Variangle incidence arrangement

Industry

CPC
G01N2021/214

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Parent Industries

GPHYSICS G01Measuring instruments G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

Current Industry

G01N2021/214Variangle incidence arrangement

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for determining properties of a sample by ellipsometry
- Patent number 11,959,852
- Issue date Apr 16, 2024
- Park Systems GmbH
- Matthias Duwe
- G01 - MEASURING TESTING
Information Patent Grant
Measurement system capable of adjusting AOI, AOI spread and azimuth...
- Patent number 11,624,699
- Issue date Apr 11, 2023
- Samsung Electronics Co., Ltd.
- Jaehwang Jung
- G01 - MEASURING TESTING
Information Patent Grant
Pupil ellipsometry measurement apparatus and method and method of f...
- Patent number 11,604,136
- Issue date Mar 14, 2023
- Samsung Electronics Co., Ltd.
- Jaehwang Jung
- G02 - OPTICS
Information Patent Grant
System and method for use in high spatial resolution ellipsometry
- Patent number 11,262,293
- Issue date Mar 1, 2022
- Ronen Rapaport
- G01 - MEASURING TESTING
Information Patent Grant
Automatic determination of fourier harmonic order for computation o...
- Patent number 10,481,088
- Issue date Nov 19, 2019
- KLA-Tencor Corporation
- Mark Backues
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of determining refractive indices and surface properties of...
- Patent number 10,466,171
- Issue date Nov 5, 2019
- J. A. Woollam Co., Inc.
- Ronald A. Synowicki
- G01 - MEASURING TESTING
Information Patent Grant
Variable resolution spectrometer
- Patent number 10,386,233
- Issue date Aug 20, 2019
- KLA-Tencor Corporation
- Mark Allen Neil
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for measuring large-area and massive scattered fi...
- Patent number 9,785,047
- Issue date Oct 10, 2017
- Huazhong University of Science & Technology
- Shiyuan Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for measuring pretilt angle of liquid crystal
- Patent number 9,766,061
- Issue date Sep 19, 2017
- Samsung Display Co., Ltd.
- Sejoon Oh
- G02 - OPTICS
Information Patent Grant
Multiple angles of incidence semiconductor metrology systems and me...
- Patent number 9,310,290
- Issue date Apr 12, 2016
- KLA-Tencor Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Grant
Ellipsometer for detecting surface
- Patent number 9,267,879
- Issue date Feb 23, 2016
- Samsung Electronics Co., Ltd.
- Kang-woong Ko
- G01 - MEASURING TESTING
Information Patent Grant
Multi-analyzer angle spectroscopic ellipsometry
- Patent number 9,046,474
- Issue date Jun 2, 2015
- KLA-Tencor Corporation
- Hidong Kwak
- G01 - MEASURING TESTING
Information Patent Grant
Multi-analyzer angle spectroscopic ellipsometry
- Patent number 9,007,583
- Issue date Apr 14, 2015
- KLA-Tencor Corporation
- Hidong Kwak
- G01 - MEASURING TESTING
Information Patent Grant
Scatterometry measurement of asymmetric structures
- Patent number 8,525,993
- Issue date Sep 3, 2013
- Nanometrics Incorporated
- Silvio J. Rabello
- G01 - MEASURING TESTING
Information Patent Grant
Measurement of critical dimension
- Patent number 8,456,639
- Issue date Jun 4, 2013
- KLA-Tencor Corporation
- Shankar Krishnan
- G01 - MEASURING TESTING
Information Patent Grant
Light focusing unit and spectrum measuring apparatus having the same
- Patent number 8,446,583
- Issue date May 21, 2013
- Samsung Electronics Co., Ltd.
- Hyun-Jong Kim
- G01 - MEASURING TESTING
Information Patent Grant
Fast sample height, AOI and POI alignment in mapping ellipsometer o...
- Patent number 8,436,994
- Issue date May 7, 2013
- J. A. Woollam Co., Inc.
- Martin M. Liphardt
- G01 - MEASURING TESTING
Information Patent Grant
Spatially precise optical treatment for measurement of targets thro...
- Patent number 8,159,671
- Issue date Apr 17, 2012
- NovaSolar Holdings Limited
- Fang Huang
- G01 - MEASURING TESTING
Information Patent Grant
Multiple measurement techniques including focused beam scatterometr...
- Patent number 8,139,232
- Issue date Mar 20, 2012
- Rudolph Technologies, Inc.
- Robert Gregory Wolf
- G01 - MEASURING TESTING
Information Patent Grant
Spatially precise optical treatment or measurement of targets throu...
- Patent number 8,040,510
- Issue date Oct 18, 2011
- NovaSolar Holdings Limited
- Fang Huang
- G01 - MEASURING TESTING
Information Patent Grant
Fast sample height, AOI and POI alignment in mapping ellipsometer o...
- Patent number 7,872,751
- Issue date Jan 18, 2011
- J. A. Woollam Co., Inc.
- Martin M. Liphardt
- G01 - MEASURING TESTING
Information Patent Grant
Automated ellipsometer and the like systems
- Patent number 7,746,472
- Issue date Jun 29, 2010
- J. A. Woollam Co., Inc.
- Blaine D. Johs
- G01 - MEASURING TESTING
Information Patent Grant
Flying mobile on-board ellipsometer, polarimeter, reflectometer and...
- Patent number 7,746,471
- Issue date Jun 29, 2010
- J. A. Woollam Co., Inc.
- Blaine D. Johs
- G01 - MEASURING TESTING
Information Patent Grant
Measuring a surface characteristic
- Patent number 7,742,168
- Issue date Jun 22, 2010
- Surfoptic Limited
- Nick Elton
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for three-dimensionally determining the refractiv...
- Patent number 7,612,879
- Issue date Nov 3, 2009
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Joachim Stumpe
- G01 - MEASURING TESTING
Information Patent Grant
Automated ellipsometer and the like systems
- Patent number 7,505,134
- Issue date Mar 17, 2009
- J. A. Woollam Co., Inc.
- Blaine D. Johs
- G01 - MEASURING TESTING
Information Patent Grant
Probe beam profile modulated optical reflectance system and methods
- Patent number 7,502,104
- Issue date Mar 10, 2009
- KLA-Tencor Corporation
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for ellipsometric measurements with high spati...
- Patent number 7,324,209
- Issue date Jan 29, 2008
- Zetetic Institute
- Henry Allen Hill
- G01 - MEASURING TESTING
Information Patent Grant
Flying mobile on-board ellipsometer, polarimeter, reflectometer and...
- Patent number 7,277,171
- Issue date Oct 2, 2007
- J.A. Woollan Co., Inc.
- Blaine D. Johs
- G01 - MEASURING TESTING
Information Patent Grant
Achromatic spectroscopic ellipsometer with high spatial resolution
- Patent number 7,184,145
- Issue date Feb 27, 2007
- Horiba Jobin Yvon, Inc.
- Pascal Amary
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DETERMINING AND RECONSTRUCTING A SHAPE AND A MATERIAL PROPERTY OF A...
- Publication number 20240369352
- Publication date Nov 7, 2024
- Meta Platforms Technologies, LLC
- Salim BOUTAMI
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
DEVICES AND METHODS FOR DETERMINING POLARIZATION CHARACTERISTICS FR...
- Publication number 20240240986
- Publication date Jul 18, 2024
- Arizona Board of Regents on behalf of The University of Arizona
- Meredith Kupinski
- G01 - MEASURING TESTING
Information Patent Application
MUELLER MATRIX ELLIPSOMETER
- Publication number 20240011894
- Publication date Jan 11, 2024
- Government of the United States of America, as Represented by the Secretary o...
- Thomas Avery Germer
- G01 - MEASURING TESTING
Information Patent Application
PUPIL ELLIPSOMETRY MEASUREMENT APPARATUS AND METHOD AND METHOD OF F...
- Publication number 20230204493
- Publication date Jun 29, 2023
- Samsung Electronics Co., Ltd.
- Jaehwang JUNG
- G01 - MEASURING TESTING
Information Patent Application
PUPIL ELLIPSOMETRY MEASUREMENT APPARATUS AND METHOD AND METHOD OF F...
- Publication number 20220074848
- Publication date Mar 10, 2022
- Samsung Electronics Co., Ltd.
- Jaehwang JUNG
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DETERMINING PROPERTIES OF A SAMPLE BY ELLIPSOMETRY
- Publication number 20220065774
- Publication date Mar 3, 2022
- Accurion GmbH
- Matthias Duwe
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR USE IN HIGH SPATIAL RESOLUTION ELLIPSOMETRY
- Publication number 20200025678
- Publication date Jan 23, 2020
- Yissum Research Development Company of the Hebrew University of Jerusalem Ltd.
- Ronen RAPAPORT
- G01 - MEASURING TESTING
Information Patent Application
VARIABLE RESOLUTION SPECTROMETER
- Publication number 20190212255
- Publication date Jul 11, 2019
- KLA-Tencor Corporation
- Mark Allen Neil
- G01 - MEASURING TESTING
Information Patent Application
MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND ME...
- Publication number 20150285735
- Publication date Oct 8, 2015
- KLA-Tencor Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Application
MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND ME...
- Publication number 20140375981
- Publication date Dec 25, 2014
- KLA-Tencor Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Application
AUTOMATIC DETERMINATION OF FOURIER HARMONIC ORDER FOR COMPUTATION O...
- Publication number 20140358476
- Publication date Dec 4, 2014
- Mark Backues
- G01 - MEASURING TESTING
Information Patent Application
MULTI-ANALYZER ANGLE SPECTROSCOPIC ELLIPSOMETRY
- Publication number 20130010296
- Publication date Jan 10, 2013
- KLA-Tencor Corporation
- Hidong Kwak
- G01 - MEASURING TESTING
Information Patent Application
Measurement of Critical Dimension
- Publication number 20130003068
- Publication date Jan 3, 2013
- KLA-Tencor Corporation
- Shankar Krishnan
- G01 - MEASURING TESTING
Information Patent Application
SPATIALLY PRECISE OPTICAL TREATMENT FOR MEASUREMENT OF TARGETS THRO...
- Publication number 20120033216
- Publication date Feb 9, 2012
- NovaSolar Holdings Limited
- Fang Huang
- G01 - MEASURING TESTING
Information Patent Application
Fast sample height, AOI and POI alignment in mapping ellipsometer o...
- Publication number 20110109906
- Publication date May 12, 2011
- Martin M. Liphardt
- G01 - MEASURING TESTING
Information Patent Application
Scatterometry Measurement of Asymmetric Structures
- Publication number 20110080585
- Publication date Apr 7, 2011
- Nanometrics Incorporated
- Silvio J. Rabello
- G01 - MEASURING TESTING
Information Patent Application
Light focusing unit and spectrum measuring apparatus having the same
- Publication number 20100277729
- Publication date Nov 4, 2010
- Hyun-Jong Kim
- G01 - MEASURING TESTING
Information Patent Application
Spatially precise optical treatment or measurement of targets throu...
- Publication number 20100045983
- Publication date Feb 25, 2010
- OPTISOLAR, INC., A DELAWARE CORPORATION
- Fang Huang
- G01 - MEASURING TESTING
Information Patent Application
MULTIPLE MEASUREMENT TECHNIQUES INCLUDING FOCUSED BEAM SCATTEROMETR...
- Publication number 20090279090
- Publication date Nov 12, 2009
- Robert Gregory Wolf
- G01 - MEASURING TESTING
Information Patent Application
Fast sample height, AOI and POI alignment in mapping ellipsometer o...
- Publication number 20090103093
- Publication date Apr 23, 2009
- Martin M. Liphardt
- G01 - MEASURING TESTING
Information Patent Application
Probe beam profile modulated optical reflectance system and methods
- Publication number 20080036998
- Publication date Feb 14, 2008
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Application
Measuring a surface characteristic
- Publication number 20070153285
- Publication date Jul 5, 2007
- Nick Elton
- G01 - MEASURING TESTING
Information Patent Application
Method and device for three-dimensionally determining the refractiv...
- Publication number 20070097356
- Publication date May 3, 2007
- Fraunhofer-Gesellschaft zur Förderung der angewand ten Forschung e.V.
- Joachim Stumpe
- G01 - MEASURING TESTING
Information Patent Application
Achromatic spectroscopie ellipsometer with high spatial resolution
- Publication number 20060164642
- Publication date Jul 27, 2006
- Pascal Amary
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for ellipsometric measurements with high spati...
- Publication number 20050111006
- Publication date May 26, 2005
- Zetetic Institute
- Henry Allen Hill
- G01 - MEASURING TESTING
Information Patent Application
Differential numerical aperture methods
- Publication number 20040246481
- Publication date Dec 9, 2004
- Accent Optical Technologies, Inc.
- John V. Sandusky
- G01 - MEASURING TESTING
Information Patent Application
Measurement chamber with adjustable optical window
- Publication number 20040001200
- Publication date Jan 1, 2004
- Seiichi Hirakawa
- G01 - MEASURING TESTING
Information Patent Application
Elllipsometer and precision auto-alignment method for incident angl...
- Publication number 20030128360
- Publication date Jul 10, 2003
- Dae Gab Gweon
- G01 - MEASURING TESTING
Information Patent Application
Differential numerical aperture methods and device
- Publication number 20020039184
- Publication date Apr 4, 2002
- John V. Sandusky
- G01 - MEASURING TESTING

Variangle incidence arrangement

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for determining properties of a sample by ellipsometry

Measurement system capable of adjusting AOI, AOI spread and azimuth...

Pupil ellipsometry measurement apparatus and method and method of f...

System and method for use in high spatial resolution ellipsometry

Automatic determination of fourier harmonic order for computation o...

Method of determining refractive indices and surface properties of...

Variable resolution spectrometer

Method and device for measuring large-area and massive scattered fi...

Apparatus and method for measuring pretilt angle of liquid crystal

Multiple angles of incidence semiconductor metrology systems and me...

Ellipsometer for detecting surface

Multi-analyzer angle spectroscopic ellipsometry

Multi-analyzer angle spectroscopic ellipsometry

Scatterometry measurement of asymmetric structures

Measurement of critical dimension

Light focusing unit and spectrum measuring apparatus having the same

Fast sample height, AOI and POI alignment in mapping ellipsometer o...

Spatially precise optical treatment for measurement of targets thro...

Multiple measurement techniques including focused beam scatterometr...

Spatially precise optical treatment or measurement of targets throu...

Fast sample height, AOI and POI alignment in mapping ellipsometer o...

Automated ellipsometer and the like systems

Flying mobile on-board ellipsometer, polarimeter, reflectometer and...

Measuring a surface characteristic

Method and device for three-dimensionally determining the refractiv...

Automated ellipsometer and the like systems

Probe beam profile modulated optical reflectance system and methods

Apparatus and method for ellipsometric measurements with high spati...

Flying mobile on-board ellipsometer, polarimeter, reflectometer and...

Achromatic spectroscopic ellipsometer with high spatial resolution

Patents Applicationslast 30 patents

DETERMINING AND RECONSTRUCTING A SHAPE AND A MATERIAL PROPERTY OF A...

DEVICES AND METHODS FOR DETERMINING POLARIZATION CHARACTERISTICS FR...

MUELLER MATRIX ELLIPSOMETER

PUPIL ELLIPSOMETRY MEASUREMENT APPARATUS AND METHOD AND METHOD OF F...

PUPIL ELLIPSOMETRY MEASUREMENT APPARATUS AND METHOD AND METHOD OF F...

METHOD FOR DETERMINING PROPERTIES OF A SAMPLE BY ELLIPSOMETRY

SYSTEM AND METHOD FOR USE IN HIGH SPATIAL RESOLUTION ELLIPSOMETRY

VARIABLE RESOLUTION SPECTROMETER

MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND ME...

MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND ME...

AUTOMATIC DETERMINATION OF FOURIER HARMONIC ORDER FOR COMPUTATION O...

MULTI-ANALYZER ANGLE SPECTROSCOPIC ELLIPSOMETRY

Measurement of Critical Dimension

SPATIALLY PRECISE OPTICAL TREATMENT FOR MEASUREMENT OF TARGETS THRO...

Fast sample height, AOI and POI alignment in mapping ellipsometer o...

Scatterometry Measurement of Asymmetric Structures

Light focusing unit and spectrum measuring apparatus having the same

Spatially precise optical treatment or measurement of targets throu...

MULTIPLE MEASUREMENT TECHNIQUES INCLUDING FOCUSED BEAM SCATTEROMETR...

Fast sample height, AOI and POI alignment in mapping ellipsometer o...

Probe beam profile modulated optical reflectance system and methods

Measuring a surface characteristic

Method and device for three-dimensionally determining the refractiv...

Achromatic spectroscopie ellipsometer with high spatial resolution

Apparatus and method for ellipsometric measurements with high spati...

Differential numerical aperture methods

Measurement chamber with adjustable optical window

Elllipsometer and precision auto-alignment method for incident angl...

Differential numerical aperture methods and device