whereby illumination and light collection take place in the same area of the discharge

Industry

CPC
H01J37/228

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/228whereby illumination and light collection take place in the same area of the discharge

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Cost effective probing in high volume manufacture of micro LEDs
- Patent number 12,014,896
- Issue date Jun 18, 2024
- ATTOLIGHT AG
- Matthew J. Davies
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for wavelength resolved angular resolved cathodoluminescence
- Patent number 11,764,032
- Issue date Sep 19, 2023
- Gatan, Inc.
- Michael Bertilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method
- Patent number 11,710,670
- Issue date Jul 25, 2023
- SPTS Technologies Limited
- Oliver Ansell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for determining a property of a sample that is to...
- Patent number 11,587,762
- Issue date Feb 21, 2023
- FEI Company
- Maarten Kuijper
- G01 - MEASURING TESTING
Information Patent Grant
Load lock device having optical measuring device for acquiring dist...
- Patent number 11,521,883
- Issue date Dec 6, 2022
- NANYA TECHNOLOGY CORPORATION
- Chia-Fu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical height detection system
- Patent number 11,521,826
- Issue date Dec 6, 2022
- ASML Netherlands B.V.
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for an advanced charged controller for wafer i...
- Patent number 11,482,399
- Issue date Oct 25, 2022
- ASML Netherlands B.V.
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microscopy
- Patent number 11,404,243
- Issue date Aug 2, 2022
- Mochii, Inc.
- Christopher Su-Yan Own
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inspection devices and methods of inspecting a sample
- Patent number 11,404,240
- Issue date Aug 2, 2022
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Changqing Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for alignment of cathodoluminescence optics
- Patent number 11,205,559
- Issue date Dec 21, 2021
- Gatan, Inc.
- John Andrew Hunt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Additive manufacturing device utilizing EB-laser composite scan
- Patent number 11,192,187
- Issue date Dec 7, 2021
- Tsinghua University
- Feng Lin
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Photoabsorption microscopy using electron analysis
- Patent number 11,101,102
- Issue date Aug 24, 2021
- The Board of Trustees of the Leland Stanford Junior University
- Arunava Majumdar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System combination of a particle beam system and a light-optical sy...
- Patent number 11,087,955
- Issue date Aug 10, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for wavelength resolved angular resolved cathodoluminescence
- Patent number 10,943,764
- Issue date Mar 9, 2021
- Gatan, Inc.
- Michael Bertilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system, opto-electro simultaneous detection s...
- Patent number 10,879,036
- Issue date Dec 29, 2020
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Wei He
- G02 - OPTICS
Information Patent Grant
Method for alignment of a light beam to a charged particle beam
- Patent number 10,777,383
- Issue date Sep 15, 2020
- FEI Company
- Cameron James Zachreson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for inspecting a sample using an assembly comprising a scann...
- Patent number 10,651,009
- Issue date May 12, 2020
- DELMIC IP B.V.
- Jacob Pieter Hoogenboom
- G02 - OPTICS
Information Patent Grant
Patterned atomic layer etching and deposition using miniature-colum...
- Patent number 10,607,845
- Issue date Mar 31, 2020
- Kevin M. Monahan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Charged particle beam device and scanning electron microscope
- Patent number 10,497,535
- Issue date Dec 3, 2019
- Matsusada Precision, Inc.
- Kazuya Kumamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and methods
- Patent number 10,410,828
- Issue date Sep 10, 2019
- Carl Zeiss Microscopy, LLC
- Chuong Huynh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray beam alignment device and method
