using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

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CPC
H01L21/673

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/673using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Exhaust device, processing apparatus, and exhausting method
- Patent number 12,322,578
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Kazuya Nagaseki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,322,606
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer container purge port assembly
- Patent number 12,322,625
- Issue date Jun 3, 2025
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer storage container
- Patent number 12,322,627
- Issue date Jun 3, 2025
- Pico & Tera Co., Ltd.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of heat-treating silicon wafer using lateral heat treatment...
- Patent number 12,320,034
- Issue date Jun 3, 2025
- Sumco Corporation
- Yoshihiro Kuwano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer storage device
- Patent number 12,322,621
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu Ju- Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Container for storing wafer
- Patent number 12,322,626
- Issue date Jun 3, 2025
- PICO & TERA CO., LTD.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor die carrier structure
- Patent number 12,322,623
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tzu-Chung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Component carrier with gap around component core and filled with fi...
- Patent number 12,322,622
- Issue date Jun 3, 2025
- AT&S Austria Technologie & Systemtechnik Aktiengesellschaft
- Artan Baftiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage shelf
- Patent number 12,322,624
- Issue date Jun 3, 2025
- Murata Machinery, Ltd.
- Tatsuo Tsubaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of installing a purge fluid conditioning element into a sem...
- Patent number 12,315,749
- Issue date May 27, 2025
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus and semiconductor processing met...
- Patent number 12,312,690
- Issue date May 27, 2025
- Samsung Electronics Co., Ltd.
- Minju Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas curtain device for front opening unified pod
- Patent number 12,315,750
- Issue date May 27, 2025
- Avex-SG Technology Inc.
- Jin-Bor Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transporting semiconductor wafers
- Patent number 12,308,267
- Issue date May 20, 2025
- Siltronic AG
- Ludwig Lamprecht
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor fabrication system and method
- Patent number 12,308,268
- Issue date May 20, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer processing system and method
- Patent number 12,308,271
- Issue date May 20, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Kai-Hung Hsiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate container and its door assembly, support assembly, and el...
- Patent number 12,308,269
- Issue date May 20, 2025
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate boat and methods of using the same
- Patent number 12,308,266
- Issue date May 20, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tung-Huang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,293,930
- Issue date May 6, 2025
- Kokusai Electric Corporation
- Shinobu Sugiura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier head for chemical mechanical polishing apparatus comprising...
- Patent number 12,285,839
- Issue date Apr 29, 2025
- Joon Mo Kang
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holder
- Patent number 12,288,707
- Issue date Apr 29, 2025
- Ebara Corporation
- Matsutaro Miyamoto
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Wafer carrier dry cleaner
- Patent number 12,288,708
- Issue date Apr 29, 2025
- NANYA TECHNOLOGY CORPORATION
- Jih-Cheng Huang
- B08 - CLEANING
Information Patent Grant
Humidity control device for equipment front end module of semicondu...
- Patent number 12,283,506
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port adapter
- Patent number 12,283,509
- Issue date Apr 22, 2025
- Nidec-Read Corporation
- Toshihide Matsukawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,281,389
- Issue date Apr 22, 2025
- Tokyo Electron Limited
- Kohei Fukushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate retaining assembly and door device
- Patent number 12,283,505
- Issue date Apr 22, 2025
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate storing and aligning apparatus in substrate bonding equip...
- Patent number 12,278,130
- Issue date Apr 15, 2025
- Semes Co., Ltd.
- Ho Cheon Bang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transferring substrate, and apparatus and method for...
- Patent number 12,278,128
- Issue date Apr 15, 2025
- Semes Co., Ltd.
- Jinwoo Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate suppport and method of ma...
- Patent number 12,272,579
- Issue date Apr 8, 2025
- Kokusai Electric Corporation
- Yusaku Okajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer storage container
- Patent number 12,264,005
- Issue date Apr 1, 2025
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER
- Publication number 20250179642
- Publication date Jun 5, 2025
- Kokusai Electric Corporation
- Tetsuya KOSUGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLANGE AND APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20250183065
- Publication date Jun 5, 2025
- ASM IP HOLDING B.V.
- Jeroen de Jonge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CONTAINER AND WAFER SUPPORT
