vertical transfer of a batch of workpieces

Industry

CPC
H01L21/67757

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67757vertical transfer of a batch of workpieces

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Device for self-assembling semiconductor light-emitting diodes
- Patent number 12,159,800
- Issue date Dec 3, 2024
- LG Electronics Inc.
- Inbum Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical batch furnace assembly comprising a cooling gas supply
- Patent number 12,130,084
- Issue date Oct 29, 2024
- ASM IP Holding B.V.
- Melvin Verbaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,091,753
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,087,598
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Hideto Tateno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and dummy substrate processing method
- Patent number 12,027,384
- Issue date Jul 2, 2024
- Tokyo Electron Limited
- Yutaka Motoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system having a front opening unified pod (FOUP) load lock
- Patent number 11,923,217
- Issue date Mar 5, 2024
- Applied Materials, Inc.
- Jacob Newman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical batch furnace assembly
- Patent number 11,915,960
- Issue date Feb 27, 2024
- ASM IP Holding B.V.
- Jeroen Fluit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and recording medium
- Patent number 11,876,010
- Issue date Jan 16, 2024
- Kokusai Electric Corporation
- Tadashi Okazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical batch furnace assembly
- Patent number 11,876,008
- Issue date Jan 16, 2024
- ASM IP Holding B.V.
- Chris G. M. de Ridder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer boat
- Patent number 11,869,786
- Issue date Jan 9, 2024
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,854,850
- Issue date Dec 26, 2023
- Kokusai Electric Corporation
- Yukinao Kaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, information processing apparatus, a...
- Patent number 11,804,395
- Issue date Oct 31, 2023
- Tokyo Electron Limited
- Youngtai Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fast FOUP swapping with a FOUP handler
- Patent number 11,798,830
- Issue date Oct 24, 2023
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Batch substrate support with warped substrate capability
- Patent number 11,784,075
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Shashidhara Patel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transport system and substrate transport method
- Patent number 11,776,831
- Issue date Oct 3, 2023
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer bonding apparatuses
- Patent number 11,728,200
- Issue date Aug 15, 2023
- Samsung Electronics Co., Ltd.
- Hoe Chul Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 11,699,601
- Issue date Jul 11, 2023
- SCREEN Holdings Co., Ltd.
- Tomohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, recording medium, and fluid circula...
- Patent number 11,694,907
- Issue date Jul 4, 2023
- Kokusai Electric Corporation
- Toshiki Fujino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Batch processing oven and operating methods
- Patent number 11,688,621
- Issue date Jun 27, 2023
- YIELD ENGINEERING SYSTEMS, INC.
- Mark William Curry
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Vertical batch furnace assembly
- Patent number 11,587,815
- Issue date Feb 21, 2023
- ASM IP Holding B.V.
- Chris G. M. de Ridder
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Vertical batch furnace assembly
- Patent number 11,587,814
- Issue date Feb 21, 2023
- ASM IP Holding B.V.
- Chris G. M. de Ridder
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Vertical batch furnace assembly comprising a cooling gas supply
- Patent number 11,530,876
- Issue date Dec 20, 2022
- ASM IP Holding B.V.
- Melvin Verbaas
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Semiconductor processing apparatus and semiconductor processing system
- Patent number 11,527,427
- Issue date Dec 13, 2022
- Samsung Electronics Co., Ltd.
- Hyun Ho Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Load lock device having optical measuring device for acquiring dist...
- Patent number 11,521,883
- Issue date Dec 6, 2022
- NANYA TECHNOLOGY CORPORATION
- Chia-Fu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and recording medium for changing at...
- Patent number 11,521,880
- Issue date Dec 6, 2022
- Kokusai Electric Corporation
- Satoru Takahata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fast FOUP swapping with a FOUP handler
- Patent number 11,515,187
- Issue date Nov 29, 2022
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for automatically handling die carriers
- Patent number 11,508,596
- Issue date Nov 22, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,488,845
- Issue date Nov 1, 2022
- EUGENE TECHNOLOGY CO., LTD.
- Cha Young Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device
- Patent number 11,469,127
- Issue date Oct 11, 2022
- Kioxia Corporation
- Shigeru Kinoshita
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,456,190
- Issue date Sep 27, 2022
- Kokusai Electric Corporation
