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H01J2237/16

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/16Vessels

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Refillable ion chamber with automated purging system
- Patent number 12,106,929
- Issue date Oct 1, 2024
- Varian Medical Systems, Inc.
- Amir Shojaei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of driving relay member
- Patent number 12,027,346
- Issue date Jul 2, 2024
- Tokyo Electron Limited
- Nobutaka Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum chamber arrangement for charged particle beam generator
- Patent number 11,961,627
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Alexander Hendrik Vincent Van Veen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Vacuum chamber arrangement for charged particle beam generator
- Patent number 11,705,252
- Issue date Jul 18, 2023
- ASML Netherlands B.V.
- Alexander Hendrik Vincent Van Veen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Refillable ion chamber with automated purging system
- Patent number 11,651,931
- Issue date May 16, 2023
- Varian Medical Systems, Inc.
- Amir Shojaei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pedestal support design for precise chamber matching and process co...
- Patent number 11,501,957
- Issue date Nov 15, 2022
- Applied Materials, Inc.
- Gopu Krishna
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Corrosion-resistant components and methods of making
- Patent number 11,376,822
- Issue date Jul 5, 2022
- Coorstek, Inc.
- Matthew Simpson
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Charged particle beam device
- Patent number 11,380,515
- Issue date Jul 5, 2022
- HITACHI HIGH-TECH CORPORATION
- Keiichiro Hosobuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle beam apparatus
- Patent number 11,282,671
- Issue date Mar 22, 2022
- HITACHI HIGH-TECH CORPORATION
- Uki Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum chamber arrangement for charged particle beam generator
- Patent number 11,094,426
- Issue date Aug 17, 2021
- ASML Netherlands B.V.
- Alexander Hendrik Vincent Van Veen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Rotary module for an accelerator system
- Patent number 11,057,982
- Issue date Jul 6, 2021
- GSI Helmholtzzentrum Fuer Schwerionenforschung GmbH
- Chen Xiao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Examination container and electron microscope
- Patent number 10,607,808
- Issue date Mar 31, 2020
- TAIWAN ELECTRON MICROSCOPE INSTRUMENT CORPORATION
- Tsu-Wei Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum chamber arrangement for charged particle beam generator
- Patent number 10,586,625
- Issue date Mar 10, 2020
- ASML Netherlands B.V.
- Alexander Hendrik Vincent Van Veen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Integrated circuit analysis systems and methods with localized evac...
- Patent number 10,373,795
- Issue date Aug 6, 2019
- FEI Company
- Yakov Bobrov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High voltage feedthrough assembly, time-resolved transmission elect...
- Patent number 10,366,861
- Issue date Jul 30, 2019
- Max-Planck Gesellschaft zur Foerderung der Wissenschaften e.V.
- Julian Hirscht
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray analysis in air
- Patent number 10,354,834
- Issue date Jul 16, 2019
- Oxford Instruments Nanotechnology Tools Limited
- Peter J. Statham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample chamber device for electron microscope, and electron microsc...
- Patent number 10,312,049
- Issue date Jun 4, 2019
- Korea Research Institute of Standards and Science
- Bok Lae Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
XRF analyzer with separate source and detector heat sinks
- Patent number 10,219,363
- Issue date Feb 26, 2019
- Moxtek, Inc.
- Vincent Floyd Jones
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Loading station for transferring frozen samples at low temperatures
- Patent number 10,217,603
- Issue date Feb 26, 2019
- Leica Mikrosysteme GmbH
- Reinhard Lihl
- G01 - MEASURING TESTING
Information Patent Grant
X-ray tube including support for latitude supply wires
- Patent number 10,181,390
- Issue date Jan 15, 2019
- Toshiba Electron Tubes & Devices Co., Ltd.
- Naoki Takahashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Inspection of a lithographic mask that is protected by a pellicle
- Patent number 10,156,785
- Issue date Dec 18, 2018
- Applied Materials Israel Ltd.
- Alon Litman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection device
- Patent number 10,157,722
- Issue date Dec 18, 2018
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron scanning microscope and image generation method
- Patent number 10,157,724
- Issue date Dec 18, 2018
- Hitachi High-Technologies Corporation
- Shinsuke Kawanishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enclosure for a target processing machine
- Patent number 10,144,134
- Issue date Dec 4, 2018
- Mapper Lithography IP B.V.
- Joep Gerard Vijverberg
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,096,495
- Issue date Oct 9, 2018
- Tokyo Electron Limited
- Manabu Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for protection of vacuum seals in plasma processi...
- Patent number 10,049,858
- Issue date Aug 14, 2018
- Mattson Technology, Inc.
- Vladimir Nagorny
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High voltage shielding and cooling in a charged particle beam gener...
- Patent number 10,037,864
- Issue date Jul 31, 2018
- Mapper Lithography IP B.V.
- Alexander Hendrik Vincent Van Veen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for assembling an electron exit window and an electron exit...
- Patent number 10,032,596
- Issue date Jul 24, 2018
- Tetra Laval Holdings & Finance S.A.
- Luca Poppi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electron microscope with multiple types of integrated x-ray detecto...
- Patent number 9,972,474
- Issue date May 15, 2018
- FEI Company
- Cornelis van Beek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
XRF analyzer with a hand shield
