Wafer manufacture interlock, load-lock module

Industry

CPC
G05B2219/45032

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

Current Industry

G05B2219/45032Wafer manufacture interlock, load-lock module

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Wafer transfer module and method thereof for transferring to-be-tra...
- Patent number 11,972,963
- Issue date Apr 30, 2024
- Shanghai Huali Integrated Circuit Corporation
- Yu Ren
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Semiconductor manufacturing apparatus and method for transferring w...
- Patent number 11,621,185
- Issue date Apr 4, 2023
- Tokyo Electron Limited
- Rintaro Takao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Component shortage detection device
- Patent number 11,622,487
- Issue date Apr 4, 2023
- Yamaha Hatsudoki Kabushiki Kaisha
- Yoichi Matsushita
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of processing target substrate
- Patent number 11,101,154
- Issue date Aug 24, 2021
- Tokyo Electron Limited
- Daisuke Morisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for identifying root causes of yield loss
- Patent number 10,935,962
- Issue date Mar 2, 2021
- National Cheng Kung University
- Fan-Tien Cheng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Matching process controllers for improved matching of process
- Patent number 10,884,400
- Issue date Jan 5, 2021
- Applied Materials, Inc.
- James Robert Moyne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical sensor optimization and system implementation with simplifi...
- Patent number 10,656,634
- Issue date May 19, 2020
- Halliburton Energy Services, Inc.
- Dingding Chen
- G02 - OPTICS
Information Patent Grant
System and method for learning and/or optimizing manufacturing proc...
- Patent number 10,635,993
- Issue date Apr 28, 2020
- Tokyo Electron Limited
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Work management device
- Patent number 10,591,907
- Issue date Mar 17, 2020
- FUJI CORPORATION
- Hitoshi Kobayashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method of controlling a robot
- Patent number 10,406,684
- Issue date Sep 10, 2019
- SK Hynix Inc.
- Sang Tae Lee
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Method for determining abnormal equipment in semiconductor manufact...
- Patent number 10,274,942
- Issue date Apr 30, 2019
- United Microelectronics Corp.
- Liu-Lian Chen
- G07 - CHECKING-DEVICES
Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and non-tr...
- Patent number 10,256,127
- Issue date Apr 9, 2019
- Tokyo Electron Limited
- Tokutarou Hayashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methodology for chamber performance matching for semiconductor equi...
- Patent number 10,192,763
- Issue date Jan 29, 2019
- Applied Materials, Inc.
- Xuesong Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Management apparatus, and mount substrate manufacturing method
- Patent number 10,139,810
- Issue date Nov 27, 2018
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Yuji Nakamura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Petri net-based optimal one-wafer cyclic scheduling of treelike hyb...
- Patent number 10,073,444
- Issue date Sep 11, 2018
- Macau University of Science and Technology
- Naiqi Wu
- G05 - CONTROLLING REGULATING
Information Patent Grant
Clustering for prediction models in process control and for optimal...
- Patent number 10,054,938
- Issue date Aug 21, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jung Cheng Ko
- G05 - CONTROLLING REGULATING
Information Patent Grant
Systems and methods for controlling temperatures in an epitaxial re...
- Patent number 10,007,255
- Issue date Jun 26, 2018
- Sunedison Semiconductor Limited (UEN201334164H)
- Benno Orschel
- G05 - CONTROLLING REGULATING
Information Patent Grant
Control system and control method for component mounting machine
- Patent number 9,966,247
- Issue date May 8, 2018
- Fuji Machine Mfg. Co., Ltd.
- Yukinori Nakayama
- G05 - CONTROLLING REGULATING
Information Patent Grant
Planar positioning system and method of using the same
- Patent number 9,898,000
- Issue date Feb 20, 2018
- AKRIBIS SYSTEMS PTE LTD
- Sastra Budiman
- G05 - CONTROLLING REGULATING
Information Patent Grant
Allocation of printed circuit boards on fitting lines
- Patent number 9,888,620
- Issue date Feb 6, 2018
- Siemens Aktiengesellschaft
- Alexander Pfaffinger
- G05 - CONTROLLING REGULATING
Information Patent Grant
Control apparatus, substrate processing apparatus, and substrate pr...
- Patent number 9,772,624
- Issue date Sep 26, 2017
- Tokyo Electron Limited
- Yuichi Takenaga
- G05 - CONTROLLING REGULATING
Information Patent Grant
Reliability monitor test strategy definition
- Patent number 9,645,573
- Issue date May 9, 2017
- International Business Machines Corporation
- Stephen P. Ayotte
- G05 - CONTROLLING REGULATING
Information Patent Grant
Matching process controllers for improved matching of process
- Patent number 9,606,519
- Issue date Mar 28, 2017
- Applied Materials, Inc.
- James Robert Moyne
- G05 - CONTROLLING REGULATING
Information Patent Grant
Complementary metal-oxide silicon having silicon and silicon german...
- Patent number 9,543,388
- Issue date Jan 10, 2017
- International Business Machines Corporation
- Gen P. Lauer
- G05 - CONTROLLING REGULATING
Information Patent Grant
System and method for learning and/or optimizing manufacturing proc...
- Patent number 9,396,443
- Issue date Jul 19, 2016
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Complementary metal-oxide silicon having silicon and silicon german...
- Patent number 9,373,638
- Issue date Jun 21, 2016
- International Business Machines Corporation
- Gen P. Lauer
- G05 - CONTROLLING REGULATING
Information Patent Grant
Optimization of a laser anneal beam path for maximizing chip yield
- Patent number 9,335,759
- Issue date May 10, 2016
- GLOBALFOUNDRIES Inc.
- Nicolas L. Breil
- G05 - CONTROLLING REGULATING
Information Patent Grant
Optimal buffer space configuration and scheduling for single-arm mu...
- Patent number 9,227,318
- Issue date Jan 5, 2016
- Macau University of Science and Technology
- Liping Bai
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Control apparatus, a substrate treating method, a substrate treatin...
- Patent number 8,868,233
- Issue date Oct 21, 2014
- Dainippon Screen Mfg. Co., Ltd.
- Hideki Shibata
- G05 - CONTROLLING REGULATING
Information Patent Grant
Vacuum process device and vacuum process method
- Patent number 8,812,151
- Issue date Aug 19, 2014
- Hitachi High-Technologies Corporation
- Teruo Nakata
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
VIBRATION DETERMINATION IN SUBSTRATE PROCESSING SYSTEMS
- Publication number 20240393761
- Publication date Nov 28, 2024
- Applied Materials, Inc.
- Zhi Wang
- G05 - CONTROLLING REGULATING
Information Patent Application
CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND CONTROL MET...
- Publication number 20240385582
- Publication date Nov 21, 2024
- TOKYO ELECTRON LIMITED
- Kiminari SAKAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIGITAL SIMULATION FOR SEMICONDUCTOR MANUFACTURING PROCESSES
- Publication number 20240329626
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Kay Siong NG
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE TREATMENT APPARATUS WITH FLEX-LL FUNCTION, AND SUBSTRATE...
- Publication number 20220359241
- Publication date Nov 10, 2022
- ASM IP HOLDING B.V.
- Yoshiyuki Umeoka
- G05 - CONTROLLING REGULATING
Information Patent Application
Wafer Transfer Module and Method Thereof for Transferring To-Be-Tra...
- Publication number 20220139749
- Publication date May 5, 2022
- Shanghai Huali Integrated Circuit Corporation
- Yu Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS
- Publication number 20210116898
- Publication date Apr 22, 2021
- Applied Materials, Inc.
- James Robert Moyne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPONENT SHORTAGE DETECTION DEVICE
- Publication number 20200323114
- Publication date Oct 8, 2020
- YAMAHA HATSUDOKI KABUSHIKI KAISHA
- Yoichi MATSUSHITA
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD OF PROCESSING TARGET SUBSTRATE
- Publication number 20190109030
- Publication date Apr 11, 2019
- TOKYO ELECTRON LIMITED
- Daisuke MORISAWA
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD FOR DETERMINING ABNORMAL EQUIPMENT IN SEMICONDUCTOR MANUFACT...
- Publication number 20180239340
- Publication date Aug 23, 2018
- United Microelectronics Corp.
- Liu-Lian Chen
- G05 - CONTROLLING REGULATING
Information Patent Application
WORK MANAGEMENT DEVICE
- Publication number 20170261968
- Publication date Sep 14, 2017
- FUJI MACHINE MFG. CO., LTD.
- Hitoshi KOBAYASHI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR IDENTIFYING ROOT CAUSES OF YIELD LOSS