- Patent number 10,325,691
- Issue date Jun 18, 2019
- Consolidated Nuclear Security, LLC
- Nathaniel Frederick Henry
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Holder device for electron microscope
- Patent number 10,312,050
- Issue date Jun 4, 2019
- SNU R&DB Foundation
- Young Woon Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for inspecting and reviewing a sample
- Patent number 10,177,048
- Issue date Jan 8, 2019
- Applied Materials Israel Ltd.
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cathodoluminescence detector including inner and outer tubes sealed...
- Patent number 10,157,726
- Issue date Dec 18, 2018
- Centre National de la Recherche Scientifique
- Mathieu Kociak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for determining a density of fluorescent marke...
- Patent number 10,132,753
- Issue date Nov 20, 2018
- DELMIC B.V.
- Jacob Pieter Hoogenboom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of imaging a specimen using ptychography
- Patent number 10,008,363
- Issue date Jun 26, 2018
- FEI Company
- Eric Gerardus Theodoor Bosch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual laser beam system used with an electron microscope and FIB
- Patent number 9,991,090
- Issue date Jun 5, 2018
- FEI Company
- Kelly Bruland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for time-resolved pump-probe electron microscopy
- Patent number 9,978,559
- Issue date May 22, 2018
- Max-Planck Gesellschaft zur Foerderung der Wissenschaften e.V.
- Nahid Talebi Sarvari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for correlative scanning transmission electron microscopy (S...
- Patent number 9,966,223
- Issue date May 8, 2018
- Leibniz-Institut fuer neue Materialien Gemeinnuetzige GmbH
- Niels De Jonge
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Sample holding device for studying light-driven reactions and sampl...
- Patent number 9,837,244
- Issue date Dec 5, 2017
- INDUSTRIAL TECHNOLOGY RESEARCH INSITUTE
- Ming-Wei Lai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Charged Particle Beam System
- Publication number 20240177964
- Publication date May 30, 2024
- Hitachi High-Tech Corporation
- Heita KIMIZUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transmission Electron Microscope
- Publication number 20240096588
- Publication date Mar 21, 2024
- JEOL Ltd.
- Kanako Noguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PULSED VOLTAGE CONTRAST DETECTION AND CAPTU...
- Publication number 20230335374
- Publication date Oct 19, 2023
- ASML NETHERLANDS B.V.
- Benoit Herve GAURY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MICROMACHINING A SAMPLE USING A FOCUSED IO...
- Publication number 20230298855
- Publication date Sep 21, 2023
- DELMIC IP B.V.
- Andries Pieter Johan EFFTING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Load Lock Device Having Optical Measuring Device for Acquiring Dist...
- Publication number 20220285195
- Publication date Sep 8, 2022
- NANYA TECHNOLOGY CORPORATION
- CHIA-FU CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COST EFFECTIVE PROBING IN HIGH VOLUME MANUFACTURE OF MICRO LEDS
- Publication number 20220230841
- Publication date Jul 21, 2022
- ATTOLIGHT AG
- Matthew J. Davies
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CATHODOLUMINESCENCE ELECTRON MICROSCOPE
- Publication number 20220216028
- Publication date Jul 7, 2022
- ATTOLIGHT AG
- BERNEY Jean
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICES AND METHODS OF INSPECTING A SAMPLE
- Publication number 20220199359
- Publication date Jun 23, 2022
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Changqing CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR DETERMINING A PROPERTY OF A SAMPLE THAT IS TO...
- Publication number 20210257183
- Publication date Aug 19, 2021
- FEI Company
- Maarten Kuijper
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR WAVELENGTH RESOLVED ANGULAR RESOLVED CATHODOLUMINESCENCE
- Publication number 20210210305
- Publication date Jul 8, 2021
- GATAN, INC.
- Michael Bertilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method
- Publication number 20210134684
- Publication date May 6, 2021
- SPTS TECHNOLOGIES LIMITED
- Oliver Ansell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ALIGNMENT OF CATHODOLUMINESCENCE OPTICS
- Publication number 20210125807
- Publication date Apr 29, 2021
- GATAN, INC.
- John Andrew Hunt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOABSORPTION MICROSCOPY USING ELECTRON ANALYSIS
- Publication number 20210066030
- Publication date Mar 4, 2021
- The Board of Trustees of the Leland Stanford Junior University
- Arunava MAJUMDAR
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM PVD ENDPOINT DETECTION AND CLOSED-LOOP PROCESS CONTRO...
- Publication number 20210062326
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- David Masayuki ISHIKAWA
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM COMBINATION OF A PARTICLE BEAM SYSTEM AND A LIGHT-OPTICAL SY...
- Publication number 20210035773
- Publication date Feb 4, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL HEIGHT DETECTION SYSTEM
- Publication number 20200279715
- Publication date Sep 3, 2020
- ASML NETHERLANDS B.V.
- Jian ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR AN ADVANCED CHARGED CONTROLLER FOR WAFER I...
- Publication number 20200273662
- Publication date Aug 27, 2020
- ASML Netherlands B.V.
- Jian ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR WAVELENGTH RESOLVED ANGULAR RESOLVED CATHODOLUMINESCENCE
- Publication number 20190371569
- Publication date Dec 5, 2019
- GATAN, INC.
- Michael Bertilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM, OPTO-ELECTRO SIMULTANEOUS DETECTION S...
- Publication number 20190287760
- Publication date Sep 19, 2019
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Wei He
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM AND METHODS
- Publication number 20190189392
- Publication date Jun 20, 2019
- Carl Zeiss Microscopy, LLC
- Chuong Huynh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF IMAGING A SPECIMEN USING PTYCHOGRAPHY
- Publication number 20180019098
- Publication date Jan 18, 2018
- FEI Company
- Eric Gerardus Theodoor Bosch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR TIME-RESOLVED PUMP-PROBE ELECTRON MICROSCOPY
- Publication number 20170271123
- Publication date Sep 21, 2017
- Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.
- Nahid TALEBI SARVARI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for inspecting a sample using an assembly comprising a scann...
- Publication number 20170221675
- Publication date Aug 3, 2017
- DELMIC B.V.
- Jacob Pieter HOOGENBOOM
- G02 - OPTICS
Information Patent Application
DEVICE FOR CORRELATIVE SCANNING TRANSMISSION ELECTRON MICROSCOPY (S...
- Publication number 20170018399
- Publication date Jan 19, 2017
- LEIBNIZ-INSTITUT FUER NEUE MATERIALIEN GEMEINNUETZIGE GESELLSCHAFT MIT BESCHR...
- Niels DE JONGE
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING A DENSITY OF FLUORESCENT MARKE...
- Publication number 20160377544
- Publication date Dec 29, 2016
- DELMIC B.V.
- Jacob Pieter HOOGENBOOM
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR INSPECTING AND REVIEWING A SAMPLE
- Publication number 20160260642
- Publication date Sep 8, 2016
- APPLIED MATERIALS ISRAEL LTD.
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM AND METHODS
- Publication number 20160203948
- Publication date Jul 14, 2016
- Carl Zeiss Microscopy, LLC
- Chuong Huynh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE HOLDING DEVICE FOR STUDYING LIGHT-DRIVEN REACTIONS AND SAMPL...
- Publication number 20160189918
- Publication date Jun 30, 2016
- Industrial Technology Research Institute
- MING-WEI LAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Simultaneous Detection of Secondary Electrons...
- Publication number 20150369737
- Publication date Dec 24, 2015
- FEI Company
- William Parker
- G01 - MEASURING TESTING
Information Patent Application
INTEGRATED OPTICAL AND CHARGED PARTICLE INSPECTION APPARATUS
- Publication number 20150262784
- Publication date Sep 17, 2015
- DELMIC B.V.
- Jacob Pieter Hoogenboom
- H01 - BASIC ELECTRIC ELEMENTS

