vertical transfer of a single workpiece

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CPC
H01L21/67751

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67751vertical transfer of a single workpiece

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor manufacturing apparatus, failure prediction method fo...
- Patent number 12,191,178
- Issue date Jan 7, 2025
- Ebara Corporation
- Jumpei Fujikata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 12,040,199
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Jeroen Fluit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Teaching method of transfer device and processing system
- Patent number 12,030,179
- Issue date Jul 9, 2024
- Tokyo Electron Limited
- Toshiaki Toyomaki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate lifting apparatus and substrate transferring method
- Patent number 12,020,967
- Issue date Jun 25, 2024
- ULVAC TECHNO, LTD.
- Katsunori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Teaching method
- Patent number 11,984,340
- Issue date May 14, 2024
- Tokyo Electron Limited
- Takehiro Shindo
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate support for reduced damage substrate backside
- Patent number 11,955,362
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Joel M Huston
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for III-v/silicon hybrid integration
- Patent number 11,953,728
- Issue date Apr 9, 2024
- Rockley Photonics Limited
- Guomin Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Internally divisible process chamber using a shutter disk assembly
- Patent number 11,830,710
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- John Joseph Mazzocco
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for improving transfer efficiency of an automat...
- Patent number 11,804,394
- Issue date Oct 31, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Yen-Fu Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer system and load lock module
- Patent number 11,791,180
- Issue date Oct 17, 2023
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer mechanism to reduce back-side substrate contact
- Patent number 11,784,076
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Masato Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport apparatus, substrate processing apparatus, and...
- Patent number 11,710,654
- Issue date Jul 25, 2023
- Semes Co., Ltd.
- Ki Won Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate handling systems
- Patent number 11,705,354
- Issue date Jul 18, 2023
- Applied Materials, Inc.
- Gee Sun Hoey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic capacitance sensor
- Patent number 11,688,617
- Issue date Jun 27, 2023
- Rorze Corporation
- Yoshiki Fukuzaki
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus and substrate delivery method
- Patent number 11,664,266
- Issue date May 30, 2023
- Tokyo Electron Limited
- Yuichiro Wagatsuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for substrate transfer and radical confinement
- Patent number 11,574,831
- Issue date Feb 7, 2023
- Applied Materials, Inc.
- Jared Ahmad Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for post exposure bake
- Patent number 11,550,224
- Issue date Jan 10, 2023
- Applied Materials, Inc.
- Kyle M. Hanson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system
- Patent number 11,515,183
- Issue date Nov 29, 2022
- Tokyo Electron Limited
- Suguru Motegi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer unit and substrate treating apparatus including ihe same
- Patent number 11,456,198
- Issue date Sep 27, 2022
- Semes Co., Ltd.
- Moon Hyung Bae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing system
- Patent number 11,443,964
- Issue date Sep 13, 2022
- Tokyo Electron Limited
- Masatoshi Kaneda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,443,972
- Issue date Sep 13, 2022
- SCREEN Holdings Co., Ltd.
- Ryo Muramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer mechanism to reduce back-side substrate contact
- Patent number 11,424,149
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Masato Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,410,865
- Issue date Aug 9, 2022
- SCREEN Holdings Co., Ltd.
- Hiroyuki Kawahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus, failure prediction method fo...
- Patent number 11,315,812
- Issue date Apr 26, 2022
- Ebara Corporation
- Jumpei Fujikata
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate liquid treatment apparatus
- Patent number 11,309,194
- Issue date Apr 19, 2022
- Tokyo Electron Limited
- Koji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus, controller of substrate treatment ap...
- Patent number 11,177,147
- Issue date Nov 16, 2021
- Ebara Corporation
- Takashi Mitsuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cleaning apparatus and cleaning method using the same
- Patent number 11,152,228
- Issue date Oct 19, 2021
- SK SILTRON CO., LTD.
- Jae Hwan Yi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning device and method for driving cleaning device
- Patent number 11,087,972
- Issue date Aug 10, 2021
- Samsung Electronics Co., Ltd.
- Hyun Joon Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,024,520
- Issue date Jun 1, 2021
- Ebara Corporation
- Keiichi Kurashina
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate conveyance robot and substrate conveyance apparatus