- Daigi Kamimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR APPARATUS AND METHOD OF COLLECTING RESIDUES
- Publication number 20240387215
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ping-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT ASSEMBLY FOR SEMICONDUCTOR MANUFACTURING PROCESSING CHAMBER
- Publication number 20240371673
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Aditya Chuttar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20240339337
- Publication date Oct 10, 2024
- Kokusai Electric Corporation
- Daigi KAMIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240254628
- Publication date Aug 1, 2024
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD OF SUBSTRATE SUPPOR...
- Publication number 20240249963
- Publication date Jul 25, 2024
- Kokusai Electric Corporation
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20240105483
- Publication date Mar 28, 2024
- SCREEN Holdings Co., Ltd.
- Ichiro MITSUYOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LOADING APPARATUS, SEMICONDUCTOR MANUFACTURING EQUIPMENT...
- Publication number 20240047253
- Publication date Feb 8, 2024
- Samsung Electronics Co., Ltd.
- Sangho JANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20240030047
- Publication date Jan 25, 2024
- SCREEN Holdings Co., Ltd.
- Tadashi MAEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20230420280
- Publication date Dec 28, 2023
- SCREEN Holdings Co., Ltd.
- Tadashi MAEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230402303
- Publication date Dec 14, 2023
- TOKYO ELECTRON LIMITED
- Tsunenaga Nakashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-ASSEMBLY DEVICE
- Publication number 20230361077
- Publication date Nov 9, 2023
- LG ELECTRONICS INC.
- Byungjun KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE HOLDER, METHOD OF MANUFAC...
- Publication number 20230343614
- Publication date Oct 26, 2023
- Kokusai Electric Corporation
- Shinya MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20230268202
- Publication date Aug 24, 2023
- TOKYO ELECTRON LIMITED
- Keita HIRASE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230170247
- Publication date Jun 1, 2023
- WONIK IPS CO., LTD.
- Kwang Ha CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE RETAINER, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MA...
- Publication number 20230116953
- Publication date Apr 20, 2023
- Kokusai Electric Corporation
- Atsushi HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH PROCESSING OVEN FOR MAGNETIC ANNEAL
- Publication number 20230117184
- Publication date Apr 20, 2023
- Yield Engineering Systems, Inc.
- M. Ziaul Karim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL BATCH FURNACE ASSEMBLY COMPRISING A COOLING GAS SUPPLY
- Publication number 20230076060
- Publication date Mar 9, 2023
- ASM IP HOLDINGS B.V.
- MELVIN VERBAAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR AUTOMATICALLY HANDLING DIE CARRIERS
- Publication number 20230063707
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT LINE
- Publication number 20230061965
- Publication date Mar 2, 2023
- KCTECH CO., LTD.
- Hee Sung Chae
- B08 - CLEANING
Information Patent Application
FAST FOUP SWAPPING WITH A FOUP HANDLER
- Publication number 20230047885
- Publication date Feb 16, 2023
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR APPARATUS AND METHOD OF COLLECTING RESIDUES
- Publication number 20230038785
- Publication date Feb 9, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ping-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20230016879
- Publication date Jan 19, 2023
- Kokusai Electric Corporation
- Daigi KAMIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND METHO...
- Publication number 20220406626
- Publication date Dec 22, 2022
- KIOXIA Corporation
- Tomohiko SUGITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEM HAVING A FRONT OPENING UNIFIED POD (FOUP) LOAD LOCK
- Publication number 20220406630
- Publication date Dec 22, 2022
- Applied Materials, Inc.
- Jacob NEWMAN
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
Load Lock Device Having Optical Measuring Device for Acquiring Dist...
- Publication number 20220285195
- Publication date Sep 8, 2022
- NANYA TECHNOLOGY CORPORATION
- CHIA-FU CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, INFORMATION PROCESSING APPARATUS, A...
- Publication number 20220270904
- Publication date Aug 25, 2022
- TOKYO ELECTRON LIMITED
- Youngtai KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BOAT
- Publication number 20220254668
- Publication date Aug 11, 2022
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, ELEVATOR AND METHOD OF MANUFACTURIN...
- Publication number 20220199443
- Publication date Jun 23, 2022
- Kokusai Electric Corporation
- Yuji TAKEBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER PROCESSING APPARATUS WITH A ROTATABLE TABLE
- Publication number 20220199444
- Publication date Jun 23, 2022
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH PROCESSING OVEN AND OPERATING METHODS
- Publication number 20220189809
- Publication date Jun 16, 2022
- Yield Engineering Systems, Inc.
- Mark William Curry
- H01 - BASIC ELECTRIC ELEMENTS

vertical transfer of a batch of workpieces

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Device for self-assembling semiconductor light-emitting diodes

Vertical batch furnace assembly comprising a cooling gas supply

Substrate processing apparatus

Substrate processing apparatus

Heat treatment apparatus and dummy substrate processing method

Processing system having a front opening unified pod (FOUP) load lock

Vertical batch furnace assembly

Substrate processing apparatus and recording medium

Vertical batch furnace assembly

Wafer boat

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, information processing apparatus, a...

Fast FOUP swapping with a FOUP handler

Batch substrate support with warped substrate capability

Substrate transport system and substrate transport method

Wafer bonding apparatuses

Substrate processing method

Substrate processing apparatus, recording medium, and fluid circula...

Batch processing oven and operating methods

Vertical batch furnace assembly

Vertical batch furnace assembly

Vertical batch furnace assembly comprising a cooling gas supply

Semiconductor processing apparatus and semiconductor processing system

Load lock device having optical measuring device for acquiring dist...

Substrate processing apparatus and recording medium for changing at...

Fast FOUP swapping with a FOUP handler

Apparatus and methods for automatically handling die carriers

Substrate processing apparatus

Substrate processing device

Substrate processing apparatus and method of manufacturing semicond...

Patents Applicationslast 30 patents

SEMICONDUCTOR APPARATUS AND METHOD OF COLLECTING RESIDUES

LIFT ASSEMBLY FOR SEMICONDUCTOR MANUFACTURING PROCESSING CHAMBER

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD OF SUBSTRATE SUPPOR...

SUBSTRATE TREATING APPARATUS

SUBSTRATE LOADING APPARATUS, SEMICONDUCTOR MANUFACTURING EQUIPMENT...

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SELF-ASSEMBLY DEVICE

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE HOLDER, METHOD OF MANUFAC...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE RETAINER, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MA...

BATCH PROCESSING OVEN FOR MAGNETIC ANNEAL

VERTICAL BATCH FURNACE ASSEMBLY COMPRISING A COOLING GAS SUPPLY

APPARATUS AND METHODS FOR AUTOMATICALLY HANDLING DIE CARRIERS

SUBSTRATE TREATMENT LINE

FAST FOUP SWAPPING WITH A FOUP HANDLER

SEMICONDUCTOR APPARATUS AND METHOD OF COLLECTING RESIDUES

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND METHO...

PROCESSING SYSTEM HAVING A FRONT OPENING UNIFIED POD (FOUP) LOAD LOCK

Load Lock Device Having Optical Measuring Device for Acquiring Dist...

SUBSTRATE PROCESSING APPARATUS, INFORMATION PROCESSING APPARATUS, A...

WAFER BOAT

SUBSTRATE PROCESSING APPARATUS, ELEVATOR AND METHOD OF MANUFACTURIN...

WAFER PROCESSING APPARATUS WITH A ROTATABLE TABLE

BATCH PROCESSING OVEN AND OPERATING METHODS