using synchrotron radiation

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CPC
C23C16/485

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/485using synchrotron radiation

Industries

Patents Grantslast 30 patents

Information Patent Grant
Production method for a semiconductor device
- Patent number 6,169,004
- Issue date Jan 2, 2001
- Matsushita Electric Industrial Co., Ltd.
- Bunji Mizuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Production method for a semiconductor device
- Patent number 5,817,559
- Issue date Oct 6, 1998
- Matsushita Electric Industrial Co., Ltd.
- Bunji Mizuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing high quality thin layer films on substrates
- Patent number 5,306,530
- Issue date Apr 26, 1994
- Associated Universities, Inc.
- Myron Strongin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...