with perovskite structure

Industry

CPC
H01L21/31691

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/31691with perovskite structure

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Composition for ferroelectric thin film formation, method for formi...
- Patent number 9,502,636
- Issue date Nov 22, 2016
- Mitsubishi Materials Corporation
- Jun Fujii
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
RPS assisted RF plasma source for semiconductor processing
- Patent number 9,502,218
- Issue date Nov 22, 2016
- Applied Materials, Inc.
- Xinglong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid-state electronic device including dielectric bismuth niobate...
- Patent number 9,293,257
- Issue date Mar 22, 2016
- Japan Science and Technology Agency
- Tatsuya Shimoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic devices including barium strontium titanium oxide films
- Patent number 9,202,686
- Issue date Dec 1, 2015
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing oxide films
- Patent number 9,169,557
- Issue date Oct 27, 2015
- ASM International N.V.
- Timo Hatanpaa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composition for ferroelectric thin film formation, method for formi...
- Patent number 9,005,358
- Issue date Apr 14, 2015
- Mitsubishi Materials Corporation
- Jun Fujii
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Composition for ferroelectric thin film formation, method for formi...
- Patent number 8,859,051
- Issue date Oct 14, 2014
- Mitsubishi Materials Corporation
- Jun Fujii
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Composition for ferroelectric thin film formation, method for formi...
- Patent number 8,790,538
- Issue date Jul 29, 2014
- Mitsubishi Materials Corporation
- Jun Fujii
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
High dielectric constant transition metal oxide materials
- Patent number 8,791,519
- Issue date Jul 29, 2014
- Micron Technology, Inc.
- Jiutao Li
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Zr-substituted BaTiO3 films
- Patent number 8,772,050
- Issue date Jul 8, 2014
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for Sr—Ti—O-based film formation
- Patent number 8,679,913
- Issue date Mar 25, 2014
- Tokyo Electron Limited
- Yumiko Kawano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of a semiconductor device
- Patent number 8,652,854
- Issue date Feb 18, 2014
- Fujitsu Semiconductor Limited
- Tomohiro Takamatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for forming layers that contain niobium and/or...
- Patent number 8,617,312
- Issue date Dec 31, 2013
- Micron Technology, Inc.
- Brian A. Vaartstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ferroelectric ultrathin perovskite films
- Patent number 8,603,573
- Issue date Dec 10, 2013
- The Trustees of the University of Pennsylvania
- Andrew M. Rappe
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Methods of forming strontium titanate films
- Patent number 8,592,058
- Issue date Nov 26, 2013
- Intermolecular, Inc.
- Laura M. Matz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 8,580,671
- Issue date Nov 12, 2013
- Hitachi Kokusai Electric Inc.
- Sadayoshi Horii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electronic devices including barium strontium titanium oxide films
- Patent number 8,581,352
- Issue date Nov 12, 2013
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition methods for forming a metal-containing layer on a...
- Patent number 8,557,697
- Issue date Oct 15, 2013
- Micron Technology, Inc.
- Bhaskar Srinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus and film deposition method
- Patent number 8,506,713
- Issue date Aug 13, 2013
- Tokyo Electron Limited
- Toshio Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Scalable lead zirconium titanate (PZT) thin film material and depos...
- Patent number 8,501,976
- Issue date Aug 6, 2013
- Advanced Technology Materials, Inc.
- Thomas H. Baum
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Trench capacitor and method for producing the same
- Patent number 8,486,800
- Issue date Jul 16, 2013
- NXP B.V.
- Jin Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Complex oxide film and method for producing same, composite body an...
- Patent number 8,486,492
- Issue date Jul 16, 2013
- Showa Denko K.K.
- Akihiko Shirakawa
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
High-dielectric constant thin film metal oxides on silicon wafers f...
- Patent number 8,481,106
- Issue date Jul 9, 2013
- SBA Materials, Inc.
- Shyama P. Mukherjee
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Nonvolatile memory device including amorphous alloy metal oxide lay...
- Patent number 8,455,854
- Issue date Jun 4, 2013
- Samsung Electronics Co., Ltd.
- Choong-Rae Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Zr-Sn-Ti-O films
- Patent number 8,445,952
- Issue date May 21, 2013
- Micron Technology, Inc.
- Kie Y. Ahn
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 8,415,237
- Issue date Apr 9, 2013
- Hitachi Kokusai Electric Inc.
- Sadayoshi Horii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dielectric layer for flash memory device and method for manufacturi...
- Patent number 8,405,166
- Issue date Mar 26, 2013
- IMEC
- Christoph Adelmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and method
- Patent number 8,383,325
- Issue date Feb 26, 2013
- ASML Netherlands B.V.
- Nikolay Nikolaevich Iosad
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for forming SrTiO3 film and storage medium
- Patent number 8,361,550
- Issue date Jan 29, 2013
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 8,357,927
- Issue date Jan 22, 2013
- Hynix Semiconductor Inc.
- Chi Hwan Jang
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION, METHOD FOR FORMI...
- Publication number 20140349834
- Publication date Nov 27, 2014
- Jun Fujii
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION, METHOD FOR FORMI...
- Publication number 20140349139
- Publication date Nov 27, 2014
- MITSUBISHI MATERIALS CORPORATION
- Jun Fujii
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SOLID-STATE ELECTRONIC DEVICE
- Publication number 20140319660
- Publication date Oct 30, 2014
- Tatsuya Shimoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC DEVICES INCLUDING BARIUM STRONTIUM TITANIUM OXIDE FILMS
- Publication number 20140065806
- Publication date Mar 6, 2014
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SCALABLE LEAD ZIRCONIUM TITANATE (PZT) THIN FILM MATERIAL AND DEPOS...
- Publication number 20130324390
- Publication date Dec 5, 2013
- Advanced Technology Materials, Inc.
- Peter C. Van Buskirk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION, METHOD FOR FORMI...
- Publication number 20130295414
- Publication date Nov 7, 2013
- Jun Fujii
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DIELECTRIC THIN FILM, METHOD OF MANUFACTURING SAME, AND APPLICATION...
- Publication number 20130252436
- Publication date Sep 26, 2013
- MITSUBISHI MATERIALS CORPORATION
- Jun Fujii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Zr-SUBSTITUTED BaTiO3 FILMS
- Publication number 20130122609
- Publication date May 16, 2013
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming strontium titanate films
- Publication number 20130059066
- Publication date Mar 7, 2013
- Intermolecular, Inc.
- Xiangxin Rui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CAPACITOR INSULATING FILM, METHOD OF FORMING THE SAME, CAPACITOR AN...
- Publication number 20130045582
- Publication date Feb 21, 2013
- Elpida Memory, Inc.
- Takakazu KIYOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM MANUFACTURING APPARATUS, THIN FILM MANUFACTURING METHOD A...
- Publication number 20130023062
- Publication date Jan 24, 2013
- Takeshi Masuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20120322254
- Publication date Dec 20, 2012
- Hitachi Kokusai Electric Inc.
- Sadayoshi Horii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF A SEMICONDUCTOR DEVICE
- Publication number 20120171785
- Publication date Jul 5, 2012
- FUJITSU SEMICONDUCTOR LIMITED
- Tomohiro Takamatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATING LAYER, ORGANIC THIN FILM TRANSISTOR USING THE INSULATING...
- Publication number 20120001159
- Publication date Jan 5, 2012
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Gi Heon KIM
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
PROCESS TO MAKE HIGH-K TRANSISTOR DIELECTRICS
- Publication number 20110318915
- Publication date Dec 29, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Liang-Gi Yao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20110300695
- Publication date Dec 8, 2011
- Hitachi Kokusai Electric Inc.
- Sadayoshi Horii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Zr-SUBSTITUTED BaTiO3 FILMS
- Publication number 20110275163
- Publication date Nov 10, 2011
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION SYSTEM
- Publication number 20110226178
- Publication date Sep 22, 2011
- TOKYO ELECTRON LIMITED
- Norihiko TSUJI
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20110220875
- Publication date Sep 15, 2011
- HYNIX SEMICONDUCTOR INC.
- Chi Hwan JANG
- B82 - NANO-TECHNOLOGY
Information Patent Application
MEMORY DEVICES INCLUDING DIELECTRIC THIN FILM AND METHOD OF MANUFAC...
- Publication number 20110212612
- Publication date Sep 1, 2011
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Sung-Yool CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION, METHOD FOR FORMI...
- Publication number 20110177235
- Publication date Jul 21, 2011
- MITSUBISHI MATERIALS CORPORATION
- Jun Fujii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRIC LAYER FOR FLASH MEMORY DEVICE AND METHOD FOR MANUFACTURI...
- Publication number 20110147900
- Publication date Jun 23, 2011
- IMEC
- Christoph Adelmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIELECTRIC FILM, DIELECTRIC ELEMENT, AND PROCESS FOR PRODUCING THE...
- Publication number 20110147060
- Publication date Jun 23, 2011
- Minoru Osada
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
SCALABLE LEAD ZIRCONIUM TITANATE (PZT) THIN FILM MATERIAL AND DEPOS...
- Publication number 20110097478
- Publication date Apr 28, 2011
- Advanced Technology Materials, Inc.
- Peter C. Van Buskirk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Composition for ferroelectric thin film formation, method for formi...
- Publication number 20110098173
- Publication date Apr 28, 2011
- STMicroelectronics(Tours) SAS
- Jun Fujii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRENCH CAPACITOR AND METHOD FOR PRODUCING THE SAME
- Publication number 20110073994
- Publication date Mar 31, 2011
- NXP B.V.
- Jin Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE HAVING COMPLEX OXIDE NANODOTS
- Publication number 20110062511
- Publication date Mar 17, 2011
- Micron Technology, Inc.
- Nirmal Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND STORAGE MEDIUM
- Publication number 20110052810
- Publication date Mar 3, 2011
- TOKYO ELECTRON LIMITED
- Yumiko Kawano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SR-TI-O-BASED FILM FORMING METHOD AND STORAGE MEDIUM
- Publication number 20110036288
- Publication date Feb 17, 2011
- TOKYO ELECTRON LIMITED
- Yumiko Kawano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of Forming Strontium Titanate Films
- Publication number 20110027960
- Publication date Feb 3, 2011
- Laura M. Matz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

