using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

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H01L21/673

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/673using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Wafer treatment device
- Patent number 12,368,058
- Issue date Jul 22, 2025
- PICO & TERA CO., LTD.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pick and placement of semiconductor chips based on nozzleless self-...
- Patent number 12,362,205
- Issue date Jul 15, 2025
- University of Southern California
- Eun Sok Kim
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Tray carrier and corresponding method
- Patent number 12,362,213
- Issue date Jul 15, 2025
- STMicroelectronics (Malta) Ltd.
- Silvio Spiteri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transferring substrate and method for transferring su...
- Patent number 12,362,215
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer container and size adaption system therefor
- Patent number 12,354,896
- Issue date Jul 8, 2025
- Entegris, Inc.
- Mohamad Zakaria Abd Mutholib
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate container with door gasket
- Patent number 12,354,897
- Issue date Jul 8, 2025
- Entegris, Inc.
- Aaron Vestal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask adhesive and pellicle comprising same
- Patent number 12,344,773
- Issue date Jul 1, 2025
- Mitsui Chemicals, Inc.
- Tsuneaki Biyajima
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Storage container and manufacturing method of the same
- Patent number 12,347,710
- Issue date Jul 1, 2025
- Shin-Etsu Polymer Co., Ltd.
- Seiya Nakarai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas diffusion device, and wafer container including the same
- Patent number 12,347,711
- Issue date Jul 1, 2025
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle pod with quick-release support mechanism
- Patent number 12,347,709
- Issue date Jul 1, 2025
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate container with built-in negative pressure cavity
- Patent number 12,347,712
- Issue date Jul 1, 2025
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Equipment front end module and destructive analysis automation appa...
- Patent number 12,343,881
- Issue date Jul 1, 2025
- Samsung Electronics Co., Ltd.
- Youn Gon Oh
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Treating vessel and liquid processing apparatus
- Patent number 12,341,027
- Issue date Jun 24, 2025
- Semes Co., Ltd.
- Dae Sung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for depositing target material in deposition chamber with ti...
- Patent number 12,341,042
- Issue date Jun 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsuan-Chih Chu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus for storing and transporting semiconductor elements, and...
- Patent number 12,338,943
- Issue date Jun 24, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tse-Lun Hsu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Boat transfer method and heat treatment apparatus
- Patent number 12,334,380
- Issue date Jun 17, 2025
- Tokyo Electron Limited
- Shingo Hishiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 12,334,370
- Issue date Jun 17, 2025
- Semes Co., Ltd.
- Sangmin Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 12,327,737
- Issue date Jun 10, 2025
- SCREEN Holdings Co., Ltd.
- Jun Sawashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alignment-assisting tray, alignment-control apparatus and alignment...
- Patent number 12,327,742
- Issue date Jun 10, 2025
- TOHOKU-MICROTEC CO., LTD.
- Makoto Motoyoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exhaust device, processing apparatus, and exhausting method
- Patent number 12,322,578
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Kazuya Nagaseki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,322,606
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer container purge port assembly
- Patent number 12,322,625
- Issue date Jun 3, 2025
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer storage container
- Patent number 12,322,627
- Issue date Jun 3, 2025
- Pico & Tera Co., Ltd.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer storage device
- Patent number 12,322,621
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu Ju- Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Container for storing wafer
- Patent number 12,322,626
- Issue date Jun 3, 2025
- PICO & TERA CO., LTD.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of heat-treating silicon wafer using lateral heat treatment...
- Patent number 12,320,034
- Issue date Jun 3, 2025
- Sumco Corporation
- Yoshihiro Kuwano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor die carrier structure
- Patent number 12,322,623
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tzu-Chung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Component carrier with gap around component core and filled with fi...
- Patent number 12,322,622
- Issue date Jun 3, 2025
- AT&S Austria Technologie & Systemtechnik Aktiengesellschaft
- Artan Baftiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage shelf
- Patent number 12,322,624
- Issue date Jun 3, 2025
- Murata Machinery, Ltd.
- Tatsuo Tsubaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of installing a purge fluid conditioning element into a sem...
- Patent number 12,315,749
- Issue date May 27, 2025
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250239472
- Publication date Jul 24, 2025
- Kokusai Electric Corporation
- Shinobu SUGIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Transfer Module and Method for Manufacturing Substrate Tr...
- Publication number 20250232994
- Publication date Jul 17, 2025
- TOKYO ELECTRON LIMITED
- Akinori SHIMAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20250232993
- Publication date Jul 17, 2025
- Kokusai Electric Corporation
- Shin TSUJIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH-TYPE SUBSTRATE PROCESSING APPARATUS
- Publication number 20250226252
- Publication date Jul 10, 2025
- Samsung Electronics Co., Ltd.
- Sekeun KWAK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CLEANING APPARATUS AND WAFER CLEANING SYSTEM INCLUDING THE SAME
- Publication number 20250226253
- Publication date Jul 10, 2025
- Samsung Electronics Co., Ltd.
- Tae Woong UM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGE SYSTEM
- Publication number 20250226254
- Publication date Jul 10, 2025
- MURATA MACHINERY, LTD.
- Yoshiya WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE ADSORPTION DEVICE
- Publication number 20250222565
- Publication date Jul 10, 2025
- SAMSUNG DISPLAY CO., LTD.
- Dong Won YI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3 PILLAR BOAT IN A LOAD LOCK CHAMBER AND METHODS OF MAKING PILLAR B...
- Publication number 20250218833
- Publication date Jul 3, 2025
- ASM IP HOLDING B.V.
- Zentaro Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HUMIDITY CONTROL DEVICE FOR EQUIPMENT FRONT END MODULE OF SEMICONDU...
- Publication number 20250218834
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20250218832
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Tatsuya NISHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL MODULE FOR A FURNACE REACTOR AND METHOD OF CONT...
- Publication number 20250210343
- Publication date Jun 26, 2025
- ASM IP HOLDING B.V.
- Marina Mariano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING SILICON CHIP CARRIERS USING WET BULK MICROMA...
- Publication number 20250210388
- Publication date Jun 26, 2025
- Council of Scientific and Industrial Research
- Pankaj Bhooshan AGARWAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20250201609
- Publication date Jun 19, 2025
- SCREEN Holdings Co., Ltd.
- Ryuichi KIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER STORAGE CONTAINER
- Publication number 20250197081
- Publication date Jun 19, 2025
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND FURNACE OPENING CLOSER
- Publication number 20250201608
- Publication date Jun 19, 2025
- Kokusai Electric Corporation
- Takashi NOGAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE CARRIER AND METHOD FOR MANUFACTURING AUXILIARY STRUCTURE IN...
- Publication number 20250201610
- Publication date Jun 19, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lu-Chih LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPORT STRUCTURES FOR SEMICONDUCTOR SUBSTRATES
- Publication number 20250201622
- Publication date Jun 19, 2025
- Intel Corporation
- Sonja Koller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PACKAGE SHUTTLE FOR ENHANCED PACKAGE HANDLING RELIABILITY AND METHO...
- Publication number 20250201607
- Publication date Jun 19, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Shin-Han You
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SMART WAFER TRANSPORT CASE WITH SENSOR SYSTEM
- Publication number 20250191945
- Publication date Jun 12, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Hsien LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250191963
- Publication date Jun 12, 2025
- Kokusai Electric Corporation
- Toshiki FUJINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER
- Publication number 20250179642
- Publication date Jun 5, 2025
- Kokusai Electric Corporation
- Tetsuya KOSUGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLANGE AND APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20250183065
- Publication date Jun 5, 2025
- ASM IP HOLDING B.V.
- Jeroen de Jonge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CONTAINER AND WAFER SUPPORT
- Publication number 20250183076
- Publication date Jun 5, 2025
- MURATA MACHINERY, LTD.
- Taito UENOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR HEAT-TREATING SUBSTRATE AND APPARATUS FOR TREATING SU...
- Publication number 20250183062
- Publication date Jun 5, 2025
- SEMES CO., LTD.
- Kyung Taek IM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE PRESSING DEVICE AND RETICLE BOX USING THE SAME
- Publication number 20250172884
- Publication date May 29, 2025
- GUDENG PRECISION INDUSTRIAL CO., LTD.
- Ming-Chien CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT SLEEVE FOR SUPPORTING A PROCESS VESSEL AND ASSOCIATED SEMIC...
- Publication number 20250174475
- Publication date May 29, 2025
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20250174480
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Shinichi TANIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE STORAGE CONTAINER
- Publication number 20250167026
- Publication date May 22, 2025
- Shin-Etsu Polymer Co., Ltd.
- Haruka Miyata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLOSED LOOP CONTROL SYSTEM TO MONITOR INSIDE PARAMETERS OF A SUBSTR...
- Publication number 20250167027
- Publication date May 22, 2025
- Applied Materials, Inc.
- Srinivas Poshatrahalli Gopalakrishna
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI-CHAMBER ASSEMBLY FOR HANDLING REMOVABLE EPITAXIAL REACTION UNITS
- Publication number 20250167017
- Publication date May 22, 2025
- LPE S.p.A.
- Maurilio Meschia
- H01 - BASIC ELECTRIC ELEMENTS