- Publication number 20250183076
- Publication date Jun 5, 2025
- MURATA MACHINERY, LTD.
- Taito UENOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR HEAT-TREATING SUBSTRATE AND APPARATUS FOR TREATING SU...
- Publication number 20250183062
- Publication date Jun 5, 2025
- SEMES CO., LTD.
- Kyung Taek IM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE PRESSING DEVICE AND RETICLE BOX USING THE SAME
- Publication number 20250172884
- Publication date May 29, 2025
- GUDENG PRECISION INDUSTRIAL CO., LTD.
- Ming-Chien CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT SLEEVE FOR SUPPORTING A PROCESS VESSEL AND ASSOCIATED SEMIC...
- Publication number 20250174475
- Publication date May 29, 2025
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20250174480
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Shinichi TANIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE STORAGE CONTAINER
- Publication number 20250167026
- Publication date May 22, 2025
- Shin-Etsu Polymer Co., Ltd.
- Haruka Miyata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLOSED LOOP CONTROL SYSTEM TO MONITOR INSIDE PARAMETERS OF A SUBSTR...
- Publication number 20250167027
- Publication date May 22, 2025
- Applied Materials, Inc.
- Srinivas Poshatrahalli Gopalakrishna
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI-CHAMBER ASSEMBLY FOR HANDLING REMOVABLE EPITAXIAL REACTION UNITS
- Publication number 20250167017
- Publication date May 22, 2025
- LPE S.p.A.
- Maurilio Meschia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR WAFER STORAGE DEVICE
- Publication number 20250157837
- Publication date May 15, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu Ju- CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PACKAGING UNIT AND TRANSPORTATION CONTAINER
- Publication number 20250157839
- Publication date May 15, 2025
- SUMCO CORPORATION
- Tomohiro HORIO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIFTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCL...
- Publication number 20250157848
- Publication date May 15, 2025
- SEMES CO., LTD.
- Mun Hyeok HWANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TREATMENT DEVICE AND WAFER TREATMENT METHOD
- Publication number 20250157838
- Publication date May 15, 2025
- SwaySure Technology Co., Ltd.
- Zhibo Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PURIFYING SUBSTRATE CONTAINERS
- Publication number 20250149363
- Publication date May 8, 2025
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STORAGE APPARATUS WITH INTEGRATED SORTER
- Publication number 20250149360
- Publication date May 8, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Tsung-Sheng KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING SYSTEMS, WAFER TRANSPORT DEVICES, AND RELATED METHODS
- Publication number 20250149362
- Publication date May 8, 2025
- Micron Technology, Inc.
- Nagasubramaniyan Chandrasekaran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CARRIER WITH RETICLE TEMPLATE FOR MARKING RETICLE FIELDS ON A...
- Publication number 20250140587
- Publication date May 1, 2025
- Micron Technology, Inc.
- Gabe Glass
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING ASSEMBLY AND METHOD FOR TRANSFERRING WAFERS
- Publication number 20250132181
- Publication date Apr 24, 2025
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLING STATION
- Publication number 20250125174
- Publication date Apr 17, 2025
- Samsung Electronics Co., Ltd.
- Haechul KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE ROTATING APPARATUS, SUBSTRATE PROCESSING SYSTEM INCLUDING...
- Publication number 20250125182
- Publication date Apr 17, 2025
- Samsung Electronics Co., Ltd.
- HYUN HO CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOW MODIFICATION FIXTURE FOR AN EQUIPMENT FRONT END MODULE
- Publication number 20250118582
- Publication date Apr 10, 2025
- Entegris, Inc.
- Seong Chan Kim
- G05 - CONTROLLING REGULATING
Information Patent Application
SEALING RING
- Publication number 20250116332
- Publication date Apr 10, 2025
- Samsung Electronics Co., Ltd.
- Jihwan Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BOAT SYSTEM
- Publication number 20250112068
- Publication date Apr 3, 2025
- ASM IP HOLDING B.V.
- Klaas Boonstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER STORAGE CONTAINER PROCESSING APPARATUS
- Publication number 20250112070
- Publication date Apr 3, 2025
- SHIBAURA MECHATRONICS CORPORATION
- Junji ISHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PACKAGE TRAYS FOR SEMICONDUCTOR PACKAGES AND RELATED METHODS
- Publication number 20250112069
- Publication date Apr 3, 2025
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Byounghee LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF STORING CARRIERS AND METHOD OF STORING CARRIERS
- Publication number 20250112071
- Publication date Apr 3, 2025
- SEMES CO., LTD.
- Yong Bae CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS FOR WAFER STORAGE CONTAINER
- Publication number 20250108414
- Publication date Apr 3, 2025
- SHIBAURA MECHATRONICS CORPORATION
- Junji ISHIHARA
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS FOR WAFER STORAGE CONTAINER
- Publication number 20250108415
- Publication date Apr 3, 2025
- SHIBAURA MECHATRONICS CORPORATION
- Junji ISHIHARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR
- Publication number 20250100161
- Publication date Mar 27, 2025
- Taiwan Semiconductor Manufacturing Co., LTD
- Jen-Ti WANG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Exhaust device, processing apparatus, and exhausting method