- Patent number 10,867,826
- Issue date Dec 15, 2020
- Kawasaki Jukogyo Kabushiki Kaisha
- Takeshi Shibata
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR III-V/SILICON HYBRID INTEGRATION
- Publication number 20240402427
- Publication date Dec 5, 2024
- ROCKLEY PHOTONICS LIMITED
- Guomin Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE PROCESSING SYSTEM INCLUDING...
- Publication number 20240379386
- Publication date Nov 14, 2024
- Samsung Electronics Co., Ltd.
- YONGSUK CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...
- Publication number 20240371672
- Publication date Nov 7, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yongfei WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20240339340
- Publication date Oct 10, 2024
- ASM IP HOLDING B.V.
- Jeroen Fluit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC COMPONENT CLEANING APPARATUS
- Publication number 20240258125
- Publication date Aug 1, 2024
- Yamaha Robotics Holdings Co., Ltd.
- Hiroshi KIKUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER SHIFT DETECTION
- Publication number 20240105480
- Publication date Mar 28, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Ming-Sze Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT
- Publication number 20230420279
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- Masato ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Systems for Improving Transfer Efficiency of an Automat...
- Publication number 20230369088
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Yen-Fu SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20230317488
- Publication date Oct 5, 2023
- TOKYO ELECTRON LIMITED
- Hiromitsu SAKAUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230187243
- Publication date Jun 15, 2023
- Kokusai Electric Corporation
- Jin SHIBATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS, AND RING REPLACEMEN...
- Publication number 20230178417
- Publication date Jun 8, 2023
- TOKYO ELECTRON LIMITED
- Shin MATSUURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD-BEARING DEVICE, WAFER TRANSFER DEVICE, CHAMBER DEVICE AND WAFE...
- Publication number 20230075313
- Publication date Mar 9, 2023
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Lei JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR IMPROVING TRANSFER EFFICIENCY OF AN AUTOMAT...
- Publication number 20230065660
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Yen-Fu SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CLEANING AND DRYING DEVICE
- Publication number 20230005761
- Publication date Jan 5, 2023
- HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
- Linghan Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR III-V/SILICON HYBRID INTEGRATION
- Publication number 20220357509
- Publication date Nov 10, 2022
- ROCKLEY PHOTONICS LIMITED
- Guomin Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT
- Publication number 20220351999
- Publication date Nov 3, 2022
- Applied Materials, Inc.
- Masato ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Nasal Delivery Device and Methods of Use
- Publication number 20220310440
- Publication date Sep 29, 2022
- Bruce H. Levin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, FAILURE PREDICTION METHOD FO...
- Publication number 20220181180
- Publication date Jun 9, 2022
- EBARA CORPORATION
- Jumpei FUJIKATA
- G05 - CONTROLLING REGULATING
Information Patent Application
BOAT TRANSFER METHOD AND HEAT TREATMENT APPARATUS
- Publication number 20220122867
- Publication date Apr 21, 2022
- TOKYO ELECTRON LIMITED
- Shingo HISHIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND...
- Publication number 20220051926
- Publication date Feb 17, 2022
- SEMES CO., LTD.
- Ki Won HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CAPACITANCE SENSOR
- Publication number 20220037177
- Publication date Feb 3, 2022
- Rorze Corporation
- YOSHIKI FUKUZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE PROCESS SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20220020615
- Publication date Jan 20, 2022
- Applied Materials, Inc.
- Nitin Pathak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HANDLING SYSTEMS
- Publication number 20220013394
- Publication date Jan 13, 2022
- Applied Materials, Inc.
- Gee Sun HOEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER SYSTEM AND LOAD LOCK MODULE
- Publication number 20210280441
- Publication date Sep 9, 2021
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEACHING METHOD OF TRANSFER DEVICE AND PROCESSING SYSTEM
- Publication number 20210252694
- Publication date Aug 19, 2021
- TOKYO ELECTRON LIMITED
- Toshiaki TOYOMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEACHING METHOD
- Publication number 20210252695
- Publication date Aug 19, 2021
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME
- Publication number 20210057253
- Publication date Feb 25, 2021
- Semes Co., LTD.
- Moon Hyung BAE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20210043480
- Publication date Feb 11, 2021
- TOKYO ELECTRON LIMITED
- Suguru MOTEGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE DELIVERY METHOD
- Publication number 20210005505
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Yuichiro WAGATSUMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT
- Publication number 20200411350
- Publication date Dec 31, 2020
- Applied Materials, Inc.
- Jared Ahmad LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

vertical transfer of a single workpiece

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor manufacturing apparatus, failure prediction method fo...

Substrate processing apparatus for processing substrates

Teaching method of transfer device and processing system

Substrate lifting apparatus and substrate transferring method

Teaching method

Substrate support for reduced damage substrate backside

Method for III-v/silicon hybrid integration

Internally divisible process chamber using a shutter disk assembly

Methods and systems for improving transfer efficiency of an automat...

Substrate transfer system and load lock module

Substrate transfer mechanism to reduce back-side substrate contact

Substrate transport apparatus, substrate processing apparatus, and...

Substrate handling systems

Electrostatic capacitance sensor

Substrate processing apparatus and substrate delivery method

Method and apparatus for substrate transfer and radical confinement

Apparatus for post exposure bake

Substrate processing system

Transfer unit and substrate treating apparatus including ihe same

Substrate processing apparatus and substrate processing system

Substrate processing apparatus

Substrate transfer mechanism to reduce back-side substrate contact

Substrate processing apparatus

Semiconductor manufacturing apparatus, failure prediction method fo...

Substrate liquid treatment apparatus

Substrate treatment apparatus, controller of substrate treatment ap...

Wafer cleaning apparatus and cleaning method using the same

Cleaning device and method for driving cleaning device

Substrate processing apparatus

Substrate conveyance robot and substrate conveyance apparatus

Patents Applicationslast 30 patents

METHOD FOR III-V/SILICON HYBRID INTEGRATION

SUBSTRATE CLEANING APPARATUS, SUBSTRATE PROCESSING SYSTEM INCLUDING...

SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...

SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES

ELECTRONIC COMPONENT CLEANING APPARATUS

WAFER SHIFT DETECTION

SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

Methods and Systems for Improving Transfer Efficiency of an Automat...

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS, AND RING REPLACEMEN...

LOAD-BEARING DEVICE, WAFER TRANSFER DEVICE, CHAMBER DEVICE AND WAFE...

METHODS AND SYSTEMS FOR IMPROVING TRANSFER EFFICIENCY OF AN AUTOMAT...

WAFER CLEANING AND DRYING DEVICE

METHOD FOR III-V/SILICON HYBRID INTEGRATION

SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

Nasal Delivery Device and Methods of Use

SEMICONDUCTOR MANUFACTURING APPARATUS, FAILURE PREDICTION METHOD FO...

BOAT TRANSFER METHOD AND HEAT TREATMENT APPARATUS

SUBSTRATE TRANSPORT APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND...

ELECTROSTATIC CAPACITANCE SENSOR

MULTIPLE PROCESS SEMICONDUCTOR PROCESSING SYSTEM

SUBSTRATE HANDLING SYSTEMS

SUBSTRATE TRANSFER SYSTEM AND LOAD LOCK MODULE

TEACHING METHOD OF TRANSFER DEVICE AND PROCESSING SYSTEM

TEACHING METHOD

TRANSFER UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE DELIVERY METHOD

METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT