Vertical boat type carrier whereby the substrates are horizontally supported

Industry

CPC
H01L21/67303

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67303Vertical boat type carrier whereby the substrates are horizontally supported

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor processing apparatus and semiconductor processing met...
- Patent number 12,312,690
- Issue date May 27, 2025
- Samsung Electronics Co., Ltd.
- Minju Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor fabrication system and method
- Patent number 12,308,268
- Issue date May 20, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,293,930
- Issue date May 6, 2025
- Kokusai Electric Corporation
- Shinobu Sugiura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and furnace opening closer
- Patent number 12,261,066
- Issue date Mar 25, 2025
- Kokusai Electric Corporation
- Takashi Nogami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and ceiling heater
- Patent number 12,241,159
- Issue date Mar 4, 2025
- Kokusai Electric Corporation
- Tetsuya Kosugi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flange and apparatus for processing substrates
- Patent number 12,243,757
- Issue date Mar 4, 2025
- ASM IP Holding B.V.
- Jeroen de Jonge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor apparatus and method of collecting residues
- Patent number 12,217,989
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ping-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor storage apparatus with integrated sorter
- Patent number 12,198,956
- Issue date Jan 14, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus with an injector
- Patent number 12,195,852
- Issue date Jan 14, 2025
- ASM IP Holding B.V.
- Kornelius Haanstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,142,476
- Issue date Nov 12, 2024
- Kokusai Electric Corporation
- Masayuki Asai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,087,598
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Hideto Tateno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for recognizing wafer identification number with automatical...
- Patent number 12,068,182
- Issue date Aug 20, 2024
- National Tsing Hua University
- Wei-Chang Yeh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 12,040,199
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Jeroen Fluit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,018,373
- Issue date Jun 25, 2024
- Kokusai Electric Corporation
- Seiyo Nakashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
FOUP or cassette storage for hybrid substrate bonding system
- Patent number 11,984,335
- Issue date May 14, 2024
- Applied Materials, Inc.
- Coby Scott Grove
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer cassette roller type transportation structure s...
- Patent number 11,929,275
- Issue date Mar 12, 2024
- EDDIE AND SONS TECHNOLOGY CO., LTD
- James Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor fabrication system and method
- Patent number 11,929,273
- Issue date Mar 12, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,913,116
- Issue date Feb 27, 2024
- Kokusai Electric Corporation
- Motoya Takewaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical batch furnace assembly
- Patent number 11,915,960
- Issue date Feb 27, 2024
- ASM IP Holding B.V.
- Jeroen Fluit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer method and transfer system for transferring substrate betw...
- Patent number 11,908,717
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Masakazu Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 11,869,785
- Issue date Jan 9, 2024
- Kokusai Electric Corporation
- Tomoyuki Miyada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer boat
- Patent number 11,869,786
- Issue date Jan 9, 2024
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diffusion furnace
- Patent number 11,862,490
- Issue date Jan 2, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Pengfei Gao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus
- Patent number 11,827,982
- Issue date Nov 28, 2023
- Kokusai Electric Corporation
- Masanori Okuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, information processing apparatus, a...
- Patent number 11,804,395
- Issue date Oct 31, 2023
- Tokyo Electron Limited
- Youngtai Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method
- Patent number 11,804,388
- Issue date Oct 31, 2023
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Open-ended type substrate receiving cassette and system thereof
- Patent number 11,798,829
- Issue date Oct 24, 2023
- Samsung Electronics Co., Ltd.
- Yoon Su Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus, heat treatment method, and film forming m...
- Patent number 11,784,070
- Issue date Oct 10, 2023
- Tokyo Electron Limited
- Yasuaki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber for degassing substrates
- Patent number 11,776,825
- Issue date Oct 3, 2023
- EVATEC AG
- Rogier Lodder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 11,705,325
- Issue date Jul 18, 2023
- Kokusai Electric Corporation
- Masayuki Asai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER
- Publication number 20250179642
- Publication date Jun 5, 2025
- Kokusai Electric Corporation
- Tetsuya KOSUGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLANGE AND APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20250183065
- Publication date Jun 5, 2025
- ASM IP HOLDING B.V.
- Jeroen de Jonge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STORAGE APPARATUS WITH INTEGRATED SORTER
- Publication number 20250149360
- Publication date May 8, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Tsung-Sheng KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250022702
- Publication date Jan 16, 2025
- Kokusai Electric Corporation
- Masayuki ASAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND DISPLAY METHOD
- Publication number 20240404849
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Tatsuya WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR MANAGING SEISMIC FORCES
- Publication number 20240404857
- Publication date Dec 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Hao LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS WITH AN INJECTOR
- Publication number 20240384411
- Publication date Nov 21, 2024
- ASM IP HOLDING B.V.
- Kornelius Haanstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20240339340
- Publication date Oct 10, 2024
- ASM IP HOLDING B.V.
- Jeroen Fluit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE CHECKING METHOD, METHOD O...
- Publication number 20240321612
- Publication date Sep 26, 2024
- Kokusai Electric Corporation
- Takuya SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR FABRICATION SYSTEM AND METHOD
- Publication number 20240213067
- Publication date Jun 27, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tsung-Sheng KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER HOLDER AND METHOD FOR OPERATING THE SAME
- Publication number 20240186164
- Publication date Jun 6, 2024
- INNOSCIENCE (SUZHOU) SEMICONDUCTOR CO., LTD.
- Xudong ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MAKING A THREE-DIMENSIONAL MEMORY DEVICE USING DUAL WATER...
- Publication number 20240121961
- Publication date Apr 11, 2024
- SANDISK TECHNOLOGIES LLC
- Hiraku HASHIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20240105484
- Publication date Mar 28, 2024
- SCREEN Holdings Co., Ltd.
- Ichiro MITSUYOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device and Non-transitory Com...
- Publication number 20240087929
- Publication date Mar 14, 2024
- Kokusai Electric Corporation
- Tomoyuki MIYADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER FOR DEGASSING SUBSTRATES
- Publication number 20230395402
- Publication date Dec 7, 2023
- Evatec AG
- Rogier Lodder
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230298883
- Publication date Sep 21, 2023
- Kokusai Electric Corporation
- Masayuki ASAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR RECOGNIZING WAFER IDENTIFICATION NUMBER WITH AUTOMATICAL...
- Publication number 20230260810
- Publication date Aug 17, 2023
- National Tsing Hua University
- Wei-Chang YEH
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FOUP OR CASSETTE STORAGE FOR HYBRID SUBSTRATE BONDING SYSTEM
- Publication number 20230207358
- Publication date Jun 29, 2023
- Coby Scott GROVE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR INSPECTING A CONTAINER AND INSPECTION SYSTEM
- Publication number 20230187244
- Publication date Jun 15, 2023
- BROOKS AUTOMATION (GERMANY) GMBH
- Alexander WENDEL
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230070910
- Publication date Mar 9, 2023
- Kokusai Electric Corporation
- Masayuki ASAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIFFUSION FURNACE
- Publication number 20230031706
- Publication date Feb 2, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Pengfei GAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRAY ELEVATING AND LOWERING APPARATUS OF TEST HANDLER
- Publication number 20230024139
- Publication date Jan 26, 2023
- SEMES CO., LTD.
- Jin Ho KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR PROCESSING MET...
- Publication number 20230002903
- Publication date Jan 5, 2023
- Samsung Electronics Co., Ltd.
- MINJU LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING STATION AND SEMICONDUCTOR PROCESS USING TH...
- Publication number 20220384220
- Publication date Dec 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Wei Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FRONT OPENING UNIFIED POD, WAFER TRANSFER SYSTEM AND WAFER TRANSFER...
- Publication number 20220351996
- Publication date Nov 3, 2022
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Yanbin LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, REACTION TUBE, METHOD OF MANUFACTUR...
- Publication number 20220301865
- Publication date Sep 22, 2022
- Kokusai Electric Corporation
- Atsushi HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20220298642
- Publication date Sep 22, 2022
- Kokusai Electric Corporation
- Taketoshi SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR WAFER CASSETTE ROLLER TYPE TRANSPORTATION STRUCTURE S...
- Publication number 20220277978
- Publication date Sep 1, 2022
- Eddie and Sons Technology Co.,Ltd
- James TENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, INFORMATION PROCESSING APPARATUS, A...
- Publication number 20220270904
- Publication date Aug 25, 2022
- TOKYO ELECTRON LIMITED
- Youngtai KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS WITH AN INJECTOR
- Publication number 20220162751
- Publication date May 26, 2022
- ASM IP HOLDING B.V.
- Kornelius Haanstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Vertical boat type carrier whereby the substrates are horizontally supported

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor processing apparatus and semiconductor processing met...

Semiconductor fabrication system and method

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus and furnace opening closer

Substrate processing apparatus and ceiling heater

Flange and apparatus for processing substrates

Semiconductor apparatus and method of collecting residues

Semiconductor storage apparatus with integrated sorter

Substrate processing apparatus with an injector

Method of processing substrate, method of manufacturing semiconduct...

Substrate processing apparatus

Device for recognizing wafer identification number with automatical...

Substrate processing apparatus for processing substrates

Substrate processing apparatus

FOUP or cassette storage for hybrid substrate bonding system

Semiconductor wafer cassette roller type transportation structure s...

Semiconductor fabrication system and method

Substrate processing apparatus and method of manufacturing semicond...

Vertical batch furnace assembly

Transfer method and transfer system for transferring substrate betw...

Method of manufacturing semiconductor device and non-transitory com...

Wafer boat

Diffusion furnace

Processing apparatus

Substrate processing apparatus, information processing apparatus, a...

Substrate processing apparatus and method

Open-ended type substrate receiving cassette and system thereof

Heat treatment apparatus, heat treatment method, and film forming m...

Chamber for degassing substrates

Method of processing substrate, method of manufacturing semiconduct...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER

FLANGE AND APPARATUS FOR PROCESSING SUBSTRATES

SEMICONDUCTOR STORAGE APPARATUS WITH INTEGRATED SORTER

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING SYSTEM AND DISPLAY METHOD

SYSTEMS AND METHODS FOR MANAGING SEISMIC FORCES

SUBSTRATE PROCESSING APPARATUS WITH AN INJECTOR

SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE CHECKING METHOD, METHOD O...

SEMICONDUCTOR FABRICATION SYSTEM AND METHOD

WAFER HOLDER AND METHOD FOR OPERATING THE SAME

METHOD OF MAKING A THREE-DIMENSIONAL MEMORY DEVICE USING DUAL WATER...

SUBSTRATE TREATING APPARATUS

Method of Manufacturing Semiconductor Device and Non-transitory Com...

CHAMBER FOR DEGASSING SUBSTRATES

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

DEVICE FOR RECOGNIZING WAFER IDENTIFICATION NUMBER WITH AUTOMATICAL...

FOUP OR CASSETTE STORAGE FOR HYBRID SUBSTRATE BONDING SYSTEM

METHOD FOR INSPECTING A CONTAINER AND INSPECTION SYSTEM

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

DIFFUSION FURNACE

TRAY ELEVATING AND LOWERING APPARATUS OF TEST HANDLER

SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR PROCESSING MET...

SEMICONDUCTOR PROCESSING STATION AND SEMICONDUCTOR PROCESS USING TH...

FRONT OPENING UNIFIED POD, WAFER TRANSFER SYSTEM AND WAFER TRANSFER...

SUBSTRATE PROCESSING APPARATUS, REACTION TUBE, METHOD OF MANUFACTUR...

Substrate Processing Apparatus and Method of Manufacturing Semicond...

SEMICONDUCTOR WAFER CASSETTE ROLLER TYPE TRANSPORTATION STRUCTURE S...

SUBSTRATE PROCESSING APPARATUS, INFORMATION PROCESSING APPARATUS, A...

SUBSTRATE PROCESSING APPARATUS WITH AN INJECTOR