whereby illumination and light collection take place in the same area of the discharge

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Cost effective probing in high volume manufacture of micro LEDs

Apparatus for wavelength resolved angular resolved cathodoluminescence

Apparatus and method

Device and method for determining a property of a sample that is to...

Load lock device having optical measuring device for acquiring dist...

Optical height detection system

Method and apparatus for an advanced charged controller for wafer i...

Microscopy

Inspection devices and methods of inspecting a sample

System and method for alignment of cathodoluminescence optics

Additive manufacturing device utilizing EB-laser composite scan

Photoabsorption microscopy using electron analysis

System combination of a particle beam system and a light-optical sy...

Apparatus for wavelength resolved angular resolved cathodoluminescence

Charged particle beam system, opto-electro simultaneous detection s...

Method for alignment of a light beam to a charged particle beam

Method for inspecting a sample using an assembly comprising a scann...

Patterned atomic layer etching and deposition using miniature-colum...

Charged particle beam device and scanning electron microscope

Charged particle beam system and methods

X-ray beam alignment device and method

Holder device for electron microscope

System for inspecting and reviewing a sample

Cathodoluminescence detector including inner and outer tubes sealed...

Method and apparatus for determining a density of fluorescent marke...

Method of imaging a specimen using ptychography

Dual laser beam system used with an electron microscope and FIB

Method and device for time-resolved pump-probe electron microscopy

Device for correlative scanning transmission electron microscopy (S...

Sample holding device for studying light-driven reactions and sampl...

Patents Applicationslast 30 patents

Charged Particle Beam System

Transmission Electron Microscope

SYSTEMS AND METHODS FOR PULSED VOLTAGE CONTRAST DETECTION AND CAPTU...

METHOD AND APPARATUS FOR MICROMACHINING A SAMPLE USING A FOCUSED IO...

Load Lock Device Having Optical Measuring Device for Acquiring Dist...

COST EFFECTIVE PROBING IN HIGH VOLUME MANUFACTURE OF MICRO LEDS

CATHODOLUMINESCENCE ELECTRON MICROSCOPE

INSPECTION DEVICES AND METHODS OF INSPECTING A SAMPLE

DEVICE AND METHOD FOR DETERMINING A PROPERTY OF A SAMPLE THAT IS TO...

APPARATUS FOR WAVELENGTH RESOLVED ANGULAR RESOLVED CATHODOLUMINESCENCE

Apparatus and Method

SYSTEM AND METHOD FOR ALIGNMENT OF CATHODOLUMINESCENCE OPTICS

PHOTOABSORPTION MICROSCOPY USING ELECTRON ANALYSIS

ELECTRON BEAM PVD ENDPOINT DETECTION AND CLOSED-LOOP PROCESS CONTRO...

SYSTEM COMBINATION OF A PARTICLE BEAM SYSTEM AND A LIGHT-OPTICAL SY...

OPTICAL HEIGHT DETECTION SYSTEM

METHOD AND APPARATUS FOR AN ADVANCED CHARGED CONTROLLER FOR WAFER I...

APPARATUS FOR WAVELENGTH RESOLVED ANGULAR RESOLVED CATHODOLUMINESCENCE

CHARGED PARTICLE BEAM SYSTEM, OPTO-ELECTRO SIMULTANEOUS DETECTION S...

CHARGED PARTICLE BEAM SYSTEM AND METHODS

METHOD OF IMAGING A SPECIMEN USING PTYCHOGRAPHY

METHOD AND DEVICE FOR TIME-RESOLVED PUMP-PROBE ELECTRON MICROSCOPY

Method for inspecting a sample using an assembly comprising a scann...

DEVICE FOR CORRELATIVE SCANNING TRANSMISSION ELECTRON MICROSCOPY (S...

METHOD AND APPARATUS FOR DETERMINING A DENSITY OF FLUORESCENT MARKE...

SYSTEM FOR INSPECTING AND REVIEWING A SAMPLE

CHARGED PARTICLE BEAM SYSTEM AND METHODS

SAMPLE HOLDING DEVICE FOR STUDYING LIGHT-DRIVEN REACTIONS AND SAMPL...

System and Method for Simultaneous Detection of Secondary Electrons...

INTEGRATED OPTICAL AND CHARGED PARTICLE INSPECTION APPARATUS