Vapour phase etching

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H01L21/30621

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/30621Vapour phase etching

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,170,206
- Issue date Dec 17, 2024
- Kokusai Electric Corporation
- Arito Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Resistor and resistor-transistor-logic circuit with GaN structure a...
- Patent number 12,132,043
- Issue date Oct 29, 2024
- United Microelectronics Corp.
- Kuo-Hsing Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resistor and resistor-transistor-logic circuit with GaN structure a...
- Patent number 12,119,342
- Issue date Oct 15, 2024
- United Microelectronics Corp.
- Kuo-Hsing Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and system
- Patent number 12,087,591
- Issue date Sep 10, 2024
- Tokyo Electron Limited
- Gen Tamamushi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nitride semiconductor device
- Patent number 12,087,762
- Issue date Sep 10, 2024
- Panasonic Holdings Corporation
- Daisuke Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer etch and ion beam etch patterning
- Patent number 12,080,562
- Issue date Sep 3, 2024
- Lam Research Corporation
- Samantha Siamhwa Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High electron mobility transistor and fabricating method of the same
- Patent number 12,002,681
- Issue date Jun 4, 2024
- United Microelectronics Corp.
- Ming-Hua Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High aspect ratio taper improvement using directional deposition
- Patent number 11,987,879
- Issue date May 21, 2024
- Applied Materials, Inc.
- Armin Saeedi Vahdat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Direct growth of lateral III-V bipolar transistor on silicon substrate
- Patent number 11,916,130
- Issue date Feb 27, 2024
- International Business Machines Corporation
- Kuen-Ting Shiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fin field-effect transistor device and method of forming the same
- Patent number 11,908,920
- Issue date Feb 20, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Yao Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate, method for manufacturing semiconductor sub...
- Patent number 11,894,272
- Issue date Feb 6, 2024
- FILNEX INC.
- Mitsuhiko Ogihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate structuring methods
- Patent number 11,837,680
- Issue date Dec 5, 2023
- Applied Materials, Inc.
- Han-Wen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nitride semiconductor device and fabrication method therefor
- Patent number 11,777,024
- Issue date Oct 3, 2023
- Rohm Co., Ltd.
- Kenji Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 11,756,793
- Issue date Sep 12, 2023
- HITACHI HIGH-TECH CORPORATION
- Yohei Ishii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dry non-plasma treatment system
- Patent number 11,745,202
- Issue date Sep 5, 2023
- Tokyo Electron Limited
- Martin Kent
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tunnel field-effect transistor with reduced subthreshold swing
- Patent number 11,735,658
- Issue date Aug 22, 2023
- International Business Machines Corporation
- Xin Miao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Designer atomic layer etching
- Patent number 11,721,558
- Issue date Aug 8, 2023
- Lam Research Corporation
- Keren Jacobs Kanarik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas phase etch with controllable etch selectivity of metals
- Patent number 11,715,643
- Issue date Aug 1, 2023
- Tokyo Electron Limited
- Subhadeep Kal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of fabricating semiconductor structures with two-step etching
- Patent number 11,682,713
- Issue date Jun 20, 2023
- Vanguard International Semiconductor Corporation
- Yung-Fung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resistor and resistor-transistor-logic circuit with GaN structure a...
- Patent number 11,631,664
- Issue date Apr 18, 2023
- United Microelectronics Corp.
- Kuo-Hsing Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas splitting by time average injection into different zones by fas...
- Patent number 11,610,759
- Issue date Mar 21, 2023
- Applied Materials, Inc.
- James Rogers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for dry etching compound materials
- Patent number 11,605,542
- Issue date Mar 14, 2023
- Tokyo Electron Limited
- Peter Ventzek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tunnel field-effect transistor with reduced subthreshold swing
- Patent number 11,575,042
- Issue date Feb 7, 2023
- International Business Machines Corporation
- Xin Miao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-planar transistors with channel regions having varying widths
- Patent number 11,569,231
- Issue date Jan 31, 2023
- Intel Corporation
- Stephen D Snyder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low turn-on voltage GaN diodes having anode metal with consistent c...
- Patent number 11,557,682
- Issue date Jan 17, 2023
- Xidian University
- Jing Ning
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming fluorine doped high electron mobility transisto...
- Patent number 11,545,567
- Issue date Jan 3, 2023
- Vanguard International Semiconductor Corporation
- Chih-Yen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming interconnect for semiconductor device
- Patent number 11,508,617
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Hao Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for selectively etching silicon oxide films
- Patent number 11,437,241
- Issue date Sep 6, 2022
- ASM IP Holding B.V.
- Fei Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for selective etching of nanostructures
- Patent number 11,424,130
- Issue date Aug 23, 2022
- ALIXLABS AB
- Md Sabbir Ahmed Khan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate structuring methods
- Patent number 11,362,235
- Issue date Jun 14, 2022
- Applied Materials, Inc.
- Han-Wen Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DECIVE AND PRODUCTION METHOD THEREFOR
- Publication number 20240332361
- Publication date Oct 3, 2024
- Toyoda Gosei Co., Ltd.
- Kimiyasu IDE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH ELECTRON MOBILITY TRANSISTOR AND FABRICATING METHOD OF THE SAME
- Publication number 20240222133
- Publication date Jul 4, 2024
- UNITED MICROELECTRONICS CORP.
- Ming-Hua Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW ALUMINUM CONCENTRATION ALUMINUM GALLIUM NITRIDE INTERLAYER FOR...
- Publication number 20240204091
- Publication date Jun 20, 2024
- Intel Corporation
- Heli Vora
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIN FIELD-EFFECT TRANSISTOR DEVICE AND METHOD OF FORMING THE SAME
- Publication number 20240154025
- Publication date May 9, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Yao Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE GAS PHASE ETCH OF SILICON GERMANIUM ALLOYS
- Publication number 20240128088
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Toshiki KANAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE, METHOD FOR MANUFACTURING SEMICONDUCTOR SUB...
- Publication number 20240120238
- Publication date Apr 11, 2024
- FILNEX INC.
- Mitsuhiko OGIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GaN TRENCH MOSFET AND FABRICATION METHOD
- Publication number 20240021724
- Publication date Jan 18, 2024
- Sixpoint Materials, Inc.
- TADAO HASHIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NITRIDE SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREFOR
- Publication number 20230411508
- Publication date Dec 21, 2023
- ROHM CO., LTD.
- Kenji Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PROVIDING APPARATUS, SYSTEM INCLUDING THE SAME, AND METHO...
- Publication number 20230402983
- Publication date Dec 14, 2023
- SEMES CO., LTD.
- Yoonseok Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT EMITTING DIODE DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20230387096
- Publication date Nov 30, 2023
- SAMSUNG DISPLAY CO., LTD.
- Su Bin BAE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH ASPECT RATIO TAPER IMPROVEMENT USING DIRECTIONAL DEPOSITION
- Publication number 20230257872
- Publication date Aug 17, 2023
- Applied Materials, Inc.
- Armin Saeedi Vahdat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESISTOR AND RESISTOR-TRANSISTOR-LOGIC CIRCUIT WITH GAN STRUCTURE A...
- Publication number 20230223399
- Publication date Jul 13, 2023
- UNITED MICROELECTRONICS CORP.
- Kuo-Hsing Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESISTOR AND RESISTOR-TRANSISTOR-LOGIC CIRCUIT WITH GAN STRUCTURE A...
- Publication number 20230223400
- Publication date Jul 13, 2023
- UNITED MICROELECTRONICS CORP.
- Kuo-Hsing Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
- Publication number 20230187490
- Publication date Jun 15, 2023
- DENSO CORPORATION
- SHINICHI HOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCH PROCESS AND A PROCESSING ASSEMBLY
- Publication number 20230170221
- Publication date Jun 1, 2023
- ASM IP HOLDING, B.V.
- Charles Dezelah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH ELECTRON MOBILITY TRANSISTOR AND FABRICATING METHOD OF THE SAME
- Publication number 20230112917
- Publication date Apr 13, 2023
- UNITED MICROELECTRONICS CORP.
- Ming-Hua Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
- Publication number 20230081182
- Publication date Mar 16, 2023
- SEMES CO., LTD.
- Yoon Seok CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING INTERCONNECT FOR SEMICONDUCTOR DEVICE
- Publication number 20230045689
- Publication date Feb 9, 2023
- Applied Materials, Inc.
- Hao Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Devices with Uniform Gate Regions
- Publication number 20230027676
- Publication date Jan 26, 2023
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Chia-Chien Kuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR SELECTIVELY ETCHING SILICON OXIDE FILMS
- Publication number 20220384203
- Publication date Dec 1, 2022
- ASM IP HOLDING B.V.
- Fei Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTILAYER SEMICONDUCTOR STRUCTURE, SEMICONDUCTOR DEVICE, AND METHO...
- Publication number 20220328321
- Publication date Oct 13, 2022
- Sumitomo Electric Industries, Ltd.
- Takahide HIRASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL REMOVAL METHOD, DRY ETCHING METHOD, AND PRODUCTION METHOD FOR...
- Publication number 20220325418
- Publication date Oct 13, 2022
- SHOWA DENKO K.K.
- Kazuma MATSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE STRUCTURING METHODS
- Publication number 20220278248
- Publication date Sep 1, 2022
- Applied Materials, Inc.
- Han-Wen CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR SELECTIVE ETCHING OF NANOSTRUCTURES
- Publication number 20220262642
- Publication date Aug 18, 2022
- ALIXLABS AB
- MD Sabbir KHAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELECTIVE GAS ETCHING FOR SELF-ALIGNED PATTERN TRANSFER
- Publication number 20220262636
- Publication date Aug 18, 2022
- TESSERA LLC
- John Christopher Arnold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fin Field-Effect Transistor Device and Method of Forming the Same
- Publication number 20220238696
- Publication date Jul 28, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Yao Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND SYSTEM
- Publication number 20220223427
- Publication date Jul 14, 2022
- TOKYO ELECTRON LIMITED
- Gen TAMAMUSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-THRESHOLD-VOLTAGE NORMALLY-OFF HIGH-ELECTRON-MOBILITY TRANSIST...
- Publication number 20220209000
- Publication date Jun 30, 2022
- DALIAN UNIVERSITY OF TECHNOLOGY
- Huolin HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-LINEARITY GAN-BASED MILLIMETER WAVE DEVICE AND PREPARATION MET...
- Publication number 20220209002
- Publication date Jun 30, 2022
- ZHONGSHAN INSTITUTE OF MODERN INDUSTRIAL TECHNOLOGY, SOUTH CHINA UNIVERSITY O...
- Hong WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR IN-SITU PROTECTION OF ETCHED SURFACES
- Publication number 20220181160
- Publication date Jun 9, 2022
- Applied Materials, Inc.
- Shiva RAI
- H01 - BASIC ELECTRIC ELEMENTS

Vapour phase etching

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of processing substrate, method of manufacturing semiconduct...

Resistor and resistor-transistor-logic circuit with GaN structure a...

Resistor and resistor-transistor-logic circuit with GaN structure a...

Plasma processing apparatus and system

Nitride semiconductor device

Atomic layer etch and ion beam etch patterning

High electron mobility transistor and fabricating method of the same

High aspect ratio taper improvement using directional deposition

Direct growth of lateral III-V bipolar transistor on silicon substrate

Fin field-effect transistor device and method of forming the same

Semiconductor substrate, method for manufacturing semiconductor sub...

Substrate structuring methods

Nitride semiconductor device and fabrication method therefor

Semiconductor device manufacturing method

Dry non-plasma treatment system

Tunnel field-effect transistor with reduced subthreshold swing

Designer atomic layer etching

Gas phase etch with controllable etch selectivity of metals

Methods of fabricating semiconductor structures with two-step etching

Resistor and resistor-transistor-logic circuit with GaN structure a...

Gas splitting by time average injection into different zones by fas...

Method for dry etching compound materials

Tunnel field-effect transistor with reduced subthreshold swing

Non-planar transistors with channel regions having varying widths

Low turn-on voltage GaN diodes having anode metal with consistent c...

Methods for forming fluorine doped high electron mobility transisto...

Method of forming interconnect for semiconductor device

Apparatus and methods for selectively etching silicon oxide films

Method for selective etching of nanostructures

Substrate structuring methods

Patents Applicationslast 30 patents

SEMICONDUCTOR DECIVE AND PRODUCTION METHOD THEREFOR

HIGH ELECTRON MOBILITY TRANSISTOR AND FABRICATING METHOD OF THE SAME

LOW ALUMINUM CONCENTRATION ALUMINUM GALLIUM NITRIDE INTERLAYER FOR...

FIN FIELD-EFFECT TRANSISTOR DEVICE AND METHOD OF FORMING THE SAME

SELECTIVE GAS PHASE ETCH OF SILICON GERMANIUM ALLOYS

SEMICONDUCTOR SUBSTRATE, METHOD FOR MANUFACTURING SEMICONDUCTOR SUB...

GaN TRENCH MOSFET AND FABRICATION METHOD

NITRIDE SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREFOR

MICROWAVE PROVIDING APPARATUS, SYSTEM INCLUDING THE SAME, AND METHO...

LIGHT EMITTING DIODE DEVICE AND METHOD OF MANUFACTURING THE SAME

HIGH ASPECT RATIO TAPER IMPROVEMENT USING DIRECTIONAL DEPOSITION

RESISTOR AND RESISTOR-TRANSISTOR-LOGIC CIRCUIT WITH GAN STRUCTURE A...

RESISTOR AND RESISTOR-TRANSISTOR-LOGIC CIRCUIT WITH GAN STRUCTURE A...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME

ETCH PROCESS AND A PROCESSING ASSEMBLY

HIGH ELECTRON MOBILITY TRANSISTOR AND FABRICATING METHOD OF THE SAME

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE

METHOD OF FORMING INTERCONNECT FOR SEMICONDUCTOR DEVICE

Semiconductor Devices with Uniform Gate Regions

APPARATUS AND METHODS FOR SELECTIVELY ETCHING SILICON OXIDE FILMS

MULTILAYER SEMICONDUCTOR STRUCTURE, SEMICONDUCTOR DEVICE, AND METHO...

METAL REMOVAL METHOD, DRY ETCHING METHOD, AND PRODUCTION METHOD FOR...

SUBSTRATE STRUCTURING METHODS

METHOD FOR SELECTIVE ETCHING OF NANOSTRUCTURES

SELECTIVE GAS ETCHING FOR SELF-ALIGNED PATTERN TRANSFER

Fin Field-Effect Transistor Device and Method of Forming the Same

PLASMA PROCESSING APPARATUS AND SYSTEM

HIGH-THRESHOLD-VOLTAGE NORMALLY-OFF HIGH-ELECTRON-MOBILITY TRANSIST...

HIGH-LINEARITY GAN-BASED MILLIMETER WAVE DEVICE AND PREPARATION MET...

METHODS AND APPARATUS FOR IN-SITU PROTECTION OF ETCHED SURFACES