with perovskite structure

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Composition for ferroelectric thin film formation, method for formi...

RPS assisted RF plasma source for semiconductor processing

Solid-state electronic device including dielectric bismuth niobate...

Electronic devices including barium strontium titanium oxide films

Process for producing oxide films

Composition for ferroelectric thin film formation, method for formi...

Composition for ferroelectric thin film formation, method for formi...

Composition for ferroelectric thin film formation, method for formi...

High dielectric constant transition metal oxide materials

Zr-substituted BaTiO3 films

Method for Sr—Ti—O-based film formation

Manufacturing method of a semiconductor device

Systems and methods for forming layers that contain niobium and/or...

Ferroelectric ultrathin perovskite films

Methods of forming strontium titanate films

Method of manufacturing semiconductor device and substrate processi...

Electronic devices including barium strontium titanium oxide films

Vapor deposition methods for forming a metal-containing layer on a...

Film deposition apparatus and film deposition method

Scalable lead zirconium titanate (PZT) thin film material and depos...

Trench capacitor and method for producing the same

Complex oxide film and method for producing same, composite body an...

High-dielectric constant thin film metal oxides on silicon wafers f...

Nonvolatile memory device including amorphous alloy metal oxide lay...

Zr-Sn-Ti-O films

Method of manufacturing semiconductor device and substrate processi...

Dielectric layer for flash memory device and method for manufacturi...

Lithographic apparatus and method

Method for forming SrTiO3 film and storage medium

Semiconductor device and method for manufacturing the same

Patents Applicationslast 30 patents

COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION, METHOD FOR FORMI...

COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION, METHOD FOR FORMI...

SOLID-STATE ELECTRONIC DEVICE

ELECTRONIC DEVICES INCLUDING BARIUM STRONTIUM TITANIUM OXIDE FILMS

SCALABLE LEAD ZIRCONIUM TITANATE (PZT) THIN FILM MATERIAL AND DEPOS...

COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION, METHOD FOR FORMI...

DIELECTRIC THIN FILM, METHOD OF MANUFACTURING SAME, AND APPLICATION...

Zr-SUBSTITUTED BaTiO3 FILMS

Method of forming strontium titanate films

CAPACITOR INSULATING FILM, METHOD OF FORMING THE SAME, CAPACITOR AN...

THIN FILM MANUFACTURING APPARATUS, THIN FILM MANUFACTURING METHOD A...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

MANUFACTURING METHOD OF A SEMICONDUCTOR DEVICE

INSULATING LAYER, ORGANIC THIN FILM TRANSISTOR USING THE INSULATING...

PROCESS TO MAKE HIGH-K TRANSISTOR DIELECTRICS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

Zr-SUBSTITUTED BaTiO3 FILMS

FILM DEPOSITION SYSTEM

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

MEMORY DEVICES INCLUDING DIELECTRIC THIN FILM AND METHOD OF MANUFAC...

COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION, METHOD FOR FORMI...

DIELECTRIC LAYER FOR FLASH MEMORY DEVICE AND METHOD FOR MANUFACTURI...

DIELECTRIC FILM, DIELECTRIC ELEMENT, AND PROCESS FOR PRODUCING THE...

SCALABLE LEAD ZIRCONIUM TITANATE (PZT) THIN FILM MATERIAL AND DEPOS...

Composition for ferroelectric thin film formation, method for formi...

TRENCH CAPACITOR AND METHOD FOR PRODUCING THE SAME

DEVICE HAVING COMPLEX OXIDE NANODOTS

FILM FORMING METHOD AND STORAGE MEDIUM

SR-TI-O-BASED FILM FORMING METHOD AND STORAGE MEDIUM

Methods of Forming Strontium Titanate Films