with particular means for stabilising the discharge

Industry

CPC
H01S3/09705

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Parent Industries

HELECTRICITY H01Electric elements H01SDEVICES USING STIMULATED EMISSION H01S3/00Lasers

Current Industry

H01S3/09705with particular means for stabilising the discharge

Industries

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for tuning discharge performance in a laser chamber
- Patent number 11,349,273
- Issue date May 31, 2022
- Cymer, LLC
- Edward Siqi Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser chamber with metal damper member
- Patent number 10,965,085
- Issue date Mar 30, 2021
- Gigaphoton Inc.
- Hisakazu Katsuumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser device, laser machining apparatus, and method for controlling...
- Patent number 10,965,089
- Issue date Mar 30, 2021
- Mitsubishi Electric Corporation
- Tomohiro Kyoto
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Systems and methods for spatiotemporal control of a laser and appli...
- Patent number 10,897,115
- Issue date Jan 19, 2021
- University of Rochester
- Dustin H. Froula
- G02 - OPTICS
Information Patent Grant
Gas optimization in a gas discharge light source
- Patent number 10,892,594
- Issue date Jan 12, 2021
- Cymer, LLC
- Tanuj Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser gas regeneration system and laser system
- Patent number 10,879,664
- Issue date Dec 29, 2020
- Gigaphoton Inc.
- Masanori Yashiro
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Gas optimization in a gas discharge light source
- Patent number 10,218,147
- Issue date Feb 26, 2019
- Cymer, LLC
- Tanuj Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser device and control method therefor
- Patent number 9,853,410
- Issue date Dec 26, 2017
- Gigaphoton Inc.
- Takeshi Asayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Floating current mirror for RLG discharge control
- Patent number 9,671,228
- Issue date Jun 6, 2017
- Honeywell International Inc.
- John F. Ackerman
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Gas laser apparatus for determining composition ratio of laser gas
- Patent number 9,653,876
- Issue date May 16, 2017
- FANUC CORPORATION
- Kenichi Yuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus and method of controlling laser apparatus
- Patent number 9,647,415
- Issue date May 9, 2017
- Gigaphoton Inc.
- Hiroaki Tsushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compensation for a disturbance in an optical source
- Patent number 9,634,460
- Issue date Apr 25, 2017
- Cymer, LLC
- Rahul Ahlawat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas circulation type laser oscillator
- Patent number 9,484,704
- Issue date Nov 1, 2016
- FANUC CORPORATION
- Hiroyuki Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compensation for a disturbance in an optical source
- Patent number 9,261,794
- Issue date Feb 16, 2016
- Cymer, LLC
- Rahul Ahlawat
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas laser oscillator capable of estimating sealability of gas conta...
- Patent number 9,252,552
- Issue date Feb 2, 2016
- FANUC CORPORATION
- Masahiro Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser oscillator having function of judging start of discharge
- Patent number 9,130,343
- Issue date Sep 8, 2015
- FANUC CORPORATION
- Tooru Nukui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF-excited laser assembly
- Patent number 9,071,031
- Issue date Jun 30, 2015
- Trumpf, Inc.
- Francisco Javier Villarreal-Saucedo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser resonator
- Patent number 9,008,143
- Issue date Apr 14, 2015
- Via Mechanics, Ltd.
- Hideho Yamamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser pre-ionization optical monitoring and compensation
- Patent number 8,923,356
- Issue date Dec 30, 2014
- Kern Technologies, LLC.
- Gerald L. Kern
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple phase-locked loops for high-power RF-power combiners
- Patent number 8,842,704
- Issue date Sep 23, 2014
- Coherent, Inc.
- David P. Schmelzer
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Pulsed CO2 laser output-pulse shape and power control
- Patent number 8,687,661
- Issue date Apr 1, 2014
- Coherent, Inc.
- Peter Rosenthal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extendable electrode for gas discharge laser
- Patent number 8,526,481
- Issue date Sep 3, 2013
- Cymer, Inc.
- Richard L. Sandstrom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extendable electrode for gas discharge laser
- Patent number 8,446,928
- Issue date May 21, 2013
- Cymer, Inc.
- Richard L. Sandstrom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser discharge pre-ionization using a simmer-discharge
- Patent number 8,391,329
- Issue date Mar 5, 2013
- Coherent, Inc.
- Joel Fontanella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extendable electrode for gas discharge laser
- Patent number 7,856,044
- Issue date Dec 21, 2010
- Cymer, Inc.
- Richard L. Sandstrom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Timing control for two-chamber gas discharge laser system
- Patent number 7,852,899
- Issue date Dec 14, 2010
- Cymer, Inc.
- Alexander I. Ershov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser having distributed inductances
- Patent number 7,778,303
- Issue date Aug 17, 2010
- Trumpf, Inc.
- Francisco J. Villarreal-Saucedo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for discriminating anomaly in gas composition and discharge...
- Patent number 7,586,969
- Issue date Sep 8, 2009
- Fanuc Ltd
- Akira Egawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Very narrow band, two chamber, high rep-rate gas discharge laser sy...
- Patent number 7,567,607
- Issue date Jul 28, 2009
- Cymer, Inc.
- David S. Knowles
- G01 - MEASURING TESTING
Information Patent Grant
RF shielded, series inductor, high RF power impedance matching inte...
- Patent number 7,540,779
- Issue date Jun 2, 2009
- Coherent, Inc.
- Adrian Papanide
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GAS LASER DEVICE
- Publication number 20210167568
- Publication date Jun 3, 2021
- Gigaphoton Inc.
- Hiroshi UMEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TUNING DISCHARGE PERFORMANCE IN A LASER CHAMBER
- Publication number 20210066880
- Publication date Mar 4, 2021
- CYMER, LLC
- Edward Siqi Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER DEVICE, LASER MACHINING APPARATUS, AND METHOD FOR CONTROLLING...
- Publication number 20200388980
- Publication date Dec 10, 2020
- Mitsubishi Electric Corporation
- Tomohiro KYOTO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER GAS REGENERATION SYSTEM AND LASER SYSTEM
- Publication number 20190237928
- Publication date Aug 1, 2019
- Gigaphoton Inc.
- Masanori YASHIRO
- C01 - INORGANIC CHEMISTRY
Information Patent Application
GAS OPTIMIZATION IN A GAS DISCHARGE LIGHT SOURCE
- Publication number 20190190229
- Publication date Jun 20, 2019
- CYMER, LLC
- Tanuj Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER DEVICE
- Publication number 20190148905
- Publication date May 16, 2019
- Gigaphoton Inc.
- Hiroshi UMEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR SPATIOTEMPORAL CONTROL OF A LASER AND APPLI...
- Publication number 20190103720
- Publication date Apr 4, 2019
- University of Rochester
- Dustin H. Froula
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXCIMER LASER OSCILLATION DEVICE HAVING GAS RECYCLE FUNCTION
- Publication number 20180337510
- Publication date Nov 22, 2018
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Terumasa KOURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS OPTIMIZATION IN A GAS DISCHARGE LIGHT SOURCE
- Publication number 20170237224
- Publication date Aug 17, 2017
- CYMER, LLC
- Tanuj Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER APPARATUS FOR DETERMINING COMPOSITION RATIO OF LASER GAS
- Publication number 20160226213
- Publication date Aug 4, 2016
- FANUC CORPORATION
- Kenichi Yuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS CIRCULATION TYPE LASER OSCILLATOR
- Publication number 20150333469
- Publication date Nov 19, 2015
- FANUC CORPORATION
- Hiroyuki Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER WITH IMPROVED RADIO FREQUENCY ENERGY DISTRIBUTION
- Publication number 20140348198
- Publication date Nov 27, 2014
- Gerald L. Kern
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER OSCILLATOR HAVING FUNCTION OF JUDGING START OF DISCHARGE
- Publication number 20140294027
- Publication date Oct 2, 2014
- FANUC CORPORATION
- Tooru Nukui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSED CO2 LASER OUTPUT-PULSE SHAPE AND POWER CONTROL
- Publication number 20130272325
- Publication date Oct 17, 2013
- COHERENT, INC.
- Peter Rosenthal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE PHASE-LOCKED LOOPS FOR HIGH-POWER RF-POWER COMBINERS
- Publication number 20130170512
- Publication date Jul 4, 2013
- COHERENT, INC.
- David P. SCHMELZER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER
- Publication number 20120219032
- Publication date Aug 30, 2012
- Richard L. Sandstrom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER DISCHARGE PRE-IONIZATION USING A SIMMER-DISCHARGE
- Publication number 20120189031
- Publication date Jul 26, 2012
- Joel Fontanella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF-Excited Laser Assembly
- Publication number 20120106586
- Publication date May 3, 2012
- Trumpf, Inc.
- Francisco Javier Villarreal-Saucedo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER
- Publication number 20110058580
- Publication date Mar 10, 2011
- Richard L. Sandstrom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER HAVING DISTRIBUTED INDUCTANCES
- Publication number 20090116531
- Publication date May 7, 2009
- TRUMPF INC.
- Francisco J. Villarreal-Saucedo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABNORMALITY DETECTION METHOD FOR GAS LASER OSCILLATOR AND GAS LASER...
- Publication number 20090116521
- Publication date May 7, 2009
- FANUC LTD.
- Minoru ANDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF SHIELDED, SERIES INDUCTOR, HIGH RF POWER IMPEDANCE MATCHING INTE...
- Publication number 20090004918
- Publication date Jan 1, 2009
- ADRIAN PAPANIDE
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Method for discriminating anomaly in gas composition and discharge...
- Publication number 20080144681
- Publication date Jun 19, 2008
- FANUC LTD.
- Akira Egawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Extendable electrode for gas discharge laser
- Publication number 20070253459
- Publication date Nov 1, 2007
- Cymer, Inc.
- Richard L. Sandstrom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas discharge laser light source beam delivery unit
- Publication number 20070160103
- Publication date Jul 12, 2007
- Cymer, Inc.
- Palash P. Das
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Controlling the spatio-temporal uniformity of a pulsed gas laser beam
- Publication number 20070133645
- Publication date Jun 14, 2007
- Maxime Makarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Timing control for two-chamber gas discharge laser system
- Publication number 20060251135
- Publication date Nov 9, 2006
- Alexander I. Ershov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Very narrow band, two chamber, high rep-rate gas discharge laser sy...
- Publication number 20060126697
- Publication date Jun 15, 2006
- Cymer, Inc.
- David S. Knowles
- G01 - MEASURING TESTING
Information Patent Application
Gas laser oscillator
- Publication number 20060114959
- Publication date Jun 1, 2006
- FANUC LTD.
- Akira Egawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dielectric coupled CO2 slab laser
- Publication number 20060029116
- Publication date Feb 9, 2006
- Christian J. Shackleton
- H01 - BASIC ELECTRIC ELEMENTS