- Patent number 9,961,753
- Issue date May 1, 2018
- Moxtek, Inc.
- Vincent Floyd Jones
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM DEVICES AND MEMBRANE ASSEMBLIES USEFUL THEREIN
- Publication number 20240412940
- Publication date Dec 12, 2024
- AIRSEM TECHNOLOGIES LTD.
- Jenny SHKLOVSKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSED ION BEAM SYSTEM
- Publication number 20240371598
- Publication date Nov 7, 2024
- V TECHNOLOGY CO., LTD.
- Michinobu MIZUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Concentrated Solar Irradiation of Targets in Plasmas
- Publication number 20240363308
- Publication date Oct 31, 2024
- National Technology & Engineering Solutions of Sandia, LLC
- Jeffrey Daniel ENGERER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS
- Publication number 20240347321
- Publication date Oct 17, 2024
- TOKYO ELECTRON LIMITED
- Tamihiro KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, A...
- Publication number 20240162014
- Publication date May 16, 2024
- Samsung Electronics Co., Ltd.
- Heewon Min
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA CHAMBER WITH GAS CROSS-FLOW, MICROWAVE RESONATORS AND A ROTA...
- Publication number 20230395356
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Anantha Subramani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
- Publication number 20230386696
- Publication date Nov 30, 2023
- ASML NETHERLANDS B.V.
- Alexander Hendrik Vincent VAN VEEN
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
GATE VALVE APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20230317480
- Publication date Oct 5, 2023
- TOKYO ELECTRON LIMITED
- Masahiro DOGOME
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS RESERVOIR, GAS SUPPLY DEVICE HAVING A GAS RESERVOIR, AND PARTIC...
- Publication number 20230282442
- Publication date Sep 7, 2023
- CARL ZEISS MICROSCOPY GMBH
- Andreas Schmaunz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REFILLABLE ION CHAMBER WITH AUTOMATED PURGING SYSTEM
- Publication number 20230260738
- Publication date Aug 17, 2023
- Varian Medical Systems, Inc.
- Amir Shojaei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND LID MEMBER
- Publication number 20230058928
- Publication date Feb 23, 2023
- TOKYO ELECTRON LIMITED
- Hiroshi KONDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device For Generating A Dielectric Barrier Discharge And Method For...
- Publication number 20230046192
- Publication date Feb 16, 2023
- TDK Electronics AG
- Dariusz Korzec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REFILLABLE ION CHAMBER WITH AUTOMATED PURGING SYSTEM
- Publication number 20220285122
- Publication date Sep 8, 2022
- Varian Medical Systems, Inc.
- Amir Shojaei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pedestal Support Design for Precise Chamber Matching and Process Co...
- Publication number 20220068608
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- Gopu Krishna
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRINTED CIRCUIT BOARD FOR SEALING VACUUM SYSTEM
- Publication number 20220059311
- Publication date Feb 24, 2022
- ASML NETHERLANDS B.V.
- Yongxin WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CORROSION-RESISTANT COMPONENTS
- Publication number 20220013335
- Publication date Jan 13, 2022
- CoorsTek, Inc.
- Matthew Simpson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
- Publication number 20210383941
- Publication date Dec 9, 2021
- ASML NETHERLANDS B.V.
- Alexander Hendrik Vincent VAN VEEN
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
SPECIMEN CONTROL MEANS FOR PARTICLE BEAM MICROSCOPY
- Publication number 20210285899
- Publication date Sep 16, 2021
- Gerasimos Daniel DANILATOS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20210066025
- Publication date Mar 4, 2021
- HITACHI HIGH-TECH CORPORATION
- Keiichiro HOSOBUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHUTTER MECHANISM AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210027994
- Publication date Jan 28, 2021
- TOKYO ELECTRON LIMITED
- Suguru MOTEGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CHAMBER OPENING SYSTEM
- Publication number 20200194234
- Publication date Jun 18, 2020
- LAM RESEARCH CORPORATION
- Leonid BELAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
- Publication number 20200194141
- Publication date Jun 18, 2020
- ASML NETHERLANDS B.V.
- Alexander Hendrik Vincent VAN VEEN
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Charged-Particle Beam Apparatus
- Publication number 20200185189
- Publication date Jun 11, 2020
- Hitachi High-Technologies Corporation
- Uki IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING CHAMBER COMPONENT ASSEMBLY WITH PLASMA RESISTA...
- Publication number 20200152425
- Publication date May 14, 2020
- Applied Materials, Inc.
- Vahid FIROUZDOR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXAMINATION CONTAINER AND ELECTRON MICROSCOPE
- Publication number 20190080881
- Publication date Mar 14, 2019
- Taiwan Electron Microscope Instrument Corporation
- Tsu-Wei Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190006207
- Publication date Jan 3, 2019
- TOKYO ELECTRON LIMITED
- Manabu AMIKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
XRF Analyzer with Separate Source and Detector Heat Sinks
- Publication number 20180228009
- Publication date Aug 9, 2018
- Moxtek, Inc.
- Vincent Floyd Jones
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
SAMPLE CHAMBER DEVICE FOR ELECTRON MICROSCOPE, AND ELECTRON MICROSC...
- Publication number 20180158645
- Publication date Jun 7, 2018
- Korea Research Institute of Standards and Science
- Bok Lae CHO
- G02 - OPTICS
Information Patent Application
ELECTRON SCANNING MICROSCOPE AND IMAGE GENERATION METHOD
- Publication number 20180122617
- Publication date May 3, 2018
- Hitachi High-Technologies Corporation
- Shinsuke KAWANISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON MICROSCOPE WITH MULTIPE TYPES OF INTEGRATED X-RAY DETECTOR...
- Publication number 20180033589
- Publication date Feb 1, 2018
- FEI Company
- Frederick H. Schamber
- G01 - MEASURING TESTING