using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Wafer treatment device

Pick and placement of semiconductor chips based on nozzleless self-...

Tray carrier and corresponding method

Apparatus for transferring substrate and method for transferring su...

Wafer container and size adaption system therefor

Substrate container with door gasket

Mask adhesive and pellicle comprising same

Storage container and manufacturing method of the same

Gas diffusion device, and wafer container including the same

Reticle pod with quick-release support mechanism

Substrate container with built-in negative pressure cavity

Equipment front end module and destructive analysis automation appa...

Treating vessel and liquid processing apparatus

Method for depositing target material in deposition chamber with ti...

Apparatus for storing and transporting semiconductor elements, and...

Boat transfer method and heat treatment apparatus

Apparatus and method for treating substrate

Substrate treating apparatus

Alignment-assisting tray, alignment-control apparatus and alignment...

Exhaust device, processing apparatus, and exhausting method

Substrate processing apparatus and substrate processing method

Wafer container purge port assembly

Wafer storage container

Semiconductor wafer storage device

Container for storing wafer

Method of heat-treating silicon wafer using lateral heat treatment...

Semiconductor die carrier structure

Component carrier with gap around component core and filled with fi...

Storage shelf

Methods of installing a purge fluid conditioning element into a sem...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Substrate Transfer Module and Method for Manufacturing Substrate Tr...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

BATCH-TYPE SUBSTRATE PROCESSING APPARATUS

WAFER CLEANING APPARATUS AND WAFER CLEANING SYSTEM INCLUDING THE SAME

PURGE SYSTEM

SUBSTRATE ADSORPTION DEVICE

3 PILLAR BOAT IN A LOAD LOCK CHAMBER AND METHODS OF MAKING PILLAR B...

HUMIDITY CONTROL DEVICE FOR EQUIPMENT FRONT END MODULE OF SEMICONDU...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

TEMPERATURE CONTROL MODULE FOR A FURNACE REACTOR AND METHOD OF CONT...

METHOD FOR FABRICATING SILICON CHIP CARRIERS USING WET BULK MICROMA...

SUBSTRATE PROCESSING SYSTEM

WAFER STORAGE CONTAINER

SUBSTRATE PROCESSING APPARATUS AND FURNACE OPENING CLOSER

RETICLE CARRIER AND METHOD FOR MANUFACTURING AUXILIARY STRUCTURE IN...

SUPPORT STRUCTURES FOR SEMICONDUCTOR SUBSTRATES

PACKAGE SHUTTLE FOR ENHANCED PACKAGE HANDLING RELIABILITY AND METHO...

SMART WAFER TRANSPORT CASE WITH SENSOR SYSTEM

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER

FLANGE AND APPARATUS FOR PROCESSING SUBSTRATES

WAFER CONTAINER AND WAFER SUPPORT

APPARATUS FOR HEAT-TREATING SUBSTRATE AND APPARATUS FOR TREATING SU...

RETICLE PRESSING DEVICE AND RETICLE BOX USING THE SAME

SUPPORT SLEEVE FOR SUPPORTING A PROCESS VESSEL AND ASSOCIATED SEMIC...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE STORAGE CONTAINER

CLOSED LOOP CONTROL SYSTEM TO MONITOR INSIDE PARAMETERS OF A SUBSTR...

MULTI-CHAMBER ASSEMBLY FOR HANDLING REMOVABLE EPITAXIAL REACTION UNITS