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CPC
H01J2237/04753
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Parent Industries
H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
Current Industry
H01J2237/04753
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Patents Grants
last 30 patents
Information
Patent Grant
High performance inspection scanning electron microscope device and...
Patent number
10,504,684
Issue date
Dec 10, 2019
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Pavel Adamec
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Probe assembly with high bandwidth beam
Patent number
10,163,601
Issue date
Dec 25, 2018
Intel Corporation
Amir Raveh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope
Patent number
6,979,821
Issue date
Dec 27, 2005
Hitachi, Ltd.
Naomasa Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope
Patent number
6,555,819
Issue date
Apr 29, 2003
Hitachi, Ltd.
Naomasa Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for ion-plasma machining workpiece surfaces including imp...
Patent number
5,262,611
Issue date
Nov 16, 1993
Hauzer Holding B.V.
Sergey V. Danysh
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Scanning electron microscope
Publication number
20040113074
Publication date
Jun 17, 2004
Hitachi, Ltd
Naomasa Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scanning electron microscope
Publication number
20030122074
Publication date
Jul 3, 2003
Hitachi, Ltd
Naomasa Suzuki
H01 - BASIC ELECTRIC ELEMENTS