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Beam guiding apparatus
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Patent number 9,596,743
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Issue date Mar 14, 2017
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TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
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Andreas Enzmann
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G02 - OPTICS
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Plasma valve
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Patent number 6,528,948
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Issue date Mar 4, 2003
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Brookhaven Science Associates LLC
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Ady Hershcovitch
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Vacuum chamber for an SOR apparatus
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Patent number 4,908,580
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Issue date Mar 13, 1990
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Mitsubishi Denki Kabushiki Kaisha
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Tadatoshi Yamada
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Vacuum chamber for containing particle beams
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Patent number 4,712,074
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Issue date Dec 8, 1987
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The United States of America as represented by the Department of Energy
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Alexander Harvey
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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3489894
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Patent number 3,489,894
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Issue date Jan 13, 1970
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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3471630
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Patent number 3,471,630
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Issue date Oct 7, 1969
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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3395279
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Patent number 3,395,279
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Issue date Jul 30, 1968
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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2822491
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Patent number 2,822,491
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Issue date Feb 4, 1958
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR