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H01J37/292
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/292
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Patents Grants
last 30 patents
Information
Patent Grant
Arbitrary electron dose waveforms for electron microscopy
Patent number
12,080,514
Issue date
Sep 3, 2024
INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
Ruth Shewmon Bloom
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Arbitrary electron dose waveforms for electron microscopy
Patent number
11,728,128
Issue date
Aug 15, 2023
INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
Ruth Shewmon Bloom
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam system and method for the particle-optical examinatio...
Patent number
11,657,999
Issue date
May 23, 2023
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Arbitrary electron dose waveforms for electron microscopy
Patent number
11,476,082
Issue date
Oct 18, 2022
INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
Ruth Shewmon Bloom
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
11,398,368
Issue date
Jul 26, 2022
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam system and method for the particle-optical examinatio...
Patent number
11,049,686
Issue date
Jun 29, 2021
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron channeling pattern acquisition from small crystalline areas
Patent number
11,003,942
Issue date
May 11, 2021
International Business Machines Corporation
Stephen W. Bedell
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
10,811,222
Issue date
Oct 20, 2020
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Composite beam apparatus
Patent number
10,636,615
Issue date
Apr 28, 2020
Hitachi High-Tech Science Corporation
Tatsuya Asahata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measuring spherical and chromatic aberrations in cathode lens elect...
Patent number
10,593,510
Issue date
Mar 17, 2020
International Business Machines Corporation
Rudolf M. Tromp
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
10,586,681
Issue date
Mar 10, 2020
ASML Netherlands B.V.
Zhongwei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam system and method for the particle-optical examinatio...
Patent number
10,535,494
Issue date
Jan 14, 2020
Carl Zeiss Microscopy GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
10,446,359
Issue date
Oct 15, 2019
Hitachi High-Technologies Corporation
Toshiyuki Yokosuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron channeling pattern acquisition from small crystalline areas
Patent number
10,417,519
Issue date
Sep 17, 2019
International Business Machines Corporation
Stephen W. Bedell
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for inspection of scattered hot spot areas on...
Patent number
10,217,605
Issue date
Feb 26, 2019
KLA-Tencor Corporation
Sean X. Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Composite beam apparatus
Patent number
10,204,759
Issue date
Feb 12, 2019
Hitachi High-Tech Science Corporation
Tatsuya Asahata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System for inspecting and reviewing a sample
Patent number
10,177,048
Issue date
Jan 8, 2019
Applied Materials Israel Ltd.
Juergen Frosien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam system and method for the particle-optical examinatio...
Patent number
10,163,603
Issue date
Dec 25, 2018
Carl Zeiss Microscopy GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
10,141,160
Issue date
Nov 27, 2018
Hermes-Microvision, Inc.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope
Patent number
10,134,558
Issue date
Nov 20, 2018
Hitachi High-Technologies Corporation
Yasunari Sohda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron channeling pattern acquisition from small crystalline areas
Patent number
10,127,649
Issue date
Nov 13, 2018
International Business Machines Corporation
Stephen W. Bedell
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Cross-section processing-and-observation method and cross-section p...
Patent number
10,096,449
Issue date
Oct 9, 2018
Hitachi High-Tech Science Corporation
Xin Man
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Imaging apparatus having a plurality of movable beam columns, and m...
Patent number
10,026,588
Issue date
Jul 17, 2018
Keysight Technologies, Inc.
Kurt Stephen Werder
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
10,020,164
Issue date
Jul 10, 2018
Hermes Microvision Inc.
Zhongwei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and charged particle beam device contr...
Patent number
9,881,769
Issue date
Jan 30, 2018
Hitachi High-Technologies Corporation
Kenji Aoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for preparing a sample for microscopy
Patent number
9,779,914
Issue date
Oct 3, 2017
E. A. Fischione Instruments, Inc.
Paul E. Fischione
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam substrate inspection using both vector and ra...
Patent number
9,620,332
Issue date
Apr 11, 2017
Multibeam Corporation
David K. Lam
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and image generation method
Patent number
9,478,392
Issue date
Oct 25, 2016
Hitachi High-Technologies Corporation
Kazuki Ikeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
9,362,087
Issue date
Jun 7, 2016
Hermes-Microvision, Inc.
Zhongwei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage apparatus and sample observation apparatus
Patent number
9,171,695
Issue date
Oct 27, 2015
Hitachi High-Technologies Corporation
Yasuyuki Momoi
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES
Publication number
20240094150
Publication date
Mar 21, 2024
APPLIED MATERIALS ISRAEL LTD.
Dror Shemesh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ARBITRARY ELECTRON DOSE WAVEFORMS FOR ELECTRON MICROSCOPY
Publication number
20230411112
Publication date
Dec 21, 2023
Integrated Dynamic Electron Solutions, Inc.
Ruth Shewmon BLOOM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ANALYSIS SYSTEM, ANALYSIS METHOD, COMPUTER PROGRAM PRODUCT AND SAMP...
