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Electric elements
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SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
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Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/30621
Vapour phase etching
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last 30 patents
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Direct growth of lateral III-V bipolar transistor on silicon substrate
Patent number
11,916,130
Issue date
Feb 27, 2024
International Business Machines Corporation
Kuen-Ting Shiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fin field-effect transistor device and method of forming the same
Patent number
11,908,920
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shih-Yao Lin
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor substrate, method for manufacturing semiconductor sub...
Patent number
11,894,272
Issue date
Feb 6, 2024
FILNEX INC.
Mitsuhiko Ogihara
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Substrate structuring methods
Patent number
11,837,680
Issue date
Dec 5, 2023
Applied Materials, Inc.
Han-Wen Chen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Nitride semiconductor device and fabrication method therefor
Patent number
11,777,024
Issue date
Oct 3, 2023
Rohm Co., Ltd.
Kenji Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor device manufacturing method
Patent number
11,756,793
Issue date
Sep 12, 2023
HITACHI HIGH-TECH CORPORATION
Yohei Ishii
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Dry non-plasma treatment system
Patent number
11,745,202
Issue date
Sep 5, 2023
Tokyo Electron Limited
Martin Kent
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Tunnel field-effect transistor with reduced subthreshold swing
Patent number
11,735,658
Issue date
Aug 22, 2023
International Business Machines Corporation
Xin Miao
H01 - BASIC ELECTRIC ELEMENTS
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Designer atomic layer etching
Patent number
11,721,558
Issue date
Aug 8, 2023
Lam Research Corporation
Keren Jacobs Kanarik
H01 - BASIC ELECTRIC ELEMENTS
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Gas phase etch with controllable etch selectivity of metals
Patent number
11,715,643
Issue date
Aug 1, 2023
Tokyo Electron Limited
Subhadeep Kal
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods of fabricating semiconductor structures with two-step etching
Patent number
11,682,713
Issue date
Jun 20, 2023
Vanguard International Semiconductor Corporation
Yung-Fung Lin
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Resistor and resistor-transistor-logic circuit with GaN structure a...
Patent number
11,631,664
Issue date
Apr 18, 2023
United Microelectronics Corp.
Kuo-Hsing Lee
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Gas splitting by time average injection into different zones by fas...
Patent number
11,610,759
Issue date
Mar 21, 2023
Applied Materials, Inc.
James Rogers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method for dry etching compound materials
Patent number
11,605,542
Issue date
Mar 14, 2023
Tokyo Electron Limited
Peter Ventzek
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Tunnel field-effect transistor with reduced subthreshold swing
Patent number
11,575,042
Issue date
Feb 7, 2023
International Business Machines Corporation
Xin Miao
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Non-planar transistors with channel regions having varying widths
Patent number
11,569,231
Issue date
Jan 31, 2023
Intel Corporation
Stephen D Snyder
H01 - BASIC ELECTRIC ELEMENTS
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Low turn-on voltage GaN diodes having anode metal with consistent c...
Patent number
11,557,682
Issue date
Jan 17, 2023
Xidian University
Jing Ning
H01 - BASIC ELECTRIC ELEMENTS
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Methods for forming fluorine doped high electron mobility transisto...
Patent number
11,545,567
Issue date
Jan 3, 2023
Vanguard International Semiconductor Corporation
Chih-Yen Chen
H01 - BASIC ELECTRIC ELEMENTS
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Method of forming interconnect for semiconductor device
Patent number
11,508,617
Issue date
Nov 22, 2022
Applied Materials, Inc.
Hao Jiang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Apparatus and methods for selectively etching silicon oxide films
Patent number
11,437,241
Issue date
Sep 6, 2022
ASM IP Holding B.V.
Fei Wang
H01 - BASIC ELECTRIC ELEMENTS
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Method for selective etching of nanostructures
Patent number
11,424,130
Issue date
Aug 23, 2022
ALIXLABS AB
Md Sabbir Ahmed Khan
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Substrate structuring methods
Patent number
11,362,235
Issue date
Jun 14, 2022
Applied Materials, Inc.
