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H01L21/67178

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67178vertical arrangement

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Side storage pods, equipment front end modules, and methods for pro...
- Patent number 12,142,500
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 12,131,923
- Issue date Oct 29, 2024
- Ebara Corporation
- Yuta Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film processing method
- Patent number 12,119,242
- Issue date Oct 15, 2024
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,091,753
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating apparatus and substrate transporting method
- Patent number 12,035,576
- Issue date Jul 9, 2024
- SCREEN Holdings Co., Ltd.
- Joji Kuwahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating system and substrate transporting method
- Patent number 12,014,940
- Issue date Jun 18, 2024
- SCREEN Holdings Co., Ltd.
- Joji Kuwahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems for coating a substrate
- Patent number 12,004,303
- Issue date Jun 4, 2024
- Nordson Corporation
- Michel Van De Vijver
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus, film formation unit, substrate proc...
- Patent number 11,986,853
- Issue date May 21, 2024
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate transfer mechanism and substrate transferring method
- Patent number 11,978,655
- Issue date May 7, 2024
- Tokyo Electron Limited
- Kousei Ide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,971,661
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Yoji Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating method
- Patent number 11,927,886
- Issue date Mar 12, 2024
- Semes Co., Ltd.
- Doo Young Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate processing method and comput...
- Patent number 11,929,268
- Issue date Mar 12, 2024
- Tokyo Electron Limited
- Munehisa Kodama
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and method for treating substrate including process chamb...
- Patent number 11,923,216
- Issue date Mar 5, 2024
- Samsung Electronics Co., Ltd.
- Seung Min Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,915,945
- Issue date Feb 27, 2024
- SCREEN Holdings Co., Ltd.
- Hajime Nishide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer method and transfer system for transferring substrate betw...
- Patent number 11,908,717
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Masakazu Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer robot for reduced footprint platform architecture
- Patent number 11,908,714
- Issue date Feb 20, 2024
- Lam Research Corporation
- Richard H. Gould
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nozzle apparatus, apparatus and method for treating substrate
- Patent number 11,845,090
- Issue date Dec 19, 2023
- Semes Co., Ltd.
- Chang Suk Oh
- B08 - CLEANING
Information Patent Grant
Substrate inspection apparatus, substrate processing apparatus, sub...
- Patent number 11,823,922
- Issue date Nov 21, 2023
- Tokyo Electron Limited
- Akiko Kiyotomi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing device
- Patent number 11,813,646
- Issue date Nov 14, 2023
- SCREEN Holdings Co., Ltd.
- Nobuaki Okita
- B08 - CLEANING
Information Patent Grant
Semiconductor tool having controllable ambient environment processi...
- Patent number 11,814,731
- Issue date Nov 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chiao-Chun Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating apparatus
- Patent number 11,810,795
- Issue date Nov 7, 2023
- SCREEN Holdings Co., Ltd.
- Jun Sawashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber for degassing substrates
- Patent number 11,776,825
- Issue date Oct 3, 2023
- EVATEC AG
- Rogier Lodder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 11,735,437
- Issue date Aug 22, 2023
- Semes Co., Ltd.
- Boong Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer mechanism and substrate transferring method
- Patent number 11,705,359
- Issue date Jul 18, 2023
- Tokyo Electron Limited
- Kousei Ide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stacked structure for a vertical memory device
- Patent number 11,700,731
- Issue date Jul 11, 2023
- Samsung Electronics Co., Ltd.
- Il-Woo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid system architecture for thin film deposition
- Patent number 11,694,913
- Issue date Jul 4, 2023
- Intevac, Inc.
- Terry Bluck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and controller
- Patent number 11,663,562
- Issue date May 30, 2023
- Kokusai Electric Corporation
- Mitsuru Fukuda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus for electrochemically processing semiconductor substrates
- Patent number 11,643,744
- Issue date May 9, 2023
- SPTS Technologies Limited
- John Macneil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,640,916
- Issue date May 2, 2023
- SCREEN Holdings Co., Ltd.
- Takahiro Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-blade robot apparatus, electronic device manufacturing appara...
- Patent number 11,621,182
- Issue date Apr 4, 2023
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20240373683
- Publication date Nov 7, 2024
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20240339337
- Publication date Oct 10, 2024
- Kokusai Electric Corporation
- Daigi KAMIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20240334758
- Publication date Oct 3, 2024
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20240334759
- Publication date Oct 3, 2024
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240254628
- Publication date Aug 1, 2024
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240253079
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE TRANSFERRING METHOD
- Publication number 20240249968
- Publication date Jul 25, 2024
- TOKYO ELECTRON LIMITED
- Kousei IDE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240231232
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Yoji Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POWER SUPPLY SYSTEM FOR SEMICONDUCTOR MANUFACTURING SYSTEM GROUP
- Publication number 20240222969
- Publication date Jul 4, 2024
- TOKYO ELECTRON LIMITED
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240194497
- Publication date Jun 13, 2024
- SCREEN Holdings Co., Ltd.
- Hajime NISHIDE
- B08 - CLEANING
Information Patent Application
TRANSFER ROBOT FOR REDUCED FOOTPRINT PLATFORM ARCHITECTURE
- Publication number 20240194505
- Publication date Jun 13, 2024
- Richard H. Gould
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...
- Publication number 20240071791
- Publication date Feb 29, 2024
- Samsung Electronics Co., Ltd.
- Tae Soon KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20240030047
- Publication date Jan 25, 2024
- SCREEN Holdings Co., Ltd.
- Tadashi MAEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR TOOL HAVING CONTROLLABLE AMBIENT ENVIRONMENT PROCESSI...
- Publication number 20240018661
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chiao-Chun Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230402303
- Publication date Dec 14, 2023
- TOKYO ELECTRON LIMITED
- Tsunenaga Nakashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER FOR DEGASSING SUBSTRATES
- Publication number 20230395402
- Publication date Dec 7, 2023
- Evatec AG
- Rogier Lodder
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20230352326
- Publication date Nov 2, 2023
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
TRANSFER CHAMBER AND WAFER PROCESSING MODULE COMPRISING TRANSFER CH...
- Publication number 20230317479
- Publication date Oct 5, 2023
- SEMES CO., LTD.
- Shi Hyun PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230307277
- Publication date Sep 28, 2023
- SCREEN Holdings Co., Ltd.
- Takahiro YAMAGUCHI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE TRANSFERRING METHOD
- Publication number 20230298927
- Publication date Sep 21, 2023
- TOKYO ELECTRON LIMITED
- Kousei IDE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM WITH VERTICAL ARRANGEMENT STRUCTURE
- Publication number 20230260806
- Publication date Aug 17, 2023
- KCTECH CO., LTD.
- Dong Hwa LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR SHIFTING AT LEAST ONE SUB-ASSEMBLY BETWEEN A PROVISIONIN...
- Publication number 20230234152
- Publication date Jul 27, 2023
- Siegfried Hofmann GmbH
- Daniel Feseker
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS
- Publication number 20230230865
- Publication date Jul 20, 2023
- Samsung Electronics Co., Ltd.
- Jinhyuk CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BLADE ROBOT APPARATUS, ELECTRONIC DEVICE MANUFACTURING APPARA...
- Publication number 20230207354
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR TREATING A SUBSTRATE
- Publication number 20230207355
- Publication date Jun 29, 2023
- SEMES CO., LTD.
- Kun Hee PARK
- B08 - CLEANING
Information Patent Application
SUBSTRATE INSPECTION APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUB...
- Publication number 20230197480
- Publication date Jun 22, 2023
- TOKYO ELECTRON LIMITED
- Akiko Kiyotomi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SLIDE AND PIVOT ASSEMBLIES FOR PROCESS MODULE BIAS ASSEMBLIES OF SU...
- Publication number 20230154772
- Publication date May 18, 2023
- LAM RESEARCH CORPORATION
- David William PAQUET
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER ROBOT FOR REDUCED FOOTPRINT PLATFORM ARCHITECTURE
- Publication number 20230062737
- Publication date Mar 2, 2023
- LAM RESEARCH CORPORATION
- Richard H. GOULD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT LINE
- Publication number 20230061965
- Publication date Mar 2, 2023
- KCTECH CO., LTD.
- Hee Sung Chae
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230056038
- Publication date Feb 23, 2023
- TOKYO ELECTRON LIMITED
- Kousei IDE
- H01 - BASIC ELECTRIC ELEMENTS

vertical arrangement

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Side storage pods, equipment front end modules, and methods for pro...

Polishing apparatus and polishing method

Film processing method

Substrate processing apparatus

Substrate treating apparatus and substrate transporting method

Substrate treating system and substrate transporting method

Systems for coating a substrate

Substrate processing apparatus, film formation unit, substrate proc...

Substrate transfer mechanism and substrate transferring method

Substrate processing apparatus and substrate processing method

Substrate treating method

Substrate processing system, substrate processing method and comput...

Apparatus and method for treating substrate including process chamb...

Substrate processing apparatus

Transfer method and transfer system for transferring substrate betw...

Transfer robot for reduced footprint platform architecture

Nozzle apparatus, apparatus and method for treating substrate

Substrate inspection apparatus, substrate processing apparatus, sub...

Substrate processing device

Semiconductor tool having controllable ambient environment processi...

Substrate treating apparatus

Chamber for degassing substrates

Apparatus and method for treating substrate

Substrate transfer mechanism and substrate transferring method

Stacked structure for a vertical memory device

Hybrid system architecture for thin film deposition

Substrate processing apparatus and controller

Apparatus for electrochemically processing semiconductor substrates

Substrate processing apparatus and substrate processing method

Multi-blade robot apparatus, electronic device manufacturing appara...

Patents Applicationslast 30 patents

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD

SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE TRANSFERRING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

POWER SUPPLY SYSTEM FOR SEMICONDUCTOR MANUFACTURING SYSTEM GROUP

SUBSTRATE PROCESSING APPARATUS

TRANSFER ROBOT FOR REDUCED FOOTPRINT PLATFORM ARCHITECTURE

SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...

SUBSTRATE TREATING APPARATUS

SEMICONDUCTOR TOOL HAVING CONTROLLABLE AMBIENT ENVIRONMENT PROCESSI...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

CHAMBER FOR DEGASSING SUBSTRATES

SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD

TRANSFER CHAMBER AND WAFER PROCESSING MODULE COMPRISING TRANSFER CH...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE TRANSFERRING METHOD

SUBSTRATE PROCESSING SYSTEM WITH VERTICAL ARRANGEMENT STRUCTURE

DEVICE FOR SHIFTING AT LEAST ONE SUB-ASSEMBLY BETWEEN A PROVISIONIN...

SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS

MULTI-BLADE ROBOT APPARATUS, ELECTRONIC DEVICE MANUFACTURING APPARA...

APPARATUS AND METHOD FOR TREATING A SUBSTRATE

SUBSTRATE INSPECTION APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUB...

SLIDE AND PIVOT ASSEMBLIES FOR PROCESS MODULE BIAS ASSEMBLIES OF SU...

TRANSFER ROBOT FOR REDUCED FOOTPRINT PLATFORM ARCHITECTURE

SUBSTRATE TREATMENT LINE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD