using two or more gratings

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G01J2009/0219

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GPHYSICS G01Measuring instruments G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT COLORIMETRY RADIATION PYROMETRY

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G01J2009/0219using two or more gratings

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Patents Grantslast 30 patents

Information Patent Grant
Method for high-accuracy wavefront measurement base on grating shea...
- Patent number 11,340,118
- Issue date May 24, 2022
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Yunjun Lu
- G01 - MEASURING TESTING
Information Patent Grant
Measuring method and measuring system for interferometrically measu...
- Patent number 10,697,852
- Issue date Jun 30, 2020
- Carl Zeiss SMT GmbH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Shearing interferometer using two opposing shearing plates for laser
- Patent number 10,557,756
- Issue date Feb 11, 2020
- Samsung Display Co., Ltd.
- Emil Aslanov
- G01 - MEASURING TESTING
Information Patent Grant
Ocular metrology employing spectral wavefront analysis of reflected...
- Patent number 10,470,655
- Issue date Nov 12, 2019
- Steven James Frisken
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Ocular metrology employing spectral wavefront analysis of reflected...
- Patent number 9,913,579
- Issue date Mar 13, 2018
- Steven James Frisken
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Wavefront analyser
- Patent number 9,861,277
- Issue date Jan 9, 2018
- Trevor Bruce Anderson
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Interferometer and phase shift amount measuring apparatus with diff...
- Patent number 9,719,859
- Issue date Aug 1, 2017
- LASERTEC CORPORATION
- Haruhiko Kusunose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wavelength shift measuring apparatus, optical source apparatus, int...
- Patent number 8,416,387
- Issue date Apr 9, 2013
- Canon Kabushiki Kaisha
- Ko Ishizuka
- G01 - MEASURING TESTING
Information Patent Grant
Two grating lateral shearing wavefront sensor
- Patent number 7,889,356
- Issue date Feb 15, 2011
- Zygo Corporation
- Michael Küchel
- G01 - MEASURING TESTING
Information Patent Grant
Methods for measuring a wavefront of an optical system
- Patent number 7,602,503
- Issue date Oct 13, 2009
- ASML Holdings N.V.
- Sherman K. Poultney
- G01 - MEASURING TESTING
Information Patent Grant
Transmission shear grating in checkerboard configuration for EUV wa...
- Patent number 7,268,891
- Issue date Sep 11, 2007
- ASML Holding N.V.
- Sherman K. Poultney
- G01 - MEASURING TESTING
Information Patent Grant
Parallel light ray measuring apparatus
- Patent number 5,170,221
- Issue date Dec 8, 1992
- Okuma Corp.
- Keiji Matsui
- G01 - MEASURING TESTING
Information Patent Grant
High stability interferometer for measuring small changes in refrac...
- Patent number 5,074,666
- Issue date Dec 24, 1991
- Agency of Industrial Science and Technology
- Thomas H. Barnes
- G01 - MEASURING TESTING
Information Patent Grant
Spatial heterodyne spectrometer and method
- Patent number 5,059,027
- Issue date Oct 22, 1991
- Wisconsin Alumni Research Foundation
- Fred L. Roesler
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring an optical length of light path and a laser in...
- Patent number 4,558,952
- Issue date Dec 17, 1985
- Vladimir P. Kulesh
- G01 - MEASURING TESTING
Information Patent Grant
Wavefront sensor using a surface acoustic wave diffraction grating
- Patent number 4,474,467
- Issue date Oct 2, 1984
- Itek Corporation
- John W. Hardy
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR HIGH-ACCURACY WAVEFRONT MEASUREMENT BASE ON GRATING SHEA...
- Publication number 20220074793
- Publication date Mar 10, 2022
- Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
- Yunjun LU
- G01 - MEASURING TESTING
Information Patent Application
MEASURING METHOD AND MEASURING SYSTEM FOR INTERFEROMETRICALLY MEASU...
- Publication number 20190212226
- Publication date Jul 11, 2019
- Carl Zeiss SMT GMBH
- Ulrich WEGMANN
- G01 - MEASURING TESTING
Information Patent Application
SHEARING INTERFEROMETER FOR LASER
- Publication number 20190154514
- Publication date May 23, 2019
- SAMSUNG DISPLAY CO., LTD.
- Emil ASLANOV
- G01 - MEASURING TESTING
Information Patent Application
OCULAR METROLOGY EMPLOYING SPECTRAL WAVEFRONT ANALYSIS OF REFLECTED...
- Publication number 20180146851
- Publication date May 31, 2018
- Steven James Frisken
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
TWO GRATING LATERAL SHEARING WAVEFRONT SENSOR
- Publication number 20100141959
- Publication date Jun 10, 2010
- Michael Kuchel
- G01 - MEASURING TESTING
Information Patent Application
WAVELENGTH SHIFT MEASURING APPARATUS, OPTICAL SOURCE APPARATUS, INT...
- Publication number 20100103403
- Publication date Apr 29, 2010
- Canon Kabushiki Kaisha
- Ko Ishizuka
- G01 - MEASURING TESTING
Information Patent Application
Transmission shear grating in checkerboard configuration for EUV wa...
- Publication number 20070153295
- Publication date Jul 5, 2007
- ASML Holding N.V.
- Sherman K. Poultney
- G02 - OPTICS
Information Patent Application
Transmission shear grating in checkerboard configuration for EUV wa...
- Publication number 20040169866
- Publication date Sep 2, 2004
- ASML Holding, N. V.
- Sherman K. Poultney
- G02 - OPTICS

using two or more gratings

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for high-accuracy wavefront measurement base on grating shea...

Measuring method and measuring system for interferometrically measu...

Shearing interferometer using two opposing shearing plates for laser

Ocular metrology employing spectral wavefront analysis of reflected...

Ocular metrology employing spectral wavefront analysis of reflected...

Wavefront analyser

Interferometer and phase shift amount measuring apparatus with diff...

Wavelength shift measuring apparatus, optical source apparatus, int...

Two grating lateral shearing wavefront sensor

Methods for measuring a wavefront of an optical system

Transmission shear grating in checkerboard configuration for EUV wa...

Parallel light ray measuring apparatus

High stability interferometer for measuring small changes in refrac...

Spatial heterodyne spectrometer and method

Method for measuring an optical length of light path and a laser in...

Wavefront sensor using a surface acoustic wave diffraction grating

Patents Applicationslast 30 patents

METHOD FOR HIGH-ACCURACY WAVEFRONT MEASUREMENT BASE ON GRATING SHEA...

MEASURING METHOD AND MEASURING SYSTEM FOR INTERFEROMETRICALLY MEASU...

SHEARING INTERFEROMETER FOR LASER

OCULAR METROLOGY EMPLOYING SPECTRAL WAVEFRONT ANALYSIS OF REFLECTED...

TWO GRATING LATERAL SHEARING WAVEFRONT SENSOR

WAVELENGTH SHIFT MEASURING APPARATUS, OPTICAL SOURCE APPARATUS, INT...

Transmission shear grating in checkerboard configuration for EUV wa...

Transmission shear grating in checkerboard configuration for EUV wa...