Substrate processing apparatus and substrate processing method

Wafer container purge port assembly

Wafer storage container

Method of heat-treating silicon wafer using lateral heat treatment...

Semiconductor wafer storage device

Container for storing wafer

Semiconductor die carrier structure

Component carrier with gap around component core and filled with fi...

Storage shelf

Methods of installing a purge fluid conditioning element into a sem...

Semiconductor processing apparatus and semiconductor processing met...

Gas curtain device for front opening unified pod

Apparatus for transporting semiconductor wafers

Semiconductor fabrication system and method

Semiconductor wafer processing system and method

Substrate container and its door assembly, support assembly, and el...

Semiconductor substrate boat and methods of using the same

Substrate processing apparatus, method of manufacturing semiconduct...

Carrier head for chemical mechanical polishing apparatus comprising...

Substrate holder

Wafer carrier dry cleaner

Humidity control device for equipment front end module of semicondu...

Load port adapter

Substrate processing method and substrate processing apparatus

Substrate retaining assembly and door device

Substrate storing and aligning apparatus in substrate bonding equip...

Apparatus for transferring substrate, and apparatus and method for...

Substrate processing apparatus, substrate suppport and method of ma...

Wafer storage container

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER

FLANGE AND APPARATUS FOR PROCESSING SUBSTRATES

WAFER CONTAINER AND WAFER SUPPORT

APPARATUS FOR HEAT-TREATING SUBSTRATE AND APPARATUS FOR TREATING SU...

RETICLE PRESSING DEVICE AND RETICLE BOX USING THE SAME

SUPPORT SLEEVE FOR SUPPORTING A PROCESS VESSEL AND ASSOCIATED SEMIC...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE STORAGE CONTAINER

CLOSED LOOP CONTROL SYSTEM TO MONITOR INSIDE PARAMETERS OF A SUBSTR...

MULTI-CHAMBER ASSEMBLY FOR HANDLING REMOVABLE EPITAXIAL REACTION UNITS

SEMICONDUCTOR WAFER STORAGE DEVICE

PACKAGING UNIT AND TRANSPORTATION CONTAINER

SUBSTRATE LIFTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCL...

WAFER TREATMENT DEVICE AND WAFER TREATMENT METHOD

METHODS AND APPARATUS FOR PURIFYING SUBSTRATE CONTAINERS

SEMICONDUCTOR STORAGE APPARATUS WITH INTEGRATED SORTER

WAFER PROCESSING SYSTEMS, WAFER TRANSPORT DEVICES, AND RELATED METHODS

WAFER CARRIER WITH RETICLE TEMPLATE FOR MARKING RETICLE FIELDS ON A...

SEMICONDUCTOR PROCESSING ASSEMBLY AND METHOD FOR TRANSFERRING WAFERS

COOLING STATION

SUBSTRATE ROTATING APPARATUS, SUBSTRATE PROCESSING SYSTEM INCLUDING...

FLOW MODIFICATION FIXTURE FOR AN EQUIPMENT FRONT END MODULE

SEALING RING

WAFER BOAT SYSTEM

WAFER STORAGE CONTAINER PROCESSING APPARATUS

PACKAGE TRAYS FOR SEMICONDUCTOR PACKAGES AND RELATED METHODS

APPARATUS OF STORING CARRIERS AND METHOD OF STORING CARRIERS

CLEANING APPARATUS FOR WAFER STORAGE CONTAINER

CLEANING APPARATUS FOR WAFER STORAGE CONTAINER

SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR