using STM

Follow

Industry

CPC
H01J2237/31733

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/31733using STM

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for low-energy scanning electron beam lithography
- Patent number 4,785,189
- Issue date Nov 15, 1988
- International Business Machines Corporation
- Oliver C. Wells
- B82 - NANO-TECHNOLOGY