with electrostatic counterbalancing means

Industry

CPC
G01P15/131

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Parent Industries

GPHYSICS G01Measuring instruments G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT G01P15/00Measuring acceleration Measuring deceleration Measuring shock

Current Industry

G01P15/131with electrostatic counterbalancing means

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for lithography process
- Patent number 12,066,756
- Issue date Aug 20, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Hung Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Closed-loop microelectromechanical accelerometer with compensation...
- Patent number 11,965,906
- Issue date Apr 23, 2024
- STMicroelectronics S.r.l.
- Gabriele Gattere
- G01 - MEASURING TESTING
Information Patent Grant
Pendular accelerometer sensor with conditional capacitive detection
- Patent number 11,906,539
- Issue date Feb 20, 2024
- SAFRAN ELECTRONICS & DEFENSE
- Philippe Ullah
- G01 - MEASURING TESTING
Information Patent Grant
MEMS vibrating beam accelerometer with built-in test actuators
- Patent number 11,703,521
- Issue date Jul 18, 2023
- Honeywell International Inc.
- John Reinke
- G01 - MEASURING TESTING
Information Patent Grant
High performance micro-electro-mechanical systems accelerometer
- Patent number 11,614,463
- Issue date Mar 28, 2023
- Cambridge Enterprise Limited
- Xudong Zou
- G01 - MEASURING TESTING
Information Patent Grant
MEMS sensor detection device and MEMS sensor system
- Patent number 11,401,160
- Issue date Aug 2, 2022
- INSTITUTE OF GEOLOGY AND GEOPHYSICS CHINESE ACADEMY OF SCIENCES
- Zongwei Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Moisture detector, moisture detection method, electronic device, an...
- Patent number 11,397,047
- Issue date Jul 26, 2022
- MINEBEA MITSUMI INC.
- Taketomo Nakane
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatically softened accelerometer spring
- Patent number 11,333,679
- Issue date May 17, 2022
- Facebook Technologies, LLC
- Doruk Senkal
- G01 - MEASURING TESTING
Information Patent Grant
MEMS sensor structure comprising mechanically preloaded suspension...
- Patent number 11,267,694
- Issue date Mar 8, 2022
- Stichting VU-VUMC
- Eric Hennes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS electrostatic capacitor type acceleration sensor
- Patent number 11,169,174
- Issue date Nov 9, 2021
- Hitachi, Ltd.
- Takashi Oshima
- G01 - MEASURING TESTING
Information Patent Grant
Vibrating device, vibrating device module, electronic apparatus, an...
- Patent number 11,137,415
- Issue date Oct 5, 2021
- Seiko Epson Corporation
- Yoshiyuki Matsuura
- G01 - MEASURING TESTING
Information Patent Grant
Sensor with servo noise reduction
- Patent number 11,035,876
- Issue date Jun 15, 2021
- Hitachi, Ltd.
- Takashi Oshima
- G01 - MEASURING TESTING
Information Patent Grant
Accelerometer control
- Patent number 10,900,994
- Issue date Jan 26, 2021
- ATLANTIC INERTIAL SYSTEMS, LIMITED
- Alan Malvern
- G01 - MEASURING TESTING
Information Patent Grant
Accelerometer
- Patent number 10,884,020
- Issue date Jan 5, 2021
- ATLANTIC INERTIAL SYSTEMS, LIMITED
- Alan Malvern
- G01 - MEASURING TESTING
Information Patent Grant
MEMS pendulum accelerometer having two measurement ranges
- Patent number 10,866,261
- Issue date Dec 15, 2020
- SAFRAN ELECTRONICS & DEFENSE
- Vincent Ragot
- G01 - MEASURING TESTING
Information Patent Grant
Closed loop accelerometer
- Patent number 10,816,568
- Issue date Oct 27, 2020
- PHYSICAL LOGIC LTD.
- Lisa Koenigsberg
- G01 - MEASURING TESTING
Information Patent Grant
Accelerometers
- Patent number 10,775,404
- Issue date Sep 15, 2020
- ATLANTIC INERTIAL SYSTEMS, LIMITED.
- Kevin Townsend
- G01 - MEASURING TESTING
Information Patent Grant
Sensor apparatus, planning processing system, and planning method
- Patent number 10,775,521
- Issue date Sep 15, 2020
- Hitachi, Ltd.
- Masaki Murata
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
MEMS sensor compensation for off-axis movement
- Patent number 10,766,764
- Issue date Sep 8, 2020
- Invensense, Inc.
- Ilya Gurin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity sensor, inertia measurement device, vehicle posit...
- Patent number 10,761,109
- Issue date Sep 1, 2020
- Seiko Epson Corporation
- Shogo Inaba
- G01 - MEASURING TESTING
Information Patent Grant
MEMS sensor structure comprising mechanically preloaded suspension...
- Patent number 10,710,870
- Issue date Jul 14, 2020
- Stichting VU-VUMC
- Eric Hennes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acceleration sensor
- Patent number 10,690,696
- Issue date Jun 23, 2020
- Hitachi, Ltd.
- Takashi Oshima
- G01 - MEASURING TESTING
Information Patent Grant
Physical quantity sensor, electronic device, and mobile body
- Patent number 10,663,481
- Issue date May 26, 2020
- Seiko Epson Corporation
- Satoru Tanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual capacitive linearization circuit
- Patent number 10,649,001
- Issue date May 12, 2020
- Invensense, Inc.
- Matthew Julian Thompson
- G01 - MEASURING TESTING
Information Patent Grant
Acceleration sensor
- Patent number 10,585,112
- Issue date Mar 10, 2020
- Hitachi, Ltd.
- Takashi Oshima
- G01 - MEASURING TESTING
Information Patent Grant
Accelerometers
- Patent number 10,571,485
- Issue date Feb 25, 2020
- ATLANTIC INERTIAL SYSTEMS, LIMITED
- Michael Durston
- G01 - MEASURING TESTING
Information Patent Grant
Capacitive accelerometer
- Patent number 10,564,176
- Issue date Feb 18, 2020
- EM Microelectronic-Marin SA
- Sylvain Grosjean
- G01 - MEASURING TESTING
Information Patent Grant
Inertia sensor with improved detection sensitivity using servo volt...
- Patent number 10,527,643
- Issue date Jan 7, 2020
- Hitachi, Ltd.
- Atsushi Isobe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dynamic self-calibration of an accelerometer system
- Patent number 10,495,664
- Issue date Dec 3, 2019
- Northrop Grumman Systems Corporation
- Robert E. Stewart
- G01 - MEASURING TESTING
Information Patent Grant
Window sensing device with movement detection
- Patent number 10,460,578
- Issue date Oct 29, 2019
- Robert Bosch GmbH
- William DiPoala
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
ACCELEROMETER INCLUDING PROTECTIVE HOUSING
- Publication number 20240118306
- Publication date Apr 11, 2024
- Honeywell International Inc.
- Paul W. Dwyer
- G01 - MEASURING TESTING
Information Patent Application
MEMS ACCELEROMETER SYSTEMS
- Publication number 20240094238
- Publication date Mar 21, 2024
- Simmonds Precision Products, Inc.
- Richard A. Hull
- G01 - MEASURING TESTING
Information Patent Application
PENDULAR ACCELEROMETER SENSOR WITH CONDITIONAL CAPACITIVE DETECTION
- Publication number 20230026178
- Publication date Jan 26, 2023
- SAFRAN ELECTRONICS & DEFENSE
- Philippe ULLAH
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR LITHOGRAPHY PROCESS
- Publication number 20220404390
- Publication date Dec 22, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Hung LIAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MECHANICALLY-SENSITIVE SEMICONDUCTING TRIODE CAPACITOR
- Publication number 20220252635
- Publication date Aug 11, 2022
- Kionix, Inc.
- Jonah DEWALL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR STRUCTURE COMPRISING MECHANICALLY PRELOADED SUSPENSION...
- Publication number 20200369513
- Publication date Nov 26, 2020
- Eric Hennes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH PERFORMANCE MICRO-ELECTRO-MECHANICAL SYSTEMS ACCELEROMETER
- Publication number 20200166537
- Publication date May 28, 2020
- Cambridge Enterprise Limited
- Xudong Zou
- G01 - MEASURING TESTING
Information Patent Application
ACCELEROMETERS
- Publication number 20200041537
- Publication date Feb 6, 2020
- Atlantic Inertial Systems Limited
- Kevin Townsend
- G01 - MEASURING TESTING
Information Patent Application
ACCELEROMETERS
- Publication number 20190242925
- Publication date Aug 8, 2019
- Atlantic Inertial Systems, Limited
- Alan MALVERN
- G01 - MEASURING TESTING
Information Patent Application
DUAL CAPACITIVE LINEARIZATION CIRCUIT
- Publication number 20190170786
- Publication date Jun 6, 2019
- InvenSense, Inc.
- Matthew Julian THOMPSON
- G01 - MEASURING TESTING
Information Patent Application
PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND MOBILE BODY
- Publication number 20190154728
- Publication date May 23, 2019
- SEIKO EPSON CORPORATION
- Satoru TANAKA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHYSICAL QUANTITY SENSOR, INERTIA MEASUREMENT DEVICE, VEHICLE POSIT...
- Publication number 20190101566
- Publication date Apr 4, 2019
- SEIKO EPSON CORPORATION
- Shogo INABA
- G01 - MEASURING TESTING
Information Patent Application
DYNAMIC SELF-CALIBRATION OF AN ACCELEROMETER SYSTEM
- Publication number 20190049485
- Publication date Feb 14, 2019
- Northrop Grumman Systems Corporation
- Robert E. Stewart
- G01 - MEASURING TESTING
Information Patent Application
Vibrating Device, Vibrating Device Module, Electronic Apparatus, An...
- Publication number 20180372773
- Publication date Dec 27, 2018
- SEIKO EPSON CORPORATION
- Yoshiyuki MATSUURA
- G01 - MEASURING TESTING
Information Patent Application
WINDOW SENSING DEVICE WITH MOVEMENT DETECTION
- Publication number 20180357866
- Publication date Dec 13, 2018
- ROBERT BOSCH GmbH
- William DiPoala
- G01 - MEASURING TESTING
Information Patent Application
MEMS PENDULUM ACCELEROMETER HAVING TWO MEASUREMENT RANGES
- Publication number 20180335445
- Publication date Nov 22, 2018
- SAFRAN ELECTRONICS & DEFENSE
- Vincent RAGOT
- G01 - MEASURING TESTING
Information Patent Application
Inertia Sensor
- Publication number 20180210005
- Publication date Jul 26, 2018
- Hitachi, Ltd
- Atsushi ISOBE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELEROMETER CONTROL
- Publication number 20180128851
- Publication date May 10, 2018
- Atlantic Inertial Systems, Limited
- Alan MALVERN
- G01 - MEASURING TESTING
Information Patent Application
OPTICALLY ENABLED MEMS INERTIAL SENSORS ON INTEGRATED PHOTONIC PLAT...
- Publication number 20180038890
- Publication date Feb 8, 2018
- Khalifa University of Science and Technology
- Marcus S. Dahlem
- G01 - MEASURING TESTING
Information Patent Application
ACCELERATION SENSOR
- Publication number 20180011125
- Publication date Jan 11, 2018
- Hitachi, Ltd
- Takashi OSHIMA
- G01 - MEASURING TESTING
Information Patent Application
ACCELEROMETER SENSOR SYSTEM
- Publication number 20170276698
- Publication date Sep 28, 2017
- Northrop Grumman Systems Corporation
- MICHAEL D. BULATOWICZ
- G01 - MEASURING TESTING
Information Patent Application
DYNAMIC SELF-CALIBRATION OF AN ACCELEROMETER SYSTEM
- Publication number 20170269122
- Publication date Sep 21, 2017
- Northrop Grumman Systems Corporation
- Robert E. Stewart
- G01 - MEASURING TESTING
Information Patent Application
ACCELEROMETERS
- Publication number 20170153267
- Publication date Jun 1, 2017
- Atlantic Inertial Systems Limited
- Kevin Townsend
- G01 - MEASURING TESTING
Information Patent Application
ACCELEROMETERS
- Publication number 20170146562
- Publication date May 25, 2017
- Atlantic Inertial Systems Limited
- Michael Durston
- G01 - MEASURING TESTING
Information Patent Application
ACCELEROMETERS
- Publication number 20170089947
- Publication date Mar 30, 2017
- Atlantic Inertial Systems Limited
- Kevin Townsend
- G01 - MEASURING TESTING
Information Patent Application
PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND MOBILE BODY
- Publication number 20160061858
- Publication date Mar 3, 2016
- SEIKO EPSON CORPORATION
- Satoru TANAKA
- G01 - MEASURING TESTING
Information Patent Application
PERFORMANCE OPTIMIZATION OF A DIFFERENTIAL CAPACITANCE BASED MOTION...
- Publication number 20150346236
- Publication date Dec 3, 2015
- Northrop Grumman Systems Corporation
- JUERGEN KARL PETER FLAMM
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND STRUCTURE OF AN INTEGRATED MEMS INERTIAL SENSOR DEVICE U...
- Publication number 20140361348
- Publication date Dec 11, 2014
- SHINGO YONEOKA
- G01 - MEASURING TESTING
Information Patent Application
EXTENDED-RANGE CLOSED-LOOP ACCELEROMETER
- Publication number 20140352434
- Publication date Dec 4, 2014
- Honeywell International Inc.
- Jens Henrickson
- G01 - MEASURING TESTING
Information Patent Application
FULLY DIFFERENTIAL CAPACITIVE ARCHITECTURE FOR MEMS ACCELEROMETER
- Publication number 20140260617
- Publication date Sep 18, 2014
- Agency for Science Technology and Research (A"STAR)
- Ilker Ender Ocak
- G01 - MEASURING TESTING

with electrostatic counterbalancing means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for lithography process

Closed-loop microelectromechanical accelerometer with compensation...

Pendular accelerometer sensor with conditional capacitive detection

MEMS vibrating beam accelerometer with built-in test actuators

High performance micro-electro-mechanical systems accelerometer

MEMS sensor detection device and MEMS sensor system

Moisture detector, moisture detection method, electronic device, an...

Electrostatically softened accelerometer spring

MEMS sensor structure comprising mechanically preloaded suspension...

MEMS electrostatic capacitor type acceleration sensor

Vibrating device, vibrating device module, electronic apparatus, an...

Sensor with servo noise reduction

Accelerometer control

Accelerometer

MEMS pendulum accelerometer having two measurement ranges

Closed loop accelerometer

Accelerometers

Sensor apparatus, planning processing system, and planning method

MEMS sensor compensation for off-axis movement

Physical quantity sensor, inertia measurement device, vehicle posit...

MEMS sensor structure comprising mechanically preloaded suspension...

Acceleration sensor

Physical quantity sensor, electronic device, and mobile body

Dual capacitive linearization circuit

Acceleration sensor

Accelerometers

Capacitive accelerometer

Inertia sensor with improved detection sensitivity using servo volt...

Dynamic self-calibration of an accelerometer system

Window sensing device with movement detection

Patents Applicationslast 30 patents

ACCELEROMETER INCLUDING PROTECTIVE HOUSING

MEMS ACCELEROMETER SYSTEMS

PENDULAR ACCELEROMETER SENSOR WITH CONDITIONAL CAPACITIVE DETECTION

METHOD FOR LITHOGRAPHY PROCESS

MECHANICALLY-SENSITIVE SEMICONDUCTING TRIODE CAPACITOR

MEMS SENSOR STRUCTURE COMPRISING MECHANICALLY PRELOADED SUSPENSION...

HIGH PERFORMANCE MICRO-ELECTRO-MECHANICAL SYSTEMS ACCELEROMETER

ACCELEROMETERS

ACCELEROMETERS

DUAL CAPACITIVE LINEARIZATION CIRCUIT

PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND MOBILE BODY

PHYSICAL QUANTITY SENSOR, INERTIA MEASUREMENT DEVICE, VEHICLE POSIT...

DYNAMIC SELF-CALIBRATION OF AN ACCELEROMETER SYSTEM

Vibrating Device, Vibrating Device Module, Electronic Apparatus, An...

WINDOW SENSING DEVICE WITH MOVEMENT DETECTION

MEMS PENDULUM ACCELEROMETER HAVING TWO MEASUREMENT RANGES

Inertia Sensor

ACCELEROMETER CONTROL

OPTICALLY ENABLED MEMS INERTIAL SENSORS ON INTEGRATED PHOTONIC PLAT...

ACCELERATION SENSOR

ACCELEROMETER SENSOR SYSTEM

DYNAMIC SELF-CALIBRATION OF AN ACCELEROMETER SYSTEM

ACCELEROMETERS

ACCELEROMETERS

ACCELEROMETERS

PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND MOBILE BODY

PERFORMANCE OPTIMIZATION OF A DIFFERENTIAL CAPACITANCE BASED MOTION...

METHOD AND STRUCTURE OF AN INTEGRATED MEMS INERTIAL SENSOR DEVICE U...

EXTENDED-RANGE CLOSED-LOOP ACCELEROMETER

FULLY DIFFERENTIAL CAPACITIVE ARCHITECTURE FOR MEMS ACCELEROMETER