Vacuum seals

Industry

CPC
H01J2237/2006

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2006Vacuum seals

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum processing apparatus and method for controlling vacuum proce...
- Patent number 12,080,523
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Kiyoshi Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample protection device for scanning electron microscopy
- Patent number 12,040,156
- Issue date Jul 16, 2024
- SHANGHAI NEMOR OPTOELECTRONIC TECHNOLOGY CO., LTD.
- Xuan Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Replaceable module for a charged particle apparatus
- Patent number 11,961,698
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Christiaan Otten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system
- Patent number 11,631,569
- Issue date Apr 18, 2023
- Jeol Ltd.
- Shuichi Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Portable vacuum antioxidant bag
- Patent number 11,127,559
- Issue date Sep 21, 2021
- Korea Institute of Science and Technology
- So Hee Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 11,024,481
- Issue date Jun 1, 2021
- FEI Company
- Karel Diederick Van Der Mast
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system, opto-electro simultaneous detection s...
- Patent number 10,879,036
- Issue date Dec 29, 2020
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Wei He
- G02 - OPTICS
Information Patent Grant
Scanning electron microscope
- Patent number 10,796,879
- Issue date Oct 6, 2020
- Phenom-World Holding B.V.
- Karel Diederick Van Der Mast
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and mass spectrometer
- Patent number 10,643,831
- Issue date May 5, 2020
- Shimadzu Corporation
- Tomoyoshi Matsushita
- G01 - MEASURING TESTING
Information Patent Grant
Sample stage
- Patent number 10,580,613
- Issue date Mar 3, 2020
- Phenom-World Holding B.V.
- Gerhardus Bernardus Stamsnijder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuit analysis systems and methods with localized evac...
- Patent number 10,373,795
- Issue date Aug 6, 2019
- FEI Company
- Yakov Bobrov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for optimizing fluid flow across a sample within an electron...
- Patent number 10,373,800
- Issue date Aug 6, 2019
- Protochips, Inc.
- Daniel Stephen Gardiner
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
User interface for an electron microscope
- Patent number 9,865,427
- Issue date Jan 9, 2018
- FEI Company
- Martinus Petrus Maria Bierhoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diaphragm mounting member and charged particle beam device
- Patent number 9,633,817
- Issue date Apr 25, 2017
- Hitachi High-Technologies Corporation
- Shinsuke Kawanishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample storage container, charged particle beam apparatus, and imag...
- Patent number 9,564,288
- Issue date Feb 7, 2017
- Hitachi High-Technologies Corporation
- Yusuke Ominami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample base, charged particle beam device and sample observation me...
- Patent number 9,508,527
- Issue date Nov 29, 2016
- Hitachi High-Technologies Corporation
- Yusuke Ominami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for optimizing fluid flow across a sample within an electron...
- Patent number 9,466,459
- Issue date Oct 11, 2016
- PROTOCHIPS, INC.
- Daniel Stephen Gardiner
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Charged particle beam device and filter member
- Patent number 9,373,480
- Issue date Jun 21, 2016
- Hitachi High-Technologies Corporation
- Shinsuke Kawanishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interface, a method for observing an object within a non-vacuum env...
- Patent number 9,076,631
- Issue date Jul 7, 2015
- Dov Shachal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target positioning device, method for driving a target positioning...
- Patent number 9,030,649
- Issue date May 12, 2015
- Mapper Lithography IP B.V.
- Jerry Johannes Martinus Peijster
- B82 - NANO-TECHNOLOGY
Information Patent Grant
User interface for an electron microscope
- Patent number 9,025,018
- Issue date May 5, 2015
- FEI Company
- Martinus Petrus Maria Bierhoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interface, a method for observing an object within a non-vacuum env...
- Patent number 8,779,358
- Issue date Jul 15, 2014
- Dov Shachal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample device for charged particle beam
- Patent number 8,729,497
- Issue date May 20, 2014
- Hitachi High-Technologies Corporation
- Yasuhira Nagakubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 8,610,061
- Issue date Dec 17, 2013
- Honda Motor Co., Ltd.
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slider bearing for use with an apparatus comprising a vacuum chamber
- Patent number 8,598,524
- Issue date Dec 3, 2013
- FEI Company
- Johannes Antonius Hendricus Wilhelmus Gerardus Persoon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam device system comprising a particle beam device and an optical...
- Patent number 8,530,856
- Issue date Sep 10, 2013
- Carl Zeiss NTS Limited
- Bernd Spruck
- G02 - OPTICS
Information Patent Grant
Stage device
- Patent number 8,530,857
- Issue date Sep 10, 2013
- Advantest Corp.
- Yoshihisa Ooae
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Compact scanning electron microscope
- Patent number 8,309,921
- Issue date Nov 13, 2012
- FEI Company
- Martinus Petrus Maria Bierhoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interface, a method for observing an object within a non-vacuum env...
- Patent number 8,164,057
- Issue date Apr 24, 2012
- Dov Shachal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and a method
- Patent number 7,989,784
- Issue date Aug 2, 2011
- Twin Creeks Technologies, Inc.
- Hilton Glavish
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240055234
- Publication date Feb 15, 2024
- PSK INC.
- Kwang Bo SIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICE AND RETRACTABLE SEALING PART THEREOF
- Publication number 20220384157
- Publication date Dec 1, 2022
- Advanced Micro-Fabrication Equipment Inc. China
- Zhihao WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam System
- Publication number 20220223371
- Publication date Jul 14, 2022
- JEOL Ltd.
- Shuichi Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE PROTECTION DEVICE FOR SCANNING ELECTRON MICROSCOPY
- Publication number 20220216031
- Publication date Jul 7, 2022
- SHANGHAI NEMOR OPTOELECTRONIC TECHNOLOGY CO., LTD
- Xuan TANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS AND METHOD FOR CONTROLLING VACUUM PROCE...
- Publication number 20220051876
- Publication date Feb 17, 2022
- TOKYO ELECTRON LIMITED
- Kiyoshi Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS
- Publication number 20210391139
- Publication date Dec 16, 2021
- ASML NETHERLANDS B.V.
- Christiaan OTTEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PORTABLE VACUUM ANTIOXIDANT BAG
- Publication number 20210090847
- Publication date Mar 25, 2021
- Korea Institute of Science and Technology
- So Hee KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20200402760
- Publication date Dec 24, 2020
- Phenom-World Holding B.V.
- Karel Diederick VAN DER MAST
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM, OPTO-ELECTRO SIMULTANEOUS DETECTION S...
- Publication number 20190287760
- Publication date Sep 19, 2019
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Wei He
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE STAGE
- Publication number 20190287756
- Publication date Sep 19, 2019
- Phenom-World Holding B.V.
- Gerhardus Bernardus Stamsnijder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20190103245
- Publication date Apr 4, 2019
- Phenom-World Holding B.V.
- Karel Diederick VAN DER MAST
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPTIMIZING FLUID FLOW ACROSS A SAMPLE WITHIN AN ELECTRON...
- Publication number 20180294138
- Publication date Oct 11, 2018
- PROTOCHIPS, INC.
- Daniel Stephen Gardiner
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
INTEGRATED CIRCUIT ANALYSIS SYSTEMS AND METHODS WITH LOCALIZED EVAC...
- Publication number 20180197713
- Publication date Jul 12, 2018
- FEI Company
- Yakov Bobrov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample Stage
- Publication number 20170316913
- Publication date Nov 2, 2017
- Phenom-World Holding B.V.
- Gerhardus Bernardus Stamsnijder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device and Filter Member
- Publication number 20160071685
- Publication date Mar 10, 2016
- Hitachi High-Technologies Corporation
- Shinsuke Kawanishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBER FOR CHARGED PARTICLE BEAM DEVICE, CHARGED PARTICLE BEAM DEVI...
- Publication number 20150206705
- Publication date Jul 23, 2015
- Hitachi High-Technologies Corporation
- Noriyuki Sakuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENV...
- Publication number 20140361166
- Publication date Dec 11, 2014
- Dov Shachal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Specimen Positioning Device, Charged Particle Beam System, and Spec...
- Publication number 20140158907
- Publication date Jun 12, 2014
- JEOL Ltd.
- Mitsuru Hamochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE DEVICE FOR CHARGED PARTICLE BEAM
- Publication number 20130193343
- Publication date Aug 1, 2013
- Yasuhira Nagakubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET POSITIONING DEVICE, METHOD FOR DRIVING A TARGET POSITIONING...
- Publication number 20130094008
- Publication date Apr 18, 2013
- Jerry Johannes Martinus Peijster
- B82 - NANO-TECHNOLOGY
Information Patent Application
HEAT LIP SEAL FOR CRYOGENIC PROCESSING
- Publication number 20120241648
- Publication date Sep 27, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Jeffrey E. Krampert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENV...
- Publication number 20120241608
- Publication date Sep 27, 2012
- Dov Shachal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20120145899
- Publication date Jun 14, 2012
- Honda Motor Co., Ltd.
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stage device
- Publication number 20110204255
- Publication date Aug 25, 2011
- Yoshihisa Ooae
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPACT SCANNING ELECTRON MICROSCOPE
- Publication number 20110133083
- Publication date Jun 9, 2011
- FEI Company
- MART PETRUS MARIA BIERHOFF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND A METHOD
- Publication number 20100327190
- Publication date Dec 30, 2010
- TWIN CREEKS TECHNOLOGIES, INC.
- Hilton Glavish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Compact Scanning Electron Microscope
- Publication number 20100276592
- Publication date Nov 4, 2010
- FEI Company
- Johannes Antonius Hendricus Wilhelmus Gerardus Persoon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Compact Scanning Electron Microscope
- Publication number 20100230590
- Publication date Sep 16, 2010
- FEI Company
- Mart Petrus Maria Bierhoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM DEVICE SYSTEM COMPRISING A PARTICLE BEAM DEVICE AND AN OPTICAL...
- Publication number 20100224780
- Publication date Sep 9, 2010
- Bernd Spruck
- G02 - OPTICS
Information Patent Application
User Interface for an Electron Microscope
- Publication number 20100194874
- Publication date Aug 5, 2010
- FEI Company
- Mart Petrus Maria Bierhoff
- H01 - BASIC ELECTRIC ELEMENTS

Vacuum seals

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Vacuum processing apparatus and method for controlling vacuum proce...

Sample protection device for scanning electron microscopy

Replaceable module for a charged particle apparatus

Charged particle beam system

Portable vacuum antioxidant bag

Scanning electron microscope

Charged particle beam system, opto-electro simultaneous detection s...

Scanning electron microscope

Vacuum processing apparatus and mass spectrometer

Sample stage

Integrated circuit analysis systems and methods with localized evac...

Method for optimizing fluid flow across a sample within an electron...

User interface for an electron microscope

Diaphragm mounting member and charged particle beam device

Sample storage container, charged particle beam apparatus, and imag...

Sample base, charged particle beam device and sample observation me...

Method for optimizing fluid flow across a sample within an electron...

Charged particle beam device and filter member

Interface, a method for observing an object within a non-vacuum env...

Target positioning device, method for driving a target positioning...

User interface for an electron microscope

Interface, a method for observing an object within a non-vacuum env...

Sample device for charged particle beam

Scanning electron microscope

Slider bearing for use with an apparatus comprising a vacuum chamber

Beam device system comprising a particle beam device and an optical...

Stage device

Compact scanning electron microscope

Interface, a method for observing an object within a non-vacuum env...

Ion implantation apparatus and a method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

PLASMA PROCESSING DEVICE AND RETRACTABLE SEALING PART THEREOF

Charged Particle Beam System

SAMPLE PROTECTION DEVICE FOR SCANNING ELECTRON MICROSCOPY

VACUUM PROCESSING APPARATUS AND METHOD FOR CONTROLLING VACUUM PROCE...

REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS

PORTABLE VACUUM ANTIOXIDANT BAG

SCANNING ELECTRON MICROSCOPE

CHARGED PARTICLE BEAM SYSTEM, OPTO-ELECTRO SIMULTANEOUS DETECTION S...

SAMPLE STAGE

SCANNING ELECTRON MICROSCOPE

METHOD FOR OPTIMIZING FLUID FLOW ACROSS A SAMPLE WITHIN AN ELECTRON...

INTEGRATED CIRCUIT ANALYSIS SYSTEMS AND METHODS WITH LOCALIZED EVAC...

Sample Stage

Charged Particle Beam Device and Filter Member

MEMBER FOR CHARGED PARTICLE BEAM DEVICE, CHARGED PARTICLE BEAM DEVI...

INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENV...

Specimen Positioning Device, Charged Particle Beam System, and Spec...

SAMPLE DEVICE FOR CHARGED PARTICLE BEAM

TARGET POSITIONING DEVICE, METHOD FOR DRIVING A TARGET POSITIONING...

HEAT LIP SEAL FOR CRYOGENIC PROCESSING

INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENV...

SCANNING ELECTRON MICROSCOPE

Stage device

COMPACT SCANNING ELECTRON MICROSCOPE

ION IMPLANTATION APPARATUS AND A METHOD

Compact Scanning Electron Microscope

Compact Scanning Electron Microscope

BEAM DEVICE SYSTEM COMPRISING A PARTICLE BEAM DEVICE AND AN OPTICAL...

User Interface for an Electron Microscope