with particular means for stabilising the discharge

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus for tuning discharge performance in a laser chamber

Laser chamber with metal damper member

Laser device, laser machining apparatus, and method for controlling...

Systems and methods for spatiotemporal control of a laser and appli...

Gas optimization in a gas discharge light source

Laser gas regeneration system and laser system

Gas optimization in a gas discharge light source

Gas laser device and control method therefor

Floating current mirror for RLG discharge control

Gas laser apparatus for determining composition ratio of laser gas

Laser apparatus and method of controlling laser apparatus

Compensation for a disturbance in an optical source

Gas circulation type laser oscillator

Compensation for a disturbance in an optical source

Gas laser oscillator capable of estimating sealability of gas conta...

Gas laser oscillator having function of judging start of discharge

RF-excited laser assembly

Gas laser resonator

Gas laser pre-ionization optical monitoring and compensation

Multiple phase-locked loops for high-power RF-power combiners

Pulsed CO2 laser output-pulse shape and power control

Extendable electrode for gas discharge laser

Extendable electrode for gas discharge laser

Gas laser discharge pre-ionization using a simmer-discharge

Extendable electrode for gas discharge laser

Timing control for two-chamber gas discharge laser system

Laser having distributed inductances

Method for discriminating anomaly in gas composition and discharge...

Very narrow band, two chamber, high rep-rate gas discharge laser sy...

RF shielded, series inductor, high RF power impedance matching inte...

Patents Applicationslast 30 patents

GAS LASER DEVICE

APPARATUS FOR TUNING DISCHARGE PERFORMANCE IN A LASER CHAMBER

LASER DEVICE, LASER MACHINING APPARATUS, AND METHOD FOR CONTROLLING...

LASER GAS REGENERATION SYSTEM AND LASER SYSTEM

GAS OPTIMIZATION IN A GAS DISCHARGE LIGHT SOURCE

GAS LASER DEVICE

SYSTEMS AND METHODS FOR SPATIOTEMPORAL CONTROL OF A LASER AND APPLI...

EXCIMER LASER OSCILLATION DEVICE HAVING GAS RECYCLE FUNCTION

GAS OPTIMIZATION IN A GAS DISCHARGE LIGHT SOURCE

GAS LASER APPARATUS FOR DETERMINING COMPOSITION RATIO OF LASER GAS

GAS CIRCULATION TYPE LASER OSCILLATOR

LASER WITH IMPROVED RADIO FREQUENCY ENERGY DISTRIBUTION

GAS LASER OSCILLATOR HAVING FUNCTION OF JUDGING START OF DISCHARGE

PULSED CO2 LASER OUTPUT-PULSE SHAPE AND POWER CONTROL

MULTIPLE PHASE-LOCKED LOOPS FOR HIGH-POWER RF-POWER COMBINERS

EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER

GAS LASER DISCHARGE PRE-IONIZATION USING A SIMMER-DISCHARGE

RF-Excited Laser Assembly

EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER

LASER HAVING DISTRIBUTED INDUCTANCES

ABNORMALITY DETECTION METHOD FOR GAS LASER OSCILLATOR AND GAS LASER...

RF SHIELDED, SERIES INDUCTOR, HIGH RF POWER IMPEDANCE MATCHING INTE...

Method for discriminating anomaly in gas composition and discharge...

Extendable electrode for gas discharge laser

Gas discharge laser light source beam delivery unit

Controlling the spatio-temporal uniformity of a pulsed gas laser beam

Timing control for two-chamber gas discharge laser system

Very narrow band, two chamber, high rep-rate gas discharge laser sy...

Gas laser oscillator

Dielectric coupled CO2 slab laser