Publication number
20230178333
Publication date
Jun 8, 2023
CARL ZEISS MICROSCOPY GMBH
Bruno Linn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEAM ARRAY GEOMETRY OPTIMIZER FOR MULTI-BEAM INSPECTION SYSTEM
Publication number
20230086984
Publication date
Mar 23, 2023
ASML NETHERLANDS B.V.
Te-Yu CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ARBITRARY ELECTRON DOSE WAVEFORMS FOR ELECTRON MICROSCOPY
Publication number
20220406561
Publication date
Dec 22, 2022
Integrated Dynamic Electron Solutions, Inc.
Ruth Shewmon BLOOM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ARBITRARY ELECTRON DOSE WAVEFORMS FOR ELECTRON MICROSCOPY
Publication number
20220336185
Publication date
Oct 20, 2022
Integrated Dynamic Electron Solutions, Inc.
Ruth Shewmon BLOOM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS, APPARATUS AND METHODS FOR FORMING METAL STRIPS INTO DIES
Publication number
20220044051
Publication date
Feb 10, 2022
Ontario Die International Inc.
Tin To Chan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...
Publication number
20210313137
Publication date
Oct 7, 2021
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Publication number
20210193433
Publication date
Jun 24, 2021
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING ELECTRON MICROSCOPE
Publication number
20210042943
Publication date
Feb 11, 2021
Shimadzu Corporation
Ryuta MATSUMOTO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20200251305
Publication date
Aug 6, 2020
ASML NETHERLANDS B.V.
Zhongwei CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...
Publication number
20200098541
Publication date
Mar 26, 2020
CARL ZEISS MICROSCOPY GMBH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON CHANNELING PATTERN ACQUISITION FROM SMALL CRYSTALLINE AREAS
Publication number
20190318193
Publication date
Oct 17, 2019
International Business Machines Corporation
Stephen W. Bedell
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
COMPOSITE BEAM APPARATUS
Publication number
20190189388
Publication date
Jun 20, 2019
HITACHI HIGH-TECH SCIENCE CORPORATION
Tatsuya ASAHATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Publication number
20190172677
Publication date
Jun 6, 2019
HERMES MICROVISION, INC.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...
Publication number
20190122852
Publication date
Apr 25, 2019
CARL ZEISS MICROSCOPY GMBH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON CHANNELING PATTERN ACQUISITION FROM SMALL CRYSTALLINE AREAS
Publication number
20180211378
Publication date
Jul 26, 2018
International Business Machines Corporation
Stephen W. Bedell
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ELECTRON CHANNELING PATTERN ACQUISITION FROM SMALL CRYSTALLINE AREAS
Publication number
20180211376
Publication date
Jul 26, 2018
International Business Machines Corporation
Stephen W. Bedell
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
COMPOSITE BEAM APPARATUS
Publication number
20180076001
Publication date
Mar 15, 2018
HITACHI HIGH-TECH SCIENCE CORPORATION
Tatsuya ASAHATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device
Publication number
20180012725
Publication date
Jan 11, 2018
Hitachi High-Technologies Corporation
Toshiyuki YOKOSUKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Source
Publication number
20170047207
Publication date
Feb 16, 2017
KLA-Tencor Corporation
Yung-Ho Alex Chuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scanning Electron Microscope
Publication number
20170018394
Publication date
Jan 19, 2017
Hitachi High-Technologies Corporation
Yasunari SOHDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEASUREMENT APPARATUS, MEASUREMENT METHOD, AND MANUFACTURING METHOD...
Publication number
20160379902
Publication date
Dec 29, 2016
KABUSHIKI KAISHA TOSHIBA
Yoshinori HAGIO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR IMAGING WAFER WITH FOCUSED CHARGED PARTICLE BEAM IN SEMI...
Publication number
20160365222
Publication date
Dec 15, 2016
Taiwan Semiconductor Manufacturing Co., LTD
Ting-Tsung CHOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and Method for Providing a Clean Environment in an Electron-...
Publication number
20160358741
Publication date
Dec 8, 2016
KLA-Tencor Corporation
William G. Schultz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CROSS-SECTION PROCESSING-AND-OBSERVATION METHOD AND CROSS-SECTION P...
Publication number
20160343541
Publication date
Nov 24, 2016
HITACHI HIGH-TECH SCIENCE CORPORATION
Xin MAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR INSPECTION OF SCATTERED HOT SPOT AREAS ON...
Publication number
20160260577
Publication date
Sep 8, 2016
KLA-Tencor Corporation
Sean X. Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM FOR INSPECTING AND REVIEWING A SAMPLE
Publication number
20160260642
Publication date
Sep 8, 2016
APPLIED MATERIALS ISRAEL LTD.
Juergen Frosien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device and Charged Particle Beam Device Contr...
Publication number
20160203947
Publication date
Jul 14, 2016
Hitachi High-Technologies Corporation
Kenji AOKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMAGING APPARATUS HAVING A PLURALITY OF MOVABLE BEAM COLUMNS, AND M...
Publication number
20160064185
Publication date
Mar 3, 2016
Keysight Technologies, Inc.
Kurt Stephen Werder
H01 - BASIC ELECTRIC ELEMENTS