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H01L21/2683
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H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/2683
using X-ray lasers
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Patents Grants
last 30 patents
Information
Patent Grant
Processed wafer and method of manufacturing chip formation wafer
Patent number
11,881,407
Issue date
Jan 23, 2024
Denso Corporation
Masatake Nagaya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of assessing semiconductor substrate and method of assessing...
Patent number
10,586,699
Issue date
Mar 10, 2020
Disco Corporation
Youngsuk Kim
G01 - MEASURING TESTING
Information
Patent Grant
Production of an integrated circuit including electrical contact on...
Patent number
10,347,490
Issue date
Jul 9, 2019
Infineon Technologies Austria AG
Roland Rupp
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cutting method for cutting processing-target object and cutting app...
Patent number
10,121,672
Issue date
Nov 6, 2018
Disco Corporation
Koichi Shigematsu
B28 - WORKING CEMENT, CLAY, OR STONE
Information
Patent Grant
Surface treatment apparatus and surface treatment method
Patent number
9,780,390
Issue date
Oct 3, 2017
Toyota Jidosha Kabushiki Kaisha
Takashi Ikejiri
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Method of manufacturing stacked semiconductor package
Patent number
9,673,185
Issue date
Jun 6, 2017
Samsung Electronics Co., Ltd.
Young-ho Joung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of creation of defects using X-ray radiation and electric fi...
Patent number
9,530,650
Issue date
Dec 27, 2016
Romaldas Purlys
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Production of an integrated circuit including electrical contact on...
Patent number
8,895,422
Issue date
Nov 25, 2014
Infineon Technologies Austria AG
Roland Rupp
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Production of an integrated circuit including electrical contact on...
Patent number
8,450,196
Issue date
May 28, 2013
Infineon Technologies Austria AG
Roland Rupp
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer laser processing method and laser beam processing machine
Patent number
7,611,968
Issue date
Nov 3, 2009
Disco Corporation
Satoshi Kobayashi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method of manufacturing GaN-based p-type compound semiconductors an...
Patent number
6,479,313
Issue date
Nov 12, 2002
Kopin Corporation
Jinlin Ye
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of making reoxidized nitrided oxide MOSFETs
Patent number
5,219,773
Issue date
Jun 15, 1993
Massachusetts Institute of Technology
Gregory J. Dunn
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PROCESSED WAFER AND METHOD OF MANUFACTURING CHIP FORMATION WAFER
Publication number
20220130675
Publication date
Apr 28, 2022
DENSO CORPORATION
Masatake NAGAYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ASSESSING SEMICONDUCTOR SUBSTRATE AND METHOD OF ASSESSING...
Publication number
20190080905
Publication date
Mar 14, 2019
Disco Corporation
Youngsuk Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CUTTING METHOD FOR CUTTING PROCESSING-TARGET OBJECT AND CUTTING APP...
Publication number
20170372908
Publication date
Dec 28, 2017
Disco Corporation
Koichi Shigematsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NEW METHOD OF CREATION OF DEFECTS USING X-RAY RADIATION AND ELECTRI...
Publication number
20150262821
Publication date
Sep 17, 2015
VILNIUS UNVERSITY
Romaldas Purlys
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRODUCTION OF AN INTEGRATED CIRCUIT INCLUDING ELECTRICAL CONTACT ON...
Publication number
20130193449
Publication date
Aug 1, 2013
Infineon Technologies Austria AG
Roland Rupp
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer laser processing method and laser beam processing machine
Publication number
20080124898
Publication date
May 29, 2008
DISCO CORPORATION
Satoshi Kobayashi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHODS OF FABRICATING TRANSISTORS HAVING HIGH CARRIER MOBILITY AND...
Publication number
20080116487
Publication date
May 22, 2008
SAMSUNG ELECTRONICS CO., LTD.
Byeong-Chan Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRODUCTION OF AN INTEGRATED CIRCUIT INCLUDING ELECTRICAL CONTACT ON...
Publication number
20080099769
Publication date
May 1, 2008
Infineon Technologies Austria AG
Roland Rupp
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING GAN-BASED P-TYPE COMPOUND SEMICONDUCTORS AN...
Publication number
20020177251
Publication date
Nov 28, 2002
Kopin Corporation
Jinlin Ye
H01 - BASIC ELECTRIC ELEMENTS