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H01L21/673
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H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/673
using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer treatment device
Patent number
12,368,058
Issue date
Jul 22, 2025
PICO & TERA CO., LTD.
Bum Je Woo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pick and placement of semiconductor chips based on nozzleless self-...
Patent number
12,362,205
Issue date
Jul 15, 2025
University of Southern California
Eun Sok Kim
B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information
Patent Grant
Tray carrier and corresponding method
Patent number
12,362,213
Issue date
Jul 15, 2025
STMicroelectronics (Malta) Ltd.
Silvio Spiteri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for transferring substrate and method for transferring su...
Patent number
12,362,215
Issue date
Jul 15, 2025
Tokyo Electron Limited
Takehiro Shindo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer container and size adaption system therefor
Patent number
12,354,896
Issue date
Jul 8, 2025
Entegris, Inc.
Mohamad Zakaria Abd Mutholib
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate container with door gasket
Patent number
12,354,897
Issue date
Jul 8, 2025
Entegris, Inc.
Aaron Vestal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mask adhesive and pellicle comprising same
Patent number
12,344,773
Issue date
Jul 1, 2025
Mitsui Chemicals, Inc.
Tsuneaki Biyajima
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Storage container and manufacturing method of the same
Patent number
12,347,710
Issue date
Jul 1, 2025
Shin-Etsu Polymer Co., Ltd.
Seiya Nakarai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas diffusion device, and wafer container including the same
Patent number
12,347,711
Issue date
Jul 1, 2025
Gudeng Precision Industrial Co., Ltd.
Ming-Chien Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reticle pod with quick-release support mechanism
Patent number
12,347,709
Issue date
Jul 1, 2025
Gudeng Precision Industrial Co., Ltd.
Ming-Chien Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate container with built-in negative pressure cavity
Patent number
12,347,712
Issue date
Jul 1, 2025
Gudeng Precision Industrial Co., Ltd.
Ming-Chien Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Equipment front end module and destructive analysis automation appa...
Patent number
12,343,881
Issue date
Jul 1, 2025
Samsung Electronics Co., Ltd.
Youn Gon Oh
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Treating vessel and liquid processing apparatus
Patent number
12,341,027
Issue date
Jun 24, 2025
Semes Co., Ltd.
Dae Sung Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for depositing target material in deposition chamber with ti...
Patent number
12,341,042
Issue date
Jun 24, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Hsuan-Chih Chu
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Apparatus for storing and transporting semiconductor elements, and...
Patent number
12,338,943
Issue date
Jun 24, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Tse-Lun Hsu
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Boat transfer method and heat treatment apparatus
Patent number
12,334,380
Issue date
Jun 17, 2025
Tokyo Electron Limited
Shingo Hishiya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for treating substrate
Patent number
12,334,370
Issue date
Jun 17, 2025
Semes Co., Ltd.
Sangmin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating apparatus
Patent number
12,327,737
Issue date
Jun 10, 2025
SCREEN Holdings Co., Ltd.
Jun Sawashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Alignment-assisting tray, alignment-control apparatus and alignment...
Patent number
12,327,742
Issue date
Jun 10, 2025
TOHOKU-MICROTEC CO., LTD.
Makoto Motoyoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Exhaust device, processing apparatus, and exhausting method
Patent number
12,322,578
Issue date
Jun 3, 2025
Tokyo Electron Limited
Kazuya Nagaseki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
12,322,606
Issue date
Jun 3, 2025
Tokyo Electron Limited
Shota Umezaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer container purge port assembly
Patent number
12,322,625
Issue date
Jun 3, 2025
Entegris, Inc.
Matthew A. Fuller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer storage container
Patent number
12,322,627
Issue date
Jun 3, 2025
Pico & Tera Co., Ltd.
Bum Je Woo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor wafer storage device
Patent number
12,322,621
Issue date
Jun 3, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Yu Ju- Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Container for storing wafer
Patent number
12,322,626
Issue date
Jun 3, 2025
PICO & TERA CO., LTD.
Bum Je Woo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of heat-treating silicon wafer using lateral heat treatment...
Patent number
12,320,034
Issue date
Jun 3, 2025
Sumco Corporation
Yoshihiro Kuwano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor die carrier structure
Patent number
12,322,623
Issue date
Jun 3, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Tzu-Chung Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Component carrier with gap around component core and filled with fi...
Patent number
12,322,622
Issue date
Jun 3, 2025
AT&S Austria Technologie & Systemtechnik Aktiengesellschaft
Artan Baftiri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Storage shelf
Patent number
12,322,624
Issue date
Jun 3, 2025
Murata Machinery, Ltd.
Tatsuo Tsubaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of installing a purge fluid conditioning element into a sem...
Patent number
12,315,749
Issue date
May 27, 2025
Entegris, Inc.
Matthew A. Fuller
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20250239472
Publication date
Jul 24, 2025
Kokusai Electric Corporation
Shinobu SUGIURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Transfer Module and Method for Manufacturing Substrate Tr...
Publication number
20250232994
Publication date
Jul 17, 2025
TOKYO ELECTRON LIMITED
Akinori SHIMAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
Publication number
20250232993
Publication date
Jul 17, 2025
Kokusai Electric Corporation
Shin TSUJIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BATCH-TYPE SUBSTRATE PROCESSING APPARATUS
Publication number
20250226252
Publication date
Jul 10, 2025
Samsung Electronics Co., Ltd.
Sekeun KWAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER CLEANING APPARATUS AND WAFER CLEANING SYSTEM INCLUDING THE SAME
Publication number
20250226253
Publication date
Jul 10, 2025
Samsung Electronics Co., Ltd.
Tae Woong UM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PURGE SYSTEM
Publication number
20250226254
Publication date
Jul 10, 2025
MURATA MACHINERY, LTD.
Yoshiya WADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE ADSORPTION DEVICE
Publication number
20250222565
Publication date
Jul 10, 2025
SAMSUNG DISPLAY CO., LTD.
Dong Won YI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
3 PILLAR BOAT IN A LOAD LOCK CHAMBER AND METHODS OF MAKING PILLAR B...
Publication number
20250218833
Publication date
Jul 3, 2025
ASM IP HOLDING B.V.
Zentaro Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HUMIDITY CONTROL DEVICE FOR EQUIPMENT FRONT END MODULE OF SEMICONDU...
Publication number
20250218834
Publication date
Jul 3, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Ren-Hau Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
Publication number
20250218832
Publication date
Jul 3, 2025
Kokusai Electric Corporation
Tatsuya NISHINO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL MODULE FOR A FURNACE REACTOR AND METHOD OF CONT...
Publication number
20250210343
Publication date
Jun 26, 2025
ASM IP HOLDING B.V.
Marina Mariano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FABRICATING SILICON CHIP CARRIERS USING WET BULK MICROMA...
Publication number
20250210388
Publication date
Jun 26, 2025
Council of Scientific and Industrial Research
Pankaj Bhooshan AGARWAL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM
Publication number
20250201609
Publication date
Jun 19, 2025
SCREEN Holdings Co., Ltd.
Ryuichi KIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER STORAGE CONTAINER
Publication number
20250197081
Publication date
Jun 19, 2025
Bum Je WOO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND FURNACE OPENING CLOSER
Publication number
20250201608
Publication date
Jun 19, 2025
Kokusai Electric Corporation
Takashi NOGAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RETICLE CARRIER AND METHOD FOR MANUFACTURING AUXILIARY STRUCTURE IN...
Publication number
20250201610
Publication date
Jun 19, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Lu-Chih LIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUPPORT STRUCTURES FOR SEMICONDUCTOR SUBSTRATES
Publication number
20250201622
Publication date
Jun 19, 2025
Intel Corporation
Sonja Koller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PACKAGE SHUTTLE FOR ENHANCED PACKAGE HANDLING RELIABILITY AND METHO...
Publication number
20250201607
Publication date
Jun 19, 2025
Taiwan Semiconductor Manufacturing Company Limited
Shin-Han You
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SMART WAFER TRANSPORT CASE WITH SENSOR SYSTEM
Publication number
20250191945
Publication date
Jun 12, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Chung-Hsien LIAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20250191963
Publication date
Jun 12, 2025
Kokusai Electric Corporation
Toshiki FUJINO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER
Publication number
20250179642
Publication date
Jun 5, 2025
Kokusai Electric Corporation
Tetsuya KOSUGI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FLANGE AND APPARATUS FOR PROCESSING SUBSTRATES
Publication number
20250183065
Publication date
Jun 5, 2025
ASM IP HOLDING B.V.
Jeroen de Jonge
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER CONTAINER AND WAFER SUPPORT
Publication number
20250183076
Publication date
Jun 5, 2025
MURATA MACHINERY, LTD.
Taito UENOYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR HEAT-TREATING SUBSTRATE AND APPARATUS FOR TREATING SU...
Publication number
20250183062
Publication date
Jun 5, 2025
SEMES CO., LTD.
Kyung Taek IM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RETICLE PRESSING DEVICE AND RETICLE BOX USING THE SAME
Publication number
20250172884
Publication date
May 29, 2025
GUDENG PRECISION INDUSTRIAL CO., LTD.
Ming-Chien CHIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUPPORT SLEEVE FOR SUPPORTING A PROCESS VESSEL AND ASSOCIATED SEMIC...
Publication number
20250174475
Publication date
May 29, 2025
ASM IP HOLDING B.V.
Theodorus G.M. Oosterlaken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
Publication number
20250174480
Publication date
May 29, 2025
SCREEN Holdings Co., Ltd.
Shinichi TANIGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE STORAGE CONTAINER
Publication number
20250167026
Publication date
May 22, 2025
Shin-Etsu Polymer Co., Ltd.
Haruka Miyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLOSED LOOP CONTROL SYSTEM TO MONITOR INSIDE PARAMETERS OF A SUBSTR...
Publication number
20250167027
Publication date
May 22, 2025
Applied Materials, Inc.
Srinivas Poshatrahalli Gopalakrishna
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MULTI-CHAMBER ASSEMBLY FOR HANDLING REMOVABLE EPITAXIAL REACTION UNITS
Publication number
20250167017
Publication date
May 22, 2025
LPE S.p.A.
Maurilio Meschia
H01 - BASIC ELECTRIC ELEMENTS