- Publication number 20170153630
- Publication date Jun 1, 2017
- National Cheng Kung University
- Fan-Tien CHENG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODOLOGY FOR CHAMBER PERFORMANCE MATCHING FOR SEMICONDUCTOR EQUI...
- Publication number 20170098565
- Publication date Apr 6, 2017
- Applied Materials, Inc.
- Xuesong LU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Petri Net-Based Optimal One-Wafer Cyclic Scheduling of Treelike Hyb...
- Publication number 20170083009
- Publication date Mar 23, 2017
- Macau University of Science and Technology
- Naiqi Wu
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND NON-TR...
- Publication number 20170018444
- Publication date Jan 19, 2017
- TOKYO ELECTRON LIMITED
- Tokutarou HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR LEARNING AND/OR OPTIMIZING MANUFACTURING PROC...
- Publication number 20160307116
- Publication date Oct 20, 2016
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MANAGEMENT APPARATUS, AND MOUNT SUBSTRATE MANUFACTURING METHOD
- Publication number 20160306343
- Publication date Oct 20, 2016
- Panasonic Intellectual Property Management Co., Ltd.
- YUJI NAKAMURA
- G05 - CONTROLLING REGULATING
Information Patent Application
RELIABILITY MONITOR TEST STRATEGY DEFINITION
- Publication number 20160147220
- Publication date May 26, 2016
- International Business Machines Corporation
- Stephen P. Ayotte
- G05 - CONTROLLING REGULATING
Information Patent Application
SYSTEMS AND METHODS FOR CONTROLLING TEMPERATURES IN AN EPITAXIAL RE...
- Publication number 20150378372
- Publication date Dec 31, 2015
- SunEdison Semiconductor Limited (UEN201334164H)
- Benno Orschel
- G05 - CONTROLLING REGULATING
Information Patent Application
SYSTEM AND METHOD FOR MODELING AND/OR ANALYZING MANUFACTURING PROCE...
- Publication number 20150332167
- Publication date Nov 19, 2015
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OPTICAL SENSOR OPTIMIZATION AND SYSTEM IMPLEMENTATION WITH SIMPLIFI...
- Publication number 20150277438
- Publication date Oct 1, 2015
- Halliburton Energy Services Inc.
- Dingding Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONTROL APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PR...
- Publication number 20150261212
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Yuichi Takenaga
- G05 - CONTROLLING REGULATING
Information Patent Application
INTEGRATED MANAGEMENT SYSTEM, MANAGEMENT DEVICE, METHOD OF DISPLAYI...
- Publication number 20150253762
- Publication date Sep 10, 2015
- Hitachi Kokusai Electric Inc.
- Minoru Nakano
- G05 - CONTROLLING REGULATING
Information Patent Application
Clustering for Prediction Models in Process Control and for Optimal...
- Publication number 20150241876
- Publication date Aug 27, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jung Cheng Ko
- G05 - CONTROLLING REGULATING
Information Patent Application
OPTIMIZATION OF A LASER ANNEAL BEAM PATH FOR MAXIMIZING CHIP YIELD
- Publication number 20150227137
- Publication date Aug 13, 2015
- International Business Machines Corporation
- NICOLAS L. BREIL
- G05 - CONTROLLING REGULATING
Information Patent Application
CONTROL SYSTEM AND CONTROL METHOD FOR COMPONENT MOUNTING MACHINE
- Publication number 20150206735
- Publication date Jul 23, 2015
- FUJI MACHINE MFG. CO., LTD.
- Yukinori Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALLOCATION OF PRINTED CIRCUIT BOARDS ON FITTING LINES
- Publication number 20150195966
- Publication date Jul 9, 2015
- Alexander Pfaffinger
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR LEARNING AND/OR OPTIMIZING MANUFACTURING PROC...
- Publication number 20150161520
- Publication date Jun 11, 2015
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR MOBILE CLEANSPACE FABRICATORS
- Publication number 20150142161
- Publication date May 21, 2015
- Futrfab Inc.
- Frederick A. Flitsch
- G05 - CONTROLLING REGULATING
Information Patent Application
Planar Positioning System And Method Of Using The Same
- Publication number 20150127133
- Publication date May 7, 2015
- Akribis Systems PTE LTD
- Sastra Budiman
- G05 - CONTROLLING REGULATING
Information Patent Application
MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS
- Publication number 20150105895
- Publication date Apr 16, 2015
- Applied Materials, Inc.
- James Robert Moyne
- G05 - CONTROLLING REGULATING

