OF S...
- Publication number 20130200262
- Publication date Aug 8, 2013
- DELMIC B.V.
- Pieter Kruit
- G01 - MEASURING TESTING
Information Patent Application
FLEXIBLE CATHODOLUMINESCENCE DETECTION SYSTEM AND MICROSCOPE EMPLOY...
- Publication number 20130087706
- Publication date Apr 11, 2013
- Centre National de la Recherche Scientifique
- Mathieu Kociak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING A MICROSAMPLE
- Publication number 20120273692
- Publication date Nov 1, 2012
- Hitachi, Ltd
- Mitsuo Tokuda
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
SPECIMEN OBSERVATION METHOD
- Publication number 20120138795
- Publication date Jun 7, 2012
- Hitachi High-Technologies Corporation
- Eiko Nakazawa
- G01 - MEASURING TESTING
Information Patent Application
ION SOURCES, SYSTEMS AND METHODS
- Publication number 20120141693
- Publication date Jun 7, 2012
- ALIS Corporation
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
LOW-INTERFERENCE SENSOR HEAD FOR A RADIATION DETECTOR, AS WELL AS A...
- Publication number 20120132818
- Publication date May 31, 2012
- BRUKER NANO GMBH
- Meiken Falke
- G01 - MEASURING TESTING
Information Patent Application
SURFACE ANALYZER OF OBJECT TO BE MEASURED AND ANALYZING METHOD
- Publication number 20120061564
- Publication date Mar 15, 2012
- Japan Science and Technology Agency
- Masahide Tona
- G01 - MEASURING TESTING
Information Patent Application
Particle Beam System
- Publication number 20120025078
- Publication date Feb 2, 2012
- CARL ZEISS NTS GMBH
- Hubert Mantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle Beam System
- Publication number 20120025077
- Publication date Feb 2, 2012
- CARL ZEISS NTS GMBH
- Hubert Mantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Using a Direct Electron Detector for a TEM
- Publication number 20110266439
- Publication date Nov 3, 2011
- FEI Company
- Uwe Luecken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE SURFACE PROCESSING APPARATUS...
- Publication number 20110242510
- Publication date Oct 6, 2011
- TOKYO ELECTRON LIMITED
- Hiroshi NAGAIKE
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM DEVICE AND ELECTRON BEAM APPLICATION DEVICE USING THE...
- Publication number 20110240855
- Publication date Oct 6, 2011
- Hitachi High-Technologies Corporation
- Takashi Ohshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND DEVICES FOR HIGH THROUGHPUT CRYSTAL STRUCTURE ANALYSIS...
- Publication number 20110220796
- Publication date Sep 15, 2011
- NanoMegas SPRL
- Stavros Nicolopoulos
- G01 - MEASURING TESTING

using scanning beams

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Real-time direct measurement of mechanical properties in-situ of sc...

Real-time direct measurement of mechanical properties in-situ of sc...

Apparatus and method for nanoscale X-ray imaging

Method of examining a sample using a charged particle microscope, w...

Techniques for determining and correcting for expected dose variati...

Supply unit and a method for driving an electrode of a charged part...

Hard X-ray photoelectron spectroscopy arrangement and system

Particulate polymer binder composite

Electron energy loss spectrometer using direct detection sensor

Electron probe microanalyzer and storage medium

Cathodoluminescence detector including inner and outer tubes sealed...

Quantitative analysis device for trace carbon and quantitative anal...

Electron energy loss spectrometer using direct detection sensor

Automated SEM nanoprobe tool

Automated mineral classification

Methods and systems for fabricating platelets of a monochromator fo...

Low-interference sensor head for a radiation detector, as well as a...

Defect inspection apparatus and method using a plurality of detecto...

Ion sources, systems and methods

Charged particle vortex wave generation

Electron microscope with integrated detector(s)

Inspection apparatus and replaceable door for a vacuum chamber of s...

Particle beam microscope for generating material data

On-axis detector for charged particle beam system

Ion sources, systems and methods

Method and apparatus for processing a micro sample

Method of using a direct electron detector for a TEM

Substrate processing system, substrate surface processing apparatus...

Sensor head for an x-ray detector and x-ray detector containing sai...

Surface analyzer of object to be measured and analyzing method

Patents Applicationslast 30 patents

REAL-TIME DIRECT MEASUREMENT OF MECHANICAL PROPERTIES IN-SITU OF SC...

TECHNIQUES FOR DETERMINING AND CORRECTING FOR EXPECTED DOSE VARIATI...

APPARATUS AND METHOD FOR NANOSCALE X-RAY IMAGING

HARD X-RAY PHOTOELECTRON SPECTROSCOPY ARRANGEMENT AND SYSTEM

REAL-TIME DIRECT MEASUREMENT OF MECHANICAL PROPERTIES IN-SITU OF SC...

ELECTRON PROBE MICROANALYZER AND STORAGE MEDIUM

ELECTRON ENERGY LOSS SPECTROMETER USING DIRECT DETECTION SENSOR

QUANTITATIVE ANALYSIS DEVICE FOR TRACE CARBON AND QUANTITATIVE ANAL...

ION SOURCES, SYSTEMS AND METHODS

CHARGED PARTICLE VORTEX WAVE GENERATION

PRINTED CIRCUIT BOARD MULTIPOLE UNITS USED FOR ION TRANSPORTATION

DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD

ION SOURCES, SYSTEMS AND METHODS

Automated Mineral Classification

PARTICLE BEAM MICROSCOPE FOR GENERATING MATERIAL DATA

On-Axis Detector for Charged Particle Beam System

Electron Microscope with Integrated Detector(s)

INSPECTION APPARATUS AND REPLACEABLE DOOR FOR A VACUUM CHAMBER OF S...

FLEXIBLE CATHODOLUMINESCENCE DETECTION SYSTEM AND MICROSCOPE EMPLOY...

METHOD AND APPARATUS FOR PROCESSING A MICROSAMPLE

SPECIMEN OBSERVATION METHOD

ION SOURCES, SYSTEMS AND METHODS

LOW-INTERFERENCE SENSOR HEAD FOR A RADIATION DETECTOR, AS WELL AS A...

SURFACE ANALYZER OF OBJECT TO BE MEASURED AND ANALYZING METHOD

Particle Beam System

Particle Beam System

Method of Using a Direct Electron Detector for a TEM

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE SURFACE PROCESSING APPARATUS...

ELECTRON BEAM DEVICE AND ELECTRON BEAM APPLICATION DEVICE USING THE...

METHODS AND DEVICES FOR HIGH THROUGHPUT CRYSTAL STRUCTURE ANALYSIS...