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Refillable ion chamber with automated purging system

Substrate processing apparatus and method of driving relay member

Vacuum chamber arrangement for charged particle beam generator

Vacuum chamber arrangement for charged particle beam generator

Refillable ion chamber with automated purging system

Pedestal support design for precise chamber matching and process co...

Corrosion-resistant components and methods of making

Charged particle beam device

Charged-particle beam apparatus

Vacuum chamber arrangement for charged particle beam generator

Rotary module for an accelerator system

Examination container and electron microscope

Vacuum chamber arrangement for charged particle beam generator

Integrated circuit analysis systems and methods with localized evac...

High voltage feedthrough assembly, time-resolved transmission elect...

X-ray analysis in air

Sample chamber device for electron microscope, and electron microsc...

XRF analyzer with separate source and detector heat sinks

Loading station for transferring frozen samples at low temperatures

X-ray tube including support for latitude supply wires

Inspection of a lithographic mask that is protected by a pellicle

Inspection device

Electron scanning microscope and image generation method

Enclosure for a target processing machine

Substrate processing apparatus

System and method for protection of vacuum seals in plasma processi...

High voltage shielding and cooling in a charged particle beam gener...

Method for assembling an electron exit window and an electron exit...

Electron microscope with multiple types of integrated x-ray detecto...

XRF analyzer with a hand shield

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM DEVICES AND MEMBRANE ASSEMBLIES USEFUL THEREIN

FOCUSED ION BEAM SYSTEM

Concentrated Solar Irradiation of Targets in Plasmas

PROCESSING APPARATUS

PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, A...

PLASMA CHAMBER WITH GAS CROSS-FLOW, MICROWAVE RESONATORS AND A ROTA...

VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR

GATE VALVE APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS

GAS RESERVOIR, GAS SUPPLY DEVICE HAVING A GAS RESERVOIR, AND PARTIC...

REFILLABLE ION CHAMBER WITH AUTOMATED PURGING SYSTEM

PLASMA PROCESSING APPARATUS AND LID MEMBER

Device For Generating A Dielectric Barrier Discharge And Method For...

REFILLABLE ION CHAMBER WITH AUTOMATED PURGING SYSTEM

Pedestal Support Design for Precise Chamber Matching and Process Co...

PRINTED CIRCUIT BOARD FOR SEALING VACUUM SYSTEM

CORROSION-RESISTANT COMPONENTS

VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR

SPECIMEN CONTROL MEANS FOR PARTICLE BEAM MICROSCOPY

Charged Particle Beam Device

SHUTTER MECHANISM AND SUBSTRATE PROCESSING APPARATUS

VACUUM CHAMBER OPENING SYSTEM

VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR

Charged-Particle Beam Apparatus

SUBSTRATE PROCESSING CHAMBER COMPONENT ASSEMBLY WITH PLASMA RESISTA...

EXAMINATION CONTAINER AND ELECTRON MICROSCOPE

SUBSTRATE PROCESSING APPARATUS

XRF Analyzer with Separate Source and Detector Heat Sinks

SAMPLE CHAMBER DEVICE FOR ELECTRON MICROSCOPE, AND ELECTRON MICROSC...

ELECTRON SCANNING MICROSCOPE AND IMAGE GENERATION METHOD

ELECTRON MICROSCOPE WITH MULTIPE TYPES OF INTEGRATED X-RAY DETECTOR...