Han-Wen Chen
H01 - BASIC ELECTRIC ELEMENTS
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Transistor with polarization layer superlattice for target threshol...
Patent number
11,329,132
Issue date
May 10, 2022
Intel Corporation
Marko Radosavljevic
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Etching method and plasma processing apparatus
Patent number
11,315,793
Issue date
Apr 26, 2022
Tokyo Electron Limited
Gen Tamamushi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Fin field-effect transistor device and method of forming the same
Patent number
11,309,403
Issue date
Apr 19, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Shih-Yao Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective gas etching for self-aligned pattern transfer
Patent number
11,302,533
Issue date
Apr 12, 2022
Tessera, Inc.
John Christopher Arnold
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device and method of manufacturing the device
Patent number
11,257,918
Issue date
Feb 22, 2022
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Yusuke Kanda
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Process gas supply apparatus and wafer treatment system including t...
Patent number
11,244,837
Issue date
Feb 8, 2022
Semes Co., Ltd.
Ki Yung Lee
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Designer atomic layer etching
Patent number
11,239,094
Issue date
Feb 1, 2022
Lam Research Corporation
Keren Jacobs Kanarik
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for controlling electrostatic chuck and plasma processing ap...
Patent number
11,227,773
Issue date
Jan 18, 2022
Tokyo Electron Limited
Gen Tamamushi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SELECTIVE GAS PHASE ETCH OF SILICON GERMANIUM ALLOYS
Publication number
20240128088
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Toshiki KANAKI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR SUBSTRATE, METHOD FOR MANUFACTURING SEMICONDUCTOR SUB...
Publication number
20240120238
Publication date
Apr 11, 2024
FILNEX INC.
Mitsuhiko OGIHARA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
GaN TRENCH MOSFET AND FABRICATION METHOD
Publication number
20240021724
Publication date
Jan 18, 2024
Sixpoint Materials, Inc.
TADAO HASHIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NITRIDE SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREFOR
Publication number
20230411508
Publication date
Dec 21, 2023
ROHM CO., LTD.
Kenji Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE PROVIDING APPARATUS, SYSTEM INCLUDING THE SAME, AND METHO...
Publication number
20230402983
Publication date
Dec 14, 2023
SEMES CO., LTD.
Yoonseok Choi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
LIGHT EMITTING DIODE DEVICE AND METHOD OF MANUFACTURING THE SAME
Publication number
20230387096
Publication date
Nov 30, 2023
SAMSUNG DISPLAY CO., LTD.
Su Bin BAE
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
HIGH ASPECT RATIO TAPER IMPROVEMENT USING DIRECTIONAL DEPOSITION
Publication number
20230257872
Publication date
Aug 17, 2023
Applied Materials, Inc.
Armin Saeedi Vahdat
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
RESISTOR AND RESISTOR-TRANSISTOR-LOGIC CIRCUIT WITH GAN STRUCTURE A...
Publication number
20230223399
Publication date
Jul 13, 2023
UNITED MICROELECTRONICS CORP.
Kuo-Hsing Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESISTOR AND RESISTOR-TRANSISTOR-LOGIC CIRCUIT WITH GAN STRUCTURE A...
Publication number
20230223400
Publication date
Jul 13, 2023
UNITED MICROELECTRONICS CORP.
Kuo-Hsing Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
Publication number
20230187490
Publication date
Jun 15, 2023
DENSO CORPORATION
SHINICHI HOSHI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
ETCH PROCESS AND A PROCESSING ASSEMBLY
Publication number
20230170221
Publication date
Jun 1, 2023
ASM IP HOLDING, B.V.
Charles Dezelah
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
HIGH ELECTRON MOBILITY TRANSISTOR AND FABRICATING METHOD OF THE SAME
Publication number
20230112917
Publication date
Apr 13, 2023
UNITED MICROELECTRONICS CORP.
Ming-Hua Chang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
Publication number
20230081182
Publication date
Mar 16, 2023
SEMES CO., LTD.
Yoon Seok CHOI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF FORMING INTERCONNECT FOR SEMICONDUCTOR DEVICE
Publication number
20230045689
Publication date
Feb 9, 2023
Applied Materials, Inc.
Hao Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Devices with Uniform Gate Regions
Publication number
20230027676
Publication date
Jan 26, 2023
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Chia-Chien Kuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR SELECTIVELY ETCHING SILICON OXIDE FILMS
Publication number
20220384203
Publication date
Dec 1, 2022
ASM IP HOLDING B.V.
Fei Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTILAYER SEMICONDUCTOR STRUCTURE, SEMICONDUCTOR DEVICE, AND METHO...
Publication number
20220328321
Publication date
Oct 13, 2022
Sumitomo Electric Industries, Ltd.
Takahide HIRASAKI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METAL REMOVAL METHOD, DRY ETCHING METHOD, AND PRODUCTION METHOD FOR...
Publication number
20220325418
Publication date
Oct 13, 2022
SHOWA DENKO K.K.
Kazuma MATSUI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE STRUCTURING METHODS
Publication number
20220278248
Publication date
Sep 1, 2022
Applied Materials, Inc.
Han-Wen CHEN
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD FOR SELECTIVE ETCHING OF NANOSTRUCTURES
Publication number
20220262642
Publication date
Aug 18, 2022
ALIXLABS AB
MD Sabbir KHAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SELECTIVE GAS ETCHING FOR SELF-ALIGNED PATTERN TRANSFER
Publication number
20220262636
Publication date
Aug 18, 2022
TESSERA LLC
John Christopher Arnold
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Fin Field-Effect Transistor Device and Method of Forming the Same
Publication number
20220238696
Publication date
Jul 28, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Yao Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND SYSTEM
Publication number
20220223427
Publication date
Jul 14, 2022
TOKYO ELECTRON LIMITED
Gen TAMAMUSHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH-THRESHOLD-VOLTAGE NORMALLY-OFF HIGH-ELECTRON-MOBILITY TRANSIST...
Publication number
20220209000
Publication date
Jun 30, 2022
DALIAN UNIVERSITY OF TECHNOLOGY
Huolin HUANG
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
HIGH-LINEARITY GAN-BASED MILLIMETER WAVE DEVICE AND PREPARATION MET...
Publication number
20220209002
Publication date
Jun 30, 2022
ZHONGSHAN INSTITUTE OF MODERN INDUSTRIAL TECHNOLOGY, SOUTH CHINA UNIVERSITY O...
Hong WANG
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHODS AND APPARATUS FOR IN-SITU PROTECTION OF ETCHED SURFACES
Publication number
20220181160
Publication date
Jun 9, 2022
Applied Materials, Inc.
Shiva RAI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Method for Controlling Electrostatic Attractor and Plasma Processin...
Publication number
20220093407
Publication date
Mar 24, 2022
TOKYO ELECTRON LIMITED
Gen TAMAMUSHI
B08 - CLEANING
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Patent Application
RESISTOR AND RESISTOR-TRANSISTOR-LOGIC CIRCUIT WITH GAN STRUCTURE A...
Publication number
20220093584
Publication date
Mar 24, 2022
UNITED MICROELECTRONICS CORP.
Kuo-Hsing Lee
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
DESIGNER ATOMIC LAYER ETCHING
Publication number
20220093413
Publication date
Mar 24, 2022
LAM RESEARCH CORPORATION
Keren Jacobs Kanarik
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EPITAXIAL HIGH-K ETCH STOP LAYER FOR BACKSIDE REVEAL INTEGRATION
Publication number
20220093466
Publication date
Mar 24, 2022
TOKYO ELECTRON LIMITED
Robert D. Clark
H01 - BASIC ELECTRIC ELEMENTS