Wafer manufacture interlock, load-lock module

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Wafer transfer module and method thereof for transferring to-be-tra...

Semiconductor manufacturing apparatus and method for transferring w...

Component shortage detection device

Method of processing target substrate

System and method for identifying root causes of yield loss

Matching process controllers for improved matching of process

Optical sensor optimization and system implementation with simplifi...

System and method for learning and/or optimizing manufacturing proc...

Work management device

System and method of controlling a robot

Method for determining abnormal equipment in semiconductor manufact...

Substrate transfer apparatus, substrate transfer method, and non-tr...

Methodology for chamber performance matching for semiconductor equi...

Management apparatus, and mount substrate manufacturing method

Petri net-based optimal one-wafer cyclic scheduling of treelike hyb...

Clustering for prediction models in process control and for optimal...

Systems and methods for controlling temperatures in an epitaxial re...

Control system and control method for component mounting machine

Planar positioning system and method of using the same

Allocation of printed circuit boards on fitting lines

Control apparatus, substrate processing apparatus, and substrate pr...

Reliability monitor test strategy definition

Matching process controllers for improved matching of process

Complementary metal-oxide silicon having silicon and silicon german...

System and method for learning and/or optimizing manufacturing proc...

Complementary metal-oxide silicon having silicon and silicon german...

Optimization of a laser anneal beam path for maximizing chip yield

Optimal buffer space configuration and scheduling for single-arm mu...

Control apparatus, a substrate treating method, a substrate treatin...

Vacuum process device and vacuum process method

Patents Applicationslast 30 patents

VIBRATION DETERMINATION IN SUBSTRATE PROCESSING SYSTEMS

CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND CONTROL MET...

DIGITAL SIMULATION FOR SEMICONDUCTOR MANUFACTURING PROCESSES

SUBSTRATE TREATMENT APPARATUS WITH FLEX-LL FUNCTION, AND SUBSTRATE...

Wafer Transfer Module and Method Thereof for Transferring To-Be-Tra...

MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS

COMPONENT SHORTAGE DETECTION DEVICE

METHOD OF PROCESSING TARGET SUBSTRATE

METHOD FOR DETERMINING ABNORMAL EQUIPMENT IN SEMICONDUCTOR MANUFACT...

WORK MANAGEMENT DEVICE

SYSTEM AND METHOD FOR IDENTIFYING ROOT CAUSES OF YIELD LOSS

METHODOLOGY FOR CHAMBER PERFORMANCE MATCHING FOR SEMICONDUCTOR EQUI...

Petri Net-Based Optimal One-Wafer Cyclic Scheduling of Treelike Hyb...

SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND NON-TR...

SYSTEM AND METHOD FOR LEARNING AND/OR OPTIMIZING MANUFACTURING PROC...

MANAGEMENT APPARATUS, AND MOUNT SUBSTRATE MANUFACTURING METHOD

RELIABILITY MONITOR TEST STRATEGY DEFINITION

SYSTEMS AND METHODS FOR CONTROLLING TEMPERATURES IN AN EPITAXIAL RE...

SYSTEM AND METHOD FOR MODELING AND/OR ANALYZING MANUFACTURING PROCE...

OPTICAL SENSOR OPTIMIZATION AND SYSTEM IMPLEMENTATION WITH SIMPLIFI...

CONTROL APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PR...

INTEGRATED MANAGEMENT SYSTEM, MANAGEMENT DEVICE, METHOD OF DISPLAYI...

Clustering for Prediction Models in Process Control and for Optimal...

OPTIMIZATION OF A LASER ANNEAL BEAM PATH FOR MAXIMIZING CHIP YIELD

CONTROL SYSTEM AND CONTROL METHOD FOR COMPONENT MOUNTING MACHINE

ALLOCATION OF PRINTED CIRCUIT BOARDS ON FITTING LINES

SYSTEM AND METHOD FOR LEARNING AND/OR OPTIMIZING MANUFACTURING PROC...

METHOD AND APPARATUS FOR MOBILE CLEANSPACE FABRICATORS

Planar Positioning System And Method Of